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    • 1. 发明专利
    • PRESSURE REGULATOR FOR VERY SMALL AMOUNT OF STANDARD GAS
    • JPH11338550A
    • 1999-12-10
    • JP16295198
    • 1998-05-26
    • HORIBA LTD
    • AKIYAMA SHIGEYUKIAOKI JUNJITSUJI MITSUYOSHIOTA SHIGEHARU
    • F16K31/126G05D16/06
    • PROBLEM TO BE SOLVED: To stably supply a very small amount of component gas which satisfies the specifications of primary and secondary pressure reducing mechanisms and has small gas adsorptivity and small contaminant gas production under a low pressure for a long period. SOLUTION: This pressure regulator is equipped with a primary pressure chamber 3 which is connected to a primary-side flow passage 2, a secondary pressure chamber 5 which is connected to a secondary-side flow passage 4, a pressure regulating chamber 6 which is provided between both the pressure chambers 3 and 5 and communicates with both the pressure chambers 3 and 5, a primary-side regulating valve 11 which controls passage from the primary pressure chamber 3 to the regulating chamber 6, a secondary regulating valve 22 which controls passage from the regulating chamber 6 to the secondary pressure chamber 5, a primary-side diaphragm 15 which is provided for the regulating chamber 6, associated with the primary-side regulating valve 11, and made of anticorrosive metal, and a secondary-side diaphragm 25 which is provided for the secondary pressure chamber 5, associated with the secondary- side regulating valve 22, and made of ethylene tetrafluoride resin.
    • 2. 发明专利
    • PRESSURE REGULATOR FOR VERY SMALL AMOUNT OF STANDARD GAS
    • JPH11338551A
    • 1999-12-10
    • JP16295298
    • 1998-05-26
    • HORIBA LTD
    • TSUJI MITSUYOSHISHIMIZU NAOHITOAKIYAMA SHIGEYUKIOTA SHIGEHARU
    • G05D16/06
    • PROBLEM TO BE SOLVED: To eliminate the change with time in the pressure value of a secondary pressure chamber by making excellent the parallelism between the seal and sleeve of a regulating valve of a secondary pressure reducing mechanism and improving gas sealing properties and measured pressure precision. SOLUTION: This regulator is equipped with a primary pressure chamber 3 connected to a primary flow passage 2, a secondary pressure chamber 5 connected to a secondary flow passage 4, a pressure regulating chamber 6 which is provided between the primary pressure chamber 3 and secondary pressure chamber 5 across partition walls 7 and 8 and communicates with both the pressure chambers 3 and 5 through two valve openings 9 and 10 bored in the partition walls 7 and 8, a primary regulating valve 13 which controls passage from the primary pressure chamber 3 to the pressure regulating chamber 6, a secondary regulating valve 24 which controls passage from the pressure governing chamber 6 to the secondary pressure chamber 5, and seats 16 and 30 of both the regulating valves 13 and 24 which are provided for valve 14 and 25 of both the regulating valve 13 and 14 and pressed against the valve openings 9 and 10, freely touchably/separably to block the valve openings 9 and 10, and a fluorine- based elastomer is used for the seat 30 of the secondary regulating valve 24.