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1. 发明专利

JP2010061153A Mirror device 有权
标题翻译：镜子装置
公开(公告)号：JP2010061153A
公开(公告)日：2010-03-18
申请号：JP2009252471
申请日：2009-11-02
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： UCHIYAMA SHINGO , SHIMOKAWA FUSAO , YAMAGUCHI JOJI , SATO MAKOTO , SASAKURA KUNIHIKO , MORITA HIROBUMI , INAGAKI HIDEICHIRO , MURAKAMI MAKOTO , MACHIDA KATSUYUKI , ISHII HITOSHI
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： PROBLEM TO BE SOLVED: To improve the linear responsiveness of the inclination of a mirror to a driving voltage. SOLUTION: This mirror device comprises a mirror 140 pivotably supported with respect to a mirror substrate, driving electrodes 1303-1 to 4 formed on electrode substrates facing the mirror substrate, a pivot supporting the turning center of the mirror, and a control circuit which applies a voltage to the driving electrodes. The plurality of driving electrodes are formed on the electrode substrates around the pivot and generate a voltage difference between the positive side driving electrode and the negative side driving electrode while applying a bias voltage Vb. Thereby, the mirror can be turned, and the linear responsiveness of the inclination θ in relation to the driving voltage V can be improved. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提高反射镜的倾斜度对驱动电压的线性响应性。解决方案：该反射镜装置包括相对于反射镜基板枢转地支撑的反射镜140，形成在面向反射镜基板的电极基板上的驱动电极1303-1至4，支撑反射镜的转动中心的枢轴以及控制向驱动电极施加电压的电路。多个驱动电极形成在电极基板周围的枢轴上，并在施加偏置电压Vb时产生正侧驱动电极和负侧驱动电极之间的电压差。由此，可以转动镜子，并且可以提高倾斜度θ相对于驱动电压V的线性响应性。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2010039499A Optical switch 有权
标题翻译：光开关
公开(公告)号：JP2010039499A
公开(公告)日：2010-02-18
申请号：JP2009252480
申请日：2009-11-02
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： UCHIYAMA SHINGO , SHIMOKAWA FUSAO , YAMAGUCHI JOJI , SATO MAKOTO , SASAKURA KUNIHIKO , MORITA HIROBUMI , INAGAKI HIDEICHIRO , MURAKAMI MAKOTO , MACHIDA KATSUYUKI , ISHII HITOSHI
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： PROBLEM TO BE SOLVED: To efficiently dispose a mirror while avoiding increase in driving voltage and the difficulty in manufacturing in a pair of mirror arrays provided in an optical switch. SOLUTION: The arrangement of mirrors 203 in the mirror arrays 2203a, 2203b is optimized in consideration of anisotropy of inclination angle θ of the mirror. Thus, the scan enabling area of a mirror 153 can be effectively utilized without making driving voltage higher and higher to achieve efficient mirror arrangement. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了有效地配置反射镜，同时避免驱动电压的增加和设置在光开关中的一对反射镜阵列的制造困难。解决方案：考虑到反射镜的倾斜角度θ的各向异性，反射镜阵列2203a，2203b中的反射镜203的布置被优化。因此，可以有效地利用反射镜153的扫描使能区域，而不会使驱动电压越来越高，以实现有效的镜面布置。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2010039496A Mirror device, mirror array and optical switch 有权
标题翻译：镜子设备，镜像阵列和光学开关
公开(公告)号：JP2010039496A
公开(公告)日：2010-02-18
申请号：JP2009252460
申请日：2009-11-02
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： UCHIYAMA SHINGO , SHIMOKAWA FUSAO , YAMAGUCHI JOJI , SATO MAKOTO , SASAKURA KUNIHIKO , MORITA HIROBUMI , INAGAKI HIDEICHIRO , MURAKAMI MAKOTO , MACHIDA KATSUYUKI , ISHII HITOSHI
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： PROBLEM TO BE SOLVED: To decrease a tilting angle of a mirror. SOLUTION: Movable frame connecting parts 211a, 211b and mirror connecting parts 221a, 221b are paired members and different in spring constant. Thus, the mirror enters a tilting state by a predetermined angle in its initial state, so that the tilting angle of the mirror can be decreased. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：降低反射镜的倾斜角度。解决方案：可移动框架连接部分211a，211b和反射镜连接部分221a，221b是成对构件，弹簧常数不同。因此，反射镜在其初始状态下进入预定角度的倾斜状态，从而可以减小反射镜的倾斜角度。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2007248809A Mirror element 审中-公开
标题翻译：镜子元素
公开(公告)号：JP2007248809A
公开(公告)日：2007-09-27
申请号：JP2006072212
申请日：2006-03-16
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： SHIMOKAWA FUSAO , UCHIYAMA SHINGO , MAKIHARA MITSUHIRO
IPC分类号： G02B26/08 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To more strongly bond an electrode substrate and a mirror substrate.
SOLUTION: On the electrode substrate 300 (mirror element) shown in Fig.1 as an example, rib structural bodies 310 are formed at the parts between vertically adjacent element regions (inter-element regions) other than wiring regions in which electrodes or the like are provided. Focusing on one element region, the rib structural bodies 310 are formed outside the wiring regions surrounding the element region. Further, on the electrode substrate 300, a supporting walls 101 having the same height as that of the rib structural bodies 310 are formed (fixed) separately from the electrode substrate 300 in the peripheral regions (inter-element regions) of the respective element regions, in which the rib structural bodies 310 are not provided. The upper face of the supporting walls 101 and the upper face of the rib structural bodies 310 are arranged on the same plane.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：更牢固地结合电极基板和反射镜基板。解决方案：在图1所示的电极基板300（反射镜元件）为例，肋结构体310形成在布线区域之外的垂直相邻的元件区域（元件间区域）之间的部分，其中电极或类似物。聚焦在一个元件区域上，肋结构体310形成在围绕元件区域的布线区域的外部。此外，在电极基板300上，在各个元件区域的周边区域（元件间区域）中，与电极基板300分开地形成（固定）具有与肋结构体310相同高度的支撑壁101 ，其中不设置肋结构体310。支撑壁101的上表面和肋结构体310的上表面布置在同一平面上。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2005228803A Semiconductor device and its manufacturing method 审中-公开
标题翻译：半导体器件及其制造方法
公开(公告)号：JP2005228803A
公开(公告)日：2005-08-25
申请号：JP2004033630
申请日：2004-02-10
申请人： Nippon Telegr & Teleph Corp , Shindengen Electric Mfg Co Ltd , 新電元工業株式会社 , 日本電信電話株式会社
发明人： SHIMIZU TAKASHI , SHIMOKAWA FUSAO , MAKIHARA MITSUHIRO , SATO MAKOTO , YODOGAWA HIROYUKI , YAMAZAKI TAKESHI
IPC分类号： H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a semiconductor device that can suppress the reduction of pattern size of a polyimide film by etching and hardly changes device characteristics through processing; and to provide its manufacturing method.
SOLUTION: A polyimide is deposited on a semiconductor substrate 2 by spin coating so as to form a polyimide film 1. Next, an SiO
2 is deposited on the polyimide film 1 through CVD to form an SiO
2 film 3. The SiO
2 film 3 is subjected to patterning, and while the SiO
2 film 3 is used as a mask, the polyimide film 1 is dry-etched by a plasma 4 using O
2 . A thin SiO
2 film is deposited on the semiconductor substrate 2 including the polyimide film 1 through CVD, and a conductive film 5 as a material for a heater is deposited thereon by vacuum vapor deposition method or sputtering method. When the conductive film 5 is patterned by dry etching, an optional structure can be obtained.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：解决的问题：提供能够通过蚀刻抑制聚酰亚胺膜的图案尺寸的降低的半导体装置，并且通过加工几乎不改变装置特性; 并提供其制造方法。解决方案：通过旋涂将聚酰亚胺沉积在半导体衬底2上以形成聚酰亚胺膜1.接下来，通过CVD在聚酰亚胺膜1上沉积SiO 2 ，以形成 SiO 2 膜3.将SiO 2 膜3进行图案化，而当使用SiO 2 SB 3膜作为掩模时，聚酰亚胺薄膜1用等离子体4使用O SB SB2进行干式蚀刻。通过CVD将包括薄膜1的薄SiO 2薄膜沉积在包含聚酰亚胺薄膜1的半导体衬底2上，通过真空气相沉积法或溅射法沉积作为加热器材料的导电膜5。当通过干蚀刻图案化导电膜5时，可以获得任选的结构。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2010039498A Mirror device 有权
标题翻译：镜子装置
公开(公告)号：JP2010039498A
公开(公告)日：2010-02-18
申请号：JP2009252467
申请日：2009-11-02
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： UCHIYAMA SHINGO , SHIMOKAWA FUSAO , YAMAGUCHI JOJI , SATO MAKOTO , SASAKURA KUNIHIKO , MORITA HIROBUMI , INAGAKI HIDEICHIRO , MURAKAMI MAKOTO , MACHIDA KATSUYUKI , ISHII HITOSHI
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： PROBLEM TO BE SOLVED: To restrain unexpected fluctuation in tilting angle of a mirror due to interference from adjacent wiring in a mirror device and a mirror array in which a plurality of mirror devices are disposed in two dimensions. SOLUTION: Wires 1005-1 to 1005-4, 1006 are provided in the direction orthogonal to the rotating axis of a gimbal 1102. Thus, unexpected fluctuation in tilting angle of the mirror 1103 due to interference from the wires 1005-1 to 1005-4, 1006 can be restrained, and the wires 1005-1 to 1005-4, 1006 are separated from the mirror 1103 to further improve the restraining effect. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了抑制由于反射镜装置中的相邻布线的干涉引起的反射镜的倾斜角度的意外波动以及其中多个反射镜装置被设置在二维中的反射镜阵列。电线1005-1至1005-4,1006设置在与万向架1102的旋转轴线正交的方向上。因此，由于来自电线1005-1的干扰而导致的反射镜1103的倾斜角度的意外波动可以抑制为1005-4,1006，电线1005-1〜1005-4,1006与反射镜1103分离，进一步提高抑制效果。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2010026535A Mirror device, mirror array and optical switch 有权
标题翻译：镜子设备，镜像阵列和光学开关
公开(公告)号：JP2010026535A
公开(公告)日：2010-02-04
申请号：JP2009252463
申请日：2009-11-02
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： UCHIYAMA SHINGO , SHIMOKAWA FUSAO , YAMAGUCHI JOJI , SATO MAKOTO , SASAKURA KUNIHIKO , MORITA HIROBUMI , INAGAKI HIDEICHIRO , MURAKAMI MAKOTO , MACHIDA KATSUYUKI , ISHII HITOSHI
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： PROBLEM TO BE SOLVED: To reduce a tilting angle of a mirror, in a mirror device, a mirror array and an optical switch. SOLUTION: Electrodes 340a-340d are formed in positions on a base part 310 wherein the electrodes 340a-340d themselves do not become symmetrical to at least one of a mirror turn axis and a movable frame turn axis of the mirror 230 projected on an electrode substrate 300. Accordingly, the central axis (shown by the dashed line) of the mirror 230 and the central axis (shown by the two-dot line) of the electrodes 340a-340d do not accord. Accordingly, when applying bias voltage to the electrodes 340a-340d, attraction is applied to portions facing to the electrodes 340a-340d in the mirror 230, so that the mirror 230 comes into a state that the mirror 230 is inclined by a prescribed angle from a state (shown by the dotted line) vertical to the central axis of the mirror 230. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：在镜装置，反射镜阵列和光学开关中减小反射镜的倾斜角度。解决方案：电极340a-340d形成在基部310上的位置，其中电极340a-340d本身不会与反射镜230的反射镜转动轴和可移动的框架转动轴线投影的至少一个成对称电极基板300.因此，反射镜230的中心轴（虚线所示）和电极340a-340d的中心轴（由双点划线所示）不一致。因此，当向电极340a-340d施加偏置电压时，在反射镜230中对与电极340a-340d相对的部分施加吸引力，使得反射镜230进入反射镜230倾斜预定角度的状态与反射镜230的中心轴垂直的状态（虚线所示）。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2009282467A Micromirror element 审中-公开
标题翻译： MICROMIRROR元素
公开(公告)号：JP2009282467A
公开(公告)日：2009-12-03
申请号：JP2008137116
申请日：2008-05-26
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： UCHIYAMA SHINGO , SHIMOKAWA FUSAO
IPC分类号： G02B26/08 , B81B3/00
摘要： PROBLEM TO BE SOLVED: To easily obtain a state that a mirror turnably provided in a mirror substrate and an electrode provided in an electrode substrate are adjacent to each other, with high positional (pitch) accuracy.
SOLUTION: A micromirror element includes: a support substrate 101; the mirror substrate 102, supported by a support section (a frame section 126) above the support substrate 101, and having the turnable mirror 125; and the electrode substrate 103, having a control electrode section 132 disposed so as to face the mirror 125, and fixed on the support substrate 101 under the mirror substrate 102.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了容易地获得在镜面基板中设置的反射镜和设置在电极基板中的电极彼此相邻的位置（间距）精度的状态。解决方案：微镜元件包括：支撑基板101; 镜基板102由支撑基板101上方的支撑部（框架部126）支撑，并具有可转动反射镜125; 以及电极基板103，其具有设置成面向反射镜125的控制电极部132，并且在反射镜基板102的下方固定在支撑基板101上。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2006201541A Method for forming mirror substrate 审中-公开
标题翻译：形成镜面基板的方法
公开(公告)号：JP2006201541A
公开(公告)日：2006-08-03
申请号：JP2005013740
申请日：2005-01-21
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： SHIMOKAWA FUSAO , YAMAGUCHI JOJI , UCHIYAMA SHINGO , SATO MAKOTO
IPC分类号： G02B26/08 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To form a metallic film more accurately and selectively for a mirror formed on a mirror substrate having a large level difference such as a frame part.
SOLUTION: With a stencil mask 107 arranged on the frame part 101a, the vapor-deposited atoms 110 flying from a vapor deposition source through an opening 171 are made to reach the mirror 135, making a condition with a metallic film 108 formed only on the mirror 135. The stencil mask 107 is equipped, on a planar substrate 172, with an engaging part 173 that fits to the opening of the frame part 101a, wherein the opening 171 is formed on the tip end face 174 of the engaging part 173. The engaging part 173 corresponds to one part of the mirror 135 constituting a mirror array, with one circular opening 171 provided for each mirror. The tip end face 174 having the opening 171 is formed nearly in parallel to the flat face of the substrate 172.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为形成在诸如框架部分的具有大水平差的镜面基板上的反射镜更精确和选择地形成金属膜。解决方案：通过布置在框架部分101a上的模板掩模107，使从气相沉积源通过开口171飞行的气相沉积原子110到达反射镜135，从而形成金属膜108的状态模板掩模107在平面基板172上配备有与框架部分101a的开口配合的接合部分173，其中开口171形成在接合部分的顶端面174上部分173。接合部分173对应于构成反射镜阵列的反射镜135的一部分，为每个反射镜提供一个圆形开口171。具有开口171的末端面174大致平行于基板172的平面形成。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2010039500A Method of manufacturing mirror board and method of manufacturing mirror device 有权
标题翻译：制造镜片的方法和制造镜子装置的方法
公开(公告)号：JP2010039500A
公开(公告)日：2010-02-18
申请号：JP2009252483
申请日：2009-11-02
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： UCHIYAMA SHINGO , SHIMOKAWA FUSAO , YAMAGUCHI JOJI , SATO MAKOTO , SASAKURA KUNIHIKO , MORITA HIROBUMI , INAGAKI HIDEICHIRO , MURAKAMI MAKOTO , MACHIDA KATSUYUKI , ISHII HITOSHI
IPC分类号： G02B26/08 , B81C1/00 , B81C3/00
CPC分类号： B81B3/004 , B81B3/0086 , B81B2201/045 , B81B2203/058 , G02B6/3518 , G02B6/3556 , G02B6/3584 , G02B26/0841 , Y10T29/49885 , Y10T156/10
摘要： PROBLEM TO BE SOLVED: To form a mirror board with a high non-defective yield. SOLUTION: In this mirror board 2300, the gaps between a base 2301, a connecting part 2332a, a connecting part 2332b, a movable frame 2303, a mirror connecting part 2334a, a mirror connecting part 2334b and a mirror 2335 are respectively provided with a protective layer 2307a in the filled state. Thus, the above structure is restrained from operation such as turning, so that it is protected from breakage and damage due to mechanical vibration from the outside. COPYRIGHT: (C)2010,JPO&INPIT

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