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1. 发明专利

JPH0557289B2 失效
公开(公告)号：JPH0557289B2
公开(公告)日：1993-08-23
申请号：JP8942788
申请日：1988-04-12
申请人： MITSUBISHI ELECTRIC CORP
发明人： ADACHI HIROSHI , ADACHI ETSUSHI , HAYASHI OSAMU , OKABASHI KAZUO
IPC分类号： C08G77/04 , C07F7/18 , C07F7/20 , C08G77/06 , C08G77/08 , C08G77/34 , C08G77/38

2. 发明专利

JPH01199678A FORMATION OF HIGH PURITY THIN SIO2 FILM 失效
公开(公告)号：JPH01199678A
公开(公告)日：1989-08-11
申请号：JP2430488
申请日：1988-02-03
申请人： MITSUBISHI ELECTRIC CORP
发明人： ADACHI ETSUSHI , ADACHI HIROSHI , HAYASHI OSAMU , OKABASHI KAZUO
IPC分类号： B05D1/40 , B05D3/04 , B05D7/24 , C08J7/00 , C23C18/12 , H01L21/312 , H01L21/316
摘要： PURPOSE:To obtain a high purity thin SiO2 film by dissolving a silicone ladder polymer having a specified compsn. contg. is phenyl or lower alkyl, R is H, methyl or ethyl and (n) is an integer of 2-1,000] and contg.

3. 发明专利

JPS6426639A HIGH-PURITY PHENYLSILICONE LADDER POLYMER AND PRODUCTION THEREOF 失效
公开(公告)号：JPS6426639A
公开(公告)日：1989-01-27
申请号：JP8942888
申请日：1988-04-12
申请人： MITSUBISHI ELECTRIC CORP
发明人： ADACHI HIROSHI , ADACHI ETSUSHI , HAYASHI OSAMU , OKABASHI KAZUO
IPC分类号： C08G77/04 , C07F7/18 , C07F7/20 , C08G77/06 , C08G77/08 , C08G77/34
摘要： PURPOSE:To provide the titled polymer having extremely low content of impurities such as sodium, potassium, chlorine, iron, copper, lead, uranium, thorium, etc. and excellent heat-resistance and contributing to the improvement in the reliability of semiconductor elements. CONSTITUTION:A phenyltrialkoxysilane is dissolved in an organic solvent. Pure water containing slight amount of hydrogen chloride is dripped to the solution under cooling to effect the hydrolysis of the phenyltrialkoxysilane and the product is washed with ultra-pure water to obtain the objective polymer of formula (R1-R4 are lower alkyl; n is 6-1,000) applicable to a passivation film and buffer coat film, etc., of a semiconductor element. The content of sodium, potassium, iron, copper and hydrogen chloride in the polymer is

4. 发明专利

JPS63120774A COATING FLUID FOR FORMING HIGH-PURITY SIO2 FILM 失效
公开(公告)号：JPS63120774A
公开(公告)日：1988-05-25
申请号：JP26621286
申请日：1986-11-07
申请人： MITSUBISHI ELECTRIC CORP
发明人： ADACHI HIROSHI , ADACHI ETSUSHI , HAYASHI OSAMU , OKABASHI KAZUO
IPC分类号： H01L21/312 , C03B8/00 , C03B8/02 , C03B19/12 , C09D183/04 , H01L21/316
摘要： PURPOSE:To obtain the title coating fluid capable of forming at relatively low temperatures a high-purity SiO2 film of good quality having excellent electrical characteristics and low internal stress, by mixing a specified high-purity silicone ladder polymer containing little impurities with an organic solvent. CONSTITUTION:The title coating fluid is obtained by mixing a silicone ladder polymer which contains an alkali metal, iron, lead, copper, and a hydrogen halide each in an amount of 0.1ppm or less and uranium and thorium each in an amount of 0.1ppb or less and is shown by the formula (wherein R1 is phenyl or lower alkyl; R2 is H, methyl or ethyl; n is 2-1,000) (e.g., polyphenylsilsesquioxane) with an organic solvent (e.g., toluene). This coating fluid is capable of forming an SiO2 film at a low temperature of about 600 deg.C; therefore, it is useful for realizing a semiconductor manufacturing process at a lower temperature.

5. 发明专利

JPS6317285B2 失效
公开(公告)号：JPS6317285B2
公开(公告)日：1988-04-13
申请号：JP14821081
申请日：1981-09-19
申请人： MITSUBISHI ELECTRIC CORP
发明人： OKABASHI KAZUO , HAYASHI OSAMU , TAKAHASHI ICHIRO
IPC分类号： C08G59/00 , C08F14/00 , C08F14/26 , C08G59/14 , C08G59/18 , C08G59/68 , C08G59/70 , C08G75/00 , C08L1/00 , C08L27/00 , C08L63/00 , C08L81/00 , C08L81/02

6. 发明专利

JPS6316560B2 失效
公开(公告)号：JPS6316560B2
公开(公告)日：1988-04-09
申请号：JP10964983
申请日：1983-06-17
申请人： MITSUBISHI ELECTRIC CORP
发明人： HAYASHI OSAMU , MATSUDA SADAMU , TAKAHASHI ICHIRO , OKAMOTO GORO , OKABASHI KAZUO
IPC分类号： B32B15/08 , B29C63/24 , B29K9/00 , B29K23/00 , E21B17/00 , E21B36/04 , E21B43/24 , E21C41/24 , F16L25/01

7. 发明专利

JPS6374224A UNDERGROUND COMMUNICATION EQUIPMENT 失效
公开(公告)号：JPS6374224A
公开(公告)日：1988-04-04
申请号：JP22026486
申请日：1986-09-17
申请人： MITSUBISHI ELECTRIC CORP
发明人： SANEMORI AKIRO , OKABASHI KAZUO , MURAI YUTAKA
IPC分类号： H04B13/00
摘要： PURPOSE:To improve the receiving sensitivity and the S/N on ground by separating a conductor such as a drill pipe or the like a part of which is connected to ground into two parts insulated electrically by an insulation layer, constituting the circuit in a way that the ground and a conductive casing are parts of the electric circuit so as to send a signal from underground while using a change in the electric field as a medium. CONSTITUTION:The drill pipe 40 at the tip accommodating a layer detecting measuring instrument 80 and a transmission section 90 is separated into a bottom part 41 and an upper part 42 by an insulation collar 6 while insulating them electrically. A lead is connected respectively to the bottom part 41 and the upper part 42 from the transmission section 90. Moreover, plural cylindrical casings 21, 22, 23 made of iron for protecting an oil well 3 are provided around the drill string comprising drill pipes 4 on ground, and connected electrically with the bottom part 41 respectively electrically via a bit 5 and a ground layer 2. On the other hand, a preamplifier 11 and a proper signal processor or the like are provided on ground, one of input terminals of the amplifier 11 is connected to the drill pipe 4 at the uppermost end and the other is connected to the casing 23, and its output is given to the signal processor.

8. 发明专利

JPS6340264A MANUFACTURE OF ELECTROLYTE RETAINING MATRIX FOR PHOSPHORIC ACID FUEL CELL 失效
公开(公告)号：JPS6340264A
公开(公告)日：1988-02-20
申请号：JP18445386
申请日：1986-08-05
申请人： MITSUBISHI ELECTRIC CORP
发明人： HAYASHI OSAMU , ADACHI HIROSHI , TAKAHASHI ICHIRO , OKABASHI KAZUO , SAKAMOTO YOSHIAKI
IPC分类号： H01M8/02
摘要： PURPOSE:To increase bubbling pressure and to increase the permeability and retainability of phosphoric acid by applying aqueous dispersion containing silicon carbide, polyetheretherketone, and binder to a nonwoven fabric sheet comprising silicon carbide fabric and polyetheretherketone fiber. CONSTITUTION:An electrolyte retaining matrix is obtained by bonding silicon carbide powder, polyetheretherketone powder, and binder to a nonwoven fabric sheet obtained by forming a mixture of silicon carbide fiber and polyetheretherketon fiber in a paper-like sheet. The nonwoven fabric sheet manufactured with a paper making machine has a thickness of 150-300mum and a weight of 25-50g/m . The sheet is coated with an aqueous dispersion containing silicon carbide, polyetheretherketone, and binder so that the content of polyetheretherketone is 5-20wt% of silicon carbide.

9. 发明专利

JPS6241755A MANUFACTURE OF HEAT-RESISTNAT BOARD 失效
公开(公告)号：JPS6241755A
公开(公告)日：1987-02-23
申请号：JP17966285
申请日：1985-08-13
申请人： RYODEN KASEI KK , MITSUBISHI ELECTRIC CORP
发明人： IKEDA YASUHIKO , MURAKAMI TADAYOSHI , KATO KAZUHARU , OKABASHI KAZUO
IPC分类号： C04B35/453 , C04B35/00

10. 发明专利

JPS6241754A MANUFACTURE OF LOW TEMPERATURE SINTERABLE HEAT-RESISTANT MATERIAL 失效
公开(公告)号：JPS6241754A
公开(公告)日：1987-02-23
申请号：JP17963485
申请日：1985-08-13
申请人： MITSUBISHI ELECTRIC CORP
发明人： MURAKAMI TADAYOSHI , KATO KAZUHARU , OKABASHI KAZUO
IPC分类号： C04B35/453 , C04B35/00 , C04B35/16

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