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1. 发明专利

JPS60127737A MANUFACTURE OF SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPS60127737A
公开(公告)日：1985-07-08
申请号：JP23577183
申请日：1983-12-14
申请人： NIPPON TELEGRAPH & TELEPHONE , MATSUSHITA ELECTRIC IND CO LTD
发明人： SANO KOUICHI , YAMAGUCHI TSUTOMU , NOYORI MASAHARU , KONDOU SHIYUUJI , WADA TETSUAKI
IPC分类号： H01L21/60
摘要： PURPOSE:To obtain a semiconductor device which has a low cost and high reliability by allowing a substrate formed with a wiring pattern to stand in a gas discharge atmosphere to form a modified layer on the surface of an electrode wiring pattern, thereby improving the corrosion resistance of metal electrode wirings. CONSTITUTION:After an electrode wiring pattern 1 is formed on a semiconductor substrate 1, the substrate is allowed to stand in a gas discharge atmosphere to form a modified layer 6 on the surface of the pattern 1, lead conductors are bonded onto the layer 6, at least part of the layer 6 is damaged at the bonding time, and the pattern 1 and the lead conductor are electrically connected. For example, a silicon oxide film 4 is formed on a silicon substrate 3, and the pattern 1 is formed thereon. Then, when a discharge is executed with oxygen used as the gas, a thin alumina film 6 is formed to include the side of the aluminum wiring pattern. Since this thin uniform alumina 6 is readily damaged by a mechanical impact at the wire bonding, the film 6 can be directly wire bonded without removing in advance.

2. 发明专利

JPS61276337A SEMICONDUCTOR INSPECTING DEVICE 失效
公开(公告)号：JPS61276337A
公开(公告)日：1986-12-06
申请号：JP11831085
申请日：1985-05-31
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SHIRAGASAWA TSUYOSHI , NOYORI MASAHARU
IPC分类号： G01R31/26 , H01L21/66
摘要： PURPOSE:To inspect without characteristic deterioration nor damage by mounting a light signal conductor on a supporting substrate, and applying a light signal from its output terminal to the arbitrary position on the surface of an LSI. CONSTITUTION:An optical fiber 2 is mounted on an independently movable base 1 in elevational, longitudinal and lateral directions, one end 3 is connected through a connector 4 with a laser light source 5, and a condensing lens 7 is mounted at the other terminal 6. A voltage source 9, an input signal source 10, and an output signal measuring instrument 11 are connected with an LSI 8. When a light is emitted to a semiconductor, electron-hole pairs are excited therein. Accordingly, a signal is input to the LSI interior by controlling the type, emitting light amount, emitting time and place of a light source to effectively evaluate the characteristics and to analyze a defect in combination with the conventional electric inspecting method.

3. 发明专利

JPS61267336A METHOD AND DEVICE FOR INSPECTING SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPS61267336A
公开(公告)日：1986-11-26
申请号：JP10882885
申请日：1985-05-21
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SHIRAGASAWA TSUYOSHI , NOYORI MASAHARU
IPC分类号： G01R31/26 , G01R31/308 , H01L21/66
摘要： PURPOSE:To display the erronenous operation part of a fault LSI in a difference of color by a method wherein the optical pumping current image obtainable by making an analysis of a fault LSI is compared with that obtainable by making an analysis of a nondefective LSI. CONSTITUTION:The laser output from a laser light source 1 is guided to an optical microscope 5 through a laser optical system 3 and an X-Y galvernomirror 4, is finely narrowed therein and is projected on the surface of an LSI 6. Test input data are memorized in the data memory of a word generator 10 and the data are impressed on the LSI. For converting the optical pumping current obtainable by scanning the laser beam on the surface of the LSI into an image, this inspection device is provided with a frame memory 12 consisting of three image surfaces of R, G and B and the convertion of the optical pumping current to an image is conducted by transferring the memory data of an optical pumping current memory 14 to this frame memory 12. The optical pumping current image obtainable by making an analysis of a nondefective LSI is written in the frame memory 12 having the image surface of G, the optical pumping current image obtainable by making an analysis of a fault LSI is written in the frame memory 12 having the image surface of R and both of the optical pumping current images are respectively displayed simultaneously on a TV system 13 with a different color.

4. 发明专利

JPS6131620B2 失效
公开(公告)号：JPS6131620B2
公开(公告)日：1986-07-21
申请号：JP7578678
申请日：1978-06-21
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： SHIRAGASAWA TSUYOSHI , NOYORI MASAHARU , FUJIMOTO HIROAKI
IPC分类号： H01L23/34 , H01L23/36

5. 发明专利

JPS6031398B2 失效
公开(公告)号：JPS6031398B2
公开(公告)日：1985-07-22
申请号：JP11119478
申请日：1978-09-08
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： NOYORI MASAHARU , FUJIMOTO HIROAKI , ISHIWATARI HIROMASA , YAMADA YOSHINORI
IPC分类号： H04R25/02 , G02C1/00 , G02C11/00 , G02C11/06

6. 发明专利

JPS5917975B2 JPS5917975B2 - 失效
公开(公告)号：JPS5917975B2
公开(公告)日：1984-04-24
申请号：JP7488779
申请日：1979-06-13
申请人： Matsushita Electric Ind Co Ltd
发明人： MATSUMURA RYUKICHI , TATEISHI FUMIKAZU , YAMAZOE SACHINORI , SHIBANO MASAYUKI , NOYORI MASAHARU
IPC分类号： H05K13/04 , H01L21/60
CPC分类号： H01L24/80 , H01L2224/75822 , H01L2924/01033
摘要： PURPOSE:To increase working efficiency by automating the selection of an IC and a resister etc., the feed to a bonding tool, a rough positioning and selection of the tool which fits to the chip size, and by having a manual operation for a precision positioning only. CONSTITUTION:Various data are input to a microcomputor by a data input operating section 31, a bonder is automatically operated, a desired tool is selected by rotating a rotary bonding tool 16 and a tray 12 having a prescribed chip 11 is moved below the tool moving the tray 12 to XY direction. Then the chip is adsorbed by lowering an axis 19 with a motor 22 and the prescribed location of a film substrate 9 is set right under the tool after the axis has been raised. Then the chip and the bonding position of the film substrate are placed so that they are reflected to a monitor television 30 through a transparent placing plate 10 and a microscope 28, a precision positioning is made by manual operation, and then a bonding is performed. As a result, manufacturing process is simplified and the number of defective products can be reduced.

7. 发明专利

JPS5823947B2 失效
公开(公告)号：JPS5823947B2
公开(公告)日：1983-05-18
申请号：JP747877
申请日：1977-01-25
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： NOYORI MASAHARU , FUJIMOTO HIROAKI
IPC分类号： H01L23/52 , H01L21/60 , H01L23/50

8. 发明专利

JPS5338403A METHOD OF ETCHING RESIN FILM 失效
公开(公告)号：JPS5338403A
公开(公告)日：1978-04-08
申请号：JP11354176
申请日：1976-09-20
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： NOYORI MASAHARU , FUJIMOTO HIROAKI
IPC分类号： C09K13/04 , B32B7/02 , B32B27/00 , B32B27/08 , C08J7/00 , C08J7/12 , G03F1/00 , G03F1/88 , H05K3/06

9. 发明专利

JPS6367358B2 失效
公开(公告)号：JPS6367358B2
公开(公告)日：1988-12-26
申请号：JP10636779
申请日：1979-08-20
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： FUJIMOTO HIROAKI , NOYORI MASAHARU
IPC分类号： H01L23/28 , H05K1/03 , H05K3/28

10. 发明专利

JPS6249669A SEMICONDUCTOR MEMORY DEVICE 失效
公开(公告)号：JPS6249669A
公开(公告)日：1987-03-04
申请号：JP19077485
申请日：1985-08-29
申请人： MATSUSHITA ELECTRIC IND CO LTD
发明人： NAKADA YOSHIRO , NOYORI MASAHARU
IPC分类号： H01L21/8247 , H01L29/78 , H01L29/788 , H01L29/792
摘要： PURPOSE:To obtain an EPROM having low voltage necessary for the write in of data by a method wherein the charge injection into a floating gate is performed using an MIS-type FET of submicron type having the channel length of 1mum or less. CONSTITUTION:A p-channel MOSFET 4, consisting of an outer gate 1 and a floating gate 2, and a submicron depression type p-channel MOSFET of the channel length of 0.8mum, consisting of the floating gate 2 and another outer gate 3, are formed on an n-type substrate 6 by performing an n-type double-layer polysilicon process. The floating gates 2 of the two p-channel MOSFET's 4 and 5 are connected on the same pattern. Through these procedures, the EPROM using the write-in by the enhancement type channel MISFET with which a data write-in operation can be performed in a short period with low voltage, can be accomplished.

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