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    • 5. 发明专利
    • OBSERVATION METHOD OF TRANSMISSION ELECTRON MICROSCOPE AND HOLDING JIG
    • JP2000329664A
    • 2000-11-30
    • JP13675499
    • 1999-05-18
    • NIPPON KOKAN KK
    • HAMADA ETSUO
    • G01N1/32G01N1/28
    • PROBLEM TO BE SOLVED: To obtain an observation method of a transmission electron microscope whereby an observation sample can be TEM observed without disturbing a magnetic field of an electromagnetic lens even when the observation sample is a magnetic material, and obtain a holding jig which can stably hold the sample. SOLUTION: When a magnetic material is used as a sample for TEM, the sample 1 of the magnetic material is processed by the FIB method to a volume of not larger than 0.025 mm3. The sample 1 of the volume has a lateral width of 2 mm or smaller. A sample holding ring 2 has a ring width 2b whereby the sample 1 of the lateral width of 2 mm or smaller can be held to the vicinity of a center part of the ring 2. The sample 1 is held to the vicinity of the center part of the ring 2, to which a TEM observation is executed. A magnetic field of a TEM electromagnetic lens will not be disturbed by the other part than an observation area of the sample 1, so that an efficiency of the TEM observation and of a TEM-EDX analysis is greatly improved.