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    • 10. 发明专利
    • SUPERLATTICE STRUCTURAL ELEMENT
    • JPH02285630A
    • 1990-11-22
    • JP10860389
    • 1989-04-26
    • MATSUSHITA ELECTRIC IND CO LTD
    • KARASAWA TAKESHIOKAWA KAZUHIROMITSUYU TSUNEO
    • C30B23/08C30B29/48C30B29/68H01L21/203H01L33/06H01L33/28H01L33/30
    • PURPOSE:To manufacture the title superlattice structural element matching with the lattice of a substrate only by materials comprising the superlattices by a method wherein a superlattice I comprising ZnTe and ZnS it formed on an InP substrate making the mean lattice constant larger than the lattice constant of the substrate and then another superlattice II is formed making the mean lattice constant smaller than the lattice constant of the substrate. CONSTITUTION:Within a superlattice structural element composed of ZnTe and ZnS alternately laminated on an InP substrate 4, a superlattice I comprising ZnTe and ZnS is formed on the said substrate 4 making the mean lattice constant larger than the lattice constant of the substrate 4 likewise another superlattice II comprising ZnTe and ZnS is formed on the superlattice I making the mean lattice constant smaller than the lattice constant of the substrate 4. In such a constitution, respective thick nesses of the superlattice constants I and II are selected so that the mean lattice constant of the whole system comprising the said superlattices I and II may be almost equalized with the lattice constant of the substrate 4. Furthermore, ZnSe may be substituted for the said ZnS likewise CdSe may be substituted for the said ZnTe.