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    • 2. 发明专利
    • ELECTROMAGNETIC WAVE HEATING DEVICE
    • JPH09306662A
    • 1997-11-28
    • JP14100396
    • 1996-05-10
    • NIPPON ELECTRIC INDNEC CORP
    • WATANABE MASAKITAKEUCHI YASUOMURAI YASUMASAHATAKEYAMA KENICHITSUKAGOSHI TSUNEO
    • H05B6/68
    • PROBLEM TO BE SOLVED: To detect the finish of a heat treatment work and automatically stop the work in the batch process in which electromagnetic waves are irradiated to a material to be heated and the materials are heated as a batch, and automatically stop the work after the heat treatment work of the final part of the material to be heated is finished in the continuous process, and efficiently conduct heat treatment work of a large volume of materials to be heated. SOLUTION: At least a thermometer 4 detecting the temperature of a heating part, a moisture sensor 5 detecting the moisture of the heating part, a power meter 6 in which electromagnetic waves containing microwaves emitted from a magnetron 1 are made incident and power corresponding to the incident electromagnetic waves is outputted, and a current transformer 7 detecting the reflecting power of the magnetron 1 are installed. A control part 3 in which when a detecting signal outputted from at least either of the thermometer 4, the moisture sensor 5, the power meter 6, and the current transformer 7 is inputted, the moisture content contained in kitchen refuse 9 is detected from the signal, and power supply to a magnetron power source 2 is automatically controlled and/or stopped is installed.
    • 9. 发明专利
    • SEMICONDUCTOR MANUFACTURING EQUIPMENT
    • JPH0443630A
    • 1992-02-13
    • JP15218190
    • 1990-06-11
    • NEC CORP
    • WATANABE MASAKI
    • G03F7/16B05D1/02B05D1/40H01L21/027
    • PURPOSE:To prevent the evaporation of volatile solvent in coating liquid, and keep the viscosity of the coating liquid constant, by making nitrogen gas flow in the solvent atmosphere of coating liquid, mixing the gas with the saturation vapor of the solvent, introducing said gas into a coating liquid vessel for spin coating, and accommodating the coating liquid in the saturation vapor atmosphere of the solvent. CONSTITUTION:When pressurized nitrogen gas supplied from a wipe 201 passes a solvent vessel 203, said gas is sent out to a sending pipe 202, in the state containing the vapor of highly volatile solvent. The closed vessel 203 containing the solvent vapor is controlled at a temperature slightly higher than the normal temperature by using a heater 204, and the vapor generation of the solvent 205 is accelerated. The pressurized nitrogen gas containing the solvent vapor is cooled while it passes a trap 206, and forms the saturation state of solvent vapor. The pressurized nitrogen gas 208 containing the solvent vapor formed in the above manner is introduced in a closed coating liquid vessel 212. Thereby the quantity of solvent can be controlled to be always constant during coating period.