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    • 5. 发明专利
    • Semiconductor device and radio electronic device
    • 半导体器件和无线电电子器件
    • JP2007019530A
    • 2007-01-25
    • JP2006230550
    • 2006-08-28
    • Hitachi Chem Co Ltd日立化成工業株式会社
    • SHIMADA YASUSHIHIRATA YOSHITAKEKURITANI HIROYUKIOTSUKA KAZUHISAYAMAGUCHI MASANORISHIMAYAMA YUICHIMADARAME TAKESHIWATANABE ETSUOKONDO YUSUKEYAMAMOTO KAZUNORI
    • H01L23/12H05K3/46
    • PROBLEM TO BE SOLVED: To provide a multilayer wiring board with a capacitor having a high dielectric constant material thin in thickness while exhibiting a small capacitance variation and that has no problem in formability, to provide a method of fabricating the multilayer wiring board, and to provide a semiconductor device and a radio electronic device.
      SOLUTION: The multilayer wiring board has a plurality of insulating layers, a plurality of conductive layers, a non-through hole processed to be conductive to connect the plurality of conductive layers electrically, and a capacitor 12 having electrodes formed on upper and lower surfaces of at least one insulating layer formed of a high dielectric constant material 8. Recesses between conductor patterns including the electrodes are filled with insulating materials different from the high dielectric constant material 8, and the surfaces of the conductor patterns and the surfaces of the filled insulating materials are flattened. A method of fabricating the multilayer wiring board, a semiconductor device having a semiconductor chip mounted on the multilayer wiring board, and a radio electronic device mounted with the semiconductor device, are also disclosed.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供一种多层布线板,其具有厚度较薄的高介电常数材料的电容器,同时具有小的电容变化,并且在成形性方面没有问题,提供一种制造多层布线板的方法 并且提供一种半导体器件和无线电电子器件。 解决方案:多层布线板具有多个绝缘层,多个导电层,被加工成导电的非贯通孔,以电连接多个导电层;以及电容器12,其具有形成在上部和 由高介电常数材料8形成的至少一个绝缘层的下表面。包括电极的导体图案之间的凹陷填充有不同于高介电常数材料8的绝缘材料,并且导体图案和表面的表面 填充绝缘材料变平。 还公开了一种制造多层布线板的方法,具有安装在多层布线板上的半导体芯片的半导体器件和安装有半导体器件的无线电电子器件。 版权所有(C)2007,JPO&INPIT
    • 6. 发明专利
    • Manufacturing method of multilayer wiring board with built-in capacitor, and the multilayer wiring board
    • 具有内置电容器的多层布线板的制造方法和多层布线板
    • JP2006019407A
    • 2006-01-19
    • JP2004194147
    • 2004-06-30
    • Hitachi Chem Co Ltd日立化成工業株式会社
    • SHIMADA YASUSHIHIRATA YOSHITAKEKONDO YUSUKEKAWAKAMI YUTAKA
    • H05K3/46H01G4/12H01L23/12H05K1/16
    • PROBLEM TO BE SOLVED: To provide the manufacturing method of a multilayer wiring board with a built-in capacitor, and a multilayer wiring board with a built-in capacitor. SOLUTION: The dielectric thin film of thickness of 0.05-2 μm is provided in one side of metallic foil, and a board for capacitors is used wherein insulating material is laminated on the metallic foil of the opposite side provided with dielectric thin film. The materials for the multilayer wiring board with built-in capacitors comprises a step (1) for forming a metal layer used as a capacitor electrode on the dielectric thin film of the surface of the board for capacitors, a step (2) for forming an etching resist on the dielectric thin film containing the pattern where the metal layer is formed on the surface of the board for capacitors at least, a step (3) for etching the dielectric thin film by the high-pressure flush using the water system treating solution containing ceramic grain, and a step (4) for removing etching resist after etching. Thus, the multilayer wiring board with built-in capacitors is provided by forming one layer or two layers or more wiring layers on at least one side of the materials for the multilayer wiring board with built-in capacitors via the insulating layer. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供具有内置电容器的多层布线板的制造方法以及具有内置电容器的多层布线板。 解决方案:在金属箔的一侧设置厚度为0.05-2μm的电介质薄膜,并且使用电容器板,其中绝缘材料层压在设置有电介质薄膜的相对侧的金属箔上 。 用于具有内置电容器的多层布线板的材料包括在用于电容器板的表面的电介质薄膜上形成用作电容器电极的金属层的步骤(1),用于形成 至少在电容器用电路板的表面上形成含有金属层的图案的电介质薄膜上的耐蚀刻剂,使用水系处理液通过高压冲洗来蚀刻电介质薄膜的工序(3) 以及用于在蚀刻后去除蚀刻抗蚀剂的步骤(4)。 因此,具有内置电容器的多层布线基板通过在绝缘层上形成内置电容器的多层布线基板材料的至少一侧上形成一层或两层以上布线层来提供。 版权所有(C)2006,JPO&NCIPI
    • 9. 发明专利
    • Method for producing barium titanate precursor solution, method for producing barium titanate thin film, barium titanate thin film obtained by the production method, and electronic component using barium titanate thin film
    • 制备钛酸钡前驱体溶液的方法,生产钛酸钡薄膜的方法,由生产方法获得的钛酸钡薄膜和使用钛酸钡薄膜的电子组件
    • JP2009227542A
    • 2009-10-08
    • JP2008077822
    • 2008-03-25
    • Hitachi Chem Co Ltd日立化成工業株式会社
    • HIRATA YOSHITAKEKONDO YUSUKESHIMADA YASUSHI
    • C01G23/00C04B35/46H01G4/12H01G4/33
    • PROBLEM TO BE SOLVED: To provide a method for producing a barium titanate precursor solution and a method for producing a barium titanate thin film, by which a content of impurity elements, particularly aluminum element is reduced, and to provide a barium titanate thin film obtained by the production method and electronic components using the barium titanate thin film. SOLUTION: The method for producing a barium titanate precursor solution and the method for producing a barium titanate thin film each includes: (A) a step of preparing a mixed solution of a barium alkoxide and a titanium alkoxide; (B) a step of adding an amino alcohol to the solution obtained in the step (A); (C) a step of filtering a solution obtained in the step (B) to remove insoluble matter; and (D) a step of adding a carboxylic acid to a solution obtained in the step (C), wherein the proportion of aluminum element contained as an impurity to barium element in the produced solution is COPYRIGHT: (C)2010,JPO&INPIT
    • 待解决的问题:提供钛酸钡前体溶液的制备方法和钛酸钡薄膜的制造方法,通过该方法使杂质元素,特别是铝元素的含量降低,并提供钛酸钡 通过制造方法获得的薄膜和使用钛酸钡薄膜的电子部件。 解决方案:钛酸钡前体溶液的制造方法和钛酸钡薄膜的制造方法均包括:(A)制备钡醇盐和钛醇盐的混合溶液的工序; (B)将步骤(A)中得到的溶液中加入氨基醇的步骤; (C)过滤步骤(B)中得到的溶液以除去不溶物的步骤; 和(D)将步骤(C)中得到的溶液中加入羧酸的步骤,其中在所制备的溶液中作为杂质含有的铝元素与钡元素的比例<0.005mol%。 还提供了通过制造方法获得的钛酸钡薄膜和使用钛酸钡薄膜的电子部件。 版权所有(C)2010,JPO&INPIT