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1. 发明专利

JP2007220733A Mask for x-ray lithography, manufacturing method thereof, manufacturing method of light reflection prevention structure using the same, forming body using light reflection prevention structure, and manufacturing method of glass object to be formed or resin object to be formed 有权
标题翻译：用于X射线光刻的掩模，其制造方法，使用光反射防止结构的光反射防止结构的制造方法，使用光反射预防结构形成体，以及要形成的玻璃对象或树脂的制造方法
公开(公告)号：JP2007220733A
公开(公告)日：2007-08-30
申请号：JP2006036771
申请日：2006-02-14
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： TAMURA TAKAMASA , UMETANI MAKOTO
IPC分类号： H01L21/027 , G02B1/11 , G02B1/118 , G03F1/22 , G03F7/20
摘要： PROBLEM TO BE SOLVED: To provide a mask for X-ray lithography that can be manufactured inexpensively and easily.
SOLUTION: The mask 1 for X-ray lithography is used to manufacture the light reflection prevention structure having a light reflection prevention structure by X-ray lithography. The mask 1 for X-ray lithography has a first substrate 10 for transmitting X rays, and an X-ray shielding layer 2. The X-ray shielding layer 2 comprises a plurality of X-ray shielding granular bodies 11 for shielding X-rays while being arranged along the direction of the plate surface on the first substrate 10. The plurality of X-ray shielding granular bodies 11 are arranged at a pitch that is not larger than the wavelength of light where reflection is suppressed by the light reflection prevention structure.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供可以廉价且容易地制造的用于X射线光刻的掩模。解决方案：用于X射线光刻的掩模1用于通过X射线光刻制造具有防光结构的光反射防止结构。用于X射线光刻的掩模1具有用于透射X射线的第一基板10和X射线屏蔽层2.X射线屏蔽层2包括用于屏蔽X射线的多个X射线屏蔽粒状体11 同时沿着第一基板10上的板表面的方向布置。多个X射线屏蔽颗粒体11以不大于光反射防止结构抑制反射的光的波长的间距排列。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2006317807A Member equipped with antireflection structure and manufacturing method of the member 审中-公开
标题翻译：配有反应结构和会员制造方法的会员
公开(公告)号：JP2006317807A
公开(公告)日：2006-11-24
申请号：JP2005141861
申请日：2005-05-13
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： YAMADA KAZUHIRO , UMETANI MAKOTO , TANAKA YASUHIRO , YAMAGATA MICHIHIRO , TAMURA TAKAMASA
IPC分类号： G02B1/11 , C03B11/00 , C03B20/00 , C03C15/00 , C25D1/00 , C25D1/10 , G03F7/20
CPC分类号： C03B11/082 , C03B11/086 , C03B40/02 , C03B2215/10 , C03B2215/12 , C03B2215/17 , C03B2215/412 , Y02P40/57
摘要： PROBLEM TO BE SOLVED: To provide the manufacturing method of a lens element having an antireflection structure which can be manufactured also on a curved surface with high precision and which has good and uniform anti-reflection effect. SOLUTION: The member is equipped with the antireflection structure on a surface where the reflection of the incident light is to be suppressed. The antireflection structure has a conical shape with a polygonal bottom and ≥1 aspect ratio as a structural unit. Respective structural units are arranged in an array state at a pitch equal to or below the wavelength of light whose reflection is to be suppressed so that bottom surfaces do not share mutual sides but share mutual vertexes. This member is manufactured by a manufacturing method comprising a preparing process of preparing one of a substrate which is made of a material photosensitive to X ray or a substrate on the surface of which a layer made of an X ray resist photosensitive to X ray is formed, an exposing process of forming X ray intensity distribution corresponding to an X ray mask pattern by exposing the substrate to X ray via an X ray mask, and a developing process of forming the antireflection structure by developing the exposed substrate. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供具有抗反射结构的透镜元件的制造方法，该透镜元件也可以高精度地制造在弯曲表面上，并且具有良好和均匀的抗反射效果。解决方案：该部件在要抑制入射光的反射的表面上配备有抗反射结构。抗反射结构具有作为结构单元的具有多边形底部和≥1长宽比的圆锥形形状。相应的结构单元以等于或低于其反射被抑制的光的波长的间距排列成阵列状态，使得底表面不共享相互的边，而是共享相互的顶点。该构件通过制造方法制造，该方法包括制备由对X射线感光的材料制成的衬底之一的制备方法或其表面上形成由X射线感光的X射线抗蚀剂制成的层的衬底通过X射线掩模将基板曝光于X射线，形成对应于X射线掩模图案的X射线强度分布的曝光处理，以及通过使曝光的基板显影来形成防反射结构的显影处理。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2006171229A Nonreflective structure and optical element with nonreflective structure, and manufacturing method thereof and mask used for same 审中-公开
标题翻译：具有非选择性结构的非选择性结构和光学元件及其制造方法及其用途
公开(公告)号：JP2006171229A
公开(公告)日：2006-06-29
申请号：JP2004361855
申请日：2004-12-14
申请人： Kyoto Univ , Matsushita Electric Ind Co Ltd , 国立大学法人京都大学 , 松下電器産業株式会社
发明人： TAMURA TAKAMASA , UMETANI MAKOTO , TABATA OSAMU
IPC分类号： G02B1/11
摘要： PROBLEM TO BE SOLVED: To provide a nonreflective structure which has large antireflection effect and an optical element having the nonreflective structure. SOLUTION: Disclosed is the nonreflective structure formed on a surface where light whose reflection should be suppressed is made incident. The nonreflective structure comprises hexagonal pyramids with an aspect ratio of ≥1 as units, and the hexagonal pyramids are arrayed at a pitch less than the wavelength of the light whose reflection should be suppressed so that circumscribed circles of hexagons of respective bottom surfaces are in the closest two-dimensional structure and adjacent hexagons have vertexes in contact. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供具有大抗反射效果的非反射结构和具有非反射结构的光学元件。解决方案：公开了在反射应被抑制的光入射的表面上形成的非反射结构。非反射结构包括长宽比为≥1的六角锥体，并且六边形金字塔以比反射应被抑制的光的波长小的间距排列，使得各个底面的六边形的外接圆处于最近的二维结构和相邻的六边形具有接触的顶点。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2005132660A Manufacturing method of optical element having non-reflective structure and optical element having non-reflective structure manufactured through the method 审中-公开
标题翻译：具有非反射结构的光学元件的制造方法和具有通过该方法制造的非反射结构的光学元件
公开(公告)号：JP2005132660A
公开(公告)日：2005-05-26
申请号：JP2003369522
申请日：2003-10-29
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： UMETANI MAKOTO , SHIMIZU YOSHIYUKI , YAMAMOTO YOSHIHARU , YAMAGATA MICHIHIRO , YAMAGUCHI HIROSHI
IPC分类号： G02B5/02 , C03B11/00 , C03B11/08 , C03B40/02 , C03C15/00 , C03C17/06 , C03C17/22 , G02B3/00
CPC分类号： C03B11/082 , C03B2215/17 , C03B2215/412 , C03B2215/66
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical element whereby a high-precision optical element having a non-reflective structure can be repetitively molded. SOLUTION: A cylindrical Cr mask is formed on the surface of a quartz glass substrate, and the surface of the quartz glass substrate is subjected to dry etching to form a conical non-reflective structure on the surface. An Ir-Rh alloy film for surface protection is formed on the surface, and a master mold for molding the non-reflective structure is prepared. A high-melting-point glass material onto which a mold release agent is applied for mold release is press-molded using the master mold, and the master mold is released from the press-molded high-melting-point glass material without cooling. The mold release agent is removed after the high-melting-point glass material is being cooled, and the Ir-Rh alloy film for surface protection is formed to prepare a replica mold 22 for molding the non-reflective structure. An optical material 11 onto which a mold release agent 16 is applied for mold release is press-molded using the replica mold 22, and the replica mold 22 is released from the optical material 11 without cooling. The mold release agent 16 is removed after the optical material 11 is being cooled. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种光学元件的制造方法，由此能够重复地模制具有非反射结构的高精度光学元件。解决方案：在石英玻璃基板的表面上形成圆柱形Cr掩模，并且对石英玻璃基板的表面进行干蚀刻以在表面上形成圆锥形非反射结构。在表面上形成用于表面保护的Ir-Rh合金膜，并制备用于模制非反射结构的母模。使用脱模剂施加脱模剂的高熔点玻璃材料使用母模进行压模，并且将母模从压制成型的高熔点玻璃材料中释放而不冷却。在高熔点玻璃材料被冷却之后除去脱模剂，形成用于表面保护的Ir-Rh合金膜以制备用于模制非反射结构的复制模具22。使用复制模具22将用于脱模的脱模剂16施加到其上的光学材料11，并且复制模具22在不冷却的情况下从光学材料11释放。在光学材料11被冷却之后，去除脱模剂16。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2004286915A Optical fiber array connector, manufacturing method therefor, and connection method therefor 审中-公开
公开(公告)号：JP2004286915A
公开(公告)日：2004-10-14
申请号：JP2003076985
申请日：2003-03-20
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： UMETANI MAKOTO , RYONAI HIROSHI
IPC分类号： G02B6/40
摘要： PROBLEM TO BE SOLVED: To solve the problem that the more the number of optical fibers is, the more positional displacement is caused and the larger the insertion loss is, in an MT connector.
SOLUTION: Optical fiber array connectors 31, 31 are formed by arranging optical fibers on a plane substrate with high accuracy, bonding the optical fiber array to the plane substrate, and polishing the end faces as the connection faces. In the connection method of the optical fiber array, two optical fiber array connectors 31, 31 are mounted on the substrate 32 having a plurality of highly accurate optical fiber fixing grooves 33, and are fixed by pressing from above after letting the end faces abut on each other. Since each of optical fibers 31, 31 is fixed on the same fixing groove 33, a guide pin such as the MT connector is not necessary, but all the optical fibers 31, 31 are connected on the respective fixing grooves separately, and the connection can be performed with very stable accuracy.
COPYRIGHT: (C)2005,JPO&NCIPI

6. 发明专利

JP2003026425A Method of forming optical element having micro-rugged shape and method of manufacturing mold for forming having micro-rugged shape 审中-公开
标题翻译：形成具有微型形状的光学元件的方法和用于形成具有微型形状的模具的制造方法
公开(公告)号：JP2003026425A
公开(公告)日：2003-01-29
申请号：JP2001210436
申请日：2001-07-11
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： UMETANI MAKOTO , RIYOUNAI HIROSHI , DOI MIYOKO , NAKAMURA SHOJI
IPC分类号： G02B5/18 , C03B11/00 , C03B40/02
CPC分类号： C03B11/005 , C03B2215/412 , C03B2215/66
摘要： PROBLEM TO BE SOLVED: To solve the problems with the case optical elements having micro- rugged shapes are formed that the deviations in patterns by a difference in the coefficient of thermal expansion upon cooling together with molds is made and the forming of the optical element having the micro-rugged shape of large areas is no longer possible and also the fine working of the molds is difficult and the cost of working the molds is extremely high. SOLUTION: Blanks for forming softened by heating in an atmosphere formed by mixing gaseous or foggy liquid containing C or F in component molecules in inert gas, such as N2 and Ar, are press formed by the molds having the micro-rugged shapes and the materials to be molded of the temperature as it is are parted from the molds without being cooled and are then cooled separately from the molds, by which the repetitive forming of the optical element having the micro-rugged shapes free of the occurrence of the deviations in the patterns is made possible. The method of manufacturing the molds for forming the optical elements having the micro-rugged shapes by forming high melting glass or crystallized glass by the similar forming method is provided.
摘要翻译：要解决的问题为了解决具有微凹凸形状的光学元件的问题，形成了通过与模具一起冷却时的热膨胀系数的差异而产生的图案偏差，并且形成具有大面积的微凹凸形状不再可能，并且模具的精细加工困难，并且模具的加工成本非常高。解决方案：通过在惰性气体（如N 2和Ar）中混合含有C或F的气态或雾状液体形成的气氛中形成软化的坯料，由具有微凹凸形状和材料的模具压制成型被模制成温度，因为它是从模具中分离而不被冷却，然后与模具分开冷却，通过该模具重复地形成具有微凹凸形状的光学元件，没有发生在模式成为可能。提供了通过相似的成型方法形成高熔点玻璃或结晶玻璃来制造用于形成具有微凹凸形状的光学元件的模具的方法。

7. 发明专利

JP2008040322A Method for manufacturing antireflection structure 有权
标题翻译：制造抗反射结构的方法
公开(公告)号：JP2008040322A
公开(公告)日：2008-02-21
申请号：JP2006216862
申请日：2006-08-09
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： UMETANI MAKOTO , TAMURA TAKAMASA
IPC分类号： G02B1/10 , C03B11/00 , C03B40/02 , G02B1/118
CPC分类号： Y02P40/57
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing an antireflection structure, in which the antireflective structured body, in which a pattern deviation is not generated over a large area and which has a high-precision antireflection structure, can be molded repeatedly. SOLUTION: The antireflection structure 17 is molded by pressing a molding material 11, on which a Ni film 16 for releasing work at a high temperature is deposited by using a sputtering method, using an upper die 3, which is prepared by forming a BN film for releasing work at high temperature on the surface (pressing surface) of quartz glass substrate 1 with a conical antireflection structure 2 deposited, by using the sputtering method at a high temperature, and then releasing the high-temperature press-molded material, as is. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：为了提供一种抗反射结构的制造方法，其中可以模制其中在大面积上不产生图案偏差并具有高精度抗反射结构的抗反射结构体反复。解决方案：通过压制成型材料11来模制抗反射结构17，该成型材料11通过使用溅射法沉积用于释放高温下的工作的Ni膜16，使用上模3，上模3通过形成通过使用溅射法在高温下沉积的锥形防反射结构2在石英玻璃基板1的表面（按压面）上释放高温的BN膜，然后将高温压制成形材料就这样。版权所有（C）2008，JPO＆INPIT

8. 发明专利

JP2007220732A Mask for x-ray lithography, manufacturing method thereof, manufacturing method of light reflection prevention structure using the same, forming body using light reflection prevention structure, and manufacturing method of glass object to be formed or resin object to be formed 有权
标题翻译：用于X射线光刻的掩模，其制造方法，使用光反射防止结构的光反射防止结构的制造方法，使用光反射预防结构形成体，以及要形成的玻璃对象或树脂的制造方法
公开(公告)号：JP2007220732A
公开(公告)日：2007-08-30
申请号：JP2006036764
申请日：2006-02-14
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： TAMURA TAKAMASA , UMETANI MAKOTO
IPC分类号： H01L21/027 , G02B1/11 , G02B1/118 , G03F1/22 , G03F7/20
摘要： PROBLEM TO BE SOLVED: To provide a mask for X-ray lithography that can be manufactured inexpensively and easily. SOLUTION: The mask 1 for X-ray lithography is used to manufacture the light reflection prevention structure 22 having a light reflection irregular structure 23 by X-ray lithography. The mask 1 for X-ray lithography has a first substrate 10 for transmitting X rays, and an X-ray shielding film 11 formed on the first substrate 10. The X-ray shielding film 11 includes an X-ray shielding material, and contains a plurality of X-ray transmission sections 11a. The plurality of X-ray transmission sections 11a are arranged along the direction of a film surface at a pitch that is not larger than the wavelength of light where reflection is suppressed by the light reflection prevention irregular structure 23. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供可以廉价且容易地制造的用于X射线光刻的掩模。解决方案：用于X射线光刻的掩模1用于通过X射线光刻制造具有光反射不规则结构23的光反射防止结构22。用于X射线光刻的掩模1具有用于透射X射线的第一基板10和形成在第一基板10上的X射线屏蔽膜11.X射线屏蔽膜11包括X射线屏蔽材料，并且包含多个X射线透射部11a。多个X射线透射部11a以不大于光反射防止不规则结构23的反射抑制的光的波长的间距沿着膜面的方向配置。版权所有（C））2007，JPO＆INPIT

9. 发明专利

JP2006130841A Method for producing member having reflection preventing structure 有权
标题翻译：生产具有防反射结构的构件的方法
公开(公告)号：JP2006130841A
公开(公告)日：2006-05-25
申请号：JP2004324134
申请日：2004-11-08
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： UMETANI MAKOTO , TAMURA TAKAMASA
IPC分类号： B29C33/38 , B29L11/00 , C03B11/08 , C03B40/02 , C03C15/00 , G02B1/11
CPC分类号： C03B11/082 , C03B2215/412 , Y02P40/57
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a member having a high precision reflection preventing structure even when the surface has a large area and is shaped in a curved surface.
SOLUTION: A core having a catalytic function is formed on the surface of an original board material. Next, needle crystals are formed on the surface of the original board material by growing crystals on the core. Next, a mold is formed by using the original board material with the needle crystals formed. When the mold is an electroformed mold, a molding resin raw material is molded by injection molding, press molding, a nano-imprinting method, or the like by using the electroformed mold. An original board material mainly containing quartz glass is used as the original board material, and the surface of the original board material is subjected to dry etching with the needle crystals used as a mask. Next, when the mold is formed by forming a protective mold releasing film, a molding raw material of multi-component glass is press-molded by using the obtained mold. In this way, the member having the reflection preventing structure good in surface precision which comprises a resin having a large area and the shape of a curved surface and the multi-component glass.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：即使当表面具有大面积并且成形为弯曲表面时，也提供了具有高精度反射防止结构的部件的制造方法。解决方案：在原板材的表面上形成具有催化功能的芯。接下来，通过在芯上生长晶体，在原板材料的表面上形成针状晶体。接下来，通过使用形成有针状晶体的原始基板材料形成模具。当模具是电铸模具时，通过使用电铸模具通过注射成型，压制成型，纳米压印方法等来模塑树脂原料。使用主要包含石英玻璃的原板材作为原板材料，用作为掩模的针状晶体对原板材的表面进行干蚀刻。接下来，当通过形成保护性脱模膜形成模具时，通过使用所获得的模具对多组分玻璃的成型原料进行压制成型。以这种方式，具有防反射结构良好的表面精度的构件包括具有大面积的树脂和曲面形状的树脂和多组分玻璃。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2005047165A Manufacturing method for inkjet printer head and pressurizing chamber of inkjet printer head 有权
标题翻译：喷墨打印机头和打印机头的加压室的制造方法
公开(公告)号：JP2005047165A
公开(公告)日：2005-02-24
申请号：JP2003282052
申请日：2003-07-29
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： UMETANI MAKOTO , RIYOUNAI HIROSHI
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for a highly precise and thin inkjet printer head at a low cost and to provide a pressurizing chamber of the inkjet printer head.
SOLUTION: A forming material (12) consisting of a glass having a die release agent (14) formed thereon is mounted on a plain metallic die (13) and the whole parts are heated to be subjected to press-forming by a pressurizing chamber forming metallic mold (11) having a projection section corresponding to the pressurizing chamber in a manner that the forming material (12) is not completely penetrated and the rear face is slightly left. After the projection shape of the pressurizing chamber forming metallic mold is completely transferred to the forming material (12), the pressurizing chamber forming metallic die is separated therefrom without being cooled. After the pressurizing chamber forming metallic mold is cooled, the die release agent (14) is removed therefrom and the rear face thereof is ground to form a through-hole to be the pressurizing chamber (16), thereby forming a pressurizing substrate having the through-hole. A nozzle plate having a nozzle through-hole formed by laser processing or press-forming is bonded to the pressurizing substrate so that a pressure applying plate is formed on the pressurizing chamber.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种低成本的高精度和薄型喷墨打印头的制造方法，并且提供喷墨打印头的加压室。解决方案：由平面金属模具（13）上安装由其上形成有脱模剂（14）的玻璃构成的成形材料（12），并将整个部件加热以进行压制成型所述加压室形成金属模具（11）具有与所述加压室对应的突出部分，使得所述成形材料（12）未完全穿透并且所述后表面略微留下。在加压室形成金属模具的突出形状完全转移到成形材料（12）之后，加压室形成金属模具被分离而不被冷却。在加压室形成金属模被冷却之后，将脱模剂（14）从其中除去，并且将其后表面研磨以形成作为加压室（16）的通孔，从而形成具有通孔 -孔。具有通过激光加工或压制成型形成的喷嘴通孔的喷嘴板被接合到加压基板上，使得在加压室上形成压力板。版权所有（C）2005，JPO＆NCIPI

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