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1. 发明专利

JPH10238833A CLEAN ROOM 失效
公开(公告)号：JPH10238833A
公开(公告)日：1998-09-08
申请号：JP4098497
申请日：1997-02-25
申请人： MITSUBISHI ELECTRIC CORP
发明人： EZAKI KOJI , FUKUMOTO HAYAAKI , IZUMI SEISHI
IPC分类号： F24F7/06
摘要： PROBLEM TO BE SOLVED: To provide a clean room which prevent the diffusion of a foreign matter produced during the maintenance time of a device or when changing a chemical and prevent the contamination of a semiconductor wafer on the way of a manufacturing process and prevent the contamination inside the device disassembled for maintenance. SOLUTION: A maintenance area formation device 16, which is mobile and can be housed, is provided inside a clean room 1 while an air conditioning system, which can supply air different from the air supplied to a working zone 9 as an occasion demands, is provided inside a maintenance area 17 formed with the maintenance area formation device 16. During the maintenance of a device 10a or exchange time of a chemical, the maintenance area formation device 16 is transferred to a required place, thereby forming the maintenance area 17 and supplying air having a required degree of cleanses into the maintenance area 17.

2. 发明专利

JPH0596277A METHOD FOR PRODUCING PURE WATER AND APPARATUS THEREFOR 失效
公开(公告)号：JPH0596277A
公开(公告)日：1993-04-20
申请号：JP25729191
申请日：1991-10-04
申请人： ORGANO KK , MITSUBISHI ELECTRIC CORP
发明人： MANABE TOSHIKI , YAME HIROSHI , KAWADA KAZUHIKO , BAN KOJI , YANAGI MOTONORI , FUKUMOTO HAYAAKI
IPC分类号： C02F1/20 , C02F1/32 , C02F1/42 , C02F1/78 , C02F9/00
摘要： PURPOSE:To reduce a nonionic silica component in pure water or ultrapure water as low as possible by subjecting the nonionic silica component to the catalytic reaction with ozone and irradiating the reacted component with ultraviolet rays simultaneously with or after this reaction process to ionize the same and passing the ionized component through an ion exchange resin tower. CONSTITUTION:Untreated water is passed through an untreated water feed pipe 2 from a raw water tank 1 to be fed to a reaction tank 3 by a pump P and an ejector 4 made of acid-resistant and ozone-resistant material quality is provided on the way of the untreated water feed pipe 2, and ozone is sucked by the aspirator action of the ejector 4 to efficiently perform gas-liquid mixing. Untreated water having ozone dissolved therein is supplied to the reaction tank 3 from the lower part thereof and aerated by ozone from the air diffusion pipe 5 provided to the bottom part of the tank 3 to hold the concn. of ozone in the reaction tank 3 to a predetermined value or more. The treated water after ozone aeration is guided to a gas-liquid separation tank 6 to be subjected to gas-liquid separation and further passed through an ultraviolet irradiation device 7 to be supplied to a membrane treatment device 9 by a dustless pump 8 and the filtered water from the device 9 is treated in a mixed bed type ion exchange resin tower 10.

3. 发明专利

JPH0526790A GAS REPLACEMENT DEVICE 失效
公开(公告)号：JPH0526790A
公开(公告)日：1993-02-02
申请号：JP18244591
申请日：1991-07-23
申请人： MITSUBISHI ELECTRIC CORP
发明人： MATSUMOTO KOICHI , FUKUMOTO HAYAAKI , TANAKA HIROSHI
IPC分类号： G01N1/02
摘要： PURPOSE:To speedily replace air with an inert gas by replacing air with an inert gas keeping the particle state, increasing the absorbing rate of sampling air and replacing during the sampling. CONSTITUTION:In a cone shape vessel 11 with the head trunkated, whirl flow of the air is generated. The particles included in the air are collected to the small diameter end of the vessel 11 to guide in the negative pressure inert gas cell 15 and the particles in the inert gas cell 15 are exhausted together with the inert gas.

4. 发明专利

JPH0445102B2 失效
公开(公告)号：JPH0445102B2
公开(公告)日：1992-07-23
申请号：JP21157385
申请日：1985-09-24
申请人： MITSUBISHI ELECTRIC CORP
发明人： MUKOGAWA YASUKAZU , TAMURA KATSUHIKO , FUKUMOTO HAYAAKI
IPC分类号： G01N15/02 , G01N15/06 , G01N15/14 , G01N33/18

5. 发明专利

JPH04171818A SEMICONDUCTOR WAFER CLEANING DEVICE 失效
公开(公告)号：JPH04171818A
公开(公告)日：1992-06-19
申请号：JP30190890
申请日：1990-11-05
申请人： TAIYO SANSO CO LTD , MITSUBISHI ELECTRIC CORP
发明人： TADA MASUTA , FUKUMOTO HAYAAKI , OMORI TOSHIAKI
IPC分类号： H01L21/304
摘要： PURPOSE:To lead a clean liquid coolant only to an ice-making container by measuring the amount of dust contained in the liquid coolant sampled from a sampling pipeline and stopping the supply of the liquid coolant to the container by actuating a three-way valve when the amount exceeds a prescribed value. CONSTITUTION:While liquid nitrogen 3 is used to obtain fine ice particles by freezing pure water finely atomized from a spray nozzle 6, the amount of dust contained in the liquid nitrogen 3 in a nitrogen supply pipeline 20 is always measured with a dust counter 17. When the occurrence of dust is conformed, the liquid nitrogen 3 is led to the external part of the hopper 1a of an ice- making container 1 by switching a three-way valve 14 so as to stop the supply of the liquid nitrogen 3 into the container 1. When the supply of the liquid nitrogen 3 into the container 1 is stopped, the supply of the pure water from the nozzle 6 is also stopped simultaneously. The liquid nitrogen 3 led to the external part of the hopper 1a of the container 1 cools the hopper 1a and prevents temperature rise of the ice particles 8 contained in the hopper 1a.

6. 发明专利

JPH04122405A OIL PURIFYING DEVICE IN VACUUM PUMP FOR SEMICONDUCTOR 失效
公开(公告)号：JPH04122405A
公开(公告)日：1992-04-22
申请号：JP24143890
申请日：1990-09-11
申请人： ZEOTETSUKU ERU AARU SHII KK , RIKITSUDO KONSANDO KK , MITSUBISHI ELECTRIC CORP
发明人： INOUE NOBORU , OKANOE KIMIHIKO , FUKUMOTO HAYAAKI , HAMA MASAHARU
IPC分类号： F16N39/06 , B01D35/02 , B01D35/06 , B03C5/00
摘要： PURPOSE:To excellently purify oil even when oil shows strong acidity and alkalinity and to prevent a filter form being clogged by providing a pH regulation means which regulates pH of oil in a range of neutral from weak acidity. CONSTITUTION:Voltage is impressed to lubricating oil of a vacuum pump for a semiconductor by a voltage impressing means 4 which is constituted of electrodes 5a, 5b having the same electric potential, an electrode rod 6 and a vessel main body 1a. Further, a pH regulation means 9 is constituted of an adsorption layer which is obtained by mixing zeolite with acid clay or activated alumina. The pH of the said lubricating oil is regulated in a range of neutral from weak acidity. Furthermore, the lubricating oil impressed with voltage by the voltage impressing means 4 is filtered by a filtering means 8 constituted of a filter. As a result, even when this lubricating oil shows strong acidity and shows strong alkalinity, it is excellently purified and also clogging of the filter is not caused.

7. 发明专利

JPH03181351A SPRAYING DEVICE 失效
公开(公告)号：JPH03181351A
公开(公告)日：1991-08-07
申请号：JP32018089
申请日：1989-12-08
申请人： TAIYO SANSO CO LTD , MITSUBISHI ELECTRIC CORP
发明人： TADA MASUTA , FUKUMOTO HAYAAKI , OMORI TOSHIAKI
IPC分类号： B05B7/24 , B05B9/03
摘要： PURPOSE:To supply clean liq. and gas by separating a liq. system from a gas system when the gas is supplied to a spray nozzle, providing a filter in each system, furnishing a valve in a blow line and spraying the liq. from the nozzle by opening and closing the valve. CONSTITUTION:A liq. filter 7 and a gas filter 8 are connected in parallel to a spray nozzle 6 with a connecting pipe. A blow line is branched from each connecting pipe, and a liq. valve 1 and a gas valve 4 are provided to the blow lines. As a result, clean liq. and gas can be supplied to the spray nozzle.

8. 发明专利

JPH0338491B2 失效
公开(公告)号：JPH0338491B2
公开(公告)日：1991-06-10
申请号：JP6943884
申请日：1984-04-06
申请人： MITSUBISHI ELECTRIC CORP
发明人： YANAGI MOTONORI , FUKUMOTO HAYAAKI
IPC分类号： F24F3/16

9. 发明专利

JPH0394822A FILTER FOR LOW BOILING POINT LIQUID 失效
公开(公告)号：JPH0394822A
公开(公告)日：1991-04-19
申请号：JP23221489
申请日：1989-09-06
申请人： TAIYO SANSO CO LTD , MITSUBISHI ELECTRIC CORP
发明人： TADA MASUTA , HIROI TAKAHIKO , FUKUMOTO HAYAAKI , OMORI TOSHIAKI
IPC分类号： B01D63/00
摘要： PURPOSE:To carry out high grade purification by providing a filter housing and a collar part formed integrally with a filter support to be housed in the housing. CONSTITUTION:The plastic collar part 4 is interposed between the flanges 3 of the filter housing 2 on the low-b.p. liq. outlet side of a filter membrane 1. The collar part 4 is welded to the cylindrical plastic support 5 for supporting the membrane 1 or formed integrally with the support 5 and is the same size as the flange 3 of the housing 2, and the bolthole 4a is bored. The support 5 and the collar part 4 are made of the same material, and the collar part 4 functions as the packing for the flange 3. Consequently, filtration is carried out without causing a leak in the filter.

10. 发明专利

JPH0394427A CLEANING OF SURFACE OF SOLID 失效
公开(公告)号：JPH0394427A
公开(公告)日：1991-04-19
申请号：JP23221589
申请日：1989-09-06
申请人： TAIYO SANSO CO LTD , MITSUBISHI ELECTRIC CORP
发明人： TADA MASUTA , FUKUMOTO HAYAAKI , HATTORI NOBUMI
IPC分类号： B08B7/00 , H01L21/304
摘要： PURPOSE:To prevent an environment from being polluted by a method wherein either fine ice particles of ultrapure water or fine ice particles of a liquid in which ozone gas, hydrogen peroxide and the like have been dissolved in ultrapure water as a main component are sprayed to and collided with the surface of a solid in order to clean and remove oils and fats, pigments, dyes and the like on the surface of the solid. CONSTITUTION:A fine ice-particle production container 9 is cooled to a low temperature by using liquid nitrogen or the like; a mixture of ultrapure water supplied from a liquid source 11 or of a liquid in which ozone gas and the like have been dissolved in ultrapure water and of a medium gas supplied from a gas bomb 12 is sprayed from a spray nozzle 10; then, liquid drops are transformed into ice because a temperature inside the container is low; fine ice particles 14 are produced. The fine ice particles 14 are taken out from another exit 9a inside the container 9; they are mixed with the medium gas supplied form the gas bomb 12; they are sprayed from a spray nozzle 13 by a gas pressure of the medium gas. When the fine ice particles 14 sprayed at this time are collided with an object 15 to be cleaned, oils and fats and the like are stripped off from the object 15 to be cleaned by an impulsive force of the fine ice particles 14. Thereby, it is not required to use a solvent such as triclene or the like which causes a danger of environmental pollution.

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