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1. 发明专利

JPH08309648A POLISHING SYSTEM 失效
公开(公告)号：JPH08309648A
公开(公告)日：1996-11-26
申请号：JP11333795
申请日：1995-05-11
申请人： NIKON CORP
发明人： TAKEUCHI ISAMU , KOYAMA TORU , SHIODA TAMOTSU
IPC分类号： B24B51/00 , B24B1/00 , B24B9/14
摘要： PURPOSE: To enhance efficiency of a process of polishing work and to improve accuracy of polishing work in a polishing system provided with a shape measuring device and a polishing device. CONSTITUTION: This polishing system is constructed by connecting a shape measuring device 1, polishing device 2 and an information processor device 3 by a communication line 4. The shape measuring device 1 and the polishing device 2 are provided with respectively detecting parts 12, 20 of detecting a mark D in the periphery of an optical element C. In each device 1, 2, respectively in the case of mounting the optical element C, by moving it in a position such as detecting the mark D by the detecting parts 12, 20, positioning the optical element C is performed. In the polishing device 2, a surface of the optical element C is polished while a polishing tool 10 is moved along a relatively equal track relating to a probe 22 of the shape measuring device 1 and the optical element.

2. 发明专利

JPH11210109A AIR CONDITIONER, BULKHEAD AND EXPOSING DEVICE 失效
公开(公告)号：JPH11210109A
公开(公告)日：1999-08-03
申请号：JP1588498
申请日：1998-01-28
申请人： NIKON CORP , ASAHI KOGYOSHA
发明人： AKIYAMA KYOICHI , KO MOTONORI , OGAWA MAKOTO , HACHISUGA MASARU , OZAKI TAKASHI , OGAWA KASUKE , TAKEUCHI ISAMU
IPC分类号： E04B1/86 , G03F7/20 , G10K11/16 , G10K11/168 , G10K11/172
摘要： PROBLEM TO BE SOLVED: To prevent noise by providing a bulkhead having a first plate arranged on the space side which is air-conditioned by an air conditioner and a second plate arranged on the space side different from that space, and providing an intermediate material having many cells between the first plate and the second plate. SOLUTION: When ultra-precise machining or measurement is conducted by a machine tool or a measuring instrument requiring high precision in a chamber where internal air is kept clean at a constant temperature, a bulkhead shielding low-frequency noise is used for the bulkhead of the chamber. A ceramic honeycomb structural material 18 serving as an intermediate material made of a cell-like material with the prescribed shape is sandwiched by two steel sheets or aluminum sheets 16 serving as a first plate and a second plate to form this bulkhead. The honeycomb structural material 18 is an aggregate of cells having a hexagonal cross section, and the cells are arranged so that their hollow faces are directed to the first plate and the second plate, thereby the low-frequency noise infiltrating into the chamber from the outside can be suppressed.

3. 发明专利

JPH08141899A POLISHING DEVICE 失效
公开(公告)号：JPH08141899A
公开(公告)日：1996-06-04
申请号：JP28308994
申请日：1994-11-17
申请人： NIKON CORP
发明人： KOYAMA TORU , TAKEUCHI ISAMU
IPC分类号： B24B13/06
摘要： PURPOSE: To provide a polishing device, which can constantly hold a load to be polished even in the case where inclination of a polishing head is changed. CONSTITUTION: An angle detecting unit 6 detects the angle θ of inclination of a polishing head 1. A load control unit 2 changes the output, which is generated by a load generating means 2, by W.g.(1--cos θ). W.g means the weight of movable parts (4, 5) positioned in the lower side of a load detecting unit 3 in a mechanism. Output fluctuation is controlled by performing the feed back control for detecting the force applied through an output shaft of the load generating means 2, which is detected by the load detecting means 3, and for inputting a result of the detection.

4. 发明专利

JPH1039195A DEVICE FOR INSPECTING OPERATION OF OPTICAL SYSTEM EQUIPMENT, AND DEVICE FOR INSPECTING FOCUSING FUNCTION OF AUTOFOCUSING CAMERA 失效
公开(公告)号：JPH1039195A
公开(公告)日：1998-02-13
申请号：JP19438996
申请日：1996-07-24
申请人： NIKON CORP
发明人： TAKEUCHI ISAMU , NAKAMURA ETSURO
IPC分类号： G03B13/36 , G02B7/28 , G03B43/00
摘要： PROBLEM TO BE SOLVED: To provide a device for inspecting an automatic focusing function capable of accurately performing the inspection of the operation of the focusing mechanism of an AF camera in a fixed environment such as indoors. SOLUTION: The device 100 for inspecting the automatic focusing function of the AF single lens reflex camera 11 is equipped with an AF mechanism optically detecting the image S of a chart 41 and a camera lens 12 operated in accordance with the position of the detected image S, and it is constituted of a base part 20 on which the camera 11 is mounted, a lens 31 for measuring which is arranged between the chart 41 and the lens 11, and a chart shaft stage 42 moving the chart 41 between the focus (f) of the lens 31 and the stage 42. The operated amount of the lens 12 in accordance with the moving amount of the chart 41 is detected by a rotational amount detector 51 detecting the rotational amount of a distance ring.

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