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    • 1. 发明专利
    • Deformable mirror
    • 可变镜
    • JP2005099357A
    • 2005-04-14
    • JP2003332210
    • 2003-09-24
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • KAJINO OSAMUMUSHISHIKA YOSHIHIRO
    • G02B26/08B81B3/00
    • PROBLEM TO BE SOLVED: To provide a deformable mirror which is driven by a low voltage and to provide a reliable deformable mirror in which a movable electrode is not broken nor deformed.
      SOLUTION: The deformable mirror is provided with a substrate 1, a plurality of micromirrors 15 supported by a substrate 1 in a mutually separated manner, and a plurality of driving parts which control the relative arrangement of the substrate 1 with respect to the micro mirrors 15 by independently driving respective micromirrors 15. Each of the plurality of driving parts is provided with: movable electrodes 7 to 9 which turn around a turning axis which is parallel in y-direction; supporting members (10 and 11) which turnably support the movable electrodes 7 to 9; at least one of fixed electrodes 4 to 6 facing to the movable electrodes 7 to 9; and acting members (12, 13a to 13c) which vary the distance between a specific part of the micromirrors 15 and the substrate 1 when the movable electrodes 7 to 9 turn. The plurality of driving parts are arranged on the substrate 1 with a predetermined pitch in y-direction and x-direction, and the position of one of the two driving parts which are adjacent to each other in the y-direction is shifted in the x-direction with respect to the position of the other driving part.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供由低电压驱动的可变形反射镜,并提供可靠的可变形反射镜,其中可动电极不会断裂或变形。 解决方案:可变形反射镜设置有基板1,以相互分离的方式由基板1支撑的多个微镜15和多个驱动部件,其控制基板1相对于 微反射镜15通过独立地驱动各个微反射镜15.多个驱动部分中的每一个设置有:在y方向上平行的转动轴线的可动电极7至9; 可转动地支撑可动电极7至9的支撑构件(10和11) 固定电极4至6中的至少一个面向可动电极7至9; 以及当可移动电极7至9转动时改变特定部分的微镜15和基板1之间的距离的作用件(12,13a至13c)。 多个驱动部件在y方向和x方向上以预定间距布置在基板1上,并且在y方向上彼此相邻的两个驱动部件中的一个的位置在x 相对于另一驱动部的位置的方向。 版权所有(C)2005,JPO&NCIPI
    • 3. 发明专利
    • Micro-electric machine system and its manufacturing method
    • 微电机系统及其制造方法
    • JP2005125484A
    • 2005-05-19
    • JP2004244946
    • 2004-08-25
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • MUSHISHIKA YOSHIHIRO
    • B81B3/00B81C1/00H01L21/8238H01L27/092
    • PROBLEM TO BE SOLVED: To provide a micro-electric machine system and its manufacturing method for compatibly realizing the prevention of high temperature breaking of a wiring part, security of a transducer characteristic and reduction in wiring resistance. SOLUTION: This micro-electric machine system has a base board 1, a transducer supported by the base board 1, and a conductor layer supported by the base board 1 and electrically connected to the transducer. The transducer has a part formed of silicon or a silicon compound. The conductor layer is formed of a high melting point electric conductor including at least one kind of element selected from a group composed of copper, gold and silver as a main component. At least a part of the high melting point electric conductor is positioned at a level between the part and the base board of the transducer. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种微电机系统及其制造方法,其兼容地实现防止布线部件的高温断裂,传感器特性的安全性和布线电阻的降低。 解决方案:该微型电机系统具有基板1,由基板1支撑的换能器和由基板1支撑并与换能器电连接的导体层。 换能器具有由硅或硅化合物形成的部分。 导体层由包含从由铜,金和银构成的组中选择的至少一种元素作为主要成分的高熔点电导体形成。 高熔点电导体的至少一部分位于换能器的部分和基板之间的水平位置。 版权所有(C)2005,JPO&NCIPI
    • 5. 发明专利
    • Circuit element driving device and driving method of circuit element
    • 电路元件驱动装置及电路元件驱动方法
    • JP2003018867A
    • 2003-01-17
    • JP2002106363
    • 2002-04-09
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • IGAWA YOSHIHIROMUSHISHIKA YOSHIHIROTAKIZAWA TERUYUKI
    • G11B7/095H02M7/5387H02P27/06H02P7/63
    • PROBLEM TO BE SOLVED: To provide a circuit element driving device which can reduce wiring necessary for driving a plurality of circuit elements without decreasing an instantaneous maximum voltage which can be applied to the circuit elements. SOLUTION: The circuit element driving device is provided with a control unit 7 and a driving part 6. The control unit 7 receives the n-number of first command values u1, u2, u3 for generating voltages to be applied to the n-number (n is an integer of at least 2) of circuit elements 2, 3, 4 having two terminals, and generates and outputs the p-number (p is an integer of at least (n+1) and less than 2n) of second command values α, r1, r2, r3, on the basis of the n- number of the first command values u1, u2, u3. The driving part 6 generates and outputs the p-number of driving voltages Vcom , V1, V2, V3 on the basis of the p-number of the second command values. At least one from among the p-number of the driving voltages is a voltage changing on the basis of at least one out of the first command values and applied in common to the respective position terminals of at least two of the circuit elements.
    • 要解决的问题:提供一种电路元件驱动装置,其可以减少驱动多个电路元件所需的布线,而不会降低可施加到电路元件的瞬时最大电压。 解决方案:电路元件驱动装置设置有控制单元7和驱动部分6.控制单元7接收n个第一命令值u1,u2,u3,用于产生要施加到n数( n是具有两个端子的电路元件2,3,4的至少2的整数,并且产生并输出第二命令的p个数(p为至少(n + 1)且小于2n的整数) 基于第一命令值u1,u2,u3的n个数,值α,r1,r2,r3。 驱动部6基于第二指令值的p数生成并输出p个驱动电压Vcom,V1,V2,V3。 所述驱动电压的p个数中的至少一个是基于所述第一指令值中的至少一个指令值而变化的电压,并共同施加于至少两个所述电路元件的各个位置端子。
    • 6. 发明专利
    • Apparatus and method for projection
    • 装置和投影方法
    • JP2005123586A
    • 2005-05-12
    • JP2004244884
    • 2004-08-25
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • MUSHISHIKA YOSHIHIRO
    • G03F7/20H01L21/027
    • PROBLEM TO BE SOLVED: To provide an apparatus and a method for projection capable of improving resolution by shifting the phase of modulated light when drawing is carried out according to pattern data.
      SOLUTION: This projection apparatus receives an input of the pattern data representing the pattern to be formed on the projection plane, and comprises a spatial light modulator (micro-mirror array 3) for spatially modulating incident light according to the pattern data and a projecting optical system 5 for projecting the light reflected by the spatial light modulator onto the projection plane. The spatial light modulator comprises an array of a plurality of micro-mirrors 3b which are driven according to the pattern data, a substrate 3a for supporting the plurality of micro-mirrors, and a driving unit 3c for displacing each of the plurality of micro-mirrors 3b in the direction inclined and/or perpendicular with respect to the substrate 3a.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种用于投影的装置和方法,其能够根据图案数据进行绘图时通过移动调制光的相位而提高分辨率。 该投影装置接收表示要在投影平面上形成的图案的图案数据的输入,并且包括用于根据图案数据空间调制入射光的空间光调制器(微镜阵列3)和 用于将由空间光调制器反射的光投射到投影平面上的投影光学系统5。 空间光调制器包括根据图案数据驱动的多个微反射镜3b的阵列,用于支撑多个微反射镜的基板3a和用于移动多个微型反射镜3b中的每一个的驱动单元3c, 反射镜3b在相对于基板3a倾斜和/或垂直的方向上。 版权所有(C)2005,JPO&NCIPI
    • 7. 发明专利
    • Microactuator
    • 微致动器
    • JP2005341788A
    • 2005-12-08
    • JP2005118473
    • 2005-04-15
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • KUROZUKA AKIRAMUSHISHIKA YOSHIHIROKAJINO OSAMU
    • G02B26/08B81B3/00H02N1/00
    • PROBLEM TO BE SOLVED: To provide a microactuator wherein a multishaft moves in a tilted manner, a movable portion of light weight and high rigidity is fit, and a high-speed operation at a lower voltage is attained.
      SOLUTION: The microactuator 100 includes a base 1, a first comb-type electrode 2 supported by the base 1, a movable portion 6 having a second comb-type electrode 8 opposing the first comb type electrode 2, and at least one reinforcement rib 9 protruding toward the base 1, and an elastic support portion 3 for supporting the movable portion 6 so as to allow the movable portion 6 to be displaced, with respect to the base 1. The height of the second comb-type electrode 8 and the height of at least one reinforcing rib 9 are made to be different from each other.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了提供一种多重倾斜移动的微型致动器,配合重量轻,刚性高的可动部,能够获得较低电压的高速运转。 解决方案:微型致动器100包括基座1,由基座1支撑的第一梳状电极2,具有与第一梳状电极2相对的第二梳状电极8的可动部分6和至少一个 相对于基座1突出的加强肋9以及用于支撑可动部6以允许可动部6相对于基座1移位的弹性支撑部3。第二梳状电极8的高度 并且使至少一个加强肋9的高度彼此不同。 版权所有(C)2006,JPO&NCIPI
    • 8. 发明专利
    • Manufacturing method for fine mechanical element, and article equipped with the fine mechanical element
    • 精细机械元件的制造方法和装备精细机械元件的制品
    • JP2005305607A
    • 2005-11-04
    • JP2004127802
    • 2004-04-23
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • MUSHISHIKA YOSHIHIRO
    • B81C1/00B81B3/00H01L21/3205H01L23/52H01L29/41
    • PROBLEM TO BE SOLVED: To manufacture a fine mechanical element which includes a sacrificial layer having a structure such that its horizontal thickness and its vertical thickness are accurately set to individual values, and achieves both a fine-pitched structure after releasing and expansion of a movable stroke; and to form the sacrificial layer in the recesses of a substrate so as to have a thick layer on a bottom of each recess but a thin and uniform layer on each side surface of the recess.
      SOLUTION: There is provided a fine mechanical element manufacturing method, according to which the sacrificial layer is formed in the following two steps, i.e. in the first step, a first sacrificial layer 2 is formed on the bottom of the recess 1a, and in the second step, a second sacrificial layer 3 is formed on the other surfaces and on the first sacrificial layer so as to have a uniform thickness. Thus the thicknesses of the sacrificial layers formed in the respective steps are individually set to values t
      1 and t
      2 .
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了制造精细的机械元件,其包括具有将其水平厚度和垂直厚度精确地设定为各个值的结构的牺牲层,并且在释放和膨胀之后实现微小的结构 一个可移动的行程; 并且在基板的凹部中形成牺牲层,以在每个凹部的底部上具有厚层,但在凹部的每个侧表面上具有薄且均匀的层。 解决方案:提供了一种精细的机械元件制造方法,根据该机械元件的制造方法,牺牲层以以下两个步骤形成,即在第一步骤中,在凹部1a的底部上形成第一牺牲层2, 并且在第二步骤中,在其它表面上和第一牺牲层上形成第二牺牲层3以具有均匀的厚度。 因此,在各个步骤中形成的牺牲层的厚度被分别设定为值t SB 1和T SB 2。 版权所有(C)2006,JPO&NCIPI
    • 9. 发明专利
    • Information apparatus and optical pickup
    • 信息装置和光学拾取
    • JP2005122878A
    • 2005-05-12
    • JP2004272823
    • 2004-09-21
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • MUSHISHIKA YOSHIHIROKAJINO OSAMU
    • G11B7/095G11B7/135
    • PROBLEM TO BE SOLVED: To perform wavefront correction in which an effect of lens shift is reduced with high accuracy without necessitating a special exclusive member for aligning the optical axis of a light beam with that of an objective lens. SOLUTION: An information apparatus for reading and/or writing data from/on an optical disk 7 with a light beam is provided. The information apparatus includes: a light source 1 for generating the light beam; an objective lens 6 for focusing the beam onto the optical disk 7; a wavefront sensor for detecting the wavefront of the beam; a lens shift sensor for sensing how much the optical axis of the objective lens has shifted from that of the beam; a wavefront corrector (variable mirror 5), in which correcting elements 5b are arranged as a two-dimensional array so as to locally correct the wavefront of the beam and to be driven independently of each other; a wavefront arithmetic means for making correspondence of each coordinate on a cross section of the beam to the wavefront phase of the beam according to the output of the wavefront sensor; a lens shift correction arithmetic means for changing the correspondence of the coordinate position to the wavefront phase according to the output of the lens shift sensor; and a controller for controlling the wavefront corrector (variable mirror 5) in accordance with the output of the lens shift correction arithmetic means. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了进行以高精度降低透镜偏移的效果的波前校正,而不需要用于使光束的光轴与物镜的光轴对准的专用构件。 提供了一种用于从具有光束的光盘7上读出数据的信息装置。 信息装置包括:用于产生光束的光源1; 用于将光束聚焦到光盘7上的物镜6; 用于检测波束的波前的波前传感器; 透镜偏移传感器,用于感测物镜的光轴已经从光束的光轴偏移多少; 一个波前校正器(可变镜5),其中校正元件5b被布置为二维阵列,以便局部校正光束的波前并且彼此独立地被驱动; 波前算术装置,用于根据波前传感器的输出,使波束横截面上的每个坐标对应于波束的波前相位; 透镜偏移校正运算装置,用于根据透镜移位传感器的输出改变坐标位置与波前相位的对应关系; 以及根据透镜偏移校正运算装置的输出来控制波前校正器(可变镜5)的控制器。 版权所有(C)2005,JPO&NCIPI