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1. 发明专利

JP2004156518A Turbo-molecular pump and its rotor 有权
公开(公告)号：JP2004156518A
公开(公告)日：2004-06-03
申请号：JP2002322332
申请日：2002-11-06
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： OKAMURA TOMOAKI , TOO ATSUSHI
IPC分类号： F04D29/053 , F04D19/04 , F04D29/04
CPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo-molecular pump 1 which has sufficient absorption capability for kinetic energy emitted by a moving blade body 4 without bolting-out of the moving blade body and safety for the peripheral apparatuses even if the moving blade body 4 is broken down caused by an excessive vibration and an internal abnormal state.
SOLUTION: A projecting part 4C of an approximately cylindrical shape is provided on the central part of the moving blade body 4, and a recessed part 6D such as to fit to the projecting part 4C is provided on a shaft part 6. The main shaft joining structure of the moving blade body 4 forms a rotor 2 with joining the moving blade 4 and the shaft part 6 by fitting the projecting part 4C and the recessed part 6D. In the constitution of the structure, the ratio of the outside diameter of the projecting part 4C relative to the outside diameter of the shaft part 6 is set to be not less than 0.4, and the ratio of the axial length of the projecting part 4C relative to the outside diameter of the projecting part 4C is set to be not less than 0.5.
COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2004076708A Vacuum pump 有权
公开(公告)号：JP2004076708A
公开(公告)日：2004-03-11
申请号：JP2002242099
申请日：2002-08-22
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： OKAMURA TOMOAKI , YOSHIMUNE TORU
IPC分类号： F04D19/04 , F04D29/52 , F04D29/70
摘要： PROBLEM TO BE SOLVED: To prevent the accumulation of a solid matter in a part particularly causing the damage or breakage of a pump mechanism without being influenced by a cooling for protection of a rotor blade made of aluminum alloy or the like.
SOLUTION: This vacuum pump has the pump mechanism 30 having a rotor 31 with the rotor blade 32 and a static body 24 with a stationary blade 24, the mechanism being arranged within a casing 21 having an intake port 22 and exhaust port 23 for gas, so that the gas sucked from the intake port 22 is discharged from the exhaust port 23. This pump further comprises a trap part 27 communicating with a gas passage in the casing 21 extending from the intake port 22 to the exhaust port 23 and having a temperature lower than the sublimation temperature of the gas, so that the gas is actively solidified in the trap 27.
COPYRIGHT: (C)2004,JPO

3. 发明专利

JP2005030209A Vacuum pump 有权
标题翻译：真空泵
公开(公告)号：JP2005030209A
公开(公告)日：2005-02-03
申请号：JP2003192595
申请日：2003-07-07
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： OKAMURA TOMOAKI
IPC分类号： F04D19/04
CPC分类号： F04D19/044 , F04D17/168
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump capable of differentially discharging gas even when pressure at an auxiliary suction port is a relatively high pressure value such as several Torr's without increasing axial size. SOLUTION: This vacuum pump is provided with a turbo molecular pump stage 5 the intake side of which is connected to a main suction port 17, a Siegbahn stage 7 positioned on the exhaust side of the turbo molecular pump stage 5, in which thread grooves are radially formed in a fixed disc 31 facing an end surface of a rotary disc 23, an axial thread groove pump stage 9 positioned on the exhaust side of the Siegbahn stage 7, in which thread grooves are axially formed in a static side wall part 33 facing a circumferential surface of a rotary cylinder part 25, and the auxiliary suction port 41 provided between the Siegbahn stage 7 and the axial thread groove pump stage 9. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：即使在辅助吸入口处的压力是相对较高的压力值（例如几个Torr）而不增加轴向尺寸的情况下，提供一种能够差异地排出气体的真空泵。
解决方案：该真空泵设有涡轮分子泵级5，其进气侧连接到主吸入口17，位于涡轮分子泵级5的排气侧的Siegbahn级7，其中螺纹槽径向地形成在面向旋转盘23的端面的固定盘31中，位于锡格巴赫级7的排气侧的轴向螺纹槽泵级9，其中螺纹槽轴向地形成在静态侧壁部分33面向旋转圆筒部分25的圆周表面，以及设置在锡格巴赫阶段7和轴向螺纹槽泵级9之间的辅助抽吸口41.版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2004197639A Rotary machine 审中-公开
标题翻译：旋转机
公开(公告)号：JP2004197639A
公开(公告)日：2004-07-15
申请号：JP2002366486
申请日：2002-12-18
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： OKAMURA TOMOAKI
IPC分类号： F04D29/04 , F04D19/04 , F04D29/046
摘要： PROBLEM TO BE SOLVED: To provide a rotary machine wherein wear caused on the sliding face is reduced, vibration of a rotor supported by bearings and noises consequent upon the vibration are reduced.
SOLUTION: The rotary machine 1 includes a rotor 2 rotating about an axis of rotation, a motor 3 for rotating the rotor 2, bearings 4 supporting the rotor 2, holders 5, 6 holding the bearings 4, and an elastic body 9 provided in the manner of being capable of expansion in the direction of the axis of rotation so as to axially preload the holders 5, 6. The rotary machine 1 is characterized by that a plurality of sliding sheets 10 are placed between the bearings 4 supporting the rotation shaft and a holer 6 holding the bearing 4.
COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种其中在滑动面上产生的磨损减小的旋转机械，减少了由轴承支撑的转子和由振动引起的噪声的振动。旋转机1包括绕旋转轴线旋转的转子2，用于使转子2旋转的马达3，支撑转子2的轴承4，保持轴承4的保持架5,6以及弹性体9 以能够沿旋转轴线的方向膨胀的方式设置，以便轴向地预紧保持器5,6。旋转机1的特征在于，多个滑动片10被放置在支撑旋转轴和保持轴承4的滚轴6.版权所有（C）2004，JPO＆NCIPI

5. 发明专利

JP2003065285A Pump member, turbo molecular pump and surface finished layer 审中-公开
标题翻译： PUMP会员，涡轮分子泵和表面处理层
公开(公告)号：JP2003065285A
公开(公告)日：2003-03-05
申请号：JP2001257887
申请日：2001-08-28
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： YASUI TOYOAKI , YAMADA YOSHIKAZU , OKAMURA TOMOAKI
IPC分类号： F04D29/02 , C23C18/31 , C23C18/32 , C23C26/00 , C23C28/00 , C25D13/06 , F04D19/04
CPC分类号： C23C28/00
摘要： PROBLEM TO BE SOLVED: To provide a pump member provided with both corrosion resistance and high radiation rate and a turbo molecular pump with this pump member applied as a rotor and to provide a surface finished layer which can generally give the above performances to optional members.
SOLUTION: On the surface of the rotor which is a component of the turbo molecular pump, the surface finished layer S is formed. This surface finished layer S is made of a first layer which is a metal plated layer S1 made of Ni-P alloy formed by electroless plating and a second layer which is a resin layer S2 formed by electropainting a fluorocarbon resin. An intermediate layer SM made of amorphous organic metal coating is provided between the metal plated layer S1 and the resin layer S2. By this constitution, corrosion resistance is improved by the metal plated layer S1 and the resin layer S2, and heat radiation by the resin layer S2, respectively.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：为了提供具有耐腐蚀性和高辐射率的泵构件，以及涡轮分子泵，该泵构件用作转子并提供通常可以将任何构件赋予上述性能的表面精加工层。解决方案：在作为涡轮分子泵的部件的转子的表面上形成表面处理层S。该表面处理层S由作为由无电镀形成的Ni-P合金制成的金属镀层S1的第一层和作为通过电碳酸化树脂形成的树脂层S2的第二层制成。在金属镀层S1和树脂层S2之间设置由无定形有机金属涂层制成的中间层SM。通过这种结构，通过金属镀层S1和树脂层S2以及树脂层S2的散热分别提高了耐腐蚀性。

6. 发明专利

JP2005240619A Turbo-molecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：JP2005240619A
公开(公告)日：2005-09-08
申请号：JP2004049355
申请日：2004-02-25
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： OKAMURA TOMOAKI , TOO ATSUSHI
IPC分类号： F04D29/056 , F04D19/04 , F04D29/04 , F04D29/05 , F04D29/058
摘要： PROBLEM TO BE SOLVED: To provide a turbo-molecular pump for optimizing the capability of a thrust magnetic bearing by setting a gap to a storage space depending on the inclination of a thrust disc.
SOLUTION: The turbo-molecular pump 1 comprises a rotor 15 to be rotationally driven by a motor 37, having a thrust disc 23 at the end, a plurality of radial magnetic bearings 29, 31 for holding the rotor 15 at a center position in the rotating direction, a lower split casing 9 having the storage space 25 storing the thrust disc 23, and the thrust magnetic bearing 27 provided in the storage space 25 for holding the thrust disc 23 and holding the rotor 15 in the axial direction. A gap between the storage space 25 and the thrust disc 23 in an outer peripheral portion 43 of the thrust disc 23 is larger than a gap between the storage space 25 and the thrust disc 23 in an inner peripheral portion 41 of the thrust disc 23.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种涡轮分子泵，用于通过根据推力盘的倾斜度将间隙设置到存储空间来优化推力磁轴承的能力。解决方案：涡轮分子泵1包括由马达37旋转驱动的转子15，其在端部具有推力盘23，多个用于将转子15保持在中心的径向磁轴承29,31 位于旋转方向的位置，具有存储推力盘23的存储空间25的下部分割壳体9和设置在存储空间25中的推力磁轴承27，用于保持推力盘23并沿轴向保持转子15。止推盘23的外周部分43中的存储空间25和止推盘23之间的间隙大于推力盘23的内周部分41中的存储空间25和止推盘23之间的间隙。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2003278688A Rotary vacuum pump and its manufacturing method 有权
标题翻译：旋转真空泵及其制造方法
公开(公告)号：JP2003278688A
公开(公告)日：2003-10-02
申请号：JP2002076134
申请日：2002-03-19
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： OKAMURA TOMOAKI , IWASAKI SHUGO
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To use a high-temperature resistance material as a rotor material for expanding a usable temperature range to comply with the increase of an exhaust flow rate.
SOLUTION: A rotor is arranged while a predetermined minute clearance is secured between a stationary wall on the casing side and it. When the rotor is turned at a high speed, air is evacuated by this rotary vacuum pump. In this manufacturing method for the rotary vacuum pump, an initial creep strain history progressing at a rate higher than that for steady creep strain is previously applied to the rotor formed of an Al-Fe group quenched aluminum alloy before assembly with the stationary wall. Then, the stationary wall, to which a reduced dimension equivalent to the initial creep strain is given previously, is combined with the rotor, and the predetermined minute clearance is secured.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：使用高温电阻材料作为转子材料，以扩大可使用的温度范围以符合排气流量的增加。解决方案：在壳体侧的固定壁与其之间固定预定的微小间隙的同时设置转子。当转子高速转动时，通过该旋转式真空泵抽空。在这种旋转式真空泵的制造方法中，在与固定壁组装之前，预先对由Al-Fe组淬火的铝合金形成的转子施加以比稳定蠕变应变高的速度进行的初始蠕变应变历史。然后，预先给出相当于初始蠕变应变的减小尺寸的固定壁与转子组合，并确保预定的微小间隙。版权所有（C）2004，JPO

8. 发明专利

JP2007262581A Surface treatment layer for turbo-molecular pump 有权
标题翻译：涡轮分子泵的表面处理层
公开(公告)号：JP2007262581A
公开(公告)日：2007-10-11
申请号：JP2007120846
申请日：2007-05-01
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： OKAMURA TOMOAKI , YASUI TOYOAKI
IPC分类号： C23C18/52 , C23C18/32 , C23C22/34 , F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a surface treatment layer for a turbo-molecular pump which is high in plasma-resistance as well as corrosion-resistance and thermal emission, and furthermore, can be realized at a low cost. SOLUTION: The surface treatment layer formed in an inner part of the turbo-molecular pump is a double layer 24 comprising an electroless Ni plating layer 22 and an electroless black color Ni plating layer 23 which are formed on the surface of a base material 21 comprising aluminum or an aluminum alloy. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供耐等离子体性以及耐腐蚀性和热发射性的涡轮分子泵的表面处理层，此外，可以以低成本实现。解决方案：形成在涡轮分子泵的内部的表面处理层是双层24，其包括形成在基材的表面上的无电Ni镀层22和无电镀黑色Ni镀层23 材料21包括铝或铝合金。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2004116354A Turbo molecular pump 审中-公开
标题翻译：涡轮分子泵
公开(公告)号：JP2004116354A
公开(公告)日：2004-04-15
申请号：JP2002279083
申请日：2002-09-25
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： OKAMURA TOMOAKI , TOO ATSUSHI
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo molecular pump capable of realizing high back-pressure by a rotor with light weight and high rigidity. SOLUTION: The rotor 4 having an outer surface on which a rotor blade 5 is radially disposed and fixed, to a rotor shaft 4a is provided with a boss part 14 of a hollow and approximately conical shape having inner and outer surfaces expanded in diameter toward an exhaust port side. COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2006233978A Turbo-molecular pump 审中-公开
标题翻译：涡轮分子泵
公开(公告)号：JP2006233978A
公开(公告)日：2006-09-07
申请号：JP2006156642
申请日：2006-06-05
申请人： Mitsubishi Heavy Ind Ltd , 三菱重工業株式会社
发明人： KOBAYASHI YOSHIO , YASUI TOYOAKI , OKAMURA TOMOAKI
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a turbo-molecular pump applied with a rotor having both performance of corrosion resistance and a high radiation rate.
SOLUTION: The turbo-molecular pump is characterized by the rotor having a nickel layer which is formed by electroless plating on a substrate composed of an aluminum alloy and an epoxy system resin layer which is formed by cation electrodeposition on the nickel layer.
COPYRIGHT: (C)2006,JPO&NCIPI

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