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1. 发明专利

JPH04297571A PRODUCTION OF FERROELECTRIC OXIDE THIN FILM 失效
公开(公告)号：JPH04297571A
公开(公告)日：1992-10-21
申请号：JP6174191
申请日：1991-03-26
申请人： MURATA MANUFACTURING CO , JAPAN RES DEV CORP , SHIMIZU TATSUO , MORIMOTO AKIJI
发明人： KITO HIDEO , OGAWA TOSHIO , SHIMIZU TATSUO , MORIMOTO AKIJI
IPC分类号： C23C14/08 , C23C14/28
摘要： PURPOSE:To easily obtain the thin ferroelectric oxide film having a perovskite crystal structure. CONSTITUTION:In the process for producing the thin ferroelectric oxide film by laser abrasion; gaseous oxygen is introduced into a vacuum device 1 and the gaseous pressure thereof is controlled. Sapphire 3 is kept heated by IR rays of an IR heating lamp 10 via a reflection mirror 11. A target 4 is then irradiated with a laser of 200mJ/shot laser power by using an ArF excimer layer 5 of 193nm wavelength, 10ns pulse width and 5Hz frequency and a condenser lens 6, by which the thin ferroelectric oxide film 7 is formed on the c-sapphire 3. The 1st film forming conditions of this time are specified to 80 to 200Pa gaseous pressure of the vacuum device and 450 to 500 deg.C range of the film forming substrate temp. at which the thin ferroelectric oxide film is formed. The 2nd film forming conditions are specified to 50 to 200Pa gaseous pressure of the vacuum device and 500 to 550 deg.C range of the film forming substrate temp. at which the thin ferroelectric oxide film is formed.

2. 发明专利

JP2504176B2 失效
公开(公告)号：JP2504176B2
公开(公告)日：1996-06-05
申请号：JP8604389
申请日：1989-04-04
申请人： MURATA MANUFACTURING CO
发明人： SANO ATSUSHI , OGAWA TOSHIO
IPC分类号： C04B35/00 , C04B35/46 , C04B35/49 , C04B35/495 , H01L41/187 , H03H9/17

3. 发明专利

JPH0532927B2 失效
公开(公告)号：JPH0532927B2
公开(公告)日：1993-05-18
申请号：JP685484
申请日：1984-01-17
申请人： MURATA MANUFACTURING CO
发明人： OGAWA TOSHIO
IPC分类号： H03H9/17 , H03H9/54 , H03H9/56

4. 发明专利

JPH0314375B2 失效
公开(公告)号：JPH0314375B2
公开(公告)日：1991-02-26
申请号：JP16347689
申请日：1989-06-26
申请人： MURATA MANUFACTURING CO
发明人： OGAWA TOSHIO , WAKINO KIKUO
IPC分类号： H03H9/25

5. 发明专利

JPH0235492B2 失效
公开(公告)号：JPH0235492B2
公开(公告)日：1990-08-10
申请号：JP4949280
申请日：1980-04-14
申请人： MURATA MANUFACTURING CO
发明人： OGAWA TOSHIO
IPC分类号： H03H9/24 , H01L41/04 , H01L41/08 , H03H9/02 , H03H9/05 , H03H9/125 , H03H9/17 , H03H9/42 , H03H9/58

6. 发明专利

JPH0242809A SURFACE ACOUSTIC WAVE DEVICE 失效
公开(公告)号：JPH0242809A
公开(公告)日：1990-02-13
申请号：JP16347689
申请日：1989-06-26
申请人： MURATA MANUFACTURING CO
发明人： OGAWA TOSHIO , WAKINO KIKUO
IPC分类号： H03H9/25
摘要： PURPOSE:To cause a piezoelectric characteristic to be stable to a severe temperature environment and thermal environment by covering a ferro-electric ceramic substrate with armoring resin, whose resistance value is lower than that of this substrate. CONSTITUTION:A surface acoustic wave filter is covered with armoring resin 8 with providing void 7 in the side of an input side inter-digital transducer(IDT) 2 and an output side IDT3 of a ceramic substrate 1. For the resin 8, for example, carbon powder, metallic oxide powder and semiconductor ceramic powder, etc., whose resistance value is lower than that of the substrate 1, is diffused to the resin 8. The film is covered with the resin 8 with including the reighborhood of respective drawing 5a-5e and another main surface to face to the forming surface of the input side IDT2 and output side IDT3. As a result, electric charge is accumulated to the IDT according to a temperature change, however, the generated electric charge is discharged through the resin 8, whose resistance value is lower than that of the substrate 1. Accordingly, polarization is prevented from getting-out by the electric charge, which is generated by the temperature change, and the effect of small dispersion can be obtained in the characteristic.

7. 发明专利

JPH0145770B2 失效
公开(公告)号：JPH0145770B2
公开(公告)日：1989-10-04
申请号：JP15420382
申请日：1982-09-03
申请人： MURATA MANUFACTURING CO
发明人： WAKINO KIKUO , OGAWA TOSHIO
IPC分类号： H01L41/187 , H03H3/02 , H03H9/17

8. 发明专利

JPS6327890B2 失效
公开(公告)号：JPS6327890B2
公开(公告)日：1988-06-06
申请号：JP9280379
申请日：1979-07-20
申请人： MURATA MANUFACTURING CO
发明人： OGAWA TOSHIO , WAKINO KIKUO
IPC分类号： H03H9/145 , H01L41/04 , H01L41/08 , H03H3/08 , H03H9/02 , H03H9/05 , H03H9/42

9. 发明专利

JPS6327404B2 失效
公开(公告)号：JPS6327404B2
公开(公告)日：1988-06-02
申请号：JP14152382
申请日：1982-08-12
申请人： MURATA MANUFACTURING CO
发明人： OGAWA TOSHIO
IPC分类号： B22F3/14 , B28B3/00 , B28B3/02 , C04B35/64

10. 发明专利

JPS6324324B2 失效
公开(公告)号：JPS6324324B2
公开(公告)日：1988-05-20
申请号：JP11856379
申请日：1979-09-13
申请人： MURATA MANUFACTURING CO
发明人： OGAWA TOSHIO
IPC分类号： H03H9/25 , H01L41/04 , H01L41/08 , H03H3/08 , H03H9/02 , H03H9/05 , H03H9/10 , H03H9/17 , H03H9/42 , H03H9/54 , H03H9/56

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