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    • 6. 发明专利
    • Microstructure and its manufacturing method
    • 微结构及其制造方法
    • JP2009107041A
    • 2009-05-21
    • JP2007280139
    • 2007-10-29
    • Nippon Telegr & Teleph Corp Ntt Advanced Technology Corpエヌ・ティ・ティ・アドバンステクノロジ株式会社日本電信電話株式会社
    • KUWABARA HIROSHISATO NORIOKODATE JUNICHIMORIMURA HIROKIISHII HITOSHIMACHIDA KATSUYUKI
    • B81B3/00
    • PROBLEM TO BE SOLVED: To form a microstructure with a minute movable structure in a state of having higher reliability without causing any increase in size of equipment or a restriction in implementation. SOLUTION: The microstructure is provided with: a substrate 101; a supporting frame 102 placed in a way that it encircles a specific range of the substrate 101; a movable section supporting section 103 formed above the substrate 101 inside the supporting frame 102; a movable structure 104 equipped with a beam 104a that is supported by the movable section supporting section 103 and a movable electrode 104b; a fixed electrode supporting section 105a; and a fixed electrode 105b one part (end part) of which is supported by the fixed electrode supporting section 105a and which is positioned above the movable electrode 104b. It is also provided with a sealing membrane 106 that is supported by a fixed electrode structure 105 composed of the fixed electrode supporting section 105a and the fixed electrode 105b, and by the supporting frame 102, and seals the space (movable section forming space) inside the supporting frame 102. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:在不会导致设备尺寸的任何增加或实施方面的限制的情况下,以更高的可靠性形成具有微小可动结构的微结构。 微结构提供有:衬底101; 以围绕衬底101的特定范围的方式设置的支撑框架102; 形成在支撑框架102内部的基板101的上方的可动部支承部103; 配备有由可动部支撑部103支撑的梁104a和可动电极104b的可动结构104; 固定电极支撑部分105a; 固定电极105b的一部分(端部)由固定电极支撑部105a支撑并位于可动电极104b的上方。 还设置有由固定电极支撑部105a和固定电极105b构成的固定电极结构105和由支撑框架102支撑的密封膜106,并将其内部的空间(可动部形成空间)密封 支持框架102.版权所有(C)2009,JPO&INPIT
    • 7. 发明专利
    • Method of forming thin film
    • 形成薄膜的方法
    • JP2008251816A
    • 2008-10-16
    • JP2007090943
    • 2007-03-30
    • Nippon Telegr & Teleph Corp Ntt Advanced Technology Corpエヌ・ティ・ティ・アドバンステクノロジ株式会社日本電信電話株式会社
    • SATO NORIOISHII HITOSHIMACHIDA KATSUYUKI
    • H01L21/314
    • PROBLEM TO BE SOLVED: To form a thin film without breakage in a recess in forming the thin film on a substrate having the recess by the use of a so-called STP method. SOLUTION: A coated film 104 is formed on the main surface of a substrate 105 by applying a coating liquid by, for instant, a spin coating method. The coating liquid is produced by including a thin film raw material being a thin film material and an organic material composed of an organic compound with its surface energy smaller than that of the thin film material. For instance, the thin film material is a polyimide, the thin film raw material is a polyamic acid as a precursor to a polyimide, and the organic material is a polycaprolactone. Further, the coating liquid is produced by dissolving these poliamic acids and polycaprolactone in 1-methyl-2-pyrrolidone. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:通过使用所谓的STP法在具有凹陷的基板上形成薄膜的凹部中形成不破裂的薄膜。 解决方案:通过以旋涂法即刻施加涂布液,在基板105的主表面上形成涂膜104。 通过包括薄膜材料的薄膜原料和由表面能小于薄膜材料的表面能的有机化合物构成的有机材料来制造涂布液。 例如,薄膜材料是聚酰亚胺,薄膜原料是聚酰胺酸作为聚酰亚胺的前体,有机材料是聚己内酯。 此外,通过将这些聚氨酯酸和聚己内酯溶解在1-甲基-2-吡咯烷酮中来制备涂布液。 版权所有(C)2009,JPO&INPIT