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    • 1. 发明专利
    • CONTROL OF MAIN STEAM PRESSURE IN BOILER
    • JPH07145905A
    • 1995-06-06
    • JP29508993
    • 1993-11-25
    • MITSUBISHI HEAVY IND LTD
    • KATSUKI KENJI
    • F22B35/00
    • PURPOSE:To control the flow rate of the feedwater to a boiler in total by adding to a main-steam pressure deviation signal a temperature deviation signal obtained by deducting a preliminarily specified set value from the main-steam temperature signal of the boiler. CONSTITUTION:A deviation signal obtained by deducting a set main-steam temperature value 9 from the main-steam temperature signal 8S of a boiler is prepared by a subtracter 10. After multiplying the result by a gain 11a and cutting off the excesses of the signal over a certain range by an upper-and-lower value limiter 12a the result is added to a main-steam pressure deviation signal by an adder 13a. Consequently, when the main-steam temperature deviation is large, the feedwater flow rate in total is so controlled as to make it smaller, that is, in the case of an excess of the main-steam temperature over a set value, the control makes the feedwater flow rate to the boiler increase in total, so that the main-steam temperature lowers to the set value. Conversely, in the case of lower of the mainsteam temperature below the set value, the control makes the feedwater flow rate to the boiler decrease in total, so that the main- steam temperature rises back to the set value.
    • 4. 发明专利
    • METHOD FOR DIAGNOSING ABNORMALITY OF DETECTOR IN PLANT
    • JPH01269018A
    • 1989-10-26
    • JP9711988
    • 1988-04-20
    • MITSUBISHI HEAVY IND LTD
    • KATSUKI KENJI
    • G01D1/18G01D1/16G01D21/00G05B23/02
    • PURPOSE:To diagnose the abnormality of a detector separately from a change in characteristics of a plant by respectively estimating values of plural detectors to be diagnosed from the dynamic relations between the detectors to be diagnosed and plural detectors not to be diagnosed by using the detectors not to be diagnosed. CONSTITUTION:In a plant 1 the signal u(t) of a detector which is not to be diagnosed, for example, a detector signal which is required for operating the plant 1 and, for example, the signal y(t) of a detector to be diagnosed required for monitoring and controlling the plant 1 are used. The signals u(t) and y(t) are inputted to an estimating section 2. A reference quantity calculating section 3 calculates an abnormality estimating reference quantity J from the difference epsilon(t) between an estimated value y(t) and measured value y(t). A decision section 4 decides whether or not a reference quantity obtained by causing the section 3 to recalculate the abnormality estimating reference quantity J is below a prescribed value and, when the recalculated reference quantity is smaller than the prescribed value, the section 4 decides that the non-estimated detector is faulty.
    • 6. 发明专利
    • Laser etching device
    • 激光蚀刻装置
    • JP2005101260A
    • 2005-04-14
    • JP2003332910
    • 2003-09-25
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • WATANABE HIROTSUYOKATSUKI KENJIKATO SATOSHIKAGIMOTO YOSHIMITSUKUDA HIROSHIKOKAJI SOJIYAMAUCHI MASAFUMIHARA TADAHIKO
    • H01L21/302
    • PROBLEM TO BE SOLVED: To provide a laser etching device in which, even if a film face side formed on a substrate is supported by a support pin, it is possible to prevent damage to a film face from being generated; and to prevent a fact that a short-circuit is generated by damage to an element of the film face to reduce substrate efficiency.
      SOLUTION: The laser etching device has a substrate which is substantially horizontally mounted, and is fixed by pressing the periphery of the substrate, and a substrate supporting device which comprises a support pin for supporting the lower face of the substrate. In the laser etching device, a laser beam is irradiated from above to laser-etch the film face on the substrate. The support pin is arranged to have an upper end into which a spherical member is rotatably filled for supporting. Alternatively, the support pin is arranged to have a top to which an air outlet is opened, and an air supply passage for making the air outlet with an air supply device communicate.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种激光蚀刻装置,其中即使由支撑销支撑形成在基板上的膜面侧,也可以防止产生对膜面的损害; 并且防止通过损坏膜面的元件而产生短路以降低基板效率的事实。 解决方案:激光蚀刻装置具有基本上水平安装的基板,并且通过按压基板的周边而被固定,以及基板支撑装置,其包括用于支撑基板的下表面的支撑销。 在激光蚀刻装置中,从上方照射激光束,对基板上的膜面进行激光蚀刻。 支撑销布置成具有可旋转地填充以支撑的球形构件的上端。 或者,支撑销布置成具有空气出口打开的顶部,以及用于使空气出口与供气装置连通的供气通道。 版权所有(C)2005,JPO&NCIPI
    • 7. 发明专利
    • CONVERSATION TYPE DIAGNOSTIC SYSTEM
    • JPH0720937A
    • 1995-01-24
    • JP16468993
    • 1993-07-02
    • MITSUBISHI HEAVY IND LTD
    • KATSUKI KENJI
    • G05B23/02G08B31/00
    • PURPOSE:To lighten the burden on a user when a question required to investigate the cause of abnormality is answered to by improving the precision of the investigation of the cause of the abnormality. CONSTITUTION:A diagnostic part 3 receives a report from an abnormality detection and report part 2 and takes a diagnosis for estimating and investigating the cause of the abnormality by using the sensor input information from a sensor input device 1. A list display part 5 displays, in a list, question items that a question item management part 5a manages as to the state of a plant, which is not known only with the sensor input information from the sensor input device 1, on a display device 4. Consequently, the input of answers to the questions are urged. An answer acceptance part 7 after recognizing which question item in the lift on the display device 4 an answer inputted through an answer input part 6 corresponds to outputs the answer to a rediagnostic part 8. The rediagnostic part 8 takes a rediagnosis for the estimating and investigating the cause of the abnormality on the basis of the answer and sensor input information and outputs the rediagnostic result on the display device 4.
    • 8. 发明专利
    • FUEL SUPPLYING DEVICE FOR THERMAL POWER PLANT BOILER
    • JPH03221713A
    • 1991-09-30
    • JP1486690
    • 1990-01-26
    • MITSUBISHI HEAVY IND LTD
    • KICHIJIMA NORIOKATSUKI KENJIKURIHARA MIKI
    • F23N1/08F22B35/00
    • PURPOSE:To minimize influence on a water-cooled wall outlet temperature and to suppress variation of main steam temperature efficiently by a method wherein the flow rate of fuel is controlled for a plurality of burners located at the upper stage side near an over-heater and located at the lower stage and then a water-to-fuel ratio is corrected only for the flow rate of fuel in the upper stage burner. CONSTITUTION:In the event that the number of burners is five, for example, the burners are divided into upper three stages near a final over-heater and opposite lower two stages. A volume of fuel proportionally distributed to the two burner stages is supplied to the lower two stages (a stage A and a stage B) under a boiler input instruction, a water-fuel ratio is added to a value in which a boiler input instruction is proportionally distributed to the upper three stages (a stage C, a stage D and a stage E) for three stages of the burner and then this is supplied as fuel. With such an arrangement, it is possible to reduce influence against a water-cooled wall of which temperature is governed by the lower stage burner fuel and further improve the effect of water-to-fuel ratio against a final over-heater of which temperature is governed by the upper stage burner fuel. Actually, in the event that the fuel exceeds the upper limit and the lower limit of a burner volume due to a substantial variation of load, values of proportional distributors 36 and 37 are corrected in response to the actual number of burners due to the fact that the number of burners is also varied.