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    • 6. 发明专利
    • PRODUCTION OF NONPLANE DIFFRACTION GRATING
    • JPS55133004A
    • 1980-10-16
    • JP4051779
    • 1979-04-04
    • NIPPON TELEGRAPH & TELEPHONE
    • FUJII YOUJIMINOWA JIYUNICHIROU
    • G02B5/18
    • PURPOSE:To readily and surely manufacture the nonplane diffraction grating by etching the silicon single crystal base body whose etching rate is aniostropic to the crystal faces to form the plane grating of the specified section and suction-affixing the same on a nonplane base body. CONSTITUTION:When masks 14 are provided at every required pitch of the plane 21 of the silicon single crystal base body 24 formed by the main plane 21, side plane 23, etc. When this base body is etched, the plane diffraction grating form body 28 whose section is of an inverted triangle shape because of the etching rate being anisotropic to the crystal planes and which is provided with the grooves 27... for grating of inner side faces 26L, 26R is formed. This grating form body 28 is placed on a base body 50 for supporting the nonplane diffraction grating set on the base table 40 connected to an exhaust means 42 and is bonded by means of vacuum suction and adhesive agent, whereby the nonplane diffraction grating is readily and surely manufactured without using any precision grating groove die, etc.