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1. 发明专利

JP2005319535A Co2 blast nozzle, and machining apparatus using the same 审中-公开
标题翻译：二氧化碳喷嘴，以及使用其的加工装置
公开(公告)号：JP2005319535A
公开(公告)日：2005-11-17
申请号：JP2004139289
申请日：2004-05-10
申请人： Hitachi Industries Co Ltd , 株式会社日立インダストリイズ
发明人： KUDO TAKUJI , TAKAHASHI KENICHI , TSUKAHARA SATOSHI
IPC分类号： B24C5/04 , B24C1/00
摘要： PROBLEM TO BE SOLVED: To provide a nozzle to be used for CO
2 blasting, which nozzle can continuously change the collision speed of dry ice particles against the machining surface without changing the state of the rapid decompression of liquefied carbonic acid, and can prevent unstable blasting due to the choke of the nozzle.
SOLUTION: Orifices exclusive for the liquefied carbonic acid and an assist gas respectively are provided. A long pipe is provided on the secondary side of the orifice exclusive for the assist gas. The orifice exclusive for the liquefied carbonic acid is provided on the side surface of the long pipe. As a result, the secondary side of the orifice exclusive for the liquefied carbonic acid is arranged on the secondary side of the assist gas. Therefore, the size and the quantity of the dry ice particles can be produced so as to be constant regardless of the primary side pressure of the assist gas.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供用于CO 2 喷砂的喷嘴，该喷嘴可以连续地改变干冰颗粒相对于加工表面的碰撞速度，而不改变快速液化碳酸减压，可防止喷嘴扼流圈引起的不稳定爆破。
解决方案：分别提供液化碳酸和辅助气体专用的孔。在辅助气体专用的孔口的次级侧设置有长管。专门用于液化碳酸的孔口设置在长管的侧面。结果，专用于液化碳酸的孔口的次级侧设置在辅助气体的次级侧。因此，与辅助气体的一次侧压力无关地，可以制造干冰颗粒的尺寸和数量，使其恒定。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2005111575A Co2 snow jetting device and co2 snow jetting method 审中-公开
标题翻译：二氧化碳喷射装置和二氧化碳喷射方法
公开(公告)号：JP2005111575A
公开(公告)日：2005-04-28
申请号：JP2003345290
申请日：2003-10-03
申请人： Hitachi Industries Co Ltd , 株式会社日立インダストリイズ
发明人： KONDO YUMITO , KUDO TAKUJI
IPC分类号： B08B7/00 , B24C1/00 , B24C5/02 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a CO
2 snow jetting device and method reducing the influence of a system loss change caused by a temperature change.
SOLUTION: In this CO
2 snow jetting device for expanding liquid CO
2 to produce CO
2 snow and allowing assist gas to join the CO
2 snow to jet the CO
2 snow, a swirling means is provided for swirling assist gas to form the swirling flow of assist gas around the CO
2 snow in an expansion chamber at a confluence part, and a pressure measuring means is provided for measuring pressure near the wall part of the expansion chamber to control the supply pressure of the assist gas based on measured pressure signals. Further, liquid CO
2 constant flow control is performed to control the supply pressure of the assist gas.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种降低由温度变化引起的系统损耗变化的影响的CO / SB 2 喷雪装置和方法。解决方案：在用于膨胀液体CO 2 的CO 2 雪喷射装置中，产生CO 2 雪，并允许辅助气体加入 CO 2 雪以喷射CO 2 雪，提供涡旋装置用于旋转辅助气体以形成围绕CO 2 SBB 2的辅助气体的旋流。 SB>在合流部分的膨胀室中产生雪，并且提供压力测量装置，用于测量膨胀室的壁部附近的压力，以基于测量的压力信号来控制辅助气体的供应压力。此外，执行液体CO 2 恒流控制以控制辅助气体的供应压力。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2006202618A Plasma processing device and plasma processing method 审中-公开
标题翻译：等离子体处理装置和等离子体处理方法
公开(公告)号：JP2006202618A
公开(公告)日：2006-08-03
申请号：JP2005013477
申请日：2005-01-21
申请人： Hitachi Industries Co Ltd , 株式会社日立インダストリイズ
发明人： KUDO TAKUJI
IPC分类号： H05H1/24
摘要： PROBLEM TO BE SOLVED: To provide a plasma processing device and a plasma processing method capable of forming a large pressure difference between a plasma generation part and a base material to be treated, and generating the plasma having high density. SOLUTION: On the plasma processing device on which a pair of electrodes are arranged, and treatment gas is introduced between both electrodes, processing a base material to be processed by using the plasma generated by impressing an electric field between the electrodes, the base material to be processed is put on the electrode at one side, and a high frequency is impressed on the other electrode by a high frequency power source. An expansible gas is used as the processing gas, a processing gas introduction part having a narrowed part is formed, the processing gas is made to expand by introducing it through the narrowed part, and a processing part forming a pressure difference area between both electrodes is constituted. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种等离子体处理装置和等离子体处理方法，其能够在等离子体产生部件和待处理的基材之间形成较大的压差，并产生具有高密度的等离子体。解决方案：在其上布置有一对电极的等离子体处理装置上，并且在两个电极之间引入处理气体，通过使用通过在电极之间施加电场而产生的等离子体来处理待处理的基材，待处理的基底材料在一侧放置在电极上，高频通过高频电源施加在另一个电极上。使用可膨胀气体作为处理气体，形成具有变窄部分的处理气体导入部，通过将其通过狭窄部引入而使处理气体膨胀，形成两电极之间的压差区域的处理部位为构成。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2005334979A Blasting device 审中-公开
标题翻译：喷砂装置
公开(公告)号：JP2005334979A
公开(公告)日：2005-12-08
申请号：JP2004152692
申请日：2004-05-24
申请人： Hitachi Industries Co Ltd , 株式会社日立インダストリイズ
发明人： TAKAHASHI KENICHI , KUDO TAKUJI
IPC分类号： B24C1/00 , B24C5/04 , H01J9/02 , H01J11/22 , H01J11/34 , H01J11/36
摘要： PROBLEM TO BE SOLVED: To provide a device recovering CO
2 and machined chips at a high recovery rate without leaving machined chips after machining, in a CO
2 blasting device.
SOLUTION: A nozzle part and a recovery part of CO
2 and machined chips are formed in chamber structure, and a bottom face of a blade section surrounding in frame shape an opening part, facing a machined surface, of the chamber structure, is sealed while maintaining a micro clearance with clearance constant control by the feedback of a non-contact displacement sensor. The flow direction of a CO
2 blast collision jet is changed upward by the blade section. The internal pressure of a hole formed in the blade part to lead into the chamber from the machined surface is made negative by the dynamic pressure of the collision jet flowing on the upper face of the blade section. Further, the machined chips left on the machined surface are positively blown off by a blow nozzle and sucked.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种在CO 2 SBB喷砂装置中回收CO＆lt; SB＆gt; 2＆lt; SB＆gt;和机加工芯片的装置，并且在机加工后不加工加工的切屑。解决方案：在腔室结构中形成有CO＆lt; SB＆gt; 2＆gt;的喷嘴部分和回收部分，并且叶片部分的底面形成为开口部分，面向机加工通过非接触位移传感器的反馈，腔室结构的表面被密封，同时保持具有间隙恒定控制的微间隙。 CO 2 爆炸冲击射流的流动方向由叶片部分向上改变。形成在叶片部分中从加工表面引入室的孔的内部压力由于在叶片部分的上表面上流动的碰撞射流的动态压力而变为负。此外，留在机加工面上的机械加工的切屑被吹塑喷嘴所吸引。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2004356244A Planarization method and equipment 审中-公开
公开(公告)号：JP2004356244A
公开(公告)日：2004-12-16
申请号：JP2003150067
申请日：2003-05-28
申请人： Hitachi Industries Co Ltd , 株式会社日立インダストリイズ
发明人： KUDO TAKUJI , KONDO YUMITO , WATANABE MICHIHIRO
IPC分类号： B24C1/00 , B24C5/02 , B24C11/00 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a method and an equipment wherein planarization of the surface of an electronic device is enabled in noncontact manner, and waste fluid is not generated since chemical liquid is not used.
SOLUTION: Dry ice particle is made to collide with the surface of the electronic device 1 wherein planarization is to be performed. Etching of the surface of the electronic device is performed by physical energy, and planarization of the surface of the electronic device is performed. At this time, since the dry ice particle has sublimational characteristic, the dry ice particle which arrived at the surface of the electronic device with kinetic energy reaches the inside of surface substance of the electronic device in a wedge shape and receives thermal energy from the electronic device, so that sublimation is performed to gas, and the surface substance of the electronic device is exfoliated by energy of expansion. The exfoliated surface substance of the electronic device is spread in atmosphere together with vaporized dry ice and discharged intensively. The discharged surface substance of the electronic device is subjected to dust collection easily with a filter, an absorption cylinder, etc.
COPYRIGHT: (C)2005,JPO&NCIPI

6. 发明专利

JP2004223430A Co2 blast washing system for under the floor of electric train 审中-公开
标题翻译：用于电火车地面的二氧化碳快速洗涤系统
公开(公告)号：JP2004223430A
公开(公告)日：2004-08-12
申请号：JP2003015500
申请日：2003-01-24
申请人： Hitachi Industries Co Ltd , 株式会社日立インダストリイズ
发明人： KONDO YUMITO , KUDO TAKUJI
IPC分类号： B08B7/00 , B60S3/04 , B61K13/00
摘要： PROBLEM TO BE SOLVED: To provide a CO
2 blast washing system for under the floor of an electric train capable of efficiently recovering CO
2 released from spray nozzles into the atmosphere in washing under the floor of the electric train by spraying the CO
2 of a solid phase in an open space.
SOLUTION: The washing system comprises spraying the CO
2 of the solid phase to the electric train 1 and recovering the CO
2 after the washing and has at least one pair of nozzle sets 8A where a spray nozzle 8a is combined with a recovery nozzle 8b, the spray nozzles 8a and recovery nozzles 8b in the nozzle sets 8A on both the right and left sides in the progressing direction of the electric train 1 face each other.
COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种能够有效回收从喷嘴释放的CO 2 的电动火车底板下的CO SB SB2喷砂清洗系统，通过在开放空间中喷射固相的CO 2 在电动火车的地板下清洗气氛。解决方案：洗涤系统包括将固相的CO 2 喷射到电火车1，并在洗涤后回收CO 2 ，并且具有至少一对其中喷嘴8a与回收喷嘴8b组合的喷嘴组8A，电动列车1的前进方向上的喷嘴组8A和左侧两侧的喷嘴组8a相互面对。版权所有（C）2004，JPO＆NCIPI

7. 发明专利

JP2005205530A Blast processing method and device 审中-公开
标题翻译： BLAST处理方法和装置
公开(公告)号：JP2005205530A
公开(公告)日：2005-08-04
申请号：JP2004013965
申请日：2004-01-22
申请人： Hitachi Industries Co Ltd , 株式会社日立インダストリイズ
发明人： KUDO TAKUJI , KONDO YUMITO
IPC分类号： B24C1/00 , B24C11/00
摘要： PROBLEM TO BE SOLVED: To provide a method and a device capable of performing clean fine processing without requiring post-cleaning, by performing the processing while restraining condensation, by holding a nozzle of a structure capable of providing a uniform blast area for the large area in a blast method.
SOLUTION: The inside of one nozzle is divided into a plurality of areas in the longitudinal direction of the nozzle by a partition wall. A pair of liquefied carbonic acid cutoff valves, liquefied carbonic acid supply ports, auxiliary gas cutoff valves and auxiliary gas supply ports, are arranged to the respective areas. Pressure in the respective areas is always measured, and a change in a blast state is monitored from a pressure variation. The uniform blast area is provided by feeding back supply pressure of a liquefied carbonic acid or supply pressure of auxiliary gas. The nozzle is arranged in a plurality in the carrying direction of a processing object. After performing the processing by the first nozzle, the processing is performed by the third nozzle after time for recovering the temperature of the processing object, to thereby restrain the condensation in a fixed quantity or less.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供能够进行清洁的精细加工而不需要后清洗的方法和装置，通过在抑制冷凝的同时进行处理，通过保持能够提供均匀喷砂区域的结构的喷嘴，大面积爆破法。解决方案：一个喷嘴的内部通过分隔壁在喷嘴的纵向方向上分成多个区域。一对液化碳酸切断阀，液化碳酸供应口，辅助气体截断阀和辅助气体供应口，被布置在各个区域。总是测量各个区域中的压力，并且从压力变化监测鼓风状态的变化。通过反馈液化碳酸的供给压力或辅助气体的供给压力来提供均匀喷射区域。喷嘴沿处理对象的传送方向多个排列。在通过第一喷嘴进行处理之后，在用于恢复处理对象的温度的时间之后由第三喷嘴执行处理，从而限制冷凝量或更少的冷凝。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2004165229A Carbon dioxide gas blast cleaning device 审中-公开
公开(公告)号：JP2004165229A
公开(公告)日：2004-06-10
申请号：JP2002326221
申请日：2002-11-11
申请人： Hitachi Industries Co Ltd , 株式会社日立インダストリイズ
发明人： KONDO YUMITO , KUDO TAKUJI , TAJIMA FUJIO
IPC分类号： G02F1/13 , B08B7/00 , G02F1/1333 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a carbon dioxide gas blast cleaning device that can be reutilized by collecting carbon dioxide gas without increasing the cost.
SOLUTION: The carbon dioxide gas blast cleaning device cleans an object S to be cleaned by spraying powdery snow-like dry ice to the object S to be cleaned. When contaminates separated from the object S to be cleaned are removed to be stored in a tank 17 by collecting the dry ice used for cleaning and the carbon dioxide gas sublimed from the dry ice and letting them pass through a filter 7, a heating means 9 is provided in a prestage of the filter 7 so as to sublime the dry ice into gas, which is passed through the filter 7.
COPYRIGHT: (C)2004,JPO

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