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1. 发明专利

JP2007044662A Ultrasonic cleaner 审中-公开
标题翻译：超声波清洗机
公开(公告)号：JP2007044662A
公开(公告)日：2007-02-22
申请号：JP2005233968
申请日：2005-08-12
申请人： Kaijo Corp , 株式会社カイジョー
发明人： SOEJIMA JUNICHIRO , SASAMOTO KAZUHIRO , IMAZEKI YASUHIRO , HASEGAWA HIROSHI , SHIMADA TADAYUKI , KAMAMURA TOMOHARU
IPC分类号： B08B3/12 , G02F1/1333 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic cleaner which is combined with an inner tank and an outer tank, and hardly causes uneven cleaning.
SOLUTION: The ultrasonic cleaner is equipped with: the outer tank 30, which keeps the bottom face 32 fitted with an ultrasonic transducer 40 and stores a mediated liquid 50 for transmitting ultrasonic vibrations; and the inner tank 20, which is disposed inside of the outer tank with predetermined intervals and cleans a cleaning object M immersed with a cleaning liquid 60 filling its inside by ultrasonic vibrations propagated with the mediated liquid. The bottom face of the inner tank has inclination angles θ° with respect to the bottom face of the outer tank fitted with the ultrasonic transducer, and the inclination angles θ° are 5°/(ultrasonic frequency MHz)≤θ°
摘要翻译：要解决的问题：提供一种与内罐和外罐组合的超声波清洗器，并且几乎不会引起不均匀的清洁。解决方案：超声波清洗机配备有：外箱30，其保持底面32配有超声换能器40并且存储用于传输超声波振动的介质液体50; 以及内箱20，其以预定的间隔设置在外箱的内部，并且通过用介质液体传播的超声波振动来清洗浸入其内填充有清洁液60的清洁对象M。内罐的底面相对于装配有超声波换能器的外罐的底面具有倾角θ°，倾角θ°为5°/（超声频率MHz）≤θ°<20°/ （超声波频率MHz）。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2006165005A Ultrasonic vibration detector and ultrasonic-wave bonder using the same 审中-公开
标题翻译：使用超声波振动检测器和超声波焊接机
公开(公告)号：JP2006165005A
公开(公告)日：2006-06-22
申请号：JP2004349365
申请日：2004-12-02
申请人： Kaijo Corp , 株式会社カイジョー
发明人： SOEJIMA JUNICHIRO , YAMAMOTO AKIO , HIRAYAMA SEIGO , GOTO SEIJI
IPC分类号： H01L21/60 , H01L21/607
CPC分类号： H01L2224/45 , H01L2224/45144 , H01L2224/48 , H01L2224/78301 , H01L2224/85 , H01L2224/85205 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01079 , H01L2924/3011 , H01L2924/3025 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic vibration detector, having a simple structure for sure shielding of ultrasonic-wave vibration in an area other than the measuring object area and for accurately detecting only the ultrasonic-wave vibration from the measuring object area, and to provide an ultrasonic-wave bonder that uses the ultrasonic vibration detector. SOLUTION: The non-contact type ultrasonic vibration detector 17 for converting ultrasonic vibration into an electrical signal using a acoustoelectric converting element is provided with an ultrasonic-wave shielding member 19 including an ultrasonic-wave guide hole 20 at the front surface position of an ultrasonic-wave receiving surface 18a of a piezoelectric element 18 as the acoustoelectric converting element. Moreover, the external shape of ultrasonic-wave shielding member 20 is formed in the conic shape to be reduced in the diameter thereof, as it goes to the front end side. In addition, an ultrasonic-wave bonder provided with an ultrasonic-wave vibration measuring means for detecting the vibrating state of an ultrasonic-wave horn 1, and a capillary 4 is formed using the ultrasonic-wave vibration detector 17. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种超声波振动检测器，其具有简单的结构，用于在测量对象区域以外的区域中可靠地屏蔽超声波振动，并且仅精确地检测来自测量对象的超声波振动并提供使用超声波振动检测器的超声波焊接机。解决方案：使用声电转换元件将超声波振动转换为电信号的非接触型超声波振动检测器17设置有超声波波形屏蔽部件19，该超声波波形屏蔽部件19在前表面位置处包括超声波引导孔20 作为声电转换元件的压电元件18的超声波接收表面18a。此外，超声波波形屏蔽构件20的外形形成锥形，直径减小到前端侧。此外，使用超声波振动检测器17形成设置有用于检测超声波波峰1的振动状态的超声波振动测定单元和毛细管4的超声波波合成器。（C）2006，JPO＆NCIPI

3. 发明专利

JP2005159009A Bonding head 审中-公开
标题翻译：绑定头
公开(公告)号：JP2005159009A
公开(公告)日：2005-06-16
申请号：JP2003395501
申请日：2003-11-26
申请人： Kaijo Corp , 株式会社カイジョー
发明人： SOEJIMA JUNICHIRO
IPC分类号： H01L21/607
CPC分类号： H01L2224/75
摘要： PROBLEM TO BE SOLVED: To provide a bonding head equipped with a bonding tool capable of being exchanged simply within a short period of time and, further, having no change in vibration transmitting characteristics or a mounting position, in a bonding device.
SOLUTION: In the bonding tool for the bonding device for connecting a connecting object to a member to be connected by impressing ultrasonic vibration, fitting and clamping surfaces 23, 33 between a vibration transmitting unit 2 and the bonding tool 3 are tapered to constitute so that clamping/fixing operation are effected toward the direction of apex of the tapers by a plurality of clamping means 39. According to this constitution, exchange can be effected easily and the repeating accuracy of stabilized vibration transmitting characteristics and positions can be maintained by the uniformity and center regulating property of the clamping.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有能够在短时间内简单地更换的接合工具的接合头，并且还具有在接合装置中的振动传播特性或安装位置没有变化的接合头。解决方案：在用于通过施加超声波振动将连接对象连接到要连接的构件的接合装置的接合工具中，在振动传递单元2和接合工具3之间的装配和夹紧表面23,33是锥形的构成为通过多个夹紧装置39对锥形的顶点的方向进行夹持/固定操作。根据该结构，可以容易地进行更换，并且可以通过以下方式保持稳定的振动传递特性和位置的重复精度夹紧的均匀性和中心调节性能。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JP2004167435A Ultrasonic horn for bonding and bonding device provided with the same 有权
标题翻译：用于与其同时提供的结合和连接装置的超声波
公开(公告)号：JP2004167435A
公开(公告)日：2004-06-17
申请号：JP2002338620
申请日：2002-11-21
申请人： Kaijo Corp , 株式会社カイジョー
发明人： NAKAJIMA NORIHIKO , YAMAMOTO AKIO , SOEJIMA JUNICHIRO
IPC分类号： B06B1/02 , B06B1/08 , H01L21/607
CPC分类号： H01L2224/78 , H01L2224/78301 , H01L2924/00 , H01L2924/00012
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic horn for bonding capable of attachment to a bonding head without restraining vibrations generated in a support for the horn, controlling variation in the impedance of the horn and ensuring good bonding. SOLUTION: The horn has a vibrator 4 generating ultrasonic vibrations, a vibration transmitting member 2 transmitting the vibrations of the vibrator 4 to a bonding tool and the support member 3 arranged at a node position of the transmitting member 2. The support member 3 consists of a free end portion 3a disposed vertically in the vibrating direction of the transmitting member 3, a connecting portion 3C integrated with the free end portion 3a and disposed horizontally in the vibrating direction of the transmitting member 2, a fixed end portion 3b disposed at the tip of the connecting member 3c and a fixed portion 3d integrated with the fixed end portion 3b. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了提供一种能够粘接到接合头上的用于接合的超声波喇叭，而不会抑制在喇叭支撑件中产生的振动，从而控制喇叭的阻抗的变化并确保良好的接合。解决方案：喇叭具有产生超声波振动的振动器4，将振动器4的振动传递到接合工具的振动传递部件2和布置在传递部件2的节点位置的支撑部件3.支撑部件 3包括沿着发送构件3的振动方向垂直设置的自由端部3a，与自由端部3a一体形成并且沿传动构件2的振动方向水平设置的连接部3C，设置在固定端部3b 在连接构件3c的前端和与固定端部3b一体的固定部3d。版权所有（C）2004，JPO

5. 发明专利

JP2005201838A High-temperature fluid measuring ultrasonic sensor 审中-公开
标题翻译：高温流体测量超声波传感器
公开(公告)号：JP2005201838A
公开(公告)日：2005-07-28
申请号：JP2004010045
申请日：2004-01-19
申请人： Kaijo Corp , 株式会社カイジョー
发明人： SOEJIMA JUNICHIRO
IPC分类号： G01F1/66
摘要： PROBLEM TO BE SOLVED: To provide a simple, inexpensive, and high-precision high-temperature fluid measuring ultrasonic sensor which does not require forced water cooling or air cooling.
SOLUTION: The high-temperature fluid measuring ultrasonic sensor comprises a tip section (1) attached to a duct through which a high-temperature fluid such as automobile exhaust fumes flows, a heat insulating section (2) attached behind the tip section, and a piezoelectric section (3) attached behind the heat insulating section, eliminating forced water cooling or air cooling. The piezoelectric section is preferably formed of a laminated structure of a high-Curie-point piezoelectric substance such as niobate and electrodes.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供不需要强制水冷或空气冷却的简单，便宜，高精度的高温流体测量超声波传感器。解决方案：高温流体测量超声波传感器包括附接到管道的末端部分（1），诸如汽车废气烟雾的高温流体穿过该管道;隔热部分（2），其安装在末端部分，以及安装在绝热部件后面的压电部（3），消除强制水冷或风冷。压电部分优选由诸如铌酸盐和电极的高居里点压电物质的层叠结构形成。版权所有（C）2005，JPO＆NCIPI

6. 发明专利

JP2015013250A 超音波洗浄装置及び超音波洗浄方法有权
标题翻译：超声波清洗装置及方法
公开(公告)号：JP2015013250A
公开(公告)日：2015-01-22
申请号：JP2013140824
申请日：2013-07-04
申请人：株式会社カイジョー , Kaijo Corp
发明人： SOEJIMA JUNICHIRO , NAKANO AKIHISA , IMAZEKI YASUHIRO , HASEGAWA HIROSHI
IPC分类号： B08B3/12 , B08B3/02 , G11B5/84 , H01L21/304
CPC分类号： B08B3/02 , B08B3/12 , B08B2203/0288 , H01L21/02052 , H01L21/02087 , H01L21/67051
摘要：【課題】被洗浄物の端面に照射した超音波伝播水の被洗浄物からの跳ね返り等による再汚染を防止し、被洗浄物の端面を効率良く洗浄することが可能な基板端面の超音波洗浄装置及び超音波洗浄方法を提供すること。【解決手段】スポットシャワーに連設して超音波伝播水を基板に対し伝達・照射する超音波伝達管を有し、超音波伝達管は、基板上に位置しないように設置し、基板の表面が水平状態となるように基板を保持して回転可能な回転保持部により基板を回転しつつ、空間に配された基板の外周を成す端面に対し、当該端面の接線方向から超音波伝播水を超音波伝達管から照射するようにする。【選択図】図2
摘要翻译：要解决的问题：提供一种用于基板端面的超声波清洗装置和方法，该超声波清洗装置和方法能够防止由于待清洗材料的端面辐射的超声波传播水的反弹而引起的再污染，并能够清洗要清洁的材料的端面有效地解决。解决方案：超声波清洗装置包括：超声波传输管，其连续地设置在点阵淋浴器上，并将超声波传播水传送到衬底。超声波传输管被布置成不被定位在基板上。一种能够保持和旋转基板以使得基板的表面处于水平状态的旋转保持部使基板旋转，并且超声波传播水从超声波传输管辐射并且从端面的切线方向向端面形成设置在该空间中的基板的外周。

7. 发明专利

JP2012125743A Ultrasonic transducer unit 有权
标题翻译：超声波传感器单元
公开(公告)号：JP2012125743A
公开(公告)日：2012-07-05
申请号：JP2010281902
申请日：2010-12-17
申请人： Kaijo Corp , 株式会社カイジョー
发明人： TAKAHASHI NORIHISA , TAKEE TOSHIMASA , SOEJIMA JUNICHIRO
IPC分类号： B06B1/06 , B08B3/12 , H04R17/00 , H04R17/10
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic transducer unit in which a vibration mode of a vibrating surface is made uniform to improve detergency.SOLUTION: The ultrasonic transducer unit includes: a vibrating surface 1a; first to third 3 vibrators 5a which mutually adjoin and adds ultrasonic vibration to the vibrating surface 1a, the other surface of a plate vibration body 10 includes first regions 3 of first to third; and second regions 4 which cover the respective first regions 3, respective vibrators of the first to the third are disposed to the first regions 3, the thickness of the plate vibration body 10 which is located in the inside of the triangle made from the first to the third 3 vibrators on the other surface and located in the second regions 4 is formed to be thicker than the thickness of the plate vibration body located in the first regions 3 of the first and the third, and the interval between the first to the third vibrators is at least λ/2, and respective outer peripheries are away from respective the first to the third vibrators by at least λ/4. The λ is a wavelength of the transverse wave of the plate vibration body.
摘要翻译：要解决的问题：提供振动表面的振动模式均匀以提高去污力的超声波换能器单元。解决方案：超声波换能器单元包括：振动表面1a; 第一至第三三个振动器5a，其相互邻接并向振动表面1a添加超声波振动，板振动体10的另一个表面包括第一至第三的第一区域3; 以及覆盖各个第一区域3的第二区域4，第一至第三区域的各个振动器设置在第一区域3上，位于三角形内侧的板状振动体10的厚度由第一区域3 位于第二区域4的另一表面上的第三三个振动器被形成为比位于第一和第三第一区域3中的板振动体的厚度更厚，并且第一至第三振动器至少为λ/ 2，相应的外周离开第一至第三振动器至少λ/ 4。 λ是板振动体的横波的波长。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2007110371A Ultrasonic sensor for high temperature 有权
标题翻译：超声波传感器
公开(公告)号：JP2007110371A
公开(公告)日：2007-04-26
申请号：JP2005298511
申请日：2005-10-13
申请人： Kaijo Corp , 株式会社カイジョー
发明人： IKEDA MASATAKA , SHIMADA TADAYUKI , SOEJIMA JUNICHIRO
IPC分类号： H04R17/00 , G01F1/66
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic sensor for a high temperature capable of securely grasping a receiving waveform without being affected by a reverberation sound, etc.
SOLUTION: An ultrasonic sensor 20 for a high temperature includes a rod-shaped sound transmission path 23 formed of quartz, disposed on the oscillation side of an ultrasonic vibrator 21 constituted of a piezoelectric device and a vibration plate.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于高温的超声波传感器，其能够可靠地抓住接收波形而不受混响声音等的影响。解决方案：用于高温的超声波传感器20包括杆设置在由压电元件和振动板构成的超声波振子21的摆动侧的由石英形成的声音传播路径23。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2005085978A Single-wafer type cleaning method and cleaning device 有权
标题翻译：单辊式清洗方法和清洗装置
公开(公告)号：JP2005085978A
公开(公告)日：2005-03-31
申请号：JP2003316477
申请日：2003-09-09
申请人： Kaijo Corp , 株式会社カイジョー
发明人： SOEJIMA JUNICHIRO , HASEGAWA HIROSHI
IPC分类号： B08B3/12 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a single-wafer type cleaning method and cleaning device capable of corresponding cleaning, regardless of the presence / absence of pattern formation, when an object of cleaning is a semiconductor wafer and freely making selection and executing cleaning corresponding to the degree of dirtiness, even in the case of other objects to be cleaned.
SOLUTION: The single-wafer type cleaning device comprises a rotary table 22 for supporting one surface of the object to be cleaned, a plurality of vibration elements 30 arranged opposite on the other surface of the cleaning object supported by it and vibrated at different vibration frequencies, a liquid supply nozzle 36 for supplying cleaning liquid between the vibration elements and the cleaning object, a motor 26 for moving the rotating table 22 in parallel with the vibration element surface, and an ultrasonic oscillator 34 for ultrasonically vibrating the vibration elements at different frequencies. The vibration element 30 is ultrasonically vibrated, while moving the cleaning object supported by the rotating table 22 and the surface of the cleaning object is cleaned by the interposing cleaning liquid.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供能够进行相应清洁的单晶片型清洁方法和清洁装置，无论是否存在图案形成，当清洁对象是半导体晶片并且自由地进行选择和执行时即使在要清洁的其他物体的情况下，也可以对应于脏污的程度进行清洁。解决方案：单晶片型清洁装置包括用于支撑待清洁物体的一个表面的旋转台22，多个振动元件30，其布置在与其支撑的清洁对象的另一个表面上相对并在其上振动不同的振动频率，用于在振动元件和清洁对象之间供应清洁液体的液体供应喷嘴36，用于使振动台22平行于振动元件表面移动的马达26和用于超声振动振动元件的超声波振荡器34 在不同的频率。振动元件30被超声波振动，同时移动由旋转台22支撑的清洁对象，并且通过介入清洗液清洁清洁对象的表面。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2005224821A Ultrasonic welding equipment 审中-公开
标题翻译：超声波焊接设备
公开(公告)号：JP2005224821A
公开(公告)日：2005-08-25
申请号：JP2004034101
申请日：2004-02-10
申请人： Kaijo Corp , 株式会社カイジョー
发明人： SOEJIMA JUNICHIRO , MAEDA TAKASHI , YAMAMOTO AKIO
IPC分类号： B23K20/10 , B23K20/26 , H01L21/60
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic welding equipment capable of reducing the heat transfer to a vibration generation unit as much as possible, and efficiently giving the thermal energy to a part to be welded.
SOLUTION: The ultrasonic welding equipment comprises a vibration generation unit 2, a vibration transmission unit 3 which is connected to an output end of the vibration generation unit 2 to be resonated with the ultrasonic vibration generated by the vibration generation unit 2, and a tool 10 for a welding work mounted on a predetermined part of the vibration transmission unit 3. A planar heater 20 for heating is arranged inside the tool 10 in a posture substantially orthogonal to a tapered tool tip 11.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够尽可能地减少向振动产生单元传热的超声波焊接设备，并且有效地将热能提供给待焊接的部件。解决方案：超声波焊接设备包括：振动产生单元2，与振动发生单元2的输出端连接以与振动产生单元2产生的超声波振动共振的振动传播单元3;以及用于焊接工件的工具10，安装在振动传播单元3的预定部分上。加热平面加热器20以与锥形工具尖端11基本正交的姿势布置在工具10的内部。）2005年，日本特许厅和NCIPI

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