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1. 发明专利

JPH01312521A OPTICAL SYSTEM FOR VACUUM DEVICE 失效
公开(公告)号：JPH01312521A
公开(公告)日：1989-12-18
申请号：JP14494388
申请日：1988-06-13
申请人： NIPPON SHEET GLASS CO LTD
发明人： NISHI HISAMI , URA KATSUMI , NISHIHARA HIROSHI , TAKAOKA AKIO , HARUNA MASAMITSU
IPC分类号： G02B19/00 , B01J3/00 , G02B3/00 , G02B27/20 , G02B27/30 , H01J37/22
摘要： PURPOSE:To reduce the size and weight of the optical system by composing a collimator lens of one axially distributed index lens. CONSTITUTION:The single axially distributed index lens (ZGI lens) is used as the collimator lens 16. The ZGI lens is a lens given a uniform refractive index distribution which decreases gradually and linearly or nearly linearly in the direction of an optical axis 16B in a spherical lens base body while maximum at the center point 0 of a spherical lens surface 16A and is uniform in a plane 16C crossing the optical axis at right angles. Namely, the refracting index is maximum at the center point 0 on the plane 16C crossing the optical axis at right angles and decreases radially toward the periphery. Namely, the refractive index index whose refractive index contours 16D are concentric is obtained. A relay lens system 15 guides parallel light from the collimator lens 16 to an objective 17. Consequently, a small-sized unit is obtained in combination with a spot light source body 13 and high-accuracy and stable light beam irradiation is enabled.

2. 发明专利

JPH02200786A METHOD FOR REMOVING METALLIC FILM IN REAL TIME 失效
公开(公告)号：JPH02200786A
公开(公告)日：1990-08-09
申请号：JP2207889
申请日：1989-01-31
申请人： NIPPON SHEET GLASS CO LTD
发明人： IKEDA MAKOTO , NISHIHARA HIROSHI , HARUNA MASAMITSU
IPC分类号： G03F7/00 , C23F1/00 , H05K3/07
摘要： PURPOSE:To continuously execute exposing and developing of a photosensitive material and etching of a metallic film in the same treating liquid by depositing the metallic film on a substrate, providing the coated film of the photosensitive material thereon, immersing this substrate into the treating liquid, impressing an electric field thereto and irradiating the surface of the coated film with a light beam. CONSTITUTION:The metallic film 3 (Al, etc.) having a prescribed thickness is deposited by thermal vapor deposition on the surface 2 of the substrate 1 (LiNbO3, etc.) and a photoresist layer 4 is applied atop the film. This substrate 1 is immersed together with a platinum electrode 5 into an aq. soln. of about 1% sodium hydroxide which has the development effect on the photoresist layer 4 and can remove the metallic film 3 by an electrodecomposition effect. A DC voltage is then impressed between the metallic film 3 and the electrode 5 by using a power source 6 and the prescribed region is irradiated with the light beam 7 (He-Cd laser light, etc.) condensed by an objective lens 8, by which the photoresist layer 4 is exposed and the metallic film 3 is successively removed in a very small area unit. The removal of the metallic film 3 in real time is attained in this way with high accuracy.

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