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1. 发明专利

JP2014041112A Pyroelectric infrared sensor 审中-公开
标题翻译：光电红外传感器
公开(公告)号：JP2014041112A
公开(公告)日：2014-03-06
申请号：JP2013071818
申请日：2013-03-29
申请人： Nec Tokin Corp , Necトーキン株式会社
发明人： KAWAKAMI YOSHIHIRO , KAKITA ARINORI , CHIBA MITSUHARU
IPC分类号： G01J1/02
摘要： PROBLEM TO BE SOLVED: To provide a pyroelectric infrared sensor high in reliability and infrared detection sensitivity.SOLUTION: A pyroelectric infrared sensor comprises pyroelectric films 11, 12, a thin metal plate 2, and a support member 3. The pyroelectric films 11, 12 are formed on the thin metal plate 2, and ends of the thin metal plate 2 are fixed by the support member 3. Infrared light incident to at least a portion of the pyroelectric films 11, 12 is detected by electric charges induced on front and rear surfaces of the pyroelectric films 11, 12.
摘要翻译：要解决的问题：提供高可靠性和红外检测灵敏度的热释电红外传感器。解决方案：热释电红外传感器包括热电膜11,12，薄金属板2和支撑构件3.热电膜11,12 形成在薄金属板2上，薄金属板2的端部被支撑部件3固定。入射到热电膜11,12的至少一部分的红外光通过前后引起的电荷来检测热电膜11,12的表面。

2. 发明专利

JP2007165385A Piezoelectric film lamination structure, and its manufacturing method 有权
标题翻译：压电薄膜层压结构及其制造方法
公开(公告)号：JP2007165385A
公开(公告)日：2007-06-28
申请号：JP2005356345
申请日：2005-12-09
申请人： Nec Tokin Corp , Necトーキン株式会社
发明人： KAWAKAMI YOSHIHIRO , AIZAWA SHUJI
IPC分类号： H01L41/09 , H01L41/08 , H01L41/083 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/314 , H01L41/319
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric film lamination structure capable of preventing any exfoliation and crack from occurring owing to reduction in strength of a junction interface between a substrate material and a PZT film, upon heat treatment in formation of the PZT film and upon continuous driving as an actuator and having high reliability and excellent piezoelectric characteristics, and to provide its manufacturing method. SOLUTION: A metal substrate containing 3 to 10% Al is used, and a first intermediate layer 2 containing Al as a chief ingredient is formed on the metal substrate 1 with diffusion by heat. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供能够防止由于基板材料和PZT膜之间的接合界面的强度降低而发生的剥离和裂纹的压电膜层叠结构，在形成PZT时进行热处理并且作为致动器连续驱动并且具有高可靠性和优异的压电特性，并提供其制造方法。解决方案：使用含有3至10％Al的金属基材，并且通过加热扩散在金属基板1上形成以Al为主要成分的第一中间层2。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2011129746A Piezoelectric film actuator and method of manufacturing the same 审中-公开
标题翻译：压电薄膜致动器及其制造方法
公开(公告)号：JP2011129746A
公开(公告)日：2011-06-30
申请号：JP2009287452
申请日：2009-12-18
申请人： Nec Tokin Corp , Necトーキン株式会社
发明人： KAWAKAMI YOSHIHIRO , HASHIMOTO TAKATOSHI , SASAKI ATSUSHI
IPC分类号： H01L41/09 , C23C24/04 , H01L41/18 , H01L41/22 , H01L41/314 , H01L41/39 , H01L41/43
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric film actuator using a piezoelectric film that does not contain lead and has high piezoelectric constant, which has high performance and is superior in temperature characteristic, and the method of manufacturing the same. SOLUTION: A piezoelectric film actuator is formed of a piezoelectric film 2 formed on a substrate 1 and a lower electrode 3 and an upper electrode 4 for applying voltage to the piezoelectric film 2. The piezoelectric film actuator drives an object using displacement produced in the piezoelectric film 2 by applying voltage between the electrodes. The piezoelectric film 2 is composed of polycrystals of barium titanate (BaTiO 3 ) whose particle size is 0.2-0.5 μm. The piezoelectric film 2 is formed by an aerosol deposition method, and then heat-treated at a temperature of 850 to 1,100°C. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决的问题：为了提供一种使用不含铅的压电膜并且具有高性能且温度特性优异的高压电常数的压电膜致动器及其制造方法。解决方案：压电膜致动器由形成在基板1上的压电膜2和用于向压电膜2施加电压的下电极3和上电极4形成。压电膜致动器使用位移产生驱动物体在压电薄膜2中通过在电极之间施加电压。压电膜2由粒径为0.2-0.5μm的钛酸钡（BaTiO 3 SB 3）的多晶体构成。压电膜2通过气溶胶沉积法形成，然后在850〜1100℃的温度下进行热处理。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2011086641A Piezoelectric film actuator, liquid droplet jetting device and method for manufacturing them 有权
标题翻译：压电薄膜致动器，液滴喷射装置及其制造方法
公开(公告)号：JP2011086641A
公开(公告)日：2011-04-28
申请号：JP2009235828
申请日：2009-10-13
申请人： Nec Tokin Corp , Necトーキン株式会社
发明人： OKAMOTO KOICHI , KAWAKAMI YOSHIHIRO , TOGANO YUICHI , CHIBA MITSUHARU
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/31 , H01L41/314 , H01L41/319
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric film actuator increasing a displacement amount of a diaphragm even if it has a simple structure and the same drive voltage, and also to provide: a droplet jetting device providing a displacement amount required for jetting a liquid and stably jetting liquid droplets by using the piezoelectric film actuator even if a pressure chamber is miniaturized; and methods for manufacturing the actuator and the device. SOLUTION: The piezoelectric film actuator has a structure in which a flow pathway structure including the pressure chamber 17 is formed inside a stainless substrate 10; and a diffusion preventing layer 15, a piezoelectric inactive layer 14, a lower electrode 13, a piezoelectric active layer 12, and an upper electrode 11, are sequentially stacked on the upper part of the pressure chamber 17. Liquid droplets are jetted by applying a pressure to a liquid in the pressure chamber 17, via the vibration above the pressure chamber 17, generated by the voltage applied between the lower electrode 13 and the upper electrode 11. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供即使具有简单的结构和相同的驱动电压也增加膜片的位移量的压电膜致动器，并且还提供：提供喷射所需的位移量的液滴喷射装置即使压力室小型化，也可以通过使用压电膜致动器来稳定地喷射液滴; 以及用于制造致动器和装置的方法。解决方案：压电薄膜致动器具有在不锈钢基板10内部形成包括压力室17的流路结构的结构，并且在压力室17的上部依次层叠有扩散防止层15，压电无
效层14，下电极13，压电有源层12和上电极11。通过施加液滴通过施加在下电极13和上电极11之间的电压产生的压力室17上的振动，压力室17中的液体的压力。（C）2011，JPO和INPIT

5. 发明专利

JP2007273799A Lamination structure and method of manufacturing same 审中-公开
标题翻译：层压结构及其制造方法
公开(公告)号：JP2007273799A
公开(公告)日：2007-10-18
申请号：JP2006098548
申请日：2006-03-31
申请人： National Institute Of Advanced Industrial & Technology , Nec Tokin Corp , Necトーキン株式会社 , 独立行政法人産業技術総合研究所
发明人： KAWAKAMI YOSHIHIRO , AIZAWA SHUJI , NISHINOMIYA YUKIO , AKETO JUN
IPC分类号： H01L41/083 , C23C24/04 , C23C28/00 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/314 , H01L41/39 , H01L41/43
摘要： PROBLEM TO BE SOLVED: To provide a lamination piezoelectric ceramic structure having a piezoelectric ceramic thick film which can use cheap metal materials, such as stainless steel, copper, iron and nickel other than Si and ceramic as board materials and contains lead such as PZT or the like excellent in a piezoelectric property, and to provide a method of manufacturing the lamination piezoelectric ceramic structure. SOLUTION: A lamination piezoelectric ceramic structure 100 is the lamination piezoelectric ceramic structure obtained by laminating an electrode layer 2 consisting of copper or platinum metal as an interlayer between a substrate 5 and a piezoelectric ceramic thick film 1 containing the lead, wherein the piezoelectric ceramic thick film 1 containing the lead has a reduction resistance containing at least one kind of MnO, Mn 2 O 3 , Mn 3 O 4 , BaO, CaO and SrO. In order to manufacture the lamination piezoelectric ceramic structure 100, the piezoelectric ceramic thick film 1 is formed by an aerosol deposition method, and a heat treatment of the lamination piezoelectric ceramic structure 100 is carried out in an inert atmosphere or a reduction atmosphere. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有压电陶瓷厚膜的层压压电陶瓷结构，其可以使用诸如不同于Si的廉价金属材料，例如不锈钢，铜，铁和镍，并且陶瓷作为板材，并且包含铅作为压电性能优异的PZT等，并提供层压型压电陶瓷结构体的制造方法。解决方案：叠层压电陶瓷结构100是通过将由铜或铂金属组成的电极层2作为中间层层叠在基板5和含有铅的压电陶瓷厚膜1之间而获得的叠层压电陶瓷结构，其中，含有铅的压电陶瓷厚膜1具有含有至少一种MnO，Mn O 3 ，Mn 3 SB> 4 ，BaO，CaO和SrO。为了制造叠层压电陶瓷结构体100，通过气溶胶沉积法形成压电陶瓷厚膜1，层叠压电陶瓷结构体100的热处理在惰性气氛或还原气氛中进行。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2004134420A Piezoelectric transformer 审中-公开
标题翻译：压电变压器
公开(公告)号：JP2004134420A
公开(公告)日：2004-04-30
申请号：JP2002294455
申请日：2002-10-08
申请人： Nec Tokin Corp , Necトーキン株式会社
发明人： KAWAKAMI YOSHIHIRO , SUZUKI SHIGEYUKI
IPC分类号： H01L41/107 , H01L41/187 , H01L41/22 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric transformer which satisfies the safety standards of a power source without lowering the efficiency as a converter. SOLUTION: Since an insulating layer is not polarized in a temperature range used as the piezoelectric transformer by using a ferroelectric material or an anti-ferroelectric material of a low Curie temperature for an insulating layer between an input and an output of the transformer, the insulating layer can be thinned, and the safety standards of the power source can be satisfied. Since its performance is not deteriorated, the transformer has a small size. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种满足电源安全标准的压电变压器，而不会降低转换器的效率。解决方案：由于在用作压电变压器的温度范围内绝缘层在变压器的输入和输出之间使用铁电材料或低居里温度的抗铁电材料用于绝缘层可以使绝缘层变薄，能够满足电源的安全标准。由于其性能未劣化，变压器尺寸小。版权所有（C）2004，JPO

7. 发明专利

JP2012242810A Optical scanning element 有权
标题翻译：光学扫描元件
公开(公告)号：JP2012242810A
公开(公告)日：2012-12-10
申请号：JP2011116290
申请日：2011-05-24
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所 , Nec Tokin Corp , Necトーキン株式会社
发明人： AKETO JUN , BOKU SAIKAKU , KAWAKAMI YOSHIHIRO
IPC分类号： G02B26/10 , H04N1/113
摘要： PROBLEM TO BE SOLVED: To solve such problems that it is effective, in an optical scanning device for torsionally vibrating, by a piezoelectric element, a mirror supported by a torsional beam and scanning light, to enhance a field intensity applied to the piezoelectric element for enlarging a scan angle or achieving a large scan angle at a low voltage and it is required to thin a piezoelectric layer, however, when a piezoelectric plate is thinned to 100 μm or less, the mechanical strength is lowered and, when a lamination structure is adopted by thinning the piezoelectric layer while retaining the mechanical strength, a capacitance increases and a power consumption increases.SOLUTION: The optical scanning element is configured by sticking a unimorph or bimorph piezoelectric element in which a piezoelectric thick film is formed on a substrate, to a mirror frame. A mirror supported by a torsional hinge is formed on the mirror frame.
摘要翻译：解决的问题为了解决有效的问题，在用于扭转振动的光学扫描装置中，通过压电元件，由扭转梁支撑的反射镜和扫描光，以增强施加到用于放大扫描角度或在低电压下实现较大扫描角度的压电元件，并且需要使压电层薄型化，然而，当将压电板减薄至100μm以下时，机械强度降低，并且当通过在保持机械强度的同时减薄压电层而采用层压结构，电容增加并且功耗增加。解决方案：光学扫描元件通过将在其上形成压电厚膜的单压电晶片或双压电晶片压电元件粘附到反射镜框架上而构成。在反射镜框架上形成由扭转铰链支撑的反射镜。版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP2011249459A Piezoelectric film type actuator and liquid droplet injection device 审中-公开
标题翻译：压电薄膜式致动器和液滴喷射装置
公开(公告)号：JP2011249459A
公开(公告)日：2011-12-08
申请号：JP2010119383
申请日：2010-05-25
申请人： Nec Tokin Corp , Necトーキン株式会社
发明人： OKAMOTO KOICHI , KAWAKAMI YOSHIHIRO
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/16 , H01L41/18 , H01L41/187
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric film type actuator having less deterioration in an amount of displacement due to a diffusion prevention layer as compared with the conventional ones, and a liquid droplet injection device using the piezoelectric film type actuator and capable of securing a sufficient discharge quantity.SOLUTION: A piezoelectric film type actuator has a three-layered structure comprising a bottom electrode 13, a piezoelectric film 12 and an upper electrode 11 on a stainless steel base plate 10 containing aluminum. The three-layered structure is formed on a diffusion prevention layer 5 comprising an aluminum nitride layer formed by performing nitriding treatment to a surface of the stainless steel base plate 10.
摘要翻译：要解决的问题：提供一种与以往相比，由于扩散防止层而导致的位移量变差较小的压电膜型致动器，以及使用该压电膜型致动器的液滴喷射装置，确保足够的排放量。解决方案：压电薄膜式致动器具有三层结构，其包括在包含铝的不锈钢底板10上的底部电极13，压电薄膜12和上部电极11。三层结构形成在包括通过对不锈钢基板10的表面进行氮化处理形成的氮化铝层的扩散防止层5上。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2007158167A Ultrasonic motor element and method of manufacturing same 审中-公开
标题翻译：超声波电机元件及其制造方法
公开(公告)号：JP2007158167A
公开(公告)日：2007-06-21
申请号：JP2005353398
申请日：2005-12-07
申请人： Nec Tokin Corp , Necトーキン株式会社
发明人： KAWAKAMI YOSHIHIRO , NISHINOMIYA YUKIO , AIZAWA SHUJI
IPC分类号： H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/314 , H01L41/331
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic motor element which has a large vibration displacement, a small variation in resonance frequency, a little deterioration against thermal processing, thermal shock, and can be composed at low price, and to provide a method of manufacturing the same. SOLUTION: A slit 53 is formed in a PZT film 54 which is formed by an aerosol deposition method in a metal tube 51. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种振动位移大，共振频率变化小，热处理温差小，热冲击小的超声波马达元件，可以以低价格构成，制造方法解决方案：在金属管51中通过气溶胶沉积法形成的PZT膜54中形成狭缝53.权利要求：（C）2007，JPO＆INPIT

10. 发明专利

JP2006303349A Method for manufacturing piezoelectric ceramic lamination element and piezoelectric ceramic lamination actuator 审中-公开
标题翻译：压电陶瓷层压元件和压电陶瓷层压致动器的制造方法
公开(公告)号：JP2006303349A
公开(公告)日：2006-11-02
申请号：JP2005126130
申请日：2005-04-25
申请人： Nec Tokin Corp , Necトーキン株式会社
发明人： NISHINOMIYA YUKIO , AIZAWA SHUJI , KAWAKAMI YOSHIHIRO
IPC分类号： H01L41/083 , H01L41/187 , H01L41/22 , H01L41/297 , H01L41/314 , H02N2/00
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric ceramic lamination element and a piezoelectric ceramic lamination actuator, wherein a thin layer of a piezoelectric ceramic can be accomplished for low voltage driving, and a low-cost base metal internal electrode can be used. SOLUTION: A laminated body is formed by laminating piezoelectric ceramics 11 and internal electrodes 12 alternately, and a ceramic insulator 14 is provided on a side face of this laminated body for insulating ends of the internal electrodes 12 every layer so as to constitute an opposing electrode. An external electrode 15 is connected to the internal electrode 12 which remains exposed to the side face, and the ceramic insulator 14 is formed through a resist coating and exposure process to the side face by an aerosol deposition method. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造压电陶瓷层叠元件和压电陶瓷层压致动器的方法，其中可以实现用于低压驱动的压电陶瓷的薄层，以及低成本的贱金属内部电极可以使用。解决方案：通过交替地层压压电陶瓷11和内部电极12来形成层压体，并且在该层压体的侧面上设置陶瓷绝缘体14，用于每层对内部电极12的端部进行绝缘，以构成相对电极。外部电极15与保持暴露于侧面的内部电极12连接，陶瓷绝缘体14通过抗蚀剂涂布形成，并通过气溶胶沉积法形成在侧面上。版权所有（C）2007，JPO＆INPIT

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