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    • 1. 发明专利
    • Method of forming optical waveguide
    • 形成光波导的方法
    • JP2006243228A
    • 2006-09-14
    • JP2005057169
    • 2005-03-02
    • Hitachi Cable LtdToyota Gakuen学校法人トヨタ学園日立電線株式会社
    • HIROSE TOMOHIROSAITO KAZUYAIKUSHIMA AKIRAOSONO KAZUMASAKUROSAWA YOSHINORI
    • G02B6/13
    • PROBLEM TO BE SOLVED: To provide a method of forming optical waveguide by which a manufacturing process is simplified and an optical waveguide having low loss is formed. SOLUTION: The method of forming the optical waveguide for forming the optical waveguide 15 is composed of a high refractive index core 17 and a low refractive index clad 16 on a glass substrate 11. A silica glass thin film 12 having a refractive index higher than that of the silica glass substrate 11 is formed on the silica glass substrate 11 by using a physical vapor deposition method, an optional part of the silica glass thin film 12 is locally heated, the heated part is formed on the clad 16, and unheated part is formed on the core 17. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种形成光波导的方法,通过该方法简化制造工艺,并且形成具有低损耗的光波导。 解决方案:形成用于形成光波导15的光波导的方法由玻璃基板11上的高折射率芯17和低折射率包层16构成。具有折射率的石英玻璃薄膜12 通过使用物理气相沉积法在石英玻璃基板11上形成高于石英玻璃基板11的玻璃基板11,局部加热二氧化硅玻璃薄膜12的任意部分,在包层16上形成加热部, 未加热部分形成在芯部17上。版权所有(C)2006,JPO&NCIPI