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    • 1. 发明专利
    • Ring resonator gyroscope with folded cylinder suspension
    • 具有折叠式气缸悬挂的环形谐振器陀螺仪
    • JP2007052014A
    • 2007-03-01
    • JP2006216271
    • 2006-08-08
    • Litton Syst Incリットン システムズ インコーポレイテッドLitton Systems, Incorporated
    • STEWART ROBERT E
    • G01C19/5684
    • G01C19/5684
    • PROBLEM TO BE SOLVED: To provide a small-sized, low-output, and low-cost MEMS accelerometer or gyroscope for a small-sized low-output navigation-class inertia system for an autonomous moveable body. SOLUTION: This vibration gyroscope using a cylindrical ring resonator is equipped with a folded cylinder suspension for supporting the ring resonator. The cylinder suspension is equipped with an inner cylinder, an outer cylinder, and an annulus. The inner cylinder, the outer cylinder, and the annulus are concentric. A top edge of the inner cylinder is coupled with an inner edge of the annulus. A top edge of the outer cylinder is coupled with an outer edge of the annulus. These structures, including drive and detection electrodes, are manufactured on an SOI wafer by using semiconductor manufacturing technologies. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为自主移动体的小尺寸低输出导航级惯性系统提供小型,低输出和低成本的MEMS加速度计或陀螺仪。

      解决方案:使用圆柱形环形谐振器的该振动陀螺仪配备有用于支撑环形谐振器的折叠气缸悬架。 气缸悬架配备有内筒,外筒和环。 内筒,外筒和环是同心的。 内筒的顶边缘与环的内边缘相连。 外筒的顶边缘与环的外边缘相连。 通过使用半导体制造技术,在SOI晶片上制造包括驱动电极和检测电极的这些结构。 版权所有(C)2007,JPO&INPIT

    • 2. 发明专利
    • Reducing bias and quadrature in class ii coriolis vibration gyroscope
    • 降低二级偏心振荡器中的偏差和二次方程
    • JP2007047166A
    • 2007-02-22
    • JP2006216241
    • 2006-08-08
    • Litton Syst Incリットン システムズ インコーポレイテッドLitton Systems, Incorporated
    • STEWART ROBERT EWYSE STANLEY F
    • G01C19/56
    • G01C19/5691G01C19/56G01C19/5649
    • PROBLEM TO BE SOLVED: To provide a Coriolis vibration gyroscope reduced with the gyro bias and quadrature. SOLUTION: The method and apparatus in one embodiment comprises following steps: a step for providing a two-dimensional axisymmetric oscillator having a beam containing two principal elastic axes and two principal damping shafts; a step for driving the beam with drive components to oscillate; a step for driving during a first period, the beam along a drive shaft of the beam in a direction normal to one pair of faces of the beam while Coriolis coupled vibration is sensed along a sense shaft of the beam normal to an orthogonal pair of faces of the beam; a step for reversing, during a second period, drive and sense axes for driving the beam; a step for reducing a bias of the beam to zero; and a step for reducing a quadrature of the beam to zero. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供用陀螺仪偏置和正交减小的科里奥利振动陀螺仪。 解决方案:一个实施例中的方法和装置包括以下步骤:提供具有包含两个主弹性轴和两个主阻尼轴的梁的二维轴对称振荡器的步骤; 用驱动部件驱动光束振荡的步骤; 在第一阶段期间驱动梁的沿着垂直于梁的一对面的方向沿着光束的驱动轴的光束,同时沿着垂直于正交对面的光束的感测轴检测科里奥利耦合的振动 的梁; 在第二时段期间,用于反转驱动和感测用于驱动光束的轴的步骤; 将光束的偏置减小到零的步骤; 以及将光束的正交减小到零的步骤。 版权所有(C)2007,JPO&INPIT