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    • 2. 发明专利
    • Ultrathin film manufacturing apparatus
    • 超薄膜制造设备
    • JP2006122788A
    • 2006-05-18
    • JP2004312975
    • 2004-10-27
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • AKITA YASUHIRONIIMA SATOSHIHORI NOBUYUKISEKI TAKAHIRONAGANO SHUSAKU
    • B05C3/132B01J19/00
    • PROBLEM TO BE SOLVED: To provide an ultrathin film manufacturing apparatus capable of producing a ultrathin film high in thickness precision in large quantities. SOLUTION: The ultrathin film manufacturing apparatus 1 is equipped with a container 2 for storing a liquid, a supply means 3 for supplying a ultrathin film raw material into the container 2, a film compression means 4 for compressing the water surface film developed on the liquid surface of the container 2 by the supply means 3 to form a ultrathin film F and a film forming means 6 for transferring the ultrathin film F formed by the film compression means 4 to a substrate 5 moving in the direction crossing the liquid surface, and also equipped with a surface pressure measuring means for measuring the surface pressure of the water surface film formed on the liquid surface. The film compression means 4 has a plurality of compression members 21a and 21b for moving while coming into contact with the liquid surface to compress the water surface film formed on the liquid surface and a drive part for individually driving a plurality of the compression members 21a and 21b and a plurality of the compression members 21a and 21b are successively driven toward a substrate direction and individually controlled in driving on the basis of the output of the surface pressure measuring means 24. COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:提供一种能够大量生产高精度的超薄膜的超薄膜制造装置。 解决方案:超薄膜制造装置1配备有用于储存液体的容器2,用于将超薄膜原料供给到容器2中的供给装置3,用于压缩显影的水面膜的膜压缩装置4 通过供给装置3在容器2的液面上形成超薄膜F,以及用于将由膜压缩装置4形成的超薄膜F转移到沿与液面交叉的方向移动的基板5的膜形成装置6 并且还配备有用于测量形成在液面上的水面膜的表面压力的表面压力测量装置。 薄膜压缩装置4具有多个压缩构件21a和21b,用于在与液面接触的同时移动,以压缩形成在液面上的水面膜;驱动部,用于分别驱动多个压缩构件21a和 21b,并且多个压缩构件21a和21b被连续地朝向基板方向驱动,并且基于表面压力测量装置24的输出单独地控制。[C]版权所有(C)2006,JPO&NCIPI