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    • 2. 发明专利
    • MONOMOLECULAR FILM ACCUMULATOR
    • JPS62291931A
    • 1987-12-18
    • JP13650886
    • 1986-06-12
    • MATSUSHITA ELECTRIC IND CO LTD
    • UEDA HISAMI
    • H01L21/368B05C3/02H01L51/05H01L51/40
    • PURPOSE:To rapidly remove an impurity mixed in pure water in a tank and unnecessary grown film molecules by providing a first water tank having a water supply port under water level for developing film forming molecules and a second water tank which surrounds the first tank. CONSTITUTION:A monomolecule film accumulator has an outer tank 6 outside a water tank 1, and avoids the contact with the water level by a barrier 3 at the time of cleaning to move upward. Pure water is supplied from the port 9 in the bottom of the tank 1. In this case, water is steadily supplied to prevent the pure water in the tank 1 from convecting. The pure water 11 is steadily overflowed from the tank 1, and water level, mixed impurity 7, film forming molecules 5, 6 which become unnecessary are simultaneously overflowed to clean the tank. An exhaust port 12 is formed at the bottom of an outer tank 8 to exhaust pure water which contains contaminants. According to this structure, molecular orientation is high to uniformly form a monomolecule accumulation film in high efficiency.
    • 5. 发明专利
    • METHOD FOR BUILDING UP MONOMOLECULAR FILM
    • JPS644279A
    • 1989-01-09
    • JP15820587
    • 1987-06-25
    • MATSUSHITA ELECTRIC IND CO LTD
    • UEDA HISAMIOGAWA KAZUFUMITAMURA HIDEJI
    • B05D1/20H01L21/368H01L51/05H01L51/40
    • PURPOSE:To shorten the time required in the transfer of a monomolecular film to a substrate, by vertically bringing the monomolecular film developed on the surface of water into contact with the substrate subjected to hydrophilic treatment and applying surface pressure to the substrate to form the monomolecular film to the entire surface of the substrate by surface tension. CONSTITUTION:A substrate 9 subjected to hydrophylic treatment is vertically brought into contact with the monomolecular film 6 developed on the surface of water and surface pressure is applied to the monomolecular film by a barrier 3. When the surface pressure is allowed to further rise, the monomolecular film moves along the surface of the substrate 9 wetted with water 10 by surface tension even when the substrate 9 is not moved up and down. As a result, the time required in the transfer of the monomolecular film to the substrate taken for the longest time heretofore can be shortened. Since the entire surface of the substrate is not sunk in water, the shock to the monomolecular film formed on the surface of water is reduced and the monomolecular film high in an orientation property can be transferred to the substrate.
    • 6. 发明专利
    • Manufacture of color filter
    • 彩色滤光片的制造
    • JPS5972409A
    • 1984-04-24
    • JP18394482
    • 1982-10-19
    • Matsushita Electric Ind Co Ltd
    • OGAWA KAZUFUMIYASUDA YOSHIKOUEDA HISAMI
    • G02B5/20H01L27/14H01L31/0216
    • H01L31/02162
    • PURPOSE:To eliminate color shading and also to obtain a titled filter at a low cost by forming a dyeing film separated like a stripe, etc. on a substrate, and thereafter, executing the dyeing of the first color to the whole surface, and thereafter, repeating alternately dyeing-proof and dyeing, and forming successively plural color filters. CONSTITUTION:A metallic layer 20 is provided like a stripe or a mosaic on a substrate 21, and a dyeing base film 22 is formed on said layer. Subsequently, a photomask 43 having a prescribed light shielding pattern 42 is placed on the film 22, exposure and development are executed, and a groove 41 for separating each picture element like a stripe, etc. is provided on the metallic layer 20. Subsequently, the whole surface is formed to a resin film 22CY by the first color, for instance, a cyan dye bath. Subsequently, a photosensitive resin layer 23 is provided on the film 22CY, exposure and development are executed through the light shielding pattern, and a dyeing-proof film 28A is formed. Subsequently, the film 22CY which is not covered with the film 28A is all dyed by the second color, for instance, a green dye bath, and it is formed to a resin film 22G. In the same way, a resin film 22R of the third color, for instance, red is provided by repeating the dyeing-proof film 28B forming process, and in the end, the top coating is performed, and a color filter dyed separately to plural colors is obtained.
    • 目的:通过在基板上形成像条纹等分离的染色薄膜等来消除遮光,并且以低成本获得标题过滤器,之后,将第一种颜色染色到整个表面,然后 交替进行染色和染色,并连续形成多个滤色器。 构成:在基板21上设置有条状或镶嵌状的金属层20,在该层上形成染色基膜22。 随后,将具有规定的遮光图案42的光掩模43放置在膜22上,进行曝光和显影,并且在金属层20上设置用于分离像条纹等的各像素的槽41。 整个表面通过第一种颜色形成树脂膜22CY,例如青色染液浴。 随后,在膜22CY上设置感光性树脂层23,通过遮光图案进行曝光和显影,形成防染色膜28A。 随后,未被膜28A覆盖的膜22CY全部用第二种颜色染色,例如绿色染浴,并且形成树脂膜22G。 以相同的方式,通过重复防染色膜28B形成工艺,提供第三种颜色的树脂膜22R,例如红色,最后进行顶涂,并将滤色器分别染色成多个 获得颜色。