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1. 发明专利

JP2002118056A MEMBRANE MASK, ITS MANUFACTURING METHOD AND POSITION ACCURACY-MAINTAINING METHOD OF MASK PATTERN 失效
公开(公告)号：JP2002118056A
公开(公告)日：2002-04-19
申请号：JP2000311194
申请日：2000-10-11
申请人： JAPAN SCIENCE & TECH CORP , MITSUBISHI ELECTRIC CORP
发明人： YABE HIDETAKA , KUBOTA HIROSHI
IPC分类号： G03F1/22 , H01L21/027 , H01L21/302 , H01L21/3065 , G03F1/16
摘要： PROBLEM TO BE SOLVED: To restrain a stress layer and a membrane that can be generated on the side of a mask pattern, and to increase the positional accuracy in a mask. SOLUTION: In a dry etching process of the fine mask pattern of a membrane mask, a radical and an ion, containing at least one of nitrogen, carbon, and oxygen that do not contribute to pattering, are generated by plasma for supplying to the upper and side surfaces and foundation of the mask pattern, and a layer (membrane) for restraining the generation of stress is reliably formed on the side. When the membrane mask is to be manufactured, correction is made according to strain after etching in pattern drawing, in advance at drawing of the mask pattern. As a method for supplying radicals and ions, an oxidizing active gas and ozone may be used, when a cluster ion beam and an oxide film are formed. The radicals and ions are supplied periodically by a plurality number of times, even after the mask has been completed, thus maintaining pattern position accuracy over a long time.

2. 发明专利

JP2002118303A PIEZOELECTRIC ACTUATOR 失效
公开(公告)号：JP2002118303A
公开(公告)日：2002-04-19
申请号：JP2000308993
申请日：2000-10-10
申请人： JAPAN SCIENCE & TECH CORP , KUMAMOTO TECHNOLOGY KK , TAIHEIYO CEMENT CORP
发明人： KUBOTA HIROSHI , KOSAKA KOJI , TAKADA SHINJI , YAMAKAWA TAKAHIRO , ASUMI KAZUMASA
IPC分类号： H01L41/083 , H02N2/00
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which increases the quantity of displacement of a mode-15 element while suppressing the size enlargement caused by the multi-layering of a mode-15 element and a mode-33 element, and besides is excellent in reliability. SOLUTION: A piezoelectric actuator 20 has such structure that piezoelectric elements and metallic plates 12 are stacked alternately. At least one of the piezoelectric elements is a mode-33 element 21a which has such structure that piezoelectric substances 22 and inner electrodes 23 are stacked alternately and are united, using a simultaneous baking method, and is displaced in the direction of stacking when specified voltage is applied to the inner electrode 23, and the piezoelectric element excluding the mode-33 element 21a are mode-15 elements 11b which are displaced in shearing direction when specified voltage is applied between the metallic plates 12.

3. 发明专利

JP2002060940A NITROGEN-IMPLANTED C60 FLULLERENE THIN FILM, AND ITS MANUFACTURING METHOD 失效
公开(公告)号：JP2002060940A
公开(公告)日：2002-02-28
申请号：JP2000243523
申请日：2000-08-11
申请人： JAPAN SCIENCE & TECH CORP
发明人： KUBOTA HIROSHI , MACHI EIICHIRO
IPC分类号： G03F7/004 , C01B31/02 , C23C14/06 , C23C14/48
摘要： PROBLEM TO BE SOLVED: To manufacture a thin film suitable for use as a negative resist for electron beam lithography in a microstructure semiconductor process. SOLUTION: A process where a C60 fullerene thin film having film thickness of penetration depth of low-energy nitrogen ions is fist vapor-deposited by the flash method and simultaneously low-energy nitrogen ions are implanted by the desired total dose is repeated until the desired thin film thickness is obtained by controlling film deposition rate in the flash method, by which the nitrogen-implanted C60 fullerene thin film can be manufactured. By this procedure, the nitrogen ions can be uniformly distributed into the C60 fullerene thin film. This nitrogen-implanted C60 fullerene thin film is suitable for use as a negative resist for electron beam lithography because difference of etching rate is remarkable before and after electron beam exposure and etching selectivity to the substrate is high.

4. 发明专利

JP2001281049A MEASURING DEVICE AND METHOD FOR VIEW ANGLE DEPENDENCY AND LOCATION DEPENDENCY OF LUMINANCE 失效
公开(公告)号：JP2001281049A
公开(公告)日：2001-10-10
申请号：JP2000089835
申请日：2000-03-28
申请人： JAPAN SCIENCE & TECH CORP , KUMAMOTO TECHNOPOLIS FOUNDATIO
发明人： KUBOTA HIROSHI , EGASHIRA YOSHIYA , FURUSE TOMOAKI , HIROSE SATOSHI
IPC分类号： G01J1/00 , G01J1/04 , G01J1/38 , G01J1/42 , G01M11/00 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To prevent the lowering of measurement accuracy (angle resolution) in luminance distribution measurement by the use of a condenser. SOLUTION: The device and method are to condense scattering light of pixels in an LCD panel in a view direction by the use of a condenser including lenses and a reflection mirror and to focus real image of the pixels on a reception plane of a CCD and measure the luminance in a specific view direction. By obtaining in advance the condensing function in the view direction of the condenser and correcting the CCD measurement data with the condensing function, the luminance distribution is obtained. By this method, obscureness of the measured data due to the condensing function of the condenser is corrected. According to the measuring angle, the condenser and the CCD are moved. When incidence light intensity into the condenser fluctuates owing to the movement, it can be calculated and corrected.

5. 发明专利

JP2002118302A PIEZOELECTRIC ACTUATOR AND ITS MANUFACTURING METHOD 失效
公开(公告)号：JP2002118302A
公开(公告)日：2002-04-19
申请号：JP2000308988
申请日：2000-10-10
申请人： JAPAN SCIENCE & TECH CORP , TAIHEIYO CEMENT CORP
发明人： OMI TADAHIRO , KUBOTA HIROSHI , YAMAKAWA TAKAHIRO , ASUMI KAZUMASA , WATANABE MASAYUKI , FUKUNAGA RYOICHI , SEKI JUNKO
IPC分类号： H01L41/083 , H01L41/22 , H01L41/257 , H01L41/29
摘要： PROBLEM TO BE SOLVED: To provide a stacked piezoelectric actuator which is used for an X-Y stage, a linear motor, a rotating motor, a carrier such as a parts feeder, etc., or the like, and drives it, making use of shearing deformation (mode 15), and its manufacturing method. SOLUTION: A piezoelectric actuator 10 has such construction that piezoelectric substance 12 and electrodes where a plurality of conductors 11 are put side by side at specified intervals roughly in parallel are stacked alternately in thickness direction of the piezoelectric substance 12. The piezoelectric substance 12 is polarized in a direction roughly orthogonal to the thickness direction of itself, and shearing transformation occurs in the piezoelectric substance 12 by applying drive voltage between the electrodes which face each other, catching the piezoelectric substance 12 in stack direction.

6. 发明专利

JPH07118014A OXIDE SUPERCONDUCTOR AND ITS PRODUCTION 失效
公开(公告)号：JPH07118014A
公开(公告)日：1995-05-09
申请号：JP26653493
申请日：1993-10-25
申请人： KOKUSAI CHODENDO SANGYO GIJUTS , MITSUBISHI ELECTRIC CORP , TOHOKU ELECTRIC POWER CO , TOSHIBA CORP
发明人： USAMI AKIRA , IZAWA KAZUYUKI , KUBOTA HIROSHI , ROOMAN PUZUNIATSUKU , YAMAUCHI HISAO , TANAKA SHOJI
IPC分类号： C04B35/45 , C01G1/00 , C01G13/00 , H01B12/00 , H01B13/00 , H01L39/12 , H01L39/24
摘要： PURPOSE:To obtain an oxide superconductor in which the lowering of the criti cal current density due to an impressed magnetic field is remarkably reduced when the magnetic field is impressed parallel with the c axis of a crystal. CONSTITUTION:The hole density of an oxide superconductor with the hole as a carrier is higher than the density of the hole giving the highest superconducting transition temp. of the oxide superconductor. The superconductor is heat-treated in an oxidizing gas atmosphere or the cation except copper constituting the superconductor is substituted by a low-balancy ion to make the density higher than the optimum value giving the maximum Tc. Consequently, the lowering of the critical current density due to an impressed magnetic field is minimized when the magnetic field is impressed parallel with the c axis of the crystal, and the superconductor having a high critical current density is produced.

7. 发明专利

JPS60191387A Display circuit 失效
公开(公告)号：JPS60191387A
公开(公告)日：1985-09-28
申请号：JP4841084
申请日：1984-03-12
申请人： Mitsubishi Electric Corp
发明人： KUBOTA HIROSHI , MORI MINAMI
IPC分类号： G08B5/36

8. 发明专利

JPH0891837A OXIDE SUPERCONDUCTOR AND ITS PROUCTION 失效
公开(公告)号：JPH0891837A
公开(公告)日：1996-04-09
申请号：JP22177294
申请日：1994-09-16
申请人： KOKUSAI CHODENDO SANGYO GIJUTS , MITSUBISHI ELECTRIC CORP , SUMITOMO ELECTRIC INDUSTRIES , TOSHIBA CORP
发明人： USAMI AKIRA , ITO MUTSUMI , KUBOTA HIROSHI , ROOMAN PUZUNIATSUKU , YAMAUCHI HISAO
IPC分类号： C01G1/00 , C01G13/02 , H01B12/04 , H01B13/00 , H01L39/24
摘要： PURPOSE: To produce an oxide superconductor in which a deterioration ration due to an impressed magnetic field of critical current density is remarkably reduced by treating an oxide superconductor containing mercury as a component with ion irradiation. CONSTITUTION: A defect is introduced into the oxide superconductor by treating the oxide superconductor containing the mercury as the component with ion irradiation. The critical current density is markedly improved by using this defective as the pin. That is, the critical current density is markedly improved by introducing the pin into all of oxide superconductor by using a proton long in penetration length as ion species to be irradiated. High critical current density is obtained at the time of 77K applying by introducing the pin effective to the superconductor having 135K Tc by irradiating HgBa2 Ca2 Cu3 O8+δ (0

9. 发明专利

JPS58204800A Ac generator 失效
标题翻译：交流发电机
公开(公告)号：JPS58204800A
公开(公告)日：1983-11-29
申请号：JP8906682
申请日：1982-05-24
申请人： Mitsubishi Electric Corp
发明人： KUBOTA HIROSHI
IPC分类号： H02P9/10
CPC分类号： H02P9/102
摘要： PURPOSE:To reset the output voltage rapidly to the original voltage by inserting a resistor in series with a field circuit by the operation of a voltage detecting relay during the period while the output voltage of an AC generator becomes higher than the prescribed voltage. CONSTITUTION:The output voltage of an AC generator 1 is detected by a transformer 3 for an instrument, compared by an automatic voltage regulator 4 with a reference voltage, a thyristor amplifier 5 is operated, and a current is supplied to a field circuit 2. A parallel circuit of a resistor 7 and a contact 8 is connected to the circuit 2, and the contact 8 is opened or closed by a voltage detecting relay coil 9 which is connected to a transformer 3. Accordingly, when the output voltage is abruptly raised due to the interruption of a load, the contact 8 is opened bythe coil 9, the resistor 7 is inserted to the circuit 2 to apparently shorten the time constant of the circuit 2, thereby rapidly reducing the field current, and the voltage is returned to the original voltage in a short time.
摘要翻译：目的：在交流发电机的输出电压高于规定电压的期间，通过在电压检测继电器的工作期间插入与励磁电路串联的电阻，将输出电压快速复位为原来的电压。构成：通过用于仪器的变压器3检测交流发电机1的输出电压，通过具有参考电压的自动电压调节器4进行比较，操作晶闸管放大器5，并将电流提供给励磁电路2。电阻器7和触点8的并联电路连接到电路2，并且通过连接到变压器3的电压检测用继电器线圈9使触点8断开或闭合。因此，当输出电压突然上升由于负载中断，触点8被线圈9打开，电阻器7被插入到电路2中，显然缩短了电路2的时间常数，从而迅速地减小了励磁电流，并将电压返回到原来的电压在短时间内。

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