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1. 发明专利

JP2008117928A Electromagnet, electromagnetic coil, and electromagnetic coil manufacturing method 有权
标题翻译：电磁线圈，电磁线圈和电磁线圈制造方法
公开(公告)号：JP2008117928A
公开(公告)日：2008-05-22
申请号：JP2006299478
申请日：2006-11-02
申请人： Nissin Ion Equipment Co Ltd , 日新イオン機器株式会社
发明人： TANAKA HIDEYUKI , OGATA KANICHIROU
IPC分类号： H01F5/06 , H01F27/32 , H01F41/12
摘要： PROBLEM TO BE SOLVED: To provide an electromagnet and an electromagnetic coil, and an electromagnetic coil manufacturing method for achieving a uniform magnetic field required for electronic hardware, apparatus, and device by use of a small and light structure. SOLUTION: The electromagnetic coil comprises a second coil in which a copper strip 3 or an aluminum strip whose surface is subjected to a blast treatment and insulating paper 2 which is an insulating material are rolled predetermined number of times around the periphery of a first coil in which an epoxy prepreg tape 1 comprising a glass or carbon fiber base is rolled, the copper strip 3 or the aluminum strip whose surface is subjected to the blast treatment and the insulating paper 2 which is the insulating material are rolled predetermined number of times, and then the epoxy prepreg tape 1 is rolled. In the electromagnetic coil, the resin impregnation of an electromagnetic coil formed by rolling a heat shrinkage tape 4 around the periphery of the first coil or the second coil and then performing pressure deformation, performing shape formation into a predetermined shape, and performing heat hardening is performed in vacuum, and then the heat hardening of the electromagnetic coil is performed in a pressurized state. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供电磁体和电磁线圈，以及通过使用小而轻的结构实现电子硬件，装置和装置所需的均匀磁场的电磁线圈制造方法。解决方案：电磁线圈包括第二线圈，其中表面经受喷砂处理的铜带3或铝条以及作为绝缘材料的绝缘纸2围绕其周边滚动预定次数卷绕包含玻璃或碳纤维基材的环氧预浸料带1的第一线圈，将表面进行喷砂处理的铜带3或铝条和作为绝缘材料的绝缘纸2卷绕预定数量的次，然后卷起环氧树脂预浸带1。在电磁线圈中，通过将热收缩带4卷绕在第一线圈或第二线圈的周围，然后进行压力变形，形状形成为规定形状，进行热硬化形成的电磁线圈的树脂浸渍，在真空中进行，然后在加压状态下进行电磁线圈的热硬化。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2008084679A Electromagnet for analysis, control method therefor, and ion implantation apparatus 有权
标题翻译：用于分析的电磁波，其控制方法和离子植入装置
公开(公告)号：JP2008084679A
公开(公告)日：2008-04-10
申请号：JP2006262827
申请日：2006-09-27
申请人： Nissin Ion Equipment Co Ltd , 日新イオン機器株式会社
发明人： YAMASHITA TAKATOSHI , IKEJIRI TADASHI , TANAKA KOHEI , KINOYAMA TOSHIAKI , TAMURA SHIGEHISA , TANAKA HIDEYUKI , OGATA KANICHIROU
IPC分类号： H01J49/30 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide an electromagnet for analysis which enables size reduction for the analyzing electromagnet by reducing a projecting distance into a beam entering/leaving direction from the yoke of the bridging part of a coil, and which enables reduction in energy consumption. SOLUTION: This electromagnet for analysis 200 is equipped with a first inside coil 206, a second inside coil 212, three first outside coils 218, three second outside coils 224, and the yoke 230. The inside coils 206, 212 are respectively saddle-form coils and both collaborate and generate the main magnetic field to bend ion beam in the X-direction. Each of outside coils 218, 224 are respectively the saddle-form coils and generate an auxiliary magnetic field to carry out correction of the main magnetic field. The respective coils have a constitution such that an insulating sheet and a conductive sheet are made mutually overlapping, wound for a plurality of times and laminated on the outer peripheral face of a laminated insulator, and that a notch part is installed at a fan-like cylindrically laminated coil, to form the laminated insulator on the outer peripheral face. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于分析的电磁体，其能够通过从线圈的桥接部分的轭减小到入射/离开方向的射束的突出距离来实现分析电磁体的尺寸减小，并且能够减少能源消耗。解决方案：该用于分析的电磁体200配备有第一内部线圈206，第二内部线圈212，三个第一外部线圈218，三个第二外部线圈224和轭230.内部线圈206,212分别鞍形线圈两者协同并产生主磁场以在X方向上弯曲离子束。每个外部线圈218,224分别是鞍形线圈，并产生辅助磁场，以执行主磁场的校正。各线圈具有使绝缘片和导电片互相重叠的结构，多次缠绕并层叠在层压绝缘体的外周面上，并且切口部安装在扇形在外周面上形成层压绝缘体。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2008097975A Ion implantation device 有权
标题翻译：离子植入装置
公开(公告)号：JP2008097975A
公开(公告)日：2008-04-24
申请号：JP2006278094
申请日：2006-10-11
申请人： Nissin Ion Equipment Co Ltd , 日新イオン機器株式会社
发明人： YAMASHITA TAKATOSHI , IKEJIRI TADASHI , TANAKA KOHEI , CHO IKO , TANAKA HIDEYUKI
IPC分类号： H01J49/30 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To allow reduction of size and power consumption of an analysis electromagnet by reducing a projecting distance of an interconnecting part of a coil, and thereby to allow the reduction of size and power consumption of an ion implantation device. SOLUTION: The analysis electromagnet 200 constituting the ion implantation device is provided with a first internal coil 206, a second internal coil 212, three first external coils 218, three second external coils 224, and a yoke 230. The internal coils 206 and 212 are each a saddle type coil, and generate a main magnetic field bending an ion beam in the X-direction by the cooperation of both of them. The respective external coils 218 and 224 are each a saddle type coil, and generate an auxiliary magnetic field correcting the main magnetic field. Each coil is structured such that members each formed by superimposing an insulation sheet and a conductor sheet on each other are stacked on a circumferential surface of a stacked insulation material by winding them multiple times; and a cutout part is formed in a fan type cylindrical stacked coil with the stacked insulation material formed on its circumferential surface. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了通过减小线圈的互连部分的突出距离来减小分析电磁体的尺寸和功率消耗，从而允许减小离子注入装置的尺寸和功率消耗。构成离子注入装置的分析电磁体200设置有第一内部线圈206，第二内部线圈212，三个第一外部线圈218，三个第二外部线圈224和轭230.内部线圈206 212分别为鞍型线圈，通过两者的配合，在X方向上产生沿X方向弯曲的主磁场。各个外部线圈218和224分别是鞍型线圈，并产生校正主磁场的辅助磁场。每个线圈被构造成使得通过将绝缘片和导体片彼此重叠而形成的部件通过多次缠绕而堆叠在层叠绝缘材料的圆周表面上; 并且在其圆周表面上形成有层叠绝缘材料的风扇式圆筒形堆叠线圈中形成有切口部。版权所有（C）2008，JPO＆INPIT

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