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1. 发明专利

JPH07266179A TURNING TOOL WITH CHIP DISCHARGE MECHANISM 失效
公开(公告)号：JPH07266179A
公开(公告)日：1995-10-17
申请号：JP4597795
申请日：1995-03-06
申请人： MITSUBISHI MATERIALS CORP
发明人： ARAI TATSUO , IIZUKA KAZUO
IPC分类号： B23Q11/00 , B23C5/06
摘要： PURPOSE:To attach a cutting edge tip to a cutter body smoothly and accurately and to contrive the curtailment of types in a chip guide member and a reduction in tool weight. CONSTITUTION:A peripheral surface 27 of a chip guide member 21 is set up in the more inward side of a cutter body than a peripheral cutting edge 3 of a cutting edge tip 2 and in parallel with this peripheral cutting edge 3, while a surface 36 at a tip side of the cutter body 20 is formed as being orthogonal with the peripheral surface 27 of the chip guide member 21 and set up in the more base end side of the cutter body 20 than a front cutting edge 5 of the cutting edge tip 2.

2. 发明专利

JP2000052229A TRUING DEVICE FOR WAFER POLISHING PAD 失效
公开(公告)号：JP2000052229A
公开(公告)日：2000-02-22
申请号：JP21836898
申请日：1998-07-31
申请人： MITSUBISHI MATERIALS CORP , SAIBEKKU NANO TECHNOL INC
发明人： HOSOKI KANJI , IIZUKA KAZUO , SANO HITOAKI
IPC分类号： B24B53/017 , H01L21/304 , B24B37/00
摘要： PROBLEM TO BE SOLVED: To provide a truing device used for a wafer polishing pad and having a superior installation property and a pressing pressure measuring means for measuring the pressing pressure of a truing grinding wheel part. SOLUTION: A pressing pressure measuring means 20 consists of a measuring part 21 and a measuring part supporting part 22. A leg part 28 is capable of parallel movement along the guide groove 30 of a substrate part 27 provided in parallel with a floor. Thus, the leg part 28 is moved by avoiding an obstacle even if the obstacle unfavorable to the installation of the pressing pressure measuring means 20 is found on the floor. The result enhances an installation property.

3. 发明专利

JPH08281530A CHIP DISCHARGING MECHANISM FOR ROLLING-CUTTING TOOL 失效
公开(公告)号：JPH08281530A
公开(公告)日：1996-10-29
申请号：JP515096
申请日：1996-01-16
申请人： MITSUBISHI MATERIALS CORP
发明人： SHIRATORI SHIGENAO , HASEGAWA RYOEI , IIZUKA KAZUO
IPC分类号： B23C5/06 , B23C9/00 , B23Q11/00
摘要： PURPOSE: To improve the discharging ability of chips. CONSTITUTION: A cylindrical body 35 opening toward the tip of a cutter body is provided on the peripheral outside of a cutter body 13 having a throw away tip 16 attached to the outer periphery of its tip. A pump chamber 38 expanding toward the radial outside of the cutter body is formed between the inner periphery of the cylindrical body 35 and the periphery of the basic end of the cutter body 13, and the side face of the cylindrical body 35 is somewhat expanded from the inner periphery of the pump chamber 38 toward its radial outside to extend to the outside of the pump chamber for forming a discharge port 40 communicating with the outside of the cylindrical body 35. A plurality of blades 52 is provided along the direction of the circumference of the cutter body on the periphery of the cutter body inside the pump chamber 38.

4. 发明专利

JP2535964B2 失效
公开(公告)号：JP2535964B2
公开(公告)日：1996-09-18
申请号：JP26350887
申请日：1987-10-19
申请人： MITSUBISHI MATERIALS CORP
发明人： SHIRATORI SHIGENAO , IIZUKA KAZUO
IPC分类号： B23C9/00 , B23C5/06 , B23P11/00 , B23Q11/00

5. 发明专利

JPH03281114A MILLING TOOL 失效
公开(公告)号：JPH03281114A
公开(公告)日：1991-12-11
申请号：JP8015990
申请日：1990-03-28
申请人： MITSUBISHI MATERIALS CORP
发明人： ARAI TATSUO , IIZUKA KAZUO
IPC分类号： B23Q11/08 , B23C5/06 , B23C5/16 , B23C9/00 , B23Q11/00
摘要： PURPOSE:To execute the centralized processing of chips and to realize the drastic improvement of a working environment, by providing the mean which processes the chip with their suction at the position faced to the discharging port of a machine on the milling tool used for the machining center, etc., equipped with an automatic tool changing device. CONSTITUTION:When a vane 50 is rotated according to the rotation of a tool main body 20, the air of the tool tip part is sucked to the base end side, so the air around the tool is sucked to the internal part from the opening part of a cover 34 and the chip generated by a cutting edge tip 21 is sucked to a chip storage room 36. So the chip can be recovered concentrically from the discharging port 37 of a cover 34. Also, the cover 34 is engaged with a main shaft head H side at the installation time of the tool main body 20 to a main shaft S, so the cover 34 is held at the specific position even in the case of the tool main body 20 being rotated. On the other hand, the rotation of the cover 34 for the tool main body 20 is restrained with the cover 34 and tool main body 20 being engaged, in the case of the tool main body 20 being removed from the main shaft S. Moreover with the provision of a chip guide member 41 the chip on a rake face 21a is forcibly guided to a chip storage room 36 side.

6. 发明专利

JP2000052239A WAFER POLISHING DEVICE 失效
公开(公告)号：JP2000052239A
公开(公告)日：2000-02-22
申请号：JP21837298
申请日：1998-07-31
申请人： MITSUBISHI MATERIALS CORP
发明人： KAJIWARA JIRO , HOSOKI KANJI , IIZUKA KAZUO , FUJIMOTO KENJI , ADACHI HITOSHI
IPC分类号： B24B37/04 , B24B37/30 , B24B37/32 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To sufficiently assure a space required for tool operation above a head body; and to easily rotates and operates a tool without projecting a locking part for holding a carrier to above the head body. SOLUTION: A locking part 60 locking and unlocking with and from a carrier 38 is constituted not to project from the upper surface of a head body 32 at the engaging position and the removing position relative to the carrier 38. The result projects no locking part 60 for holding the carrier 38 to above the head body 32, sufficiently assuring a space required for tool operation above the head body 32.

7. 发明专利

JPH08108309A ROTARY CUTTING TOOL AND CHIP DISCHARGING MECHANISM FOR ROTARY CUTTING TOOL 失效
公开(公告)号：JPH08108309A
公开(公告)日：1996-04-30
申请号：JP26055395
申请日：1995-10-06
申请人： MITSUBISHI MATERIALS CORP
发明人： SHIRATORI SHIGENAO , IIZUKA KAZUO
IPC分类号： B23Q11/00 , B23C5/06
摘要： PURPOSE: To positively and sufficiently guide and suck chips to discharge them without scattering them. CONSTITUTION: A cutting edge 3 is provided on the outside peripheral part of the tip of a cutter body 1, and a chip pocket 7 is provided in front of the cutting edge. A roughly cylindrical chip storage body 18 for covering the outer peripheral surface of the cutting body 1 is arranged-installed to form a chip discharge space 21 between the cutter body 1 and the chip storage body 18. A through-hole 18a connected to an external suction machine is provided in the chip storage body 18. A chip guide member 14 is provided on the opening part of the chip pocket 7 to form a gap between the rake face of the cutting edge 3 and itself, and to forcedly guide chips into the chip pocket 7. With suction force applied, the chips are guided into the chip pocket 7 through the gap and then into the chip discharge space 21, and discharged from the hole 18a of the chip storage body 18 to the outside.

8. 发明专利

JPH0446707A CUTTING TOOL 失效
公开(公告)号：JPH0446707A
公开(公告)日：1992-02-17
申请号：JP15734690
申请日：1990-06-15
申请人： MITSUBISHI MATERIALS CORP
发明人： ARAI TATSUO , IIZUKA KAZUO
IPC分类号： B23Q11/00 , B23C9/00
摘要： PURPOSE:To facilitate application to a working machine equipped with an automatic tool exchanger without problems by a method wherein cut chips are discharged in sequence while they are treated without being scattered around a machine. CONSTITUTION:Under a condition where a cutting tool is stored in a magazine, a cover 36 and a tool main body 20 are integrated with each other through an arbor 22, stopper 56 and an engaging shaft 54. When the arbor 22 is mounted on a spindle 28, the shaft 54 engages with an engaging hole 60 while the stopper 56 is released from an engaging groove 61, and the cover 36 is engaged with an engaging block 58 through the shaft 54. As a result, the cover 36 is restrained in its rotation and orientation of a discharge pipe 40 is fixed. When coaxial arrangement of the discharge pipe 40 and a through hole 73 is carried out after a spindle head 27 is moved, a pipe line is formed which is communicated with a discharge hose 72 via connection part 71 through the discharge pipe from a cut chip storing chamber 39. After that, the spindle head 27 is moved in the direction to separate from a table 62 face vertically, a coupling 70 is allowed only in its upward movement, and the movement in the direction parallel to the table 62 face is allowed.

9. 发明专利

JP2000343422A WAFER POLISHING DEVICE AND MANUFACTURE OF WAFER 失效
公开(公告)号：JP2000343422A
公开(公告)日：2000-12-12
申请号：JP15880299
申请日：1999-06-04
申请人： MITSUBISHI MATERIALS CORP
发明人： HOSOKI KANJI , SHIBATANI HIROSHI , IIZUKA KAZUO , KOMAZAKI MASAHITO
IPC分类号： B24B37/04 , B24B37/30 , B24B37/32 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a wafer polishing device capable of polishing a wafer stably and its manufacturing method. SOLUTION: A wafer holding head 1 is provided with a head main body 2, a diaphragm 5 stretched in the head main body 2, a carrier 6 which is fixed on the diaphragm 5, is provided so as to displace in the direction of axial line of the head together with the diaphragm 5, and holds one face of a wafer W, a retainer ring 7 which is concentrically arranged at outer periphery of the carrier 6, is fixed on the diaphragm 5, and is provided so as to displace in the direction of axial line of the head together with the diaphragm 5, and a thin plate 20 like a circular ring fixed on an upper face of the diaphragm 5. The twist acting on the diaphragm 5 when the wafer W is polished is suppressed by the thin plate 20 so that the wafer W is stably polished.

10. 发明专利

JPH07164275A ROTARY CUTTING TOOL AND CHIP DISCHARGING MECHANISM FOR ROTARY CUTTING TOOL 失效
公开(公告)号：JPH07164275A
公开(公告)日：1995-06-27
申请号：JP24446694
申请日：1994-10-07
申请人： MITSUBISHI MATERIALS CORP
发明人： ARAI TATSUO , IIZUKA KAZUO
IPC分类号： B23Q11/00 , B23C9/00 , B23Q9/00
摘要： PURPOSE:To surely and sufficiently guide, suck, and discharge chips without being scattered. CONSTITUTION:Each throwaway tip 23 is installed to a recessed groove 22 on the top end outer circumferential part of a cutter body 20 by a clamp member 26. Each clamp member 26 has a chip guide part 28 whose end surface is formed by a notch 29 opposed to the face of the tip 23. A clearance (t) for allowing the pass of chips is formed between the notch 29 and the tip face. A chip sucking cover 40 is mounted on the outer circumference of the cutter body 20, and a chip housing chamber 42 to which the chips are guide from the clearance (t) is provided between the both. The chip guide part 42 is situated to cover the top end opening part of the recessed groove 22 with clearances being left with the tip face and with the top end inner circumferential surface of the cover 40, respectively.

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