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1. 发明专利

JP2008010151A Charged particle beam apparatus 审中-公开
标题翻译：充电颗粒光束装置
公开(公告)号：JP2008010151A
公开(公告)日：2008-01-17
申请号：JP2006175979
申请日：2006-06-27
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/20 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus capable of completely neutralizing, according to kinds or the like of a test piece made of an insulating material.
SOLUTION: A destaticizing mechanism provided on a scanning electron microscope is provided with a gas flow-rate control valve 18, connected to a gas cylinder, switching valve 17, corona discharger 19, gas inlet tube 15, and memory 20. The gas flow-rate control valve 18 comprises a cylindrical body 18A, in which a rotating axle 18E installed with a rotating blade 18D is provided in its center axis direction, and a connecting tube 18B connected to one hole and a connecting tube 18C connected to the other hole opened, at a position facing the wall of the cylindrical body 18A with respect to the rotating axle 18E. The memory 20 is stored with data, regarding the inlet gas amount corresponding to the charge state on the surface of the test piece which changes, according to the kinds and observation conditions of the test piece made of insulating material.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：提供能够根据由绝缘材料制成的试件的种类等完全中和的带电粒子束装置。解决方案：在扫描电子显微镜上设置的去静电机构设置有连接到气瓶，切换阀17，电晕放电器19，进气管15和存储器20的气体流量控制阀18。气体流量控制阀18包括圆筒体18A，其中在其中心轴线方向上设置有旋转叶片18D的旋转轴18E，以及连接到一个孔的连接管18B和连接到其的连接管18C 另一个孔相对于旋转轴18E在面对筒体18A的壁的位置处打开。存储器20根据由绝缘材料制成的试件的种类和观察条件，关于根据变化的试件的表面上的充电状态的入口气体量存储数据。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2007287561A Charged particle beam device 审中-公开
标题翻译：充电颗粒光束装置
公开(公告)号：JP2007287561A
公开(公告)日：2007-11-01
申请号：JP2006115909
申请日：2006-04-19
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/21
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam device in which an accurate sample image can be obtained over the front face of a sample even if the unevenness of the sample is large.
SOLUTION: In the charged particle beam device which obtains the sample image after three-dimensionally scanning the sample and detecting two-dimensional particles from the sample by a detector, the device is provided with a focus pattern memory 13 in which focus positions in the Z direction at respective scanning positions have been described, and focus fine adjusting coils 6 which are arranged adjacent to objective lenses 3 and which fine-adjust focuses in the Z direction of the sample. The device two-dimensionally scans using scanning coils 5, and constituted so as to carry out three-dimensional scanning while fine-adjusting the positions in the Z direction by the focus fine adjusting coils 6 based on data stored in the focus pattern memory 13 according to scanning positions on the sample 2.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种带电粒子束装置，其中即使样品的不均匀性大，也可以在样品的正面上获得精确的样品图像。解决方案：在三维扫描样品并通过检测器从样品检测二维颗粒之后获得样品图像的带电粒子束装置中，该装置设置有聚焦图案存储器13，其中聚焦位置已经描述了在各个扫描位置的Z方向上的焦点微调节线圈6，并且在样品的Z方向上精细调节焦点的聚焦微调线圈6。该装置使用扫描线圈5进行二维扫描，并且构成为进行三维扫描，同时基于存储在聚焦图案存储器13中的数据，通过聚焦微调线圈6微调Z方向的位置，扫描样本2上的位置。版权所有（C）2008年，JPO＆INPIT

3. 发明专利

JP2013152798A Electron beam apparatus 有权
标题翻译：电子束设备
公开(公告)号：JP2013152798A
公开(公告)日：2013-08-08
申请号：JP2012011911
申请日：2012-01-24
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/252 , H01J37/244
摘要： PROBLEM TO BE SOLVED: To detect a characteristic X-ray from a sample well with high sensitivity, when performing X-ray analysis in the surface region of a sample, by decreasing the acceleration voltage of an electron beam and setting a short working distance.SOLUTION: The electron beam apparatus includes an electron beam source 1 for discharging an electron beam 20 toward a sample 11, an object lens 3 for focusing the electron beam 20 discharged from the electron beam source 1 on the sample 11, a deflector 4 for deflecting the electron beam 20, and an X-ray detector 7 for detecting a characteristic X-ray 22 generated from the sample 11 when it is irradiated with the electron beam 20. An X-ray condensing element 10 is disposed in the electron beam passing region 3b of the object lens 3 at an end on the side facing the sample 11, and the X-ray detector 7 is disposed at a position on the side opposite from the side where the sample 11 is located while holding the object lens 3 therebetween.
摘要翻译：要解决的问题：为了从样品的表面区域进行X射线分析，通过降低电子束的加速电压并设定短的工作距离，从高灵敏度的样品阱中检测特征X射线。解决方案：电子束装置包括用于向样品11放电电子束20的电子束源1，用于将从电子束源1排出的电子束20聚焦在样品11上的物镜3，用于偏转的偏转器4 电子束20和X射线检测器7，用于在用电子束20照射时检测从样品11产生的特征X射线22.X射线聚光元件10设置在电子束通过区域 3b的物体在面向样品11的一侧的端部，并且X射线检测器7设置在与样品11所在的一侧相对的一侧的位置处，同时将物镜3保持在其中 n。

4. 发明专利

JP2010140688A Electron beam device and operation method of electron beam device 有权
标题翻译：电子束装置及电子束装置的操作方法
公开(公告)号：JP2010140688A
公开(公告)日：2010-06-24
申请号：JP2008313904
申请日：2008-12-10
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/244
CPC分类号： H01J37/153 , H01J37/244 , H01J37/28 , H01J2237/15 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448
摘要： PROBLEM TO BE SOLVED: To provide an electron beam device capable of superbly carrying out the detection of a reflection electron or the detection of both the reflection electron and a secondary electron even in the electron beam device with an electron detection unit arranged above an objective lens. SOLUTION: The electron beam device is provided with an electron beam source 1 emitting electron beams 21 accelerated by a given accelerating voltage, an objective lens 6 for focusing the electron beams 21 emitted from the electron beam source 1 and irradiating the electron beams 21 on a sample 20, a scanning coil 5 for scanning the focused electron beams 21 over the sample 20, and an electron detection unit 7 arranged above the objective lens 6 with a hole formed for making the electron beams pass through. The electron detection unit 7 is provided with an electrode 9 for generating an electric field for drawing an electron 22 to be detected generated from the sample 20 in accordance with the irradiation of the electron beams 21, and a correction coil 4 for correcting the deflection of the electron beams 21 generated by the electric field is arranged at a lower part of the electron detect unit 7. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：即使在电子束装置中设置电子检测单元，也能够提供能够极好地进行反射电子检测或者反射电子和二次电子检测的电子束装置物镜解决方案：电子束装置设置有电子束源1，其发射通过给定的加速电压加速的电子束21;物镜6，用于聚焦从电子束源1发射的电子束21并照射电子束 21，在样品20上扫描聚焦电子束21的扫描线圈5，以及设置在物镜6上方的电子检测单元7，其中形成有用于使电子束通过的孔。电子检测单元7设置有电极9，用于根据电子束21的照射产生用于从样品20产生的待检测电子22的电场;以及校正线圈4，用于校正偏转通过电场产生的电子束21被布置在电子检测单元7的下部。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2008066057A Scanning transmission electron microscope 审中-公开
标题翻译：扫描传输电子显微镜
公开(公告)号：JP2008066057A
公开(公告)日：2008-03-21
申请号：JP2006241231
申请日：2006-09-06
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/28 , H01J37/244
摘要： PROBLEM TO BE SOLVED: To provide a scanning transmission electron microscope for improving resolution of an electron beam diffraction image.
SOLUTION: An electron beam passing hole on a sample holder 30 mounted on a sample stage 9 is formed of a hole 31 in a direction along an electron beam optical axis O and a hole 33 connecting to that hole and in a vertical direction to a direction of that hole. A diffusion angle restriction diaphragm 11 is inserted in a boundary part between the hole 31 and the hole 33, a scintillator 13 is provided in the hole 33 by inclining with respect to the electron beam optical axis O, and a photoelectron multiplier 14 is provided on an outlet part of the hole 33.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于提高电子束衍射图像分辨率的扫描透射电子显微镜。解决方案：安装在样品台9上的样品保持器30上的电子束通过孔沿着电子束光轴O的方向由孔31形成，孔33连接到该孔并且在垂直方向上到这个洞的方向。扩散角限制膜片11插入在孔31和孔33之间的边界部分中，通过相对于电子束光轴O倾斜而在孔33中设置闪烁体13，并且在孔33的出口部分。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2004355822A Aberration correcting method in charged particle beam apparatus and charged particle beam apparatus 审中-公开
公开(公告)号：JP2004355822A
公开(公告)日：2004-12-16
申请号：JP2003148756
申请日：2003-05-27
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/153 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide an aberration correcting method in a charged particle beam apparatus and the charged particle beam apparatus, whereby good operability is obtained and color aberration can be highly accurately corrected.
SOLUTION: The one line each of a sample under two-dimensional scan is repeatedly line-scanned three times by acceleration voltages ΔE+E1, ΔE, ΔE+E2 (=-1), and three kinds of image based on this scan is displayed on a display 43. The screen of the display 43 is laterally divided into three regions, and the images based on each line scan are displayed on the three picture display regions. After that, the images are focused as to the respective pictures. First, the left side image of the picture on the display 43 is focused. At that time, the power supply 38 of an aberration corrector C is adjusted so that the right side image of the display picture S is similarly focused, in order to adjust each of multipoles. Color aberration is corrected by such adjustment.
COPYRIGHT: (C)2005,JPO&NCIPI

7. 发明专利

JP2012054169A Scanning electron microscope and method for switching objective lens usage of the same 有权
标题翻译：扫描电子显微镜及用于切换目标镜片的方法
公开(公告)号：JP2012054169A
公开(公告)日：2012-03-15
申请号：JP2010197245
申请日：2010-09-03
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/141 , H01J37/20 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a compact scanning electron microscope and a method for switching the objective lens usage of the scanning electron microscope, enabling a usage change of the objective lens in a short time.SOLUTION: With the provision of a first screw portion 123 on an outside magnetic pole piece 101 of an objective lens 59, the scanning electron microscope includes: an auxiliary outside magnetic pole piece 133 detachable to an outside magnetic pole piece 101 and having, on an inner wall face, a second screw portion 139 capable of being screwed with the first screw portion 123, and on an outer wall face, a third screw portion 141 coaxial with the second screw portion 139 with a screw cutting direction opposite thereto; and a holder 111 detachable of the auxiliary outside magnetic pole piece 133, and having a fourth screw portion 117 capable of being screwed with the third screw portion 141 of the auxiliary outside magnetic pole piece 133, and being disposed on a sample stage in such a manner that the axis of the fourth screw portion 117 coincides with the rotation center of the sample stage.
摘要翻译：要解决的问题：为了提供紧凑的扫描电子显微镜和用于切换扫描电子显微镜的物镜使用的方法，能够在短时间内实现物镜的使用改变。解决方案：通过在物镜59的外部磁极片101上设置第一螺纹部分123，扫描电子显微镜包括：辅助外部磁极片133，其可拆卸到外部磁极片101并具有在内壁面上，能够与第一螺纹部123螺合的第二螺纹部139和外壁面与与第二螺纹部139同轴的第三螺纹部141与螺杆切削方向相反; 和辅助外部磁极片133可拆卸的保持件111，并且具有能够与辅助外部磁极片133的第三螺纹部141螺合的第四螺钉部117，并且设置在这样的使得第四螺纹部117的轴线与样品台的旋转中心一致。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2011249273A Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：JP2011249273A
公开(公告)日：2011-12-08
申请号：JP2010124078
申请日：2010-05-31
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/244 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of efficiently detecting reflection electrons emitted by a sample at a small angle without degradation of resolution at the time of capturing a sample image.SOLUTION: A scanning electron microscope includes: an electron beam source for emitting an electron beam; an objective lens for focusing the electron beam emitted by the electron beam source on a sample; a scanning deflector for scanning the focused electron beam on the sample; an inner tube through which the electron beam from the electron beam source goes; a first scintillator provided on an inner wall of the inner tube, which emits light when first electrons as subjects of detection arising from the sample with scanning the electron beam impinge thereon; and a photodetector for detecting first light which results from the light emission and travels toward the electron beam source in the inner tube. The scanning electron microscope forms a scan image based on a detection result by the photodetector.
摘要翻译：要解决的问题：提供一种扫描电子显微镜，能够有效地检测样品以小角度发射的反射电子，而不会在捕获样本图像时降低分辨率。解决方案：扫描电子显微镜包括：用于发射电子束的电子束源; 用于将由电子束源发射的电子束聚焦在样品上的物镜; 用于扫描样品上的聚焦电子束的扫描偏转器; 来自电子束源的电子束穿过的内管; 第一闪烁体设置在内管的内壁上，当第一电子作为检测对象时，发射光，其中扫描电子束在其上扫描; 以及光检测器，用于检测由于发光而产生的第一光并向内管中的电子束源行进。扫描电子显微镜根据光检测器的检测结果形成扫描图像。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2006216299A Charged particle beam device, and axis adjusting method of aberration correction device of the same 审中-公开
标题翻译：充电粒子束装置及其异常校正装置的轴调整方法
公开(公告)号：JP2006216299A
公开(公告)日：2006-08-17
申请号：JP2005026291
申请日：2005-02-02
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/153 , H01J37/147 , H01J37/22 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of simply adjusting an axis of an aberration correction device arranged in an optical system thereof within a short time.
SOLUTION: A charged particle beam deflection device D is arranged in front of the aberration correction device C, and it is made possible to change an incident direction of the charged particle beam against a multipole at a first step of the aberration correction device C. By arranging the deflection device D, it becomes unnecessary to change an acceleration voltage, or re-adjust the position of a diaphragm 33 even if excitation of convergence lens is changed in order to change an irradiation current, therefore, it becomes unnecessary to re-adjust shift of the axis of the aberration correction device.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供能够在短时间内简单地调整配置在其光学系统中的像差校正装置的轴的带电粒子束装置。解决方案：带电粒子束偏转装置D布置在像差校正装置C的前面，并且可以在像差校正装置的第一阶段改变带电粒子束相对于多极的入射方向通过设置偏转装置D，即使改变会聚透镜的激发以改变照射电流，也不需要改变加速电压或重新调整光圈33的位置，因此不需要重新调整像差校正装置的轴的移动。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2005149733A Scanning electron microscope 审中-公开
标题翻译：扫描电子显微镜
公开(公告)号：JP2005149733A
公开(公告)日：2005-06-09
申请号：JP2003380796
申请日：2003-11-11
申请人： Jeol Ltd , 日本電子株式会社
发明人： KAZUMORI HIROYOSHI
IPC分类号： H01J37/20 , H01J37/18 , H01J37/244 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a scanning electron microscope equipped with an object lens having an orifice, capable of effectively detecting secondary electron generated from a sample by a secondary electron detector.
SOLUTION: The scanning electron microscope comprises an electron beam source 4, an electronic optical system 8 controlling and irradiating the electron beam 20 emitted from the electron beam source 4 on the sample 10, and a sample stage 11 for mounting the sample 10. An orifice 31 is arranged at the part where the object lens 7 constructing the electronic optical system 8 faces the sample 10, a first secondary electron detecting element 34 having an electron passing hole is arranged within an electron beam passing space 9, and a voltage impressing means is connected to the sample stage 11. A negative voltage is impressed on the sample 10 through the sample stage 11 by the voltage impressing means.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种配备有具有孔口的物镜的扫描电子显微镜，其能够有效地检测由二次电子检测器从样品产生的二次电子。解决方案：扫描电子显微镜包括电子束源4，控制和照射从样品10上的电子束源4发射的电子束20的电子光学系统8和用于安装样品10的样品台11 在构成电子光学系统8的物镜7面向样品10的部分设置有孔31，在电子束通过空间9内配置有具有电子通过孔的第一二次电子检测元件34，施加装置连接到样品台11.通过电压施加装置通过样品台11向样品10施加负电压。版权所有（C）2005，JPO＆NCIPI

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