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1. 发明专利

JPH11294456A HYDROSTATIC AIR BEARING LINEAR GUIDE DEVICE 失效
公开(公告)号：JPH11294456A
公开(公告)日：1999-10-26
申请号：JP9771598
申请日：1998-04-09
申请人： NIPPON SEIKO KK
发明人： SATO TOSHINORI
IPC分类号： B23Q5/28 , B23Q1/26 , B23Q1/38 , F16C32/06 , H01L21/68 , H02K41/02
摘要： PROBLEM TO BE SOLVED: To provide a hydrostatic air bearing linear guide device to suppress reduction of bearing performance against a temperature change even when a stage is increased in size and reduce a cost. SOLUTION: A pair of opposite parts 4 and 5 positioned opposite to each other with a given gap between the two sides of a guide member 2 protruded from a base bed 1 are arranged at the lower part of a stage 3 to form a pair of horizontal air bearings 6. A vertical air bearing 7 to support the vertical direction is arranged further outside in the direction of width than the position of each horizontal air bearing 6. A suction force generating means 9 to suck in a non-contact state the stage 3 toward the base bed 1 is arranged in the vicinity of each of the vertical air bearings 7.

2. 发明专利

JPH07301229A PERPENDICULAR DRIVING DEVICE FOR DIRECT ACTING GAS BEARING 失效
公开(公告)号：JPH07301229A
公开(公告)日：1995-11-14
申请号：JP9421994
申请日：1994-05-06
申请人： NIPPON SEIKO KK
发明人： SATO TOSHINORI
IPC分类号： F16C32/06 , F16C29/00
摘要： PURPOSE:To provide a perpendicular driving device for a direct acting gas bearing to excellently keep straightness of a movable body by eliminating a vibration influence of a feed screw device. CONSTITUTION:In a perpendicular driving device for a direct acting gas bearing in which a direct acting gas bearing 14 and its driving feed screw device 13 are perpendicularly juxtaposed, a direct acting guide device 15 is arranged to perpendicularly move and guide a nut 17 threaded with the screw shaft 16 of the feed screw device. The nut 17 and a movable body 18 guided by a fixed body 19 on the direct acting gas bearing and perpendicularly moved are connected to each other via an oscillating member 22.

3. 发明专利

JPH06160069A PRECISE POSITION DETERMINING APPARATUS 失效
公开(公告)号：JPH06160069A
公开(公告)日：1994-06-07
申请号：JP31007192
申请日：1992-11-19
申请人： NIPPON SEIKO KK
发明人： SATO TOSHINORI
IPC分类号： G01B21/00 , G01B21/02
摘要： PURPOSE:To provide a precise position determining apparatus, which can reduce Abbe errors and errors in thermal expansions by shortening the distance between a point, whose position is determined, and an actual scale reading position. CONSTITUTION:The position of a work, which is attached to a movable body 3 that is supported with a bearing 2 and moved on the straight line, is detected with a linear encoder 9 in a precise position determining device. In this device, a linear-encoder scale part 9A is arranged at the work 7. The position detection is performed at a position close to a point P, whose position is to be determined. Therefore, Abbe errors and the position measuring errors caused by the thermal expansion of the work 7 become small, and the position determining accuracy can be improved.

4. 发明专利

JPH05205412A POSITIONING DEVICE 失效
公开(公告)号：JPH05205412A
公开(公告)日：1993-08-13
申请号：JP1128592
申请日：1992-01-24
申请人： NIPPON SEIKO KK
发明人： KAWASAKI KATSUYOSHI , YOSHIDA MASASHI , SATO TOSHINORI , UEDA SHIZUO , TAKAHASHI ATSUSHI , MATSUYAMA NAOKI
IPC分类号： G11B21/02
摘要： PURPOSE:To provide a positioning device whose entire length in the moving direction is short. CONSTITUTION:A guide 1 is extended backward and floated and supported by a linear slide air bearing 2. Further, the rear end part of the guide 1 whose central part is notched forward in the top end direction and forming the notched part 1b of a U-shape consisiting of the folked legs of left and right, and a cylindrical coil 3a being the movable part of a voice coil motor 3 is fixed on both rear end surfaces of the U-shaped legs 1a being the rear end surface of the guide 1 through a flange 3d. The yoke 3b a the magnet 3c of the voice coil motor 3 are arranged so that the top part is inserted into the notched part 1b of the U-shape of the guide 1 and further the top part of the yoke 3b is inserted into the rear end opening part of the air bearing 2.

5. 发明专利

JPH03239810A PAD OF STATIC PRESSURE BEARING 失效
公开(公告)号：JPH03239810A
公开(公告)日：1991-10-25
申请号：JP3480990
申请日：1990-02-15
申请人： NIPPON SEIKO KK
发明人： OKAYA HIDEKI , SATO TOSHINORI
IPC分类号： F16C32/06
摘要： PURPOSE:To reduce a pressure drop at the central portion of a bearing surface by mounting a porous element through engaging a bolt, which is inserted into a through hole in a counterbore provided in the central portion of the bearing surface, with a female thread of a body, and hence by increasing the bearing area blowing out gas. CONSTITUTION:A recess part 12 is formed on a surface 11A of a body 11. A tapped through hole 20 is provided at the center of the bottom surface 12A of the concave part 12. In addition, supply passages 22 having female thread 21 for mounting supply joints are also provided on the bottom surface 12A. A porous element 13 to be fitted in the recess part 12 has supply cavities 14 on its opposite side 13B for communicating with the supply passage 22, and has a concave counterbore 23 and a through hole 24 at the central part of the outer surface of a bearing surface 15. The porous element 13 is fixed to the body 11 by means of a bolt 25. In this case, the head 25A of the bolt 25 and the porous element 13 are finished so as to be in flush in order to remove a concave portion of the bearing surface 15. Consequently, it is possible to reduce a pressure drop at the central portion of the bearing surface 15, and to increase its load capacity and bearing stiffness, and also to get its compactness.

6. 发明专利

JPH02297787A SLIDE DEVICE 失效
公开(公告)号：JPH02297787A
公开(公告)日：1990-12-10
申请号：JP3432889
申请日：1989-02-14
申请人： NIPPON SEIKO KK
发明人： SATO TOSHINORI , YOSHIDA MASASHI
IPC分类号： G11B7/26 , G11B5/84 , G11B25/04 , H01L21/68
摘要： PURPOSE:To reduce the deterioration of accuracy of the linear motion caused by the moment force of a feed screw and also to satisfactorily suppress the vibrations due to the balance revolution of a disk by adding the 1st and 2nd guide planes to a guide member in response to the 1st and 2nd planes to be guided respectively. CONSTITUTION:The outer surface of a slide member 10 is used as a plane to be guided, and a guide plane corresponding to the plane to be guided is formed on the inner surface of a guide member 1. Thus the member 10 is fitted at the inner side of the member 1 and supported there. Therefore a screw shaft 61 of a feed screw can be set inside the member 10, and the distance between the center of the member 10 and the shaft 61 is reduced. As a result, the moment force applied to the member 10 is reduced when the shaft 61 is revolved. Then the high accuracy is kept for the linear motion of the member 10. Furthermore the lower part of the member 10 is projected over its side part with the upper part of the member 10 used as a horizontal plane to be guided. Thus the distance is reduced between the disk attachment position and the horizontal plane to be guided of the member 10. As a result, the disk vibrations can be satisfactorily suppressed.

7. 发明专利

JPS63185713A AIR SLIDE 失效
公开(公告)号：JPS63185713A
公开(公告)日：1988-08-01
申请号：JP1686887
申请日：1987-01-27
申请人： NIPPON SEIKO KK
发明人： SATO TOSHINORI
IPC分类号： B65G25/06
摘要： PURPOSE:To improve positioning accuracy by equipping a static pressure type gas coupling between a guide member, mounted in the inclined direction to a slide shaft made rectangular to a screw shaft, and a nut screw fitted to the screw shaft, on an air slide for a feeder and so on. CONSTITUTION:Gas is sent into a supply port 24 of a static pressure type gas coupling 22 and blown out from exhaust nozzles 26a, 26b in travelling faces 23a, 23b for forming gas film between the faces and guide faces 18a, 19a of guide members 18, 19 on an air slide body 16. In this condition, a screw shaft 12 is made to rotate and the static pressure type gas coupling 22 is made to move along the screw shaft 12 through a nut 20. Force in y-direction of a slide shaft 14 thus acts to guide faces 18a, 19a of guide members 18, 19, and the air slide body 16 moves in the y-direction. As the velocity ratio of x, y-direction in this case is determined by the inclination theta of guide face, positioning accuracy can be improved by setting the suitable inclination angle theta.

8. 发明专利

JPH11344585A BIAXIAL MOVING DEVICE 失效
公开(公告)号：JPH11344585A
公开(公告)日：1999-12-14
申请号：JP26634998
申请日：1998-09-21
申请人： NIPPON SEIKO KK
发明人： SATO TOSHINORI , AKIYAMA MASARU
IPC分类号： B23Q1/00 , B23Q1/26 , B23Q1/38 , B23Q1/40 , B23Q1/44 , B23Q1/62 , G12B5/00 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a biaxial moving device which is high in straightness and rigidity, excellent in motion reproducibility, and inexpensive. SOLUTION: In biaxial moving device provided with a moving body 13 in X-direction and a moving body 20 in Y-direction, one moving body 13 is supported on a base body 10 through a roller guide bearing LG, and the other moving body 20 is supported on the base body 10 through a static gas bearing 22. The load on the moving body 20 is not loaded on the moving body 13 thereby, or no eccentric load is applied to the moving body 13 while the moving body 20 is moved to obtain the high straightness, high rigidity and high reproducibility. A magnetic attraction part in the vertical direction is provided between surfaces opposite to each other of the moving body 13 and the moving body 20, and the high rigidity is obtained by forming the base body 10 of a ceramic to prevent the seizure, and the degradation in accuracy of the bearing motion due to the secular change and plastic change of the base body.

9. 发明专利

JPH11210748A HYDROSTATIC BEARING DEVICE 失效
公开(公告)号：JPH11210748A
公开(公告)日：1999-08-03
申请号：JP2161298
申请日：1998-01-20
申请人： NIPPON SEIKO KK
发明人： SATO TOSHINORI
IPC分类号： F16C39/06 , F16C32/00 , F16C32/06
摘要： PROBLEM TO BE SOLVED: To provide a hydrostatic bearing device which can be miniaturized and made lightweight, restrain the generation of shearing stresses, and prevent the adhesion of particles of a magnetic substance, etc., and which is seldom affected by external moments. SOLUTION: An annular porous body 14 ejecting compressed air is placed on the outer periphery of the opposite surface of an annular housing 12 to a base 11, and a permanent magnet 18 producing a magnetic attracting force is placed on the inner periphery of the porous body 14 on the opposite surface. Thereby the compressed air is ejected to the base 11 to support the housing 12 without contact and to attract the housing 12 with the magnetic attracting force to bring the housing 12 close to the base 11 made of a magnetic substance. Further, the porous body 14 is made of a nonmagnetic substance.

10. 发明专利

JPH1026139A DIRECT ACTIVE GAS BEARING 失效
公开(公告)号：JPH1026139A
公开(公告)日：1998-01-27
申请号：JP17957896
申请日：1996-07-09
申请人： NIPPON SEIKO KK
发明人： SATO TOSHINORI
IPC分类号： F16C32/06
摘要： PROBLEM TO BE SOLVED: To easily correct the straightness of a fixed shaft without any machine work and hand lap. SOLUTION: One bearing surface 3 provided on a fixed shaft 1 fixedly supported through a support bed 7 by a bed 8 on both ends is opposed through a bearing gap to the other bearing surface 4 provided on a movable body 2. In a direct acting gas bearing to jet gas into the bearing gap through an inlet port 18 provided in the movable body 2, at least one end of both axial ends of the fixed shaft 1 is provided with a mechanism 14 to adjust the straightness of the fixed shaft.

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