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2. 发明专利

JPH01135580A PROCESS FOR TREATING WASTE WATER DISCHARGED FROM MANUFACTURING PROCESS OF SEMICONDUCTOR WAFER 失效
公开(公告)号：JPH01135580A
公开(公告)日：1989-05-29
申请号：JP29418087
申请日：1987-11-24
申请人： ORGANO KK
发明人： HIKAMI SUMIKO , KIRIYUU SOUHEI , KOIKE KATSUMI
IPC分类号： C02F1/44 , C02F1/24 , C02F1/28 , H01L21/304
摘要： PURPOSE:To decrease the cost of an activated-carbon adsorption column, by providing a process, as a first process, wherein waste water containing fine particles of silicon and surface active agents is treated by adsorptive bubble separation method, causing the concentration of the surface active agents in the water to be reduced to about one eighth of that of raw waste water, hence reducing the size of the activated-carbon adsorption column in the succeeding process to about one eighth of the size that would have otherwise be required. CONSTITUTION:Raw waste water, containing fine particles of silicon and surface active agents, having been discharged from the manufacturing process of semiconductor wafers is caused to flow into the upper section of an adsorptive bubble separation column 1, while air in the form of small bubbles is blown into the lower section of said column 1, wherein the small bubbles of air, while rising through a liquid phase section 9, adsorb the surface active agents thereon, causing the particles of silicon in the raw waste water to be attached to the films of the surface active agents, so that the bubbles of air having said films are separated in the form of froth from the liquid phase section 9 to be sent to a froth-liquid concentration tank 11 through a discharge pipe 10. On the other hand, the waste water free from the surface active agents and silicon particles by removal of froth is introduced, from the lower section of the column 1 through a pipe 12, into an activated-carbon adsorption column 2 as water to be treated, where the remaining surface active agents are removed from said water and thereafter fine particles of silicon are removed therefrom by means of a filtration- membrane device 4, resulting in providing filtered water.

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