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1. 发明专利

JPS59118886A Formation of conductive and corrosion resistant aluminum oxide film 失效
标题翻译：形成导电和耐腐蚀氧化铝薄膜
公开(公告)号：JPS59118886A
公开(公告)日：1984-07-09
申请号：JP23425382
申请日：1982-12-24
申请人： Japan Aviation Electronics Ind Ltd
发明人： KATAOKA IZUMI , KAWAHARA YUKIO , YAMADA ICHIROU
IPC分类号： C23C22/00
摘要： PURPOSE: To form superposedly a dense and chemically strong film and a thick and mechanically strong film by impressing and discharging successively a negative voltage and positive voltage on an object to be formed thereon with an aluminum oxide film in a gaseous oxygen atmosphere in a vacuum vessel.
CONSTITUTION: The inside of a vacuum vessel 1 is evacuated through an evacuation pipe 6 and a variable leak valve 7 is operated to introduce gaseous oxygen in the vessel 1. When a contact C is connected to by operating a switch 11, a negative voltage is impressed on an object 4 attached to the 1st electrode 5 and a positive electrode is impressed through a grounding circuit on the 2nd electrode 9. Discharge is executed between the object and the 2nd electrode and a dense aluminum oxide film is formed on the surface of the object 4. When the contact C of the switch 11 is changed over to B, a positive voltage is impressed on the 1st electrode 5 and a negative voltage on the 2nd electrode 9, by which discharge is executed and the porous aluminum oxide film is superposedly formed.
COPYRIGHT: (C)1984,JPO&Japio
摘要翻译：目的：通过在真空容器中的气态氧气氛中用氧化铝膜在其上形成的物体上连续施加负电压和正电压来叠加形成致密和化学强的薄膜和厚而机械强的薄膜。构成：真空容器1的内部通过排气管6排出，并且可操作的可变泄漏阀7被操作以在容器1中引入气态氧。当通过操作开关11连接触点C时，负电压为施加在附接到第一电极5的物体4上，并且通过第二电极9上的接地电路施加正电极。在物体和第二电极之间执行放电，并且在物体和表面上形成致密的氧化铝膜对象4.当开关11的触点C转换为B时，在第一电极5上施加正电压，在第二电极9上施加正电压，通过放电进行多孔氧化铝膜的叠加形成。

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