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    • 4. 发明专利
    • Method for removal of organic coated and hardened film
    • 有机涂层和硬化膜的去除方法
    • JPS60192333A
    • 1985-09-30
    • JP4765384
    • 1984-03-13
    • Hitachi Ltd
    • MATSUZAKI HARUMITAKAHASHI SANKICHIYOSHIDA MASAHIROTAKAKUSAKI TSUNEHIKOSATOU JIYOUSHIROUYAGI HIDEYUKI
    • H01L21/30B08B7/00G03F7/30G03F7/42H01L21/027H01L21/302H01L21/3065
    • B08B7/0021G03F7/42
    • PURPOSE:To prevent the contamination of a protective film by impurities and the deterioration of element characteristics, to prevent the lowering of yield of production as well as to easily obtain a method in which a treatment solution will be reused by a method wherein, after a substrate and liquid gas or supercritical gas have been contacted with each other, the gas is expanded by changing its temperature and/or the condition of pressure. CONSTITUTION:After a substrate, whereon an organic coated and hardened film is joined together, and liquefied gas or supercritical gas have been contacted, the gas is expanded by changing its temperature and/or the condition of pressure. Non-oxidizing gas such as CO2, NH3, N2 and the like can be used as liquefied gas or supercritical gas, but CO2 is suitable taking into consideration of advantages in cost and operation. Also, a gaseous organic solvent can be used at the normal temperature, and propane, butane, methyl chloride and the like can be used as the organic solvent. When liquefied carbonic acid gas is used, as it is hardly infiltrated completely into the interior of the organic coated and hardened film and the like such as a photoresist coated film, or on the interface between said films and the substrate, it is desirable in this case that an organic solvent of high solubility is mixed into carbonic acid gas.
    • 目的:为了防止杂质对保护膜的污染和元件特性的劣化,为了防止生产成本的降低,并且容易地获得其中通过以下方法可以再次使用处理溶液的方法:在 衬底和液体气体或超临界气体彼此接触,气体通过改变其温度和/或压力条件而膨胀。 构成:在将有机涂层硬化膜接合在一起的基板之后,液化气体或超临界气体已经接触,气体通过改变其温度和/或压力条件而膨胀。 非氧化性气体如CO 2,NH 3,N 2等可用作液化气或超临界气体,但考虑到成本和操作的优点,CO 2是合适的。 此外,可以在常温下使用气态有机溶剂,丙烷,丁烷,甲基氯等可以用作有机溶剂。 当使用液化的碳酸气体时,由于它几乎不渗透到有机涂覆和硬化膜等内部,例如光致抗蚀剂涂覆的膜,或者在所述膜和基板之间的界面上,所以在此 将高溶解度的有机溶剂混入碳酸气体的情况。
    • 5. 发明专利
    • Crude oil storage apparatus
    • 原油储存装置
    • JPS6119689A
    • 1986-01-28
    • JP14111484
    • 1984-07-06
    • Hitachi Ltd
    • TAKAKUSAKI TSUNEHIKOSATOU JIYOUSHIROUYOSHIDA MASAHIROTAKAHASHI SANKICHIMATSUZAKI HARUMIMUTSUKUSHI TOSHIKI
    • C10G31/08B65D90/00
    • PURPOSE: To prevent sludge in a tank from settling and being accumulated, by controlling the temp. of charge water charged at the bottom of a crude oil storage tank and the concn. of salts.
      CONSTITUTION: Crude oil 6 from a tanker is introduced through a pipe 9 and an inner pipe 17 into a crude oil storage tank 2 in which charge water 7 is charged. The temp. of the charge water 7 in the tank 2 is detected by a water temperature detector 15, a heater 15 is operated and controlled through a temperature controlling device 14 on the basis of the detected values to thereby keep the temp. of the charge water at a temp. higher than the m.p. (40W70°C) of waxes in the crude oil 6, whereby the waxes are dissolved and diluted with water and salt water droplets and fine inorg. matters are precipitated. The charge water 7 is fed through a circulating pump 11 and an oil/water separator 12 to a desalting device 13 where the charge water 7 is desalted to such an extent that electrical conductivity is reduced to 500μΩ/cm or below. The desalted water is then recycled to the tank 2.
      COPYRIGHT: (C)1986,JPO&Japio
    • 目的:通过控制温度,防止油箱内的污泥沉降和积聚。 装在原油储罐底部的充水水 的盐。 构成:来自油罐车的原油6通过管道9和内管道17引入原油储存罐2,原油储存罐2中装入加料水7。 温度 通过水温检测器15检测罐2内的装料水7,通过温度控制装置14根据检测值对加热器15进行操作和控制,从而保持温度。 的充电水在一个温度。 高于m.p. (40-70℃)的蜡,由此蜡溶解并用水和盐水滴稀释并精细化。 事情沉淀。 加料水7通过循环泵11和油/水分离器12输送到脱盐装置13,在该脱盐装置13中,加料水7脱盐至使导电率降至500muOMEGA / cm以下的程度。 然后将脱盐水再循环到罐2中。
    • 6. 发明专利
    • EXTRACTING SEPARATION DEVICE
    • JPS60187303A
    • 1985-09-24
    • JP4334684
    • 1984-03-07
    • HITACHI LTD
    • TAKAKUSAKI TSUNEHIKOSATOU JIYOUSHIROUYOSHIDA MASAHIROTAKAHASHI SANKICHIMATSUZAKI HARUMI
    • B01D11/02B01D11/04
    • PURPOSE:To enable control of pressure and temp. of an extraction tank and a separation tank independently and highly accurately by providing a temp. controlling mechanism and a pressure controlling mechanism respectively to the extraction tank and the separation tank. CONSTITUTION:An object material to be extracted and separated is charged to an extraction tank 28 and the fluid in a fluid source 21 is filled in the whole part of the system, and the extraction tank 28 is brought to a supercritical condition. The pressure is controlled by a pressure controlling valve 25, and the temp. is controlled to the coincide with a target temp. of a temp. indicator TR1 by circulating the fluid in the extraction tank using a combination of a heat exchanger 26 and a pump 27; thus, the pressure and the temp, are controlled independently to each other. The fluid mixture consisting of the extracted material and the fluid under the supercritical condition is sent to a separation tank 29, where the pressure is reduced to near a target pressure of the separation tank 29 by a reducing valve 50; the pressure is further controlled by a fine pressure controlling mechanism comprising a hydraulic survo motor 30, accumulator 36, etc. The temp. is further controlled so as to coincide with a target temp. of a temp. indicator TR2 by circulating the fluid mixture in the separation tank using a combination of a heat exchanger 31 and a pump 32.