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    • 1. 发明专利
    • Negative resist composition for ion beam drawing and pattern forming method
    • 用于离子束绘图和图案形成方法的负极性组合物
    • JP2013003439A
    • 2013-01-07
    • JP2011136222
    • 2011-06-20
    • Shibaura Institute Of Technology学校法人 芝浦工業大学Maruzen Petrochem Co Ltd丸善石油化学株式会社
    • NISHIKAWA HIROYUKIIIZUKA TETSUYAMITA TAKAHITONISHIURA TAKAOTAKEMORI TOSHIIKU
    • G03F7/038G03F7/029H01L21/027
    • PROBLEM TO BE SOLVED: To provide a negative resist composition for ion beam drawing, the composition having suitable sensitivity to an ion beam, capable of forming a fine structure with a high aspect ratio and a narrow pitch interval, and giving a resist pattern with less degradation of the pattern with time after exposure, and to provide a pattern forming method using the composition.SOLUTION: The negative resist composition for ion beam drawing comprises: an epoxy resin, which is obtained by glycidylation of a polyaddition product between an unsaturated alicyclic compound having two or more unsaturated double bonds in the molecule and phenols; a photo-cation polymerization initiator; and an organic solvent. The pattern forming method includes: a first step of obtaining a resist film by applying the above resist composition on a substrate and then removing the organic solvent by volatilization; a second step of obtaining a desired exposure pattern by irradiating the obtained resist film with an ion beam; and a third step of obtaining a pattern layer by developing the exposed resist film to dissolve and remove the resist in an unexposed area.
    • 要解决的问题:为了提供用于离子束拉伸的负性抗蚀剂组合物,该组合物对离子束具有适当的灵敏度,能够形成具有高纵横比和窄间距间隔的精细结构,并提供抗蚀剂 并且提供使用该组合物的图案形成方法。 解决方案:用于离子束拉伸的负型抗蚀剂组合物包括:通过在分子中具有两个或更多个不饱和双键的不饱和脂环族化合物和酚之间的加聚产物缩水甘油化得到的环氧树脂; 光阳离子聚合引发剂; 和有机溶剂。 图案形成方法包括:通过将上述抗蚀剂组合物涂布在基材上,然后通过挥发除去有机溶剂来获得抗蚀剂膜的第一步骤; 通过用离子束照射获得的抗蚀剂膜来获得期望的曝光图案的第二步骤; 以及第三步骤,通过显影曝光的抗蚀剂膜以在未曝光区域中溶解和除去抗蚀剂来获得图案层。 版权所有(C)2013,JPO&INPIT
    • 2. 发明专利
    • Polymerizable composition, method of manufacturing metal nanoparticle using the same, and cured film holding the metal nanoparticle
    • 可聚合组合物,使用其制备金属纳米颗粒的方法和固化的金属纳米材料
    • JP2012012529A
    • 2012-01-19
    • JP2010151598
    • 2010-07-02
    • Maruzen Petrochem Co Ltd丸善石油化学株式会社
    • NISHIURA TAKAO
    • C08F2/44B22F1/02B22F9/24C08F20/00H01B5/14H01B13/00
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing simply and easily a metal nanoparticle which excels in dispersion stability and can control the particle size by a wet process without need of special equipment or the like.SOLUTION: A polymerizable composition includes: a metal compound [A] which can form a metal fine particle by reduction; a radical polymerization nature vinyl monomer [B] which interacts with a metal ion or a metal complex which composes the metal compound [A], and has a functional group (Q) which can stick to the surface of a metal fine particle which has deposited by reduction; a photo-radical polymerization initiator [C]; and a solvent [D]. The method of manufacturing a metal nanoparticle is characterized in that an active energy ray is irradiated at the polymerizable composition to perform the forming of a metal nanoparticle and the forming of a protecting polymer at one process.
    • 要解决的问题:提供简单且容易地制造分散稳定性优异并且可以通过湿法控制粒度而不需要特殊设备等的金属纳米粒子的制造方法。 解决方案:可聚合组合物包括:可通过还原形成金属微粒的金属化合物[A] 自由基聚合性乙烯基单体[B]与构成金属化合物[A]的金属离子或金属络合物相互作用,并且具有能粘附到沉积的金属微粒表面的官能团(Q) 减少 光自由基聚合引发剂[C]; 和溶剂[D]。 金属纳米粒子的制造方法的特征在于,在聚合性组合物上照射活性能量射线,进行金属纳米粒子的形成,并在一个工序中形成保护性聚合物。 版权所有(C)2012,JPO&INPIT
    • 4. 发明专利
    • Photocurable composition, metal nano particle-dispersed film using photocurable composition, and method of manufacturing conductive thin film
    • 光刻胶组合物,使用光刻胶组合物的金属纳米颗粒分散膜,以及制造导电薄膜的方法
    • JP2012129133A
    • 2012-07-05
    • JP2010281283
    • 2010-12-17
    • Maruzen Petrochem Co Ltd丸善石油化学株式会社
    • NISHIURA TAKAO
    • H01B1/20B22F9/24H01B13/00H05K1/09H05K3/10
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal nano particle-dispersed film which is excellent in dispersibility of metal nano particles and is uniform in particle diameter simply and handily, and readily.SOLUTION: The photocurable composition is used for manufacturing a metal nano particle-dispersed film, and comprises at least the following [A]-[C]. [A] a metal compound which allows the production of a metal microparticle by reduction; [B] a polyfunctional monomer which interacts with a metal ion or metal complex that the metal compound [A] includes, has a functional group (Q) which can be adsorbed onto the surface of a metal microparticle deposited as a result of reduction, and has two or more radical-polymerizable groups; and [C] an optical radical polymerization initiator. In the photocurable composition, the blending volume of the polyfunctional monomer [B] in the composition is in a range of over 50 to under 95 mass% based on 100 mass% of the whole composition. Further, provided are a method of manufacturing a metal nano particle-dispersed film and a method of manufacturing a conductive thin film both using the photocurable composition.
    • 要解决的问题:提供一种制造金属纳米颗粒的分散性优异且金属纳米颗粒的分散性优异且容易且容易地粒径均匀的方法。 光固化性组合物用于制造金属纳米粒子分散膜,至少包含以下[A] - [C]。 [A]金属化合物,其允许通过还原制造金属微粒; [B]与金属化合物[A]所含的金属离子或金属络合物相互作用的多官能单体具有可以吸附在作为还原结果沉积的金属微粒的表面上的官能团(Q),以及 具有两个或更多个可自由基聚合的基团; 和[C]光自由基聚合引发剂。 在光固化性组合物中,组合物中的多官能单体[B]的配合体积相对于整个组合物的100质量%为50质量%〜95质量%以下的范围。 此外,提供了制造金属纳米颗粒分散膜的方法和使用该可光固化组合物的导电薄膜的制造方法。 版权所有(C)2012,JPO&INPIT