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1. 发明专利

JPS59149317A Alignment optical system of projection type exposure device 失效
标题翻译：投影型曝光装置对准光学系统
公开(公告)号：JPS59149317A
公开(公告)日：1984-08-27
申请号：JP2420283
申请日：1983-02-16
申请人： Nippon Kogaku Kk
发明人： UEHARA MAKOTO , ANZAI AKIRA , SUWA KIYOUICHI
IPC分类号： H01L21/30 , G02B13/22 , G02B19/00 , G02B21/08 , G02B27/18 , G03F9/00 , H01L21/027
CPC分类号： G03F9/70
摘要： PURPOSE:To align a reticle and a wafer with a high precision even if the reticle size is changed, by providing a rectangular aperture in a light source means and making the lengthwise direction of the rectangular aperture coincident with the direction in which the reticle-side focus of a reticle-side positive lens group can be moved on the reticle. CONSTITUTION:A rectangular aperture 70a formed with a slit-shaped rectangular diaphragm 70 provided in a light source part is so arranged that its lengthwise direction corresponds to the direction of movement of the focus position of the first positive lens group L10, namely, the radial direction of a reticle R; and when an object lens barrel 10 and a focus barrel 20 in an alignment system are moved in accordance with the change of the reticle size, a rectangular aperture image 70a' of the light source part is moved in the lengthwise direction to an entrance pupil IE on the entrance pupil plane of a projection object lens L50, and an entrance pupil image IE' of the projection object lens L50 is moved in the lengthwise direction of the rectangular aperture 70a on the rectangular aperture 70a on the aperture plane of the light source part. Therefore, the state where an alignment mark Wm on a wafer W is illuminated through the projection object lens L50 is hardly changed.
摘要翻译：目的：即使标线尺寸改变，也可以高精度地对准标线片和晶片，通过在光源装置中设置矩形孔并使矩形孔的长度方向与标线片侧的方向一致标线片侧正透镜组的焦点可以在光罩上移动。构成：设置在光源部中的形成有狭缝状矩形膜片70的矩形孔70a的长度方向与第一正透镜组L10的聚焦位置的移动方向对应，即径向标线片R的方向; 并且当对准系统中的物镜镜筒10和聚焦镜筒20根据标线尺寸的变化而移动时，光源部分的矩形孔径图像70a'沿长度方向移动到入射光瞳IE 在投影物镜L50的入射光瞳面上，投影物镜L50的入射光瞳图像IE'沿着光源部的孔径面上的矩形孔70a的矩形孔70a的长度方向移动。因此，通过投影物镜L50照射晶片W上的对准标记Wm的状态几乎不变化。

2. 发明专利

JPS57125302A Automatic measuring device of radius of curvature 失效
标题翻译：曲率半自动测量装置
公开(公告)号：JPS57125302A
公开(公告)日：1982-08-04
申请号：JP1010881
申请日：1981-01-28
申请人： Nippon Kogaku Kk
发明人： UEHARA MAKOTO , NOUDA MASAO , NAKABARAI SHIYUUICHI
IPC分类号： G01B11/24 , A61B3/10 , G01B11/255 , G01B21/20
CPC分类号： G01B11/255
摘要： PURPOSE:To measure the curvature of a body to be checked automatically by projecting indexes on the body to be checked by parallel luminous fluxes in the directions which are symmetrical with respect to an optical axis of an objective lens, focusing the index images on an image sensor by the specified objective lens, detecting the interval, and performing computation and processing. CONSTITUTION:Point light sources 10a and 10b are arranged at the symmetrical positions with respect to the optical axis of the objective lens system comprising a front lens 1, a rear lens 2 whose front focal point is the rear focal point of the lens 1, and a stop 3 which is arranged at the focal point. The bright points 10a and 10b are projected on the body to be checked 100 by the parallel luminous fluxes in the directions which form an equal angle theta with the optical axis of the objective lens from projecting lenses 11a and 11b. The reflected image are focused on an image sensor 14 and a reticle 13 through the objective lens and a beam splitter 12. Focusing is performed by an eyepiece lense 13', and the output from the sensor 14 is inputted into a computor 17, through a waveform shaping circuit 16. Then the curvature of the body to be checked 100 is computed and displayed 18. Thus the curvature can be automatically measured.
摘要翻译：目的：通过将物体上的索引投射到要被检查的平行光束上，以相对于物镜的光轴对称的方向来自动测量要被检查的身体的曲率，将索引图像聚焦在图像上传感器通过指定的物镜，检测间隔，并执行计算和处理。构成：点光源10a和10b相对于包括前透镜1，前焦点是透镜1的后焦点的后透镜2的物镜系统的光轴布置在对称位置，以及设置在焦点处的停止件3。亮点10a和10b通过与投影透镜11a和11b的物镜的光轴形成等角度θ的方向上的平行光束投射到要检查的物体100上。反射图像通过物镜和分束器12聚焦在图像传感器14和光罩13上。通过目镜透镜13'进行聚焦，将传感器14的输出输入计算机17，通过波形整形电路16.然后计算并显示要检查的物体100的曲率。因此，可以自动测量曲率。

3. 发明专利

JPS59143146A Mirror condenser type illuminating optical system 失效
标题翻译：镜面冷凝器类型照明光学系统
公开(公告)号：JPS59143146A
公开(公告)日：1984-08-16
申请号：JP1869783
申请日：1983-02-07
申请人： Nippon Kogaku Kk
发明人： UEHARA MAKOTO , HASHIMOTO SUMIO
IPC分类号： G03B27/54 , G02B5/00 , G02B17/08 , G02B19/00 , G02B21/06 , G02B27/09 , G02F1/19 , G03F7/20
CPC分类号： G03F7/70058 , G02B5/001 , G02B19/0028 , G02B19/0047 , G02B21/06
摘要： PURPOSE: To improve the distribution of light quantity and to ensure the illumination of high efficiency by using a conical refractive member to invert the incident parallel luminous fluxes between the inside and the outside and at the same time correcting the inside vignetting of the parallel luminous fluxes.
CONSTITUTION: A conical prism 3 having the 1st and 2nd faces 3a and 3b processed into conical convex surfaces is set at the back of a condenser lens 2. The luminous flux delivered from the lens 2 is refracted inside on the face 3a and delivered again as parallel luminous fluxes through the face 3b. The parallel luminous fluxes are shifted until the parallel beams which are most distant away from the optical axis are approximately coincident with the optical axis and that the most inside beam is delivered furthest. In other words, the incident luminous flux is inverted between the inside and the outside by the prism 3 and at the same time converted into a dense luminous flux having no vignetting at its center. This improves the distribution of light quantity and the efficiency of illumination.
COPYRIGHT: (C)1984,JPO&Japio
摘要翻译：目的：为了改善光量的分布并通过使用锥形折射构件来反射内外的入射平行光通量，同时校正平行光通量的内部渐晕，确保高效照明。构成：在聚光透镜2的背面设置具有加工成圆锥形凸面的第1面和第2面3a，3b的圆锥棱镜3.从透镜2输送的光束折射到面3a的内部，再次以通过面3b的平行光通量。平行的光束被移动直到距离光轴最远的平行光束与光轴近似一致，并且最内侧光束被最远地传送。换句话说，入射光束通过棱镜3在内外反转，同时转换为在其中心没有晕影的致密光通量。这改善了光量的分布和照明的效率。

4. 发明专利

JPS59133517A Projection lens 失效
标题翻译：投影镜头
公开(公告)号：JPS59133517A
公开(公告)日：1984-07-31
申请号：JP739483
申请日：1983-01-21
申请人： Nippon Kogaku Kk
发明人： UEHARA MAKOTO , MOGAMI SATOSHI
IPC分类号： G02B13/16 , G02B13/18
CPC分类号： G02B9/34 , G02B13/16 , G02B13/18
摘要： PURPOSE: To obtain a projection lens for a video projector, which has a high performance by constituting the projection lens of four lenses having a prescribed shape, and positioning the second lens at an incident pupil position of the whole system or its vicinity.
CONSTITUTION: A projection lens is constituted of the first lens L
1 of a positive refractive power, the second lens L
2 of a positive refractive power, the third lens L
3 having a positive refractive power and a biconvex shape, and the fourth lens L
4 which has a negative refractive power and turns a strong curvature surface to the screen side, in order from the screen side, and the second lens L
2 is placed at a position of an incident pupil of the whole system or its vicinity. The first lens L
1 corrects a spherical aberration and a comatic aberration, the second lens L
2 corrects a balance of the comatic aberration, the third lens L
3 corrects the spherical aberration and the comatic aberration, and the fourth lens L
4 has a correcting function of a curvature of image and an astigmatism. Therefore, it is possible to obtain a projection lens for a video projector, which has a high performance.
COPYRIGHT: (C)1984,JPO&Japio
摘要翻译：目的：通过构成具有规定形状的四个透镜的投影透镜，并且将第二透镜定位在整个系统或其附近的入射光瞳位置，获得具有高性能的视频投影仪的投影透镜。构成：投影透镜由正屈光力的第一透镜L1，正折光力的第二透镜L2，具有正折光力的二次透镜L3和双凸形状构成，第四透镜L4具有负折射力并且从屏幕侧依次向屏幕侧弯曲强曲率表面，并且将第二透镜L2放置在整个系统或其附近的入射光瞳的位置。第一透镜L1校正球面像差和彗形像差，第二透镜L2校正彗差的平衡，第三透镜L3校正球面像差和彗形像差，并且第四透镜L4具有曲率的校正函数的形象和散光。因此，可以获得具有高性能的用于视频投影仪的投影透镜。

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