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1. 发明专利

JP2007048613A Image display device and its manufacturing method 审中-公开
标题翻译：图像显示装置及其制造方法
公开(公告)号：JP2007048613A
公开(公告)日：2007-02-22
申请号：JP2005232245
申请日：2005-08-10
申请人： Hitachi Displays Ltd , Hitachi Ltd , 株式会社日立ディスプレイズ , 株式会社日立製作所
发明人： SANO YASUSHI , TAMURA TAKUO , SAGAWA MASAKAZU , SHINTANI HIDEYUKI , MIYATA KAZUFUMI
IPC分类号： H01J1/312 , H01J9/02 , H01J29/04 , H01J31/12
摘要： PROBLEM TO BE SOLVED: To provide an image display device realizing efficient electron emission, of high brightness, and with brightness unevenness restrained. SOLUTION: In the image display device, a lower electrode 11 is formed on a main face of a first insulating substrate 10, and an electron accelerating layer 12 is formed on the surface of the lower electrode 11 with a maximum height of a surface ruggedness by oxidation of an anode of 23 nm to 25 nm. Here, a conversion current density for the anode oxidation is to be a low current density of 10μA/cm 2 or less. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供实现高亮度，高亮度不均匀性的高效电子发射的图像显示装置。解决方案：在图像显示装置中，在第一绝缘基板10的主面上形成下电极11，在下电极11的表面形成电子加速层12，最高高度为通过氧化23nm至25nm的阳极的表面粗糙度。这里，阳极氧化的转换电流密度为10μA/ cm 2以下的低电流密度。版权所有（C）2007，JPO＆INPIT

2. 发明专利

JP2007095373A Image display device 审中-公开
标题翻译：图像显示设备
公开(公告)号：JP2007095373A
公开(公告)日：2007-04-12
申请号：JP2005280408
申请日：2005-09-27
申请人： Hitachi Displays Ltd , Hitachi Ltd , 株式会社日立ディスプレイズ , 株式会社日立製作所
发明人： MIYATA KAZUFUMI , SASAMOTO TOSHIO
IPC分类号： H01J31/12 , H01J29/04
摘要： PROBLEM TO BE SOLVED: To provide an image display device enabled to realize its commercialization by avoiding failure of a lower electrode due to insulation failure with an upper electrode. SOLUTION: The device is provided with a cathode substrate 10 equipped with a lower electrode 11, an upper electrode 13 and an electron accelerating layer pinched between the lower electrode 11 and the upper electrode 13, arranging in a matrix a number of thin-film electron sources emitting electron from a side of the upper electrode in a region laminated with the electron accelerating layer by impression of voltage between the lower electrode 11 and the upper electrode 13, and a phosphor screen substrate 100 equipped with phosphor of a plurality of colors in correspondence with each of the thin-film electron sources. The thin-film electron sources have the lower electrode 11 formed in a polygon shape in the region of the electron accelerating layer, with a power feeding part consisting of an electrode film of the lower electrode 11 arranged at least at one side of the polygon, and carries out correction of cutting electric joint of the power-feeding part at insulation failure, whereby, pixels can be separated in a state in which only the thin-film electron sources suffering from the insulation failure are independent of the lower electrode 11. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够通过避免由于与上部电极的绝缘故障而引起的下部电极的故障而实现其商业化的图像显示装置。解决方案：该器件设置有阴极基板10，阴极基板10配备有下电极11，上电极13和夹在下电极11和上电极13之间的电子加速层，以矩阵排列多个薄通过下电极11和上电极13之间的电压的印刷，在与电子加速层层叠的区域中从上电极的一侧发射电子的膜电子源，以及配备有多个与每个薄膜电子源相对应的颜色。薄膜电子源具有在电子加速层的区域中形成为多边形的下部电极11，具有由至少在多边形的一侧排列的下部电极11的电极膜构成的供电部，并且在绝缘故障的情况下进行供电部的切断电接头的校正，由此可以在只有具有绝缘破坏的薄膜电子源独立于下电极11的状态下分离像素。 P>版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2009076362A Manufacturing method of image display device having electron source constituted of diode element, and image display device manufactured by the method 审中-公开
标题翻译：具有二维元素构成的电子源的图像显示装置的制造方法以及由该方法制造的图像显示装置
公开(公告)号：JP2009076362A
公开(公告)日：2009-04-09
申请号：JP2007245190
申请日：2007-09-21
申请人： Hitachi Displays Ltd , Hitachi Ltd , 株式会社日立ディスプレイズ , 株式会社日立製作所
发明人： SAGAWA MASAKAZU , MIYATA KAZUFUMI , KANEMOTO MASARU
IPC分类号： H01J9/02 , H01J31/12
摘要： PROBLEM TO BE SOLVED: To suppress an after-image phenomenon of an image display device by improving a formation method of an insulation film of a diode element used as an electron source. SOLUTION: The diode element is a diode element of a metal-insulation layer-metal type constructed by superposing a lower electrode, an insulation layer, and an upper electrode in this order formed on a flat substrate. The insulation layer is composed of an amorphous oxide film formed by an anode oxidation treatment of the surface of the lower electrode, and the lower electrode consists of a lamination film containing aluminum or an aluminum alloy layer, and in the anode oxidation treatment, firstly, an oxide film growth is performed by a constant current mode up to a first voltage V0 (for example, 4 V) being a prescribed voltage and then, as a constant voltage mode, a second voltage V1 (for example, 0 V) lower than the first voltage is impressed respectively for a certain period, and the first voltage and the second voltage are alternately applied with a certain cycle. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：通过改进用作电子源的二极管元件的绝缘膜的形成方法来抑制图像显示装置的后图像现象。解决方案：二极管元件是金属绝缘层 - 金属类型的二极管元件，其通过在平面基板上依次叠置下电极，绝缘层和上电极而构成。绝缘层由通过对下部电极的表面的阳极氧化处理形成的非晶形氧化膜构成，下部电极由含有铝或铝合金层的层叠膜构成，在阳极氧化处理中，首先，通过恒定电流模式直到达到规定电压的第一电压V0（例如，4V）进行氧化膜生长，然后作为恒定电压模式，低于第二电压V1（例如0V）第一电压分别施加一定时间，第一电压和第二电压以一定周期交替施加。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2007242489A Image display 有权
标题翻译：图像显示
公开(公告)号：JP2007242489A
公开(公告)日：2007-09-20
申请号：JP2006065108
申请日：2006-03-10
申请人： Hitachi Displays Ltd , Hitachi Ltd , 株式会社日立ディスプレイズ , 株式会社日立製作所
发明人： TAMURA TAKUO , SANO YASUSHI , MIYATA KAZUFUMI
IPC分类号： H01J1/312 , H01J29/04 , H01J31/12
CPC分类号： H01J29/30 , B82Y10/00 , H01J1/312 , H01J29/04 , H01J31/127
摘要： PROBLEM TO BE SOLVED: To provide a highly reliable image display in which deterioration of diode characteristics of an anodized film composing a thin film electron source is controlled. SOLUTION: In a thin film electron source composed of an electron accelerated layer 12 composed of an anodized film formed by anodizing a surface of the signal wiring as a lower electrode 11 and an upper electrode which is laminated on and is covering the electron accelerated layer and is composing of an electron emitting electrode, a hydrated alumina content ratio against a total of a hydrated alumina content and an anhydride alumina content in the anodized film composing of the electron accelerated layer 12 shall be in a range of 0.25 to 0.42. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种高度可靠的图像显示，其中控制构成薄膜电子源的阳极氧化膜的二极管特性的劣化。解决方案：在由电子加速层12构成的薄膜电子源中，该电子加速层12由阳极氧化膜形成，该阳极氧化膜通过阳极氧化作为下部电极11的信号布线的表面而形成，并且上部电极层压并覆盖电子并且由电子发射电极构成，构成电子加速层12的阳极氧化膜中的水合氧化铝含量和酸酐氧化铝含量的总水合氧化铝含量比应在0.25至0.42的范围内。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2006286617A Thin film electron source, manufacturing method of the same, and image display device using the thin film electron source 审中-公开
标题翻译：薄膜电子源，其制造方法和使用薄膜电子源的图像显示装置
公开(公告)号：JP2006286617A
公开(公告)日：2006-10-19
申请号：JP2006057169
申请日：2006-03-03
申请人： Hitachi Displays Ltd , Hitachi Ltd , 株式会社日立ディスプレイズ , 株式会社日立製作所
发明人： SANO YASUSHI , TAMURA TAKUO , KIKUCHI HIROSHI , MIYATA KAZUFUMI , FUKUCHI KAZUHIRO
IPC分类号： H01J1/312 , H01J9/02 , H01J29/04 , H01J31/12
摘要： PROBLEM TO BE SOLVED: To provide a thin film electron source of which defect in an anode oxide film is reduced, having high reliability and long life, and an image display device using the same. SOLUTION: An insulation layer of the thin film electron source formed by laminating a first electrode 11, the insulation layer 12, and a second electrode 13 on an insulation substrate 10 in this sequence is formed by an anode oxidation method. The number of defects existing in the insulation layer is reduced to 3×10 19 /cm 3 or less. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种降低阳极氧化膜中的缺陷，具有高可靠性和长寿命的薄膜电子源，以及使用该薄膜电子源的图像显示装置。解决方案：通过阳极氧化方法形成通过以下顺序层叠绝缘基板10上的第一电极11，绝缘层12和第二电极13而形成的薄膜电子源的绝缘层。存在于绝缘层中的缺陷的数量减少到3×10 19 / cm 3 或更小。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2012092373A Vacuum deposition device 审中-公开
标题翻译：真空沉积装置
公开(公告)号：JP2012092373A
公开(公告)日：2012-05-17
申请号：JP2010238754
申请日：2010-10-25
申请人： Canon Inc , Hitachi Displays Ltd , キヤノン株式会社 , 株式会社日立ディスプレイズ
发明人： MIYATA KAZUFUMI , KAWAGUCHI MASAHIRO , NODA SHOICHI
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide a vacuum deposition device which can exchange an evaporation source without breaking vacuum also when an evaporation material disappears from an evaporation source.SOLUTION: Two or more evaporation sources and vapor release parts are connected by a piping and a valve, a valve makes a structure which has arranged an elastic seal 100 by a superelastic β based titanium alloy in a hollow cone part formed in an evaporation source side pipe side as a seal part, and a cone-like valve body 120 by stainless steel is used for a valve body. An elastic seal by a superelastic β-based titanium alloy has a very small elastic modulus, can deform flexibly to a shape of a cone-like valve body, has a characteristic that it resets to the original form after deformation, and thereby the reliability of sealing can be raised. Moreover, the elastic seal has a characteristic in which even if it receives repetition deformation, hardening or plastic deformation are not caused, and thereby repeated use can be carried out as a seal part. Therefore, improvement in the reliability of a valve and a tact time of a vapor deposition process can be improved.
摘要翻译：要解决的问题：提供一种当蒸发材料从蒸发源消失时，也可以在不破坏真空的情况下交换蒸发源的真空沉积装置。解决方案：两个或多个蒸发源和蒸气释放部分通过管道和阀连接，阀形成了一种结构，该结构通过超弹性β基钛合金在中空锥形部分中形成弹性密封件100 作为密封部的蒸发源侧管侧和阀体使用由不锈钢构成的锥形阀体120。由超弹性β型钛合金制成的弹性密封件具有非常小的弹性模量，可以灵活地变形成锥形阀体的形状，具有在变形后复原为原始形状的特性，从而可靠性可以提高密封性。此外，弹性密封件具有即使受到重复变形也不会引起硬化或塑性变形的特征，因此可以重复使用作为密封部。因此，可以提高阀的可靠性的提高和气相沉积工艺的生产节拍时间。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2012094373A Organic electroluminescent display device manufacturing method 审中-公开
标题翻译：有机电致发光显示器件制造方法
公开(公告)号：JP2012094373A
公开(公告)日：2012-05-17
申请号：JP2010240428
申请日：2010-10-27
申请人： Canon Inc , Hitachi Displays Ltd , キヤノン株式会社 , 株式会社日立ディスプレイズ
发明人： KAWAGUCHI MASAHIRO , MIYATA KAZUFUMI , NAGAYAMA KOHEI
IPC分类号： H05B33/04 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To expose a part of wiring from inorganic film stably without causing damage to the wiring.SOLUTION: An organic film 46 including an electroluminescent layer 32 composed of an organic material and wiring 44 are formed on a substrate 12. An inorganic film 36 for sealing purposes is formed so as to cover the organic film 46 and the wiring 44. Laser light L is irradiated on the inorganic film 36 so as to draw a line 50. An adhesive material 56 is pasted to the inorganic film 36. A force in a direction getting away from the substrate 12 is applied to the adhesive material 56 to cut a part of the inorganic film 36 pasted to the adhesive material 56 along the line 50 to peel it off. The wiring 44 is formed inside and outside of a formation region of the organic film 46. The inorganic film 36 is formed to cover the wiring 44 at inside and outside of the formation region of the organic film 46. The laser light L is applied so that the line 50 passes above the wiring 44. The peeled part of the inorganic film 36 is a part which covers a part of the wiring 44 at outside of the formation region of the organic film 46.
摘要翻译：要解决的问题：从无机膜稳定地露出一部分布线而不会损坏布线。解决方案：包括由有机材料构成的电致发光层32和布线44的有机膜46形成在基板12上。形成用于密封目的的无机膜36以覆盖有机膜46和布线44 激光L照射在无机膜36上以便画一条线50.粘合剂材料56被粘贴到无机膜36上。将远离基板12的方向的力施加到粘合剂材料56至将沿着线50粘贴到粘合剂材料56的一部分无机膜36切割以将其剥离。布线44形成在有机膜46的形成区域的内部和外部。无机膜36形成为在有机膜46的形成区域的内部和外部覆盖布线44.激光L被施加线50通过布线44上方。无机膜36的剥离部分是在有机膜46的形成区域的外部覆盖布线44的一部分的部分。（C）2012 ，JPO＆INPIT

8. 发明专利

JP2012092371A Vacuum deposition device 审中-公开
标题翻译：真空沉积装置
公开(公告)号：JP2012092371A
公开(公告)日：2012-05-17
申请号：JP2010238746
申请日：2010-10-25
申请人： Canon Inc , Hitachi Displays Ltd , キヤノン株式会社 , 株式会社日立ディスプレイズ
发明人： MIYATA KAZUFUMI , KAWAGUCHI MASAHIRO , NODA SHOICHI
IPC分类号： C23C14/24 , C23C14/00 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To inhibit an amount that an evaporation material deposits in a vacuum device, and to shorten a time for cleaning an inside of the vacuum device.SOLUTION: In a vacuum deposition device in which an element substrate is arranged on a vapor deposition mask, and evaporation sources 41, 42 are arranged at a lower part of the vapor deposition mask, a sheet shutter 60 is arranged to cover the evaporation source 41, 42, and vacuum deposition is carried out to the element substrate through an opening 61 of the sheet shutter 60. When not vapor-depositing to the element substrate, the sheet shutter 60 covers openings of the evaporation source 41, 42. Therefore, an evaporation substance from the evaporation source 41, 42 is mainly deposited on the sheet shutter 60. The sheet shutter 60 can be wound to a winding mechanism 62, when an evaporation material accumulates on the sheet shutter 60 more than a predetermined amount, the sheet shutter 60 is interchanged. By this, exchange of the sheet shutter 60 can be performed for a short time, and an amount that an evaporation material deposits in the vacuum device can be inhibited.
摘要翻译：要解决的问题：抑制蒸发材料沉积在真空装置中的量，并缩短清洁真空装置内部的时间。解决方案：在其中元件基板布置在气相沉积掩模上并且蒸发源41,42布置在气相沉积掩模的下部的真空沉积装置中，薄板闸板60布置成覆盖蒸发源41,42，并且通过片状闸板60的开口61对元件基板进行真空沉积。当没有气相沉积到元件基板上时，薄板闸板60覆盖蒸发源41,42的开口。因此，来自蒸发源41,42的蒸发物质主要沉积在薄板闸板60上。当蒸发材料积聚在薄板闸板60上超过预定量时，薄板闸板60可以卷绕到卷绕机构62上，纸张挡板60互换。由此，可以短时间地进行薄板闸板60的更换，并且可以抑制蒸发材料沉积在真空装置中的量。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2010106358A Film formation mask and film formation method using the same 审中-公开
标题翻译：胶片形成掩膜和使用其的胶片形成方法
公开(公告)号：JP2010106358A
公开(公告)日：2010-05-13
申请号：JP2009207975
申请日：2009-09-09
申请人： Canon Inc , Hitachi Displays Ltd , キヤノン株式会社 , 株式会社日立ディスプレイズ
发明人： MASUDA MASAMICHI , SODA TAKEHIKO , SAKAEDA MASATAKA , MIYATA KAZUFUMI
IPC分类号： C23C14/04 , H01L51/50 , H05B33/10
CPC分类号： C23C14/042 , H01L51/56
摘要： PROBLEM TO BE SOLVED: To solve a problem that, when a position of a film formation mask is recognized by irradiating the film formation mask with light, an image having high contrast cannot be obtained, which unstabilizes reproducibility of measurement accuracy for the alignment mark position, leading to an alignment error between a substrate and the mask.
SOLUTION: A film formation mask 102 includes a mask sheet 103 having a positioning opening 106 and a mask frame 104, in which a reflective member having the reflectance higher than that of the mask sheet is provided to the positioning opening. When the positioning opening of the film formation mask is irradiated with light, an intensity difference between the light reflected by the mask sheet and the light reflected by the reflective member becomes stable. Therefore, the position of the film formation mask can be determined with high reproducibility.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题为了解决通过用光照射成膜掩模来识别成膜掩模的位置的问题，不能获得具有高对比度的图像，这使得不能稳定测量精度的再现性对准标记位置，导致基板和掩模之间的对准误差。解决方案：成膜掩模102包括具有定位开口106和掩模框架104的掩模片103，其中具有比掩模片的反射率高的反射构件设置到定位开口。当成膜掩模的定位开口被光照射时，由掩模片反射的光与被反射部件反射的光之间的强度差变得稳定。因此，可以以高再现性确定成膜掩模的位置。版权所有（C）2010，JPO＆INPIT

10. 发明专利

JP2010031345A Film deposition apparatus and film deposition method using the same 有权
标题翻译：薄膜沉积装置和薄膜沉积方法
公开(公告)号：JP2010031345A
公开(公告)日：2010-02-12
申请号：JP2008197611
申请日：2008-07-31
申请人： Canon Inc , Hitachi Displays Ltd , キヤノン株式会社 , 株式会社日立ディスプレイズ
发明人： SODA TAKEHIKO , SAKAEDA MASATAKA , MIYATA KAZUFUMI
IPC分类号： C23C14/04 , H01L51/50 , H05B33/10
CPC分类号： C23C14/042 , C03C17/001 , C03C2218/15 , C23C14/12 , Y10T156/10
摘要： PROBLEM TO BE SOLVED: To provide a film deposition apparatus and a film deposition method which, when a substrate is pressed to a mask, cause little positional deviation between the substrate and the mask in a direction of planes thereof, then, form an image pattern of satisfactory dimensional accuracy. SOLUTION: The film deposition apparatus is provided with an alignment mechanism (not shown) which is furnished inside a vacuum chamber 5 and performs alignment of the substrate 1 and the mask 2, and a pressing mechanism which presses the substrate 1 to the mask 2 by a low friction member 3b furnished at one end of each pressing element 3. After the alignment of the mask 2 is performed by the alignment mechanism, the low friction members 3b of the pressing elements 3 are touched and pressed to the substrate 1 from the opposite side of the mask 2 by the pressing mechanism. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种成膜装置和成膜方法，当将基板按压到掩模上时，在其平面方向上在基板和掩模之间几乎不产生位置偏移，然后形成具有令人满意的尺寸精度的图像图案。＆lt; P＆gt;解决方案：成膜装置设置有设置在真空室5内的对准机构（未示出），并且进行基板1和掩模2的对准，以及将基板1按压到通过设置在每个按压元件3的一端的低摩擦构件3b进行掩模2.在通过对准机构进行掩模2的对准之后，按压元件3的低摩擦构件3b被触摸并被压到基板1 通过按压机构从掩模2的相对侧。版权所有（C）2010，JPO＆INPIT

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