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    • 1. 发明专利
    • Apparatus and method for inspecting liquid crystal panel substrate
    • 检测液晶板基板的装置和方法
    • JP2003065962A
    • 2003-03-05
    • JP2001257235
    • 2001-08-28
    • Hitachi Industries Co Ltd株式会社 日立インダストリイズ
    • KAWASUMI YUKIHIROMATSUI JUNICHIENDO MASATOMOISHIDA SHIGERUTOKUYASU YOSHIAKI
    • G01N21/88G01M11/00G02F1/13G09F9/00G09F9/35
    • PROBLEM TO BE SOLVED: To provide an apparatus and a method for inspecting a liquid crystal panel substrate wherein whether the supply state of a liquid crystal is satisfactory or not can be judged and measured with satisfactory accuracy.
      SOLUTION: The inspecting apparatus is provided with a hollow substrate table 3 on which a substrate 10 supplied with liquid crystals 11 is placed, an imaging means 6 which can be moved in the upper part of the substrate table 3 by a moving means and a control means which controls the substrate table 3 and the imaging means 6. A backlight 9 and a polarizing plate 21 are installed at the substrate table 3, a polarizing plate 20 is installed at a lens part 8 in the imaging means 6, and the polarizing plate 21 at the substrate table 3 and the polarizing plate 20 at the imaging means 6 are arranged so as to become mutually crossed Nicols.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:为了提供用于检查液晶面板基板的装置和方法,其中液晶的供应状态是否令人满意可以以令人满意的精度进行判断和测量。 解决方案:检查装置设置有中空基板台3,其上放置有液晶11的基板10,成像装置6可以通过移动装置在基板台3的上部移动,并且控制 控制基板台3和成像装置6的装置。背光源9和偏光板21安装在基板台3上,偏振板20安装在成像装置6中的透镜部分8上,偏光板 在成像装置6处的基板台3和偏光板20上设置成相互交叉的尼古丁。
    • 2. 发明专利
    • Paste applicator
    • 膏药施药者
    • JP2003284985A
    • 2003-10-07
    • JP2002090191
    • 2002-03-28
    • Hitachi Industries Co Ltd株式会社 日立インダストリイズ
    • KAWASUMI YUKIHIROISHIDA SHIGERUMATSUMOTO SEIJIMATSUI JUNICHITOKUYASU YOSHIAKIMURAYAMA TAKAO
    • B05C5/00B05C9/10B05C13/02
    • PROBLEM TO BE SOLVED: To solve the problem that dust is generated from the friction slide part of a drive part in the vicinity of a nozzle when a paste applicator is operated in a clean room to adhere the dust to the surface of a substrate and paste to be coated and a paste pattern of good accuracy can not be drawn.
      SOLUTION: A paste applicator is provided with a cover for covering the friction slide part in the vicinity of the nozzle and an exhaust mechanism for discharging air in the cover. Further, a whole cover for covering the whole of the paste applicator is provided and a suction port is provided to the side surface of the whole cover at a height preventing dust from falling on the surface of the substrate while an exhaust port is provided on the side of a ceiling or to the side surface opposed to the suction port and filters are provided to the suction port and the exhaust port. Further, an exhaust duct of the friction slide part is connected to the exhaust port provided to the whole cover.
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:为了解决当在洁净室中操作膏剂时将喷嘴附近的驱动部分的摩擦滑动部分产生灰尘的问题,以将灰尘附着到喷嘴的表面上 要涂布的基材和糊状物,并且不能绘制具有良好精度的糊状图案。 解决方案:膏剂涂布器设置有用于覆盖喷嘴附近的摩擦滑动部分的盖和用于排出盖中的空气的排气机构。 此外,设置有用于覆盖整个涂料器的整个盖,并且在整个盖的侧表面上设置有防止灰尘落在基板的表面上的高度的吸入口,同时在其上设置排气口 设置在吸入口和排气口上的天花板侧或与吸入口对置的侧面和过滤器。 此外,摩擦滑动部分的排气管连接到设置在整个盖上的排气口。 版权所有(C)2004,JPO
    • 3. 发明专利
    • Paste coating method and paste coating machine
    • 涂料涂料方法和喷涂涂布机
    • JP2003053237A
    • 2003-02-25
    • JP2001250405
    • 2001-08-21
    • Hitachi Industries Co Ltd株式会社 日立インダストリイズ
    • TOKUYASU YOSHIAKIYONEDA FUKUOISHIDA SHIGERUKAWASUMI YUKIHIROMATSUI JUNICHI
    • B05D1/26B05C5/02B05C11/10B05D3/00B05D7/24
    • PROBLEM TO BE SOLVED: To obtain a desired paste shape even if paste generating stringing is used and to enhance productivity.
      SOLUTION: A paste pattern is applied and drawn on a substrate 7 by coating the substrate 7 with the paste P by a nozzle 13 while moving the nozzle 13 (a). When the nozzle 13 reaches a drawing completion position E (b) and the discharge of the paste is stopped to raise the nozzle 13 to a position G2, the stringing part PS of the paste P is generated (c) and, when the nozzle 13 is held at the position G2 for a while as it is, the stringing part PS becomes fine. Thereafter, the nozzle 13 is allowed to fall to a position G3 and immediately raised to the position G2 and the up and down movement of the nozzle 13 is repeated until the stringing part PS is cut while monitoring the stringing part PS by a nozzle monitor camera 19. When the stringing part PS is cut, the cut part PI on the side of the paste P remains on the paste P to be absorbed by the paste P.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:即使使用糊生成线条也可获得所需的糊状,并提高生产率。 解决方案:通过在喷嘴13(a)移动的同时通过喷嘴13用浆料P涂覆基板7,将基板7涂敷并涂布在基板7上。 当喷嘴13达到拉拔完成位置E(b)并停止浆料的排出以将喷嘴13升高到位置G2时,产生浆料P的拉丝部分PS(c),并且当喷嘴13 被保持在位置G2一直持续一段时间,则弦线部分PS变得很好。 此后,允许喷嘴13落到位置G3并立即升至位置G2,并且重复喷嘴13的上下运动,直到切断部分PS被切割,同时通过喷嘴监视摄像机监视穿线部分PS 当切割部分PS被切割时,糊料P一侧的切割部分PI保留在糊料P上以被浆料P吸收。
    • 4. 发明专利
    • Paste application apparatus
    • 涂料应用设备
    • JP2003053229A
    • 2003-02-25
    • JP2001250315
    • 2001-08-21
    • Hitachi Industries Co Ltd株式会社 日立インダストリイズ
    • KAWASUMI YUKIHIROYONEDA FUKUOTOKUYASU YOSHIAKIISHIDA SHIGERUMATSUI JUNICHI
    • B05C5/00
    • PROBLEM TO BE SOLVED: To eliminate unevenness of paste discharge amounts of a plurality of paste discharge outlets at the time of drawing paste patterns at once with a multihole nozzle.
      SOLUTION: A paste supply pipeline 40 composed of a vertical portion 40a descending from the paste supply hole 41 of a syringe 17, a horizontal portion 40b bent at approximately 90° from the vertical portion, and a vertical portion 40c further bent at approximately 90° from the horizontal portion is formed in a coating head part 13. The vertical portion 40c descends and the lower end part communicates with a plurality of paste discharge ports 42 arranged in x-axial direction. The paste supply pipeline 40 is made wider as a whole in the arrangement direction (the x-direction) of a plurality of the paste discharge ports 42 and the vertical portion 40a of the paste supply pipeline 40 is provided with a diffusion plate 43 for diffusing the flow of the paste on the opposite to the paste supply hole 41.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:为了消除使用多孔喷嘴一次绘制糊状图案时的多个糊料排出口的糊剂排出量的不均匀性。 解决方案:由从注射器17的浆料供应孔41下降的垂直部分40a,大约90度弯曲的水平部分40b组成的糊料供应管线40。 并且垂直部分40c进一步在大约90度弯曲。 从水平部分形成在涂覆头部13中。垂直部40c下降,下端部与沿x轴方向排列的多个浆料排出口42连通。 糊料供给配管40在多个糊料排出口42的排列方向(x方向)上整体上较宽,糊料供给配管40的上下部40a设置有用于扩散的扩散板43 浆料在与糊料供应孔41相对的流动。
    • 5. 发明专利
    • Paste applicator
    • 膏药施药者
    • JP2005193156A
    • 2005-07-21
    • JP2004002178
    • 2004-01-07
    • Hitachi Industries Co Ltd株式会社 日立インダストリイズ
    • KAWASUMI YUKIHIROISHIDA SHIGERUMITSUMOTO MASARUNAITO MASAMITOKUYASU YOSHIAKI
    • B05C5/00B05C9/10B05C11/00H01J9/227H01J11/22H01J11/34H01J11/36H01J11/42H01J11/02
    • PROBLEM TO BE SOLVED: To provide a paste applicator in which a paste pattern is high precisely formed even on a substrate having unevenness by precisely detecting the waviness of the substrate to increase productivity.
      SOLUTION: The substrate K is provided with stripe-like ribs Ra or ribs Rb of parallel crosses and has an uneven surface as shown by figure 2. A height sensor (for example, a non-contact triangle measuring type sensor) 27 is provided in a nozzle for applying paste between the ribs Ra of the substrate K. Before the application of the paste to form the paste pattern, fine angle inclination to the ribs Ra and the distance between the height sensor 27 and the substrate K along a path in the vicinity of a paste application path (in this case, between the ribs Ra) are measured to measure the waviness of the substrate K by the height sensor 27. A plane formed by connecting the peaks of the ribs Ra is determined by processing the distance data of the measured result to detect the waviness of the substrate K.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 解决问题的方法:通过精确地检测基板的波纹度以提高生产率,提供一种浆料涂布器,其中通过精确地检测基板的波纹度,甚至在具有不平坦的基板上也精确地形成糊状图案。 解决方案:如图2所示,基板K设置有条状肋Ra或平行十字形的肋Rb,并且具有不均匀的表面。高度传感器(例如,非接触式三角测量型传感器)27 设置在用于在基板K的肋Ra之间施加糊料的喷嘴中。在施加糊料以形成浆料图案之前,对肋Ra的细角度倾斜以及高度传感器27和基板K之间的距离沿着 测量在糊料施加路径(在这种情况下,肋R a之间)附近的路径,以通过高度传感器27测量衬底K的波纹度。通过连接肋Ra的峰形成的平面通过加工 测量结果的距离数据来检测基板K的波纹度。版权所有(C)2005,JPO&NCIPI
    • 7. 发明专利
    • Paste coating machine and paste coating method
    • 涂料涂料和涂料涂料方法
    • JP2003053238A
    • 2003-02-25
    • JP2001250415
    • 2001-08-21
    • Hitachi Industries Co Ltd株式会社 日立インダストリイズ
    • ISHIDA SHIGERUTOKUYASU YOSHIAKIKAWASUMI YUKIHIROYAMAMA SHINYAMATSUMOTO SEIJI
    • B05D1/26B05C5/02B05C11/10B05D3/00B05D7/24G02F1/13
    • PROBLEM TO BE SOLVED: To eliminate vibration generated when drawing is applied to the corner part of a pattern at a high speed in applying and drawing a plurality of paste patterns to one substrate.
      SOLUTION: The paste pattern formed on the substrate 9 is resolved into linear patterns, that is, a vertical pattern SP-Y and a horizontal pattern SP-X and these patterns are separately drawn to eliminate work for coating the corner part of the pattern with paste. At the crossing part XP of the vertical pattern SP-Y and the horizontal pattern SP-X, the coating amount of the paste at the crossing part XP is reduced as compared with a linear part other than the crossing part XP when the vertical pattern SP-Y is applied and drawn at first. Next, paste coating is performed so that the coating amount of the paste at the crossing part XP becomes equal to that at the linear part other than the crossing part XP in the obtained paste pattern when the horizontal pattern SP-X is applied and drawn.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:为了消除在向一个基板施加和拉伸多个糊状图案时高速地向图形的角部施加拉伸时产生的振动。 解决方案:形成在基板9上的糊状图案被分解为线状图案,即垂直图案SP-Y和水平图案SP-X,并且这些图案被分开绘制以消除用于涂覆图案的角部的工作, 糊。 在垂直图案SP-Y的交叉部分XP和水平图案SP-X处,当垂直图案SP(垂直图案SP-Y)的垂直图案SP-X的交叉部分XP与交叉部分XP之间的直线部分相比,交叉部分XP处的糊料的涂布量减少 首先应用和绘制。 接着,涂布水平图案SP-X时,进行糊状涂布,使得在交叉部XP处的糊剂的涂布量与获得的糊剂图案中的交叉部分XP以外的直线部分相同。