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    • 3. 发明专利
    • Device and method for measuring displacement amount of surface shape
    • 用于测量表面形状位移量的装置和方法
    • JP2007178137A
    • 2007-07-12
    • JP2005373747
    • 2005-12-27
    • Japan Atomic Energy Agency独立行政法人 日本原子力研究開発機構
    • YAGISAWA HIROSHIARAI TAKASHI
    • G01B5/00
    • PROBLEM TO BE SOLVED: To solve problems wherein displacement before an event is easily compared with that after the event when putting the whole surface of a sample in an exposed state generates uniform displacement but the displacement comparison becomes difficult when it generates nonuniform displacement in the case where the dimension or the like of the sample is accurately obtained before the event, and the reference becomes unclear when a sample having clear measuring reference is manufactured and no protection is performed in the exposed state.
      SOLUTION: In the event physically or chemically accompanied by the displacement on the surface of a solid body, protection is performed during the event so that the measuring reference level does not displace, two or more grooves are formed in the solid sample of a three-dimensional shape as a measured object to be parallel with or rectangularly crossing two side surfaces of it, the solid sample is mounted on a sample table, displacement gauge tips are set on the upper surface and the side surface of the solid sample, the sample table is moved or turned to perform scan, and the groove surfaces and the upper surface whose coordinates are managed are simultaneously measured, thereby acquiring three-dimensional data before and after the event on the same coordinates of the groove surfaces and the upper surface of the sample.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了解决事件之前的位移容易与将样品的整个表面放置在暴露状态之后的位移之间的位移产生均匀位移的问题,但是当产生不均匀位移时位移比较变得困难 在事件之前准确地获得样品的尺寸等的情况下,当制造具有清晰测量基准的样品并且在暴露状态下不进行保护时,参考不清楚。 解决方案:在物理或化学伴随着固体表面上的位移的情况下,在事件期间进行保护,使得测量参考水平不移位,在固体样品中形成两个或更多个凹槽 作为测量对象的三维形状与其两个侧表面平行或矩形交叉,将固体样品安装在样品台上,将置换量规末端设置在固体样品的上表面和侧表面上, 样品台被移动或转动以进行扫描,同时测量凹槽表面和坐标的上表面,从而在凹槽表面和上表面的相同坐标上获取事件之前和之后的三维数据 的样品。 版权所有(C)2007,JPO&INPIT