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    • 2. 发明专利
    • Multilayer ceramic substrate and its manufacturing method
    • 多层陶瓷基板及其制造方法
    • JP2005197285A
    • 2005-07-21
    • JP2003435171
    • 2003-12-26
    • Ngk Spark Plug Co Ltd日本特殊陶業株式会社
    • TAKAHASHI HIROYUKIKATAGIRI HIROYUKISATO MANABUOKUYAMA MASAHIKO
    • H05K3/46
    • PROBLEM TO BE SOLVED: To provide a multilayer ceramic substrate which does not contain Pb, effectively suppresses a contraction in a manufacturing time while holding dielectric characteristics, and easily removes a contraction suppressing layer, and also to provide a method of manufacturing the same.
      SOLUTION: The multilayer ceramic substrate having a glass ceramics blending part includes a glass phase consisting of glass having: transition point of 580-700°C; a temperature difference between the glass transition point and a softening point of 140°C or lower; and a content of 0-1 mass% Pb in terms of an oxide. The method of manufacturing the substrate includes a step of baking an unbaked sheet containing a ceramic filler and a glass powder without pressurization the contraction suppressing layer on the front and rear surfaces of a laminate obtained by laminating the unburned sheets. In the method, the glass powder has the glass transition point of 580-700°C, the temperature difference between the glass transition point and the softening point of 140°C or lower, and the glass that the content of Pb is 1 mass% or less (including "0") in terms of the oxide, is used.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供不含Pb的多层陶瓷基板,在保持介电特性的同时有效抑制制造时间的收缩,容易除去收缩抑制层,并且还提供制造方法 相同。 < P>解决方案:具有玻璃陶瓷配合部的多层陶瓷基板包括由玻璃构成的玻璃相,其转变点为580〜700℃; 玻璃化转变点与软化点之间的温度差为140℃以下; 以氧化物换算为0〜1质量%的Pb。 制造基板的方法包括如下步骤:将不含有陶瓷填料和玻璃粉末的未烘烤片材加压而不加压通过层压未燃烧片材得到的层压板的前后表面的收缩抑制层。 在该方法中,玻璃粉末的玻璃化转变点为580-700℃,玻璃化转变温度与软化点的温度差为140℃以下,Pb含量为1质量% 或更少(包括“0”)。 版权所有(C)2005,JPO&NCIPI
    • 3. 发明专利
    • Ceramic substrate for thin film electronic component and thin film electronic component using this
    • 薄膜电子元件和薄膜电子元件的陶瓷基板
    • JP2005129918A
    • 2005-05-19
    • JP2004285180
    • 2004-09-29
    • Ngk Spark Plug Co Ltd日本特殊陶業株式会社
    • ICHIYANAGI SEIJIOTSUKA ATSUSHISATO MANABUOKUYAMA MASAHIKO
    • H01G4/12H05K1/11H05K3/28
    • PROBLEM TO BE SOLVED: To provide a ceramic substrate for a thin film electronic component equipped with a circuit pattern in a glaze layer, and thin film electronic component using the substrate. SOLUTION: This substrate is equipped with a ceramic substrate 2, glaze layer 3 formed on at least one surface of the substrate, and circuit pattern 21 arranged inside the layer 3 with the part of the pattern exposed over the surface of the layer 3. This circuit pattern 21 can be extended inside the ceramic substrate 2 and the part of the pattern can be exposed to the other surface of the ceramic substrate 2. The thickness of the layer 3 can be from 10 to 100 μm. The surrender point of the layer 3 can be 700°C or over. The principal components of glass that constitutes the layer 3 can be Si, Al, B, Ca and O. The layer 3 can be obtained by heat and pressure treatment of a glass layer 24 formed on the frontal surface of the ceramic substrate 2. This thin film electronic component is equipped with this substrate. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种用于在釉层中配备电路图案的薄膜电子部件的陶瓷基板和使用该基板的薄膜电子部件。 解决方案:该基板装备有陶瓷基板2,形成在基板的至少一个表面上的釉层3和布置在层3内的电路图案21,其中图案的一部分暴露在层的表面上 该电路图案21可以在陶瓷基板2内部延伸,并且图案的一部分可以暴露于陶瓷基板2的另一个表面。层3的厚度可以为10至100μm。 第3层的投降点可以为700°C以上。 构成层3的玻璃的主要成分可以是Si,Al,B,Ca和O.层3可以通过对形成在陶瓷基板2的前表面上的玻璃层24进行热处理和压力处理来获得。 薄膜电子部件配备有该基板。 版权所有(C)2005,JPO&NCIPI
    • 5. 发明专利
    • Ceramic wiring board
    • 陶瓷接线板
    • JP2010010394A
    • 2010-01-14
    • JP2008167998
    • 2008-06-26
    • Ngk Spark Plug Co Ltd日本特殊陶業株式会社
    • OGAWA TAKAMICHIYAMAMOTO HIROSHIHIRANO SATOSHIOTSUKA ATSUSHIOKUYAMA MASAHIKO
    • H05K3/46H05K1/09
    • PROBLEM TO BE SOLVED: To provide a ceramic wiring board which has a superior mounting strength and has a low electric resistance for a conductor portion and which can be manufactured without suffering warping, peeling, or the like caused by simultaneous firing. SOLUTION: The ceramic wiring board 10 includes a ceramic substrate 11, chief of which is ceramic that sinters at a temperature higher than the melting point of copper, and conductors 18, 19, 23, 27, and 28 which are formed in the ceramic substrate 11. The conductors 18, 19, 23, 27, and 28 each consist of a mixed phase of a filler and copper. The filler is formed mainly of chromium-based inorganic metal oxide having a melting point higher than that of copper. The content of the inorganic metal oxide in the filler is not less than 10 vol.% nor more than 60 vol.%. A preferred inorganic metal oxide in the filler is, for example, a chromium oxide or a copper-chromium composite oxide. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种具有优良的安装强度并且对于导体部分具有低电阻并且可以在不受同时烧制引起的翘曲,剥离等的情况下制造的陶瓷布线板。 < P>解决方案:陶瓷布线板10包括陶瓷基板11,其主要是在高于铜的熔点的温度下烧结的陶瓷,以及导体18,19,23,27和28,其形成在 陶瓷基板11.导体18,19,23,27和28各自由填料和铜的混合相组成。 填料主要由熔点高于铜的铬基无机金属氧化物形成。 填料中无机金属氧化物的含量不小于10vol。%,也不大于60vol%。 填料中优选的无机金属氧化物是例如氧化铬或铜 - 铬复合氧化物。 版权所有(C)2010,JPO&INPIT
    • 6. 发明专利
    • Method for manufacturing multilayer ceramic electronic component
    • 制造多层陶瓷电子元件的方法
    • JP2010177508A
    • 2010-08-12
    • JP2009019524
    • 2009-01-30
    • Ngk Spark Plug Co Ltd日本特殊陶業株式会社
    • MURAKAMI KENJISATO MOTOHIKOOTSUKA ATSUSHIOKUYAMA MASAHIKO
    • H01G4/30H01G4/12
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing a multilayer ceramic electronic component capable of surely forming a via conductor in the successful shape since a through hole with high perpendicularity and high taper ratio can be formed. SOLUTION: In the method for manufacturing the multilayer ceramic electronic component 101, the through hole 130 is formed on a laminate 220 by a laser machining process. In the process, a system for controlling an irradiating position via an optical system 303 on which a laser beam 250 is reflected and converged is adopted. The maximum width of a machining area which can be controlled via the optical system 303 is set to ≤50 mm. Focal distance of the laser beam 250 is set to ≥70 mm, focal depth of the laser beam 250 is set to ≥70 μm, and wavelength of the laser beam 250 is set to ≥2 μm and ≤20 μm. As an irradiation system of the laser beam 250, a pulse system is used, and pulse width is set to ≥15μsec and ≤150μsec. When the laser beam is irradiated at a specific hole forming position P1 for n times, irradiation for n times is not continuously performed to specific hole forming positions P2-P5. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种能够形成通孔导体成功形成的多层陶瓷电子部件的方法,因为可以形成具有高垂直度和高锥度比的通孔。 解决方案:在多层陶瓷电子部件101的制造方法中,通过激光加工工艺在层压板220上形成通孔130。 在该过程中,采用用于通过激光束250反射和收敛的光学系统303来控制照射位置的系统。 可以通过光学系统303控制的加工区域的最大宽度设定为≤50mm。 激光束250的焦距设定为≥70mm,激光束250的焦点深度设定为≥70μm,激光束250的波长设定为≥2μm,≤20μm。 作为激光束250的照射系统,使用脉冲系统,脉冲宽度设定为≥15μsec,≤150μsec。 当激光束在特定孔形成位置P1照射n次时,对特定的孔形成位置P2-P5不连续进行n次的照射。 版权所有(C)2010,JPO&INPIT
    • 7. 发明专利
    • Electrostatic chuck
    • 静电卡
    • JP2010034256A
    • 2010-02-12
    • JP2008194434
    • 2008-07-29
    • Ngk Spark Plug Co Ltd日本特殊陶業株式会社
    • INUI YASUHIKOTSUJI MASAKIITO YOICHISUGIURA HIROKIMORITA NAOTOSHIOKUYAMA MASAHIKO
    • H01L21/683H01L21/3065
    • PROBLEM TO BE SOLVED: To provide an electrostatic chuck that never varies in leak amount of cooling gas even when a large-sized body to be sucked is repeatedly attached and detached to maintain uniform controllability for a temperature distribution of a suction surface by the cooling gas, and then enhances uniformity, reproducibility, and yield of processing such as etching processing on the body to be sucked and so on. SOLUTION: The electrostatic chuck 10 includes an insulating plate 11 having the suction surface 13 for sucking and fixing the body to be sucked, and an electrostatic electrode 12 provided in the insulating plate 11, wherein the insulating plate 11 is formed of ceramic having a Young's modulus of 100 to 200 GPa and surface roughness (Ra) of the suction surface 13 is 1 to 2 μm. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:为了提供一种静电卡盘,即使当被吸引的大型体被重复地附接和分离以保持对吸入表面的温度分布的均匀控制性时,也不会改变冷却气体的泄漏量, 冷却气体,然后提高加工的均匀性,再现性和加工性能,例如待吸附的身体上的蚀刻加工等。 解决方案:静电吸盘10包括具有用于吸引和固定被吸收体的吸附表面13的绝缘板11和设置在绝缘板11中的静电电极12,其中绝缘板11由陶瓷 杨氏模量为100〜200GPa,吸附面13的表面粗糙度(Ra)为1〜2μm。 版权所有(C)2010,JPO&INPIT
    • 9. 发明专利
    • Multilayer printed wiring board
    • 多层印刷接线板
    • JP2003069229A
    • 2003-03-07
    • JP2001255779
    • 2001-08-27
    • Ngk Spark Plug Co Ltd日本特殊陶業株式会社
    • SUMI YASUSHIKOJIMA TOSHIFUMIOKUYAMA MASAHIKOIGAI NORIHIKO
    • H05K3/46
    • PROBLEM TO BE SOLVED: To obtain a multilayer printed wiring board containing an electronic component which prevents a crack from occurring in an insulating layer laminat ed and formed on a through hole or a solder resist layer in a reliability evaluat ing test (particularly a thermal impact test of repeating cooling to -55 deg.C and heating to 125 deg.C), which improves electric characteristics by reducing a parasitic capacity and which lowers a back surface height. SOLUTION: The multilayer printed wiring board comprises a build-up layer having insulating layers and wiring layers alternatively laminated on at least one surface of a core board and openings and through-holes formed so as to pass through the core board and the build-up layer. In the substrate, an electronic component is disposed in the opening, and embedded by using the embedding resin. A cured material of a paste or filling in the through-hole having an absolute value of a difference of a thermal expansion coefficient of a thickness direction (Z-axis direction) of the core board of 20 ppm/ deg.C or lower is filled in the through-hole. An elastic modulus of the cured material of the paste at 25 deg.C is desirably in a range of 3.0 to 6.5 GPa.
    • 要解决的问题:为了获得包含电子部件的多层印刷线路板,其在可靠性评估试验(特别是热冲击)中,防止在层压并形成在通孔或阻焊层上的绝缘层中发生裂纹 重复冷却至-55℃并加热至125℃的试验),其通过降低寄生容量并降低背表面高度来改善电特性。 解决方案:多层印刷线路板包括:堆叠层,其具有绝缘层和交替层压在芯板的至少一个表面上的布线层,并且开口和通孔形成为穿过芯板和积聚层 层。 在基板中,将电子部件设置在开口内,并通过使用嵌入树脂嵌入。 将填充在芯板的厚度方向(Z轴方向)的热膨胀系数的绝对值的绝对值为20ppm /℃以下的通孔中的糊状物填充固化物填充 在通孔中。 糊状物在25℃下的固化物的弹性模量优选为3.0〜6.5GPa的范围。
    • 10. 发明专利
    • Method of manufacturing piezoelectric element
    • 制造压电元件的方法
    • JP2010258195A
    • 2010-11-11
    • JP2009106088
    • 2009-04-24
    • Ngk Spark Plug Co Ltd日本特殊陶業株式会社
    • IWASAKI MASATAKAYASUDA HIROYATAKAYAMA YASUSHIOTSUKA ATSUSHIOKUYAMA MASAHIKO
    • H01L41/083F02M51/00F02M51/06H01L41/187H01L41/22H01L41/297H01L41/39H02N2/00
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric element in which an organic binder is made easy to be removed (degreasing) even when oxygen partial pressure is low, and the time needed for the degreasing is shortened while suppressing oxidation of Cu. SOLUTION: In the method of manufacturing the piezoelectric element 10 formed by alternately laminating a piezoelectric ceramic layer 2 consisting essentially of lead zirconate titanate and Cu-based electrode layers 4, 6 consisting essentially of Cu, a calcined powder having the specific surface area of 0.75 to 1.64 m 2 /g is obtained by adding an additive material containing at least one of Mn and Co to a material powder prepared by mixing respective powders of Pb (lead) oxide, Ti (titanium) oxide and Zr (zirconium) oxide, and calcinating and pulverizing the mixture, and an unbaked piezoelectric element 10x is obtained by forming and baking an unbaked piezoelectric ceramic layer 2x from a preparation material having an organic binder added to the calcined powder, and then alternately laminating unbaked Cu-based electrode layers 4x, 6x serving as the Cu-based electrode layers after the baking, and the unbaked piezoelectric element is degreased in an atmosphere of ≤1.013 Pa in oxygen partial pressure. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供即使在氧分压低的情况下也容易除去有机粘合剂(脱脂)的压电元件的制造方法,并且在抑制脱脂所需的时间被缩短的同时抑制 Cu的氧化。 解决方案:在通过交替层叠基本上由锆钛酸铅组成的压电陶瓷层2和基本上由Cu组成的Cu基电极层4,6形成的压电元件10的制造方法中,具有比表面积的煅烧粉末 通过将含有至少一种Mn和Co的添加剂材料添加到通过混合Pb(铅)氧化物,Ti(钛)的各种粉末而制备的材料粉末中来获得0.75至1.64μm的面积 )氧化物和Zr(锆)氧化物,并煅烧和粉碎混合物,通过从预煅烧粉末中添加有机粘合剂的制备材料形成并烘焙未烘烤的压电陶瓷层2x,得到未烘烤的压电元件10x,然后 在烘烤后交替层叠用作Cu基电极层的未焙烧的Cu基电极层4x,6x,并将未烘烤的压电元件在≤1.013Pai的气氛中脱脂 n氧分压。 版权所有(C)2011,JPO&INPIT