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    • 2. 发明专利
    • Electro-optical measurement of hysteresis in interference modulator
    • 干涉调制器中电磁光度测量
    • JP2006098391A
    • 2006-04-13
    • JP2005219836
    • 2005-07-29
    • Idc Llcアイディーシー、エルエルシー
    • CUMMINGS WILLIAM JGALLY BRIAN J
    • G01M11/00G02B26/08
    • G02B26/001
    • PROBLEM TO BE SOLVED: To provide a correct and convenient method of an interference modulator with respect to a micro electricity mechanical system (MEMS).
      SOLUTION: A time-variation voltage waveform is applied to the interference modulator in a block 150, the reflectivity of light from the interference modulator is detected in a block 152, the reflectivity is determined as a function of electric voltage in a block 160, and sufficient quality for use as a display is recognized in a block 162. When there are a plurality of interference modulators, it is determined whether the repetition is required in a block 164, and the block 152 and after are repeated, thereby recognizing the quality of the plurality of interference modulators.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供关于微电机械系统(MEMS)的干扰调制器的正确和方便的方法。 解决方案:在块150中对干扰调制器施加时变电压波形,在块152中检测来自干扰调制器的光的反射率,反射率被确定为块中的电压的函数 160,并且在块162中识别出用作显示器的足够的质量。当存在多个干扰调制器时,确定在块164中是否需要重复,并且块152和之后被重复,从而识别 多个干扰调制器的质量。 版权所有(C)2006,JPO&NCIPI
    • 3. 发明专利
    • Process control monitor for interferometric modulator
    • 干涉仪调制器的过程控制监视器
    • JP2008046603A
    • 2008-02-28
    • JP2007150880
    • 2007-06-06
    • Idc Llcアイディーシー、エルエルシー
    • CUMMINGS WILLIAM JGALLY BRIAN J
    • B81C99/00G02B26/08G09F9/00
    • B81C99/004B81B2201/042G01N21/55G01N21/9501G02B26/001
    • PROBLEM TO BE SOLVED: To provide a process control monitor for interferometric modulators for reasons that errors can occur during the manufacturing of MEMS devices, that detecting the errors and the source of the errors can present a problem in the quality control and optimization of MEMS devices, and that accordingly there is a need for structures and methods for monitoring manufacturing processes and their results. SOLUTION: Process control monitors 100, 102, 104 are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device 108. Analysis of the process control monitors 100, 102, 104 can provide information regarding properties of the MEMS device 108 and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device 108. In some embodiments, analysis of the process control monitors 100, 102, 104 may utilize optical measurements. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了在MEMS器件制造过程中发生错误的原因提供干涉式调制器的过程控制监视器,检测误差和误差源可能会导致质量控制和优化中的问题 的MEMS器件,因此,需要用于监测制造工艺及其结果的结构和方法。 公开了使用用于制造MEMS器件108的至少一些相同工艺步骤生产的过程控制监视器100,102,104。过程控制监视器100,102,104的分析可以提供关于 MEMS器件108的特性以及器件中的部件或子部件。 该信息可用于识别处理中的错误或优化MEMS器件108.在一些实施例中,过程控制监视器100,102,104的分析可以利用光学测量。 版权所有(C)2008,JPO&INPIT
    • 5. 发明专利
    • Process control monitor regarding interferometric modulator
    • 关于干涉仪调制器的过程控制监视器
    • JP2007301719A
    • 2007-11-22
    • JP2007150861
    • 2007-06-06
    • Idc Llcアイディーシー、エルエルシー
    • CUMMINGS WILLIAM JGALLY BRIAN J
    • B81C99/00
    • B81C99/004B81B2201/042G01N21/55G01N21/9501G02B26/001
    • PROBLEM TO BE SOLVED: To provide a process control monitor regarding an interferometric modulator. SOLUTION: Process control monitors 100, 102 and 104 manufactured by using at least a part of the same process step as that used for manufacturing a MEMS device 108 are disclosed. By analyzing the process control monitors 100, 102 and 104, information on properties of the MEMS device 108 and components or sub components in the device 108 can be provided. The information can be used to identify an error in processing or optimize the MEMS device 108. In some embodiments, optical measured values can be used in the analysis of the process control monitors 100, 102 and 104. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供关于干涉式调制器的过程控制监视器。 解决方案:公开了通过使用与用于制造MEMS器件108的工艺步骤相同的工艺步骤的至少一部分制造的工艺控制监视器100,102和104。 通过分析过程控制监视器100,102和104,可以提供关于MEMS设备108的属性和设备108中的组件或子组件的信息。 该信息可用于识别处理或优化MEMS器件108中的错误。在一些实施例中,光学测量值可用于过程控制监视器100,102和104的分析。(C) 2008年,日本特许厅和INPIT
    • 6. 发明专利
    • Apparatus and method for reducing perceived color shift
    • 减少感知色差的装置和方法
    • JP2006113559A
    • 2006-04-27
    • JP2005260607
    • 2005-09-08
    • Idc Llcアイディーシー、エルエルシー
    • GALLY BRIAN JKOTHARI MANISH
    • G02B26/00G09F9/00G09F9/30G09G3/34
    • G02B26/001G02B5/20
    • PROBLEM TO BE SOLVED: To provide an apparatus and a method for reducing a perceived color shift. SOLUTION: An apparatus and a method for reducing perceived color shift as a function of a viewing angle is disclosed. One embodiment is a display device that includes a color light modulator and a color filter. The filter is configured to filter wavelengths of light that would be perceived as color shifted light when reflected by the modulator at an off-axis viewing angle. Another embodiment includes a color light modulator and a color light source configured to provide light having a spectral content that lacks the wavelengths that would be perceived as color shifted light by a view of the display at an off-axis viewing angle. Another embodiment is a method of making such display devices. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种减少感知色移的装置和方法。 公开了一种用于减少感知色移作为视角的函数的装置和方法。 一个实施例是包括彩色调制器和滤色器的显示装置。 滤光器被配置为滤除在离轴观察角度被调制器反射时被感知为偏移光的光的波长。 另一个实施例包括彩色光调制器和彩色光源,其被配置为提供具有光谱含量的光,所述光谱内容缺乏通过视轴处于离轴视角的显示器的视觉而被感知为偏移光的波长。 另一实施例是制造这种显示装置的方法。 版权所有(C)2006,JPO&NCIPI