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    • 8. 发明专利
    • Manufacture of thin photoconductive film
    • 薄膜光电膜的制造
    • JPS59165067A
    • 1984-09-18
    • JP4091283
    • 1983-03-11
    • Matsushita Electric Ind Co LtdMatsushita Graphic Commun Syst IncNippon Telegr & Teleph Corp
    • KOMIYA KAZUMIYAMASHITA TOSHIOTANIGUCHI HIROMITSUOONO MASARU
    • G03G5/08G03G5/082H01L31/08
    • G03G5/082
    • PURPOSE:To facilitate uniform activation of the film to be activated formed even on a large sized substrate by using porous porcelain impregnated with halide in a state of an aq. soln. and dried. CONSTITUTION:A 0.2-1.0mum thin film of CdS-CdSe solid soln. is formed on a glass substrate to form an array of 100mumX100mum small photoconductive element films. The substrate is set in a boat 1 made of alumina porcelain with a film face upside, and a porous alumina porcelain rod 3 impregnated with CdCl2 and dried is placed on the bottom of the boat is arranged in parallel to the substrate 2, and the boat is covered with a cover 5 made of alumina porcelain having a small hole 4, and heat treated to eject an excess of CdCl2 out of the hole 4, and electrode of NiCr-Au or the like are formed on both sides of the elements by the photolithographic technique. The array 6 of CdS-CdSe solid soln. photoconductive elements and electrodes 7 are formed like birds on the glass substrate 2.
    • 目的:通过使用浸渍在水中的卤化物的多孔瓷来促进甚至在大尺寸基材上形成活化膜的均匀活化。 SOLN。 并干燥。 构成:一种0.2-1.0μm的CdS-CdSe固体溶胶薄膜。 形成在玻璃基板上以形成100mumX100mum的小光电导元件膜的阵列。 将基板放置在由氧化铝陶瓷制成的带有膜面朝上的舟皿1中,并且将沉积有CdCl 2并干燥并干燥的多孔氧化铝瓷棒3放置在与基板2平行的船上,并且船 被覆有由具有小孔4的氧化铝瓷制成的盖5,并且被热处理以从孔4中喷出过量的CdCl 2,并且通过所述元件的两侧形成NiCr-Au等的电极 光刻技术。 CdS-CdSe固体溶胶阵列6。 光电导元件和电极7像玻璃基板2上的鸟一样形成。
    • 9. 发明专利
    • MANUFACTURING DEVICE FOR COMPOUND SEMICONDUCTOR FILM
    • JPS58140115A
    • 1983-08-19
    • JP2383482
    • 1982-02-16
    • MATSUSHITA ELECTRIC IND CO LTD
    • YAMASHITA TOSHIOTANIGUCHI HIROMITSU
    • H01L27/146H01L21/208H01L31/0248
    • PURPOSE:To improve the deposition efficiency and improve the uniformity of deposited film, by forming so that the inner peripheral surface of the inside cylindrical part and the outer peripheral surface of the outside cylindrical part contact the liquid in a constant temperature bath. CONSTITUTION:A cylindrical vessel 21 has a concentric cylindrical hollow part 26 and an exhaust port 27 inside. Depositing solution 22 is poured between the outer and inner cylinders of the vessel 21, a substrate 24 is set up on a substrate holder and dipped into the solution 22, and then it is deposited while being rotated along the circumference in the solution 22. The vessel 21 is dipped into the constant temperature bath 25 which is heated to a high temperature, and the deposition is performed while heating the solution 22. Then, the hot liquid enters the hollow part 26 via the exhaust port 27. When this vessel 21 is used, the precipitation can be performed simultaneously at least to 28 sheets of substrate 24 resulting in the large improvement of the deposition efficiency. Since heating is performed simultaneously from the outer and inner peripheries of the vessel 21, the uniformity of the temperature increase in the solution 22 is also improved.