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1. 发明专利

JP2014119398A Nuclear reactor member 有权
标题翻译：核反应堆成员
公开(公告)号：JP2014119398A
公开(公告)日：2014-06-30
申请号：JP2012276317
申请日：2012-12-19
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： HAN MINGXU , TAKAGI TAKASHI
IPC分类号： G21C5/00 , G21C11/02 , G21F3/00
CPC分类号： G21C5/126 , G21C11/028 , G21F1/12 , Y02E30/40
摘要： PROBLEM TO BE SOLVED: To provide a nuclear reactor member capable of being stably used without generating swelling and creep-deformation, etc., even when directly exposed to neutrons without improving operating conditions and devices of a nuclear reactor.SOLUTION: A nuclear power member includes: a core part consisting of an aggregate of a graphite granular material; and a cover layer covering a core part and consisting of a ceramic dense body. Graphite affected by neutron irradiation is used in the state of an aggregate of a granular material and does not affect a shape and size of the nuclear reactor member even when swelling and creep deformation, etc., are generated since the granular materials are not bonded to each other. The nuclear reactor member has a cover layer covering a core part and consisting of the ceramic dense body. Since the cover layer consisting of the dense body has durability higher than that of the graphite to neutron-irradiation, the shape and size of the nuclear reactor member are hardly affected.
摘要翻译：要解决的问题：即使直接暴露于中子而不改善核反应堆的操作条件和装置，也能够稳定地使用能够稳定地使用的核反应堆构件。解决方案：核能构件包括：由石墨颗粒材料的聚集体组成的芯部分; 以及覆盖芯部并由陶瓷致密体构成的覆盖层。受中子照射影响的石墨以粒状材料的聚集体的状态使用，即使发生膨胀和蠕变变形等，也不影响核反应堆构件的形状和尺寸，因为颗粒材料不粘合到彼此。核反应堆构件具有覆盖核心部分并由陶瓷致密体构成的覆盖层。由于由致密体构成的覆盖层具有比石墨对中子照射的耐久性更高的耐久性，所以核反应堆构件的形状和尺寸几乎不受影响。

2. 发明专利

JP2007012933A Semiconductor manufacturing device and component therefor 审中-公开
标题翻译：半导体制造设备及其组件
公开(公告)号：JP2007012933A
公开(公告)日：2007-01-18
申请号：JP2005192953
申请日：2005-06-30
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： TAKAGI TAKASHI , NORO TADASHI
IPC分类号： H01L21/205 , C04B35/52 , C23C16/44
摘要： PROBLEM TO BE SOLVED: To provide a member for a semiconductor manufacturing device which is capable of manufacturing a semiconductor of high quality or the like. SOLUTION: The semiconductor manufacturing device 10 has a susceptor 12 for mounting a substrate 19 inside a reaction container 11, and a heater 13 for heating the susceptor 12. The susceptor 12 is formed of a carbon material, and a thermally decomposed carbon layer is formed on at least a surface exposed to raw gas introduced from a gas introduction tube 14a. A wetting tension of the surface exposed to the raw gas is 62 mN/m or more. Consequently, it is possible to attach particle by the raw gas to the thermally decomposed carbon layer, to prevent peeling/dispersal thereof, and to carry out cleaning without opening to the air. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够制造高质量半导体的半导体制造装置的构件等。解决方案：半导体制造装置10具有用于将反射容器11内的基板19安装的基座12和用于加热基座12的加热器13.基座12由碳材料和热分解碳至少在暴露于从气体导入管14a导入的原料气体的表面上形成层。暴露于原料气体的表面的润湿张力为62mN / m以上。因此，可以将原料气体的粒子附着在热分解碳层上，防止其剥离/分散，并且不会对空气进行开放而进行清洗。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2009113459A Carbon-based composite member 有权
标题翻译：基于碳的复合材料
公开(公告)号：JP2009113459A
公开(公告)日：2009-05-28
申请号：JP2007292470
申请日：2007-11-09
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： TAKAGI TAKASHI , YASUDA MASAHIRO
IPC分类号： B32B18/00 , C04B35/52 , G21B1/11 , G21B1/17
CPC分类号： G21B1/13 , C04B37/008 , C04B2237/363 , C04B2237/64 , Y02E30/128 , Y10T156/1064 , Y10T156/1082 , Y10T428/15 , Y10T428/24314 , Y10T428/24322 , Y10T428/24331 , Y10T428/24562 , Y10T428/2457 , Y10T428/24612 , Y10T428/30
摘要： PROBLEM TO BE SOLVED: To provide a carbon-based composite member which decreases releasing, cutting or the like of a carbon-based sheet at a carbonizing stage during manufacture by heat-treatment of an adhesive and under a high-temperature environment during use, and prevents the carbon-based sheet from releasing, cutting or the like generated under the high-temperature environment. SOLUTION: The carbon-based composite member 10 is prepared by sticking the carbon-based sheet on the surface of a graphite substrate 12 by using a heat-resistant adhesive, and at least either slits 16 or grooves are formed on the carbon-based sheet 14. In the figure, in the carbon-based composite member, the carbon-based sheet is stuck on the surface of the graphite substrate by using the heat-resistant adhesive. Lattice-like slits are formed on the carbon-based sheet. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种在制造期间通过粘合剂的热处理和在高温环境下在碳化阶段减少碳基片材的释放，切割等的碳基复合材料并且防止碳基片材在高温环境下产生的剥离，切割等。解决方案：通过使用耐热粘合剂将碳基片材粘附在石墨基板12的表面上并且在碳上形成至少一个狭缝16或凹槽来制备碳基复合部件10 在该图中，在碳基复合构件中，通过使用耐热粘合剂将碳系片粘贴在石墨基板的表面上。格状狭缝形成在碳基片上。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2004298897A Member for polycrystalline silicon casting 有权
标题翻译：多晶硅铸件会员
公开(公告)号：JP2004298897A
公开(公告)日：2004-10-28
申请号：JP2003092562
申请日：2003-03-28
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： TAKAGI TAKASHI , NORO TADASHI
IPC分类号： B22D25/04 , B22C1/00 , B22C3/00 , B22C9/06 , C01B33/02 , C04B41/87 , C23C4/10
摘要： PROBLEM TO BE SOLVED: To provide a member for polycrystalline silicon casting which is excellent in durability, which can be repeatedly used, and which can be easily manufactured. SOLUTION: The member for the polycrystalline silicon casting is composed of a carbon base material and a silicon nitride layer which is formed on the surface of the carbon base material. The arithmetic average roughness Ra on the surface of the carbon base material in contact with the silicon nitride layer based on JIS B 0601 is 1-15 μm. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种可以重复使用并且可以容易地制造的耐久性优异的多晶硅铸件的构件。解决方案：多晶硅铸件的构件由碳基材料和形成在碳基材的表面上的氮化硅层组成。与基于JIS B 0601的与氮化硅层接触的碳基材的表面的算术平均粗糙度Ra为1-15μm。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2005320208A Carbon composite member 有权
标题翻译：碳复合材料
公开(公告)号：JP2005320208A
公开(公告)日：2005-11-17
申请号：JP2004140375
申请日：2004-05-10
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： TAKAGI TAKASHI , NORO TADASHI
IPC分类号： C04B41/87 , C04B35/52 , C23C16/26 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a carbon composite material in which the exposure of a carbon base material is inhibited even when it is used for a long period of time at a high temperature and reducing gas or reactive gas atmosphere and which is excellent in reliability. SOLUTION: The carbon composite member is composed of the carbon base material and a pyrolytic carbon layer formed on the surface of the carbon base material. The pyrolytic carbon layer is composed of a first pyrolytic carbon layer directly formed on the surface of the carbon base material and a second pyrolytic carbon layer formed in a laminated manner on the first pyrolytic carbon layer. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种碳复合材料，其中即使在高温下使用长时间并且还原气体或反应性气体气氛也可以抑制碳基材料的暴露，并且其是出色的可靠性。解决方案：碳复合构件由碳基材料和形成在碳基材的表面上的热解碳层组成。热解碳层由直接形成在碳基材料的表面上的第一热解碳层和在第一热解碳层上层压形成的第二热解碳层组成。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2004299932A Carbon composite material 有权
公开(公告)号：JP2004299932A
公开(公告)日：2004-10-28
申请号：JP2003092561
申请日：2003-03-28
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： TAKAGI TAKASHI , NORO TADASHI
IPC分类号： C04B41/87 , C23C16/34 , C23C16/458 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a carbon composite material having excellent durability without wear and tear or the occurrence of pinholes even in use at a high temperature under a reducing gas or a reactive gas atmosphere for a long period.
SOLUTION: The carbon composite material is composed of a graphite base material and a tantalum nitride layer formed on the surface of the graphite base material. The half-value width of the maximum peak in the analysis of X-ray diffraction of a crystal constituting the tantalum nitride layer is ≤2°.
COPYRIGHT: (C)2005,JPO&NCIPI

7. 发明专利

JP2004071247A Separator for solid polymer fuel cells 审中-公开
标题翻译：固体聚合物燃料电池分离器
公开(公告)号：JP2004071247A
公开(公告)日：2004-03-04
申请号：JP2002226570
申请日：2002-08-02
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： TAKAGI TAKASHI
IPC分类号： H01M8/02 , H01M8/10
CPC分类号： Y02E60/521
摘要： PROBLEM TO BE SOLVED: To provide a separator for a solid polymer fuel cell capable of preventing poisoning of an ion exchange film due to the ionization of impurities contained in the separator, capable of reducing the thickness of the separator depending on the excellent gas impermeability and high strength of the separator, capable of stably generating electricity for a long period caused by the nonexistence of the worsening of the gas impermeability due to heat and long termed deterioration, capable of reducing the size and weight. SOLUTION: A heat decomposing carbon film is formed on the surface of a graphite base material of the separator for the solid polymer fuel cell. COPYRIGHT: (C)2004,JPO
摘要翻译：解决问题的方案为了提供一种固体高分子型燃料电池用隔膜，其能够防止由隔膜中所含的杂质的电离导致的离子交换膜的中毒，能够根据优异的方式使隔板的厚度减小气体不透气性和高强度的隔膜，能够由于不会由于热而导致的气体不渗透性的长期恶化而长时间稳定地发电，并且长期被称为劣化，能够减小尺寸和重量。解决方案：在用于固体聚合物燃料电池的隔板的石墨基材的表面上形成热分解碳膜。版权所有（C）2004，JPO

8. 发明专利

JP2009210266A Tubular body 审中-公开
标题翻译：管状体
公开(公告)号：JP2009210266A
公开(公告)日：2009-09-17
申请号：JP2008050324
申请日：2008-02-29
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： TAKAGI TAKASHI
IPC分类号： G21C3/06 , C04B41/87
CPC分类号： G21C3/00 , C04B35/52 , C04B35/806 , C04B41/009 , C04B41/5059 , C04B41/52 , C04B41/87 , C04B41/89 , C04B2235/5244 , C04B2235/614 , C04B2235/94 , C23C16/02 , G21C3/07 , G21C21/02 , Y02E30/40 , Y10T428/249939 , C04B41/4529 , C04B41/4556 , C04B41/4531
摘要： PROBLEM TO BE SOLVED: To provide a tubular body which is suitable for the protection of nuclear fuel, has such a strength as to maintain protective functions stably in required service conditions, can prevent cracks from appearing and can be provided in a simple method, and a method for manufacturing the tubular body.
SOLUTION: The tubular body is composed by forming an SiC layer at least on the outer surface of a tubular fiber-reinforced carbonaceous base material consisting of aggregate made of ceramic fibers and carbonaceous formation filling gaps between them and diffusing silicon atoms toward the inside of the relevant fiber-reinforced carbonaceous base material from a borderline region between the fiber-reinforced carbonaceous base material and the SiC layer. In the manufacturing method, the tubular body is obtained by forming the fiber-reinforced carbonaceous base material in the aggregate through the gas phase growth of pyrocarbon and then reacting and converting the pyrocarbon located at least on the outer surface of the fiber-reinforced carbonaceous base material into SiC with an SiO gas to form the SiC layer.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供适合于保护核燃料的管状体，具有在所需的使用条件下保持保持功能的强度，可以防止出现裂纹，并且可以以简单的方式提供方法和用于制造管状体的方法。解决方案：管状体通过至少在由陶瓷纤维组成的管状纤维增强碳质基材的外表面上形成SiC层和在它们之间形成碳质层填充间隙并将硅原子朝向在纤维增强碳质基材和SiC层之间的边界区域内的相关纤维增强碳质基材的内部。在制造方法中，通过将热解碳气相生长形成聚集体中的纤维增强碳质基材，然后使至少位于纤维增强碳质基材的外表面上的热解碳反应并进行转化，将材料转化成具有SiO气体的SiC，以形成SiC层。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2008222456A Carbon composite member 有权
标题翻译：碳复合材料
公开(公告)号：JP2008222456A
公开(公告)日：2008-09-25
申请号：JP2007058937
申请日：2007-03-08
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： TAKAGI TAKASHI , YASUDA MASAHIRO
IPC分类号： C04B35/52 , C01B31/04 , C30B15/10 , C30B29/06 , H01L21/205 , H01L21/3065 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a carbon composite member which is hard to slide, excellent in workability, and usable as a member for semiconductor manufacturing apparatus. SOLUTION: The carbon composite member 1 is composed of a carbon base material 10 and a pyrolytic carbon layer 11 formed on the carbon base material 10. Projections 12 are formed on the surface of the pyrolytic carbon layer 11, wherein the projections 12 are formed by crystal growing the pyrolytic carbon around carbonaceous powder 13 as nuclei, the minor axes of the projections 12 are in the range of 5-3,000 μm, and the surface density thereof is in the range of 10 2 -10 8 /m 2 . COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种难以滑动的碳复合构件，加工性优异，可用作半导体制造装置的构件。解决方案：碳复合构件1由形成在碳基材10上的碳基材料10和热解碳层11组成。在热解碳层11的表面上形成有突起12，其中突起12 通过将碳质粉末13周围的热解碳晶体生长为核而形成，突起12的短轴在5-3,000μm的范围内，其表面密度在10SP2的范围内 > -10 8 /米 2 。版权所有（C）2008，JPO＆INPIT

10. 发明专利

JP2008222455A Crucible for pulling silicon single crystal 审中-公开
标题翻译：可溶于硅胶单晶
公开(公告)号：JP2008222455A
公开(公告)日：2008-09-25
申请号：JP2007058936
申请日：2007-03-08
申请人： Ibiden Co Ltd , イビデン株式会社
发明人： TAKAGI TAKASHI , YASUDA MASAHIRO
IPC分类号： C30B29/06 , C30B15/10
摘要： PROBLEM TO BE SOLVED: To provide a crucible for pulling a silicon single crystal having excellent durability and easily attachable to a silicon single crystal pulling device.
SOLUTION: The crucible 10 for pulling a silicon single crystal of the present invention comprises a quartz glass crucible 11 for accommodating a silicon material and a graphite crucible 12 surrounding the bottom and the outer circumference face of the quartz glass crucible and divided into two or more pieces in the axial direction. The division face of each division piece 12a, 12b constituting the graphite crucible 12 is provided with a groove in the longitudinal direction along the shape of the division face. An elastic member 14 is housed in the space formed by conforming the grooves to each other.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于拉伸具有优异耐久性并易于附着到单晶硅提拉装置的硅单晶的坩埚。解决方案：用于拉动本发明的硅单晶的坩埚10包括用于容纳硅材料的石英玻璃坩埚11和围绕石英玻璃坩埚的底部和外周面的石墨坩埚12，并被分成轴向两个或多个。构成石墨坩埚12的各分割片12a，12b的分割面沿分割面的形状沿长度方向设置有槽。弹性构件14容纳在通过使凹槽相互配合而形成的空间中。版权所有（C）2008，JPO＆INPIT

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