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1. 发明专利

JP2008206139A Dual mode piezoelectric filter, method of manufacturing the filter, high frequency circuit component and communication device using the filter 审中-公开
标题翻译：双模压电滤波器，滤波器的制造方法，使用滤波器的高频电路组件和通信装置
公开(公告)号：JP2008206139A
公开(公告)日：2008-09-04
申请号：JP2008005883
申请日：2008-01-15
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： IWASAKI TOSHIHIRO , NAKATSUKA HIROSHI , ONISHI KEIJI , YAMAKAWA TAKEHIKO , KAMIYAMA TOMOHIDE
IPC分类号： H03H9/54 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/29 , H03H3/02 , H03H9/17 , H03H9/70
CPC分类号： H03H9/564 , H03H3/04 , H03H9/0207 , H03H2003/0428 , Y10T29/42
摘要： PROBLEM TO BE SOLVED: To provide a dual mode piezoelectric filter having a filter characteristic with low loss and a smooth passband. SOLUTION: A dual mode piezoelectric filter includes a piezoelectric material layer 1 composed of a piezoelectric thin film of a high-cut type formed on a substrate, a first electrode 2 and a second electrode 3 formed on one of major surfaces of the piezoelectric material layer with a gap formed between, a third electrode 4 formed on the other major surface of the piezoelectric material layer opposite to the first electrode, the second electrode, and the gap, and an interelectrode mass load element 5 formed in the gap or at a position opposite to the gap on the surface of the piezoelectric material layer. Relationships (ρ1×h1)≤(ρa×ha) and (ρ2×h2)≤(ρa×ha) are satisfied, where h1 is the thickness and ρ1 is the density of the first electrode, h2 is the thickness and ρ2 is the density of the second electrode, and ha is the thickness and ρa is the density of the interelectrode mass load element. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有低损耗和平滑通带的滤波器特性的双模压电滤波器。解决方案：双模式压电滤波器包括由形成在基板上的高切割类型的压电薄膜构成的压电材料层1，第一电极2和第二电极3，其形成在基板的一个主表面上压电材料层之间形成有间隙，形成在与第一电极相对的压电材料层的另一个主表面上的第三电极4，第二电极和间隙，以及形成在间隙中的电极间质量负载元件5，在与压电材料层的表面上的间隙相反的位置。满足关系式（ρ1×h1）≤（ρa×ha）和（ρ2×h2）≤（ρa×ha），其中h1为厚度，ρ1为第一电极的密度，h2为厚度，ρ2为第二电极的密度，ha是厚度，ρa是电极间质量负载元件的密度。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2008035493A Piezoelectric filter, antenna duplexer, and communication apparatus employing piezoelectric resonator 审中-公开
标题翻译：压电过滤器，天线双工器和通信设备使用压电谐振器
公开(公告)号：JP2008035493A
公开(公告)日：2008-02-14
申请号：JP2007160274
申请日：2007-06-18
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： YAMAKAWA TAKEHIKO , KAMIYAMA TOMOHIDE , IWASAKI TOSHIHIRO , NAKATSUKA HIROSHI , ONISHI KEIJI
IPC分类号： H03H9/54 , H01L41/09 , H01L41/18 , H01L41/22 , H03H9/17 , H03H9/70
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric filter in which a high-impedance piezoelectric resonator and a low-impedance piezoelectric resonator are formed on the same substrate while a frequency adjustment layer has a reduced thickness, a high Q value is achieved, and insertion loss is reduced. SOLUTION: A piezoelectric filter comprises a substrate and a plurality of piezoelectric resonators provided on the same substrate. Each piezoelectric resonator comprises a cavity formed in the substrate, a lower electrode formed on the substrate, covering the cavity, a piezoelectric material layer formed on the lower electrode, and an upper electrode formed on the piezoelectric material layer. At least one of the piezoelectric resonators has a cavity formed of a plurality of cells. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种其中在频率调节层具有减小的厚度的同一基板上形成高阻抗压电谐振器和低阻抗压电谐振器的压电滤波器，实现了高Q值，并且插入损耗降低。解决方案：压电滤波器包括基板和设置在同一基板上的多个压电谐振器。每个压电谐振器包括形成在基板中的空腔，形成在基板上的覆盖空腔的下电极，形成在下电极上的压电材料层和形成在压电材料层上的上电极。至少一个压电谐振器具有由多个单元形成的空腔。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2007143127A Complex rf device and method of manufacturing the same 审中-公开
标题翻译：复合RF器件及其制造方法
公开(公告)号：JP2007143127A
公开(公告)日：2007-06-07
申请号：JP2006282902
申请日：2006-10-17
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： YAMAKAWA TAKEHIKO , NAKATSUKA HIROSHI , ONISHI KEIJI
IPC分类号： H03H9/70 , H01L21/822 , H01L27/04 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/311 , H01L41/313 , H03H3/02 , H03H9/02 , H03H9/17 , H03H9/54
CPC分类号： H01L2224/48091 , H01L2924/3011 , H01L2924/00014 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To realize a complex RF device which includes a plurality of functions and features of small size and low height, in a high-definition state, without damaging the crystallinity of piezoelectric body.
SOLUTION: The complex RF device is constituted of two RF circuits stacked in the vertical direction. The complex RF device comprises a substrate, a second RF circuit provided on the substrate, and a first RF circuit which is provided on the second circuit and dispenses with a substrate. The first RF circuit is formed on another substrate, before being transferred onto the second RF circuit.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了在高分辨率状态下实现包括小尺寸和低高度的多个功能和特征的复杂RF器件，而不损坏压电体的结晶性。解决方案：复合RF器件由在垂直方向上堆叠的两个RF电路构成。复合RF器件包括衬底，设置在衬底上的第二RF电路和设置在第二电路上并分配衬底的第一RF电路。第一RF电路在被转移到第二RF电路之前形成在另一基板上。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2005110230A Thin film bulk acoustic resonator, method for producing same, filter, composite electronic component device, and communication apparatus 有权
标题翻译：薄膜膨胀聚合谐振器，其制造方法，滤波器，复合电子元件装置和通信装置
公开(公告)号：JP2005110230A
公开(公告)日：2005-04-21
申请号：JP2004260724
申请日：2004-09-08
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： ONISHI KEIJI , NAKAMURA HIROYUKI , NAKATSUKA HIROSHI , YAMAKAWA TAKEHIKO
IPC分类号： H01L41/09 , H01L41/18 , H01L41/22 , H01L41/319 , H03H3/02 , H03H9/02 , H03H9/17 , H03H9/54 , H03H9/56 , H03H9/58
CPC分类号： H03H9/02118 , H03H3/02 , H03H9/171 , H03H9/173 , H03H9/564 , H03H9/568
摘要： PROBLEM TO BE SOLVED: To provide a thin film bulk acoustic resonator improved not to complicate a production process and to efficiently suppress a lateral propagation mode while having flexibility in design. SOLUTION: A thin film bulk acoustic resonator 100 includes a piezoelectric film 103, and a pair of electrodes 101, 102 between which the piezoelectric film 103 is interposed. The piezoelectric film 103 includes an outer region 104 extending outward from at least a portion of the periphery of a resonator portion composed of the pair of electrodes 101, 102 and the piezoelectric film 103. The outer region 104 includes, in at least a portion thereof, an acoustic damping region 105 for damping acoustic waves. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种改进的薄膜体声波谐振器，其不会使生产过程复杂化并且有效地抑制横向传播模式，同时具有设计灵活性。解决方案：薄膜体声波谐振器100包括压电膜103和一对电极101,102，压电膜103置于其间。压电膜103包括从由一对电极101,102和压电膜103构成的谐振器部分的周边的至少一部分向外延伸的外部区域104.外部区域104至少包括一部分，用于阻尼声波的声阻尼区域105。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2004194496A Drive method of piezoelectric transformer, drive circuit, cold-cathode tube light emitting device, liquid crystal panel, and liquid crystal panel incorporated instrument 审中-公开
标题翻译：压电变压器，驱动电路，冷阴极管发光器件，液晶板和液晶面板合并仪器的驱动方法
公开(公告)号：JP2004194496A
公开(公告)日：2004-07-08
申请号：JP2003328547
申请日：2003-09-19
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： TAKEDA KATSU , NAKATSUKA HIROSHI
IPC分类号： H05B41/24 , H02M7/48 , H05B41/392
摘要： PROBLEM TO BE SOLVED: To provide the drive method of the piezoelectric transformer enhancing its drive efficiency and reliability through withstanding power and distortion, by suppressing a higher order vibration mode excited by a higher harmonic component except a drive frequency contained in a drive signal of the piezoelectric transformer without using an inductive element. SOLUTION: The drive signal applied to a primary side electrode of the piezoelectric transformer is a signal of rectangular shape obtained by multiplying a period T of the drive signal by prescribed time ratio δto have a time length δT with a level maximum potential (2V) and minimum potential (0), the time ratio δis smaller than 0.5 to be further set in a manner wherein a sum of amplitude ratio of each vibration mode of higher order relating to the amplitude of the vibration mode exciting the piezoelectric transformer is minimized. COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：为了提供压电变压器的驱动方法，通过耐受功率和失真来提高其驱动效率和可靠性，通过抑制由包含在驱动器中的驱动频率以外的高次谐波分量激发的高阶振动模式不使用电感元件的压电变压器的信号。解决方案：施加到压电变压器的初级侧电极的驱动信号是通过将驱动信号的周期T乘以规定时间比δ而获得的矩形信号，具有时间长度δT与电平最大电位（ 2V）和最小电位（0），时间比δ小于0.5，以使得与激励压电变压器的振动模式的振幅相关的高阶相关振动模式的振幅比之和最小化的方式进一步设定。版权所有（C）2004，JPO＆NCIPI

6. 发明专利

JP2008160655A Method for manufacturing piezoelectric thin film resonator 审中-公开
标题翻译：制造压电薄膜共振器的方法
公开(公告)号：JP2008160655A
公开(公告)日：2008-07-10
申请号：JP2006349309
申请日：2006-12-26
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： KAMIYAMA TOMOHIDE , ONISHI KEIJI , NAKATSUKA HIROSHI , YAMAKAWA TAKEHIKO , IWASAKI TOSHIHIRO
IPC分类号： H03H3/02 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/253 , H01L41/313 , H03H3/04 , H03H9/17
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric thin film resonator by which manufacturing process regarding formation of a frequency adjustment layer is simplified and oxidation of an upper electrode is prevented. SOLUTION: The method for manufacturing the piezoelecric thin film resonator, after sticking a substrate 111 for film formation to a substrate 105 (a figure. 3B, a process h), forms a predetermined resist at a part corresponding to an oscillation part 104 on the substrate 111 for film formation, performing etching of the resist by a Deep-RIE process and removes a part of the substrate 111 for film formation (a figure 3B, a process i). Thus, the remaining part (a silicon layer) of the substrate 111 for film formation is functioned as a frequency adjustment layer 108. Next, a predetermined resist is formed on an electrode film 113 from which the substrate 111 for film formation is removed, the electrode film 113 is patterned to form the upper electrode 103 (the figure 3B, the process j). COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造压电薄膜谐振器的方法，通过该方法简化了与频率调节层的形成有关的制造工艺，并且防止了上部电极的氧化。解决方案：在将用于成膜的基板111粘贴到基板105（图3B，工艺h）之后，制造压电薄膜谐振器的方法在对应于振荡部分的部分形成预定的抗蚀剂 104在用于成膜的基板111上，通过深度RIE处理蚀刻抗蚀剂并去除用于成膜的基板111的一部分（图3B，处理i）。因此，用于成膜的基板111的剩余部分（硅层）用作频率调节层108.接下来，在去除用于成膜的基板111的电极膜113上形成预定的抗蚀剂，图案化电极膜113以形成上电极103（图3B，工艺j）。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2007235304A Electronic component and manufacturing method therefor, and communications equipment using the same 审中-公开
标题翻译：电子元件及其制造方法及其通讯设备
公开(公告)号：JP2007235304A
公开(公告)日：2007-09-13
申请号：JP2006051706
申请日：2006-02-28
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： ONISHI KEIJI , NAKATSUKA HIROSHI , YAMAKAWA TAKEHIKO
IPC分类号： H03H9/17 , H01L41/09 , H01L41/187 , H03H3/02 , H03H9/58 , H03H9/70
摘要： PROBLEM TO BE SOLVED: To solve the problem wherein an electronic component, such as, a filter and a duplexer packaged in a wafer level using a silicon substrate undergoes deterioration in modulation distortion characteristics due to a disturbance waves.
SOLUTION: A functional element 120 comprises a piezoelectric body layer 121, and an upper electrode 122 and a lower electrode 123 formed in a way of holding the layer 121 therebetween, and is formed via an insulating film (not shown) or the like, on a board 110 formed with a cavity 113 provided so as not to hinder the mechanical vibration of the functional section. The board 110 is formed with a terminal electrode 112 and a via-hole 111 for connecting the terminal electrode 112 to a wiring electrode of the functional section, the cavity 131 is formed in a vibration region of the functional section 130 of a lid part 130, and a magnetic thin film 140 is formed outside the lid part 130. Due to the magnetic field of the magnetic thin layer formed in the lid part 130, nonlinear distortion level can be improved.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题为了解决使用硅基板封装在晶片级中的诸如滤波器和双工器的电子部件由于干扰波而导致的调制失真特性的劣化的问题。解决方案：功能元件120包括压电体层121和以保持层121的方式形成的上电极122和下电极123，并且经由绝缘膜（未示出）或形成有形成有空腔113的板110，以不妨碍功能部的机械振动。板110形成有端子电极112和用于将端子电极112连接到功能部分的布线电极的通孔111，空腔131形成在盖部件130的功能部分130的振动区域中并且在盖部分130的外部形成磁性薄膜140.由于形成在盖部分130中的磁性薄层的磁场，可以提高非线性失真水平。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2007028594A Multi-mode thin film acoustic wave resonator filter, ladder-type filter with same, duplexer, and communication apparatus 审中-公开
标题翻译：多模薄膜声波谐波滤波器，带同型号的梯形滤波器，双工器和通讯设备
公开(公告)号：JP2007028594A
公开(公告)日：2007-02-01
申请号：JP2006162667
申请日：2006-06-12
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： IWASAKI TOSHIHIRO , NAKATSUKA HIROSHI , ONISHI KEIJI , NAKAMURA HIROYUKI
IPC分类号： H03H9/56 , H03H9/17 , H03H9/58
摘要： PROBLEM TO BE SOLVED: To provide a multi-mode thin film acoustic wave resonator filter improved in characteristics by efficiently utilizing generated charges.
SOLUTION: A multi-mode thin film acoustic wave resonator filter 100 comprises first and second input/output vibration portions 110 and 111 configured by holding a piezoelectric thin film 103 between first and second lower electrodes 104 and 106 and first and second upper electrodes 105 and 107, and a cavity 102 for commonly guaranteeing vibrations of the first and second input/output vibration portions 110 and 111 so as to couple the vibrations. The first and second input/output vibration portions 110 and 111 are located adjacently in contact with each other with a step therebetween, so that the first and second lower electrodes 104 and 106 are not electrically connected to each other and the first and second upper electrodes 105 and 107 are not electrically connected to each other. Insulators 108 and 109 are provided in the vicinity of the step.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供通过有效地利用所产生的电荷来提高特性的多模式薄膜声波谐振器滤波器。解决方案：多模式薄膜声波谐振器滤波器100包括第一和第二输入/输出振动部分110和111，其通过在第一和第二下部电极104和106之间保持压电薄膜103以及第一和第二上部电极105和107，以及用于共同保证第一和第二输入/输出振动部分110和111的振动以便耦合振动的空腔102。第一和第二输入/输出振动部分110和111彼此相邻地彼此接触地设置，使得第一和第二下部电极104和106彼此不电连接，并且第一和第二上部电极 105和107不彼此电连接。绝缘体108和109设置在台阶附近。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2005318562A Acoustic resonator and filter 审中-公开
标题翻译：声学谐振器和滤波器
公开(公告)号：JP2005318562A
公开(公告)日：2005-11-10
申请号：JP2005095793
申请日：2005-03-29
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： NAKATSUKA HIROSHI , ONISHI KEIJI , NAKAMURA HIROYUKI , IWASAKI TOSHIHIRO
IPC分类号： H01L41/09 , H01L41/187 , H03H9/17 , H03H9/58 , H03H9/70
摘要： PROBLEM TO BE SOLVED: To provide an acoustic resonator and filter which prevents undesired vibration caused by vibration leakage and suppresses generation of spurious vibration.
SOLUTION: The area of an opening C of a cavity 31 is equal to or greater than the area of a horizontal cross section D of a vibrating section 10. The vibrating section 10 is placed on a support section 20 at a position such that a vertical projection of the vibrating section 10 onto a substrate 30 is accommodated within the opening C of the cavity 31. Moreover, the sum of a vertical thickness t1 of the vibrating section 10 and a vertical thickness t2 of the support section 20 is equal to one wavelength of a resonance frequency fr of the acoustic resonator 1 (one wavelength=t1+t2), while the thickness t1 of the vibrating section 10 and the thickness t2 of the support section 20 are different from each other (t1≠t2). Thus, neither the thickness t1 of the vibrating section 10 nor the thickness t2 of the support section 20 is equal to the half wavelength of the resonance frequency fr.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种防止由振动泄漏引起的不期望的振动并抑制寄生振动的产生的声谐振器和滤波器。解决方案：空腔31的开口C的面积等于或大于振动部分10的水平横截面D的面积。振动部分10被放置在支撑部分20上，将振动部10的垂直投影容纳在基板30的开口C内。此外，振动部10的垂直厚度t1与支撑部20的垂直厚度t2的和相等声波谐振器1的共振频率fr的一个波长（一个波长= t1 + t2），而振动部分10的厚度t1和支撑部分20的厚度t2彼此不同（t1≠t2）。因此，振动部10的厚度t1和支撑部20的厚度t2都不等于共振频率fr的半波长。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2005176321A Filter employing piezoelectric resonator 有权
标题翻译：过滤器采用压电谐振器
公开(公告)号：JP2005176321A
公开(公告)日：2005-06-30
申请号：JP2004321227
申请日：2004-11-04
申请人： Matsushita Electric Ind Co Ltd , 松下電器産業株式会社
发明人： YAMAKAWA TAKEHIKO , YAMAGUCHI HIROSHI , NAKATSUKA HIROSHI , NAKAMURA HIROYUKI , ONISHI KEIJI , ISHIZAKI TOSHIO
IPC分类号： H03H9/64 , H03H9/25
摘要： PROBLEM TO BE SOLVED: To provide a filter employing a piezoelectric resonator capable of reducing a loss in a passband while securing an attenuation amount in an attenuation band. SOLUTION: A serial piezoelectric resonator 11 is connected in series between an input terminal 15a and an output terminal 15b. A parallel piezoelectric resonator 12a has one of electrodes connected to a connection point between the input terminal 15a and the serial piezoelectric resonator 11 and the other electrode connected to one of terminals of an inductor 13a, respectively. A parallel piezoelectric resonator 12b has one of electrodes connected to a connection point between the serial piezoelectric resonator 11 and the output terminal 15b, and the other electrode connected to one of terminals of an inductor 13b, respectively. The other terminals of the inductors 13a and 13b are grounded, respectively. An additional piezoelectric resonator 14 is connected between the other electrode of the parallel piezoelectric resonator 12a and the other electrode of the parallel piezoelectric resonator 12b. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种采用压电谐振器的滤波器，其能够在确保衰减频带中的衰减量的同时降低通带中的损耗。解决方案：串联压电谐振器11串联连接在输入端子15a和输出端子15b之间。平行压电谐振器12a具有连接到输入端子15a和串联压电谐振器11之间的连接点的电极中的一个以及分别连接到电感器13a的一个端子的另一个电极。平行压电谐振器12b具有连接到串联压电谐振器11和输出端子15b之间的连接点的电极之一，而另一个电极分别连接到电感器13b的一个端子。电感器13a和13b的其他端子分别接地。另外的压电谐振器14连接在并联压电谐振器12a的另一个电极和并联压电谐振器12b的另一个电极之间。版权所有（C）2005，JPO＆NCIPI

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