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1. 发明专利

JPH07258825A MATERIAL COATED WITH CERAMIC FILM AND METHOD AND EQUIPMENT FOR PRODUCING THE SAME 失效
公开(公告)号：JPH07258825A
公开(公告)日：1995-10-09
申请号：JP5146594
申请日：1994-03-23
申请人： HITACHI LTD , JAPAN ATOMIC ENERGY RES INST
发明人： ONO SHIGEKI , FUJIMORI HARUO , ABE TETSUYA , HIROKI SEIJI , MURAKAMI YOSHIO
IPC分类号： C23C14/06 , C23C14/30 , H01L21/203
摘要： PURPOSE:To reduce the occurrence of peeling of a ceramic film as compared with the conventional one and to facilitate the increase in the film thickness of a ceramic film as compared to the conventional method. CONSTITUTION:The surface of a stainless steel 1 as a base material is heated by using an infrared ray lamp 9, and surface temp. is regulated to about 200-500 deg.C. At this temp. the base material 1 is coated with alumina 4 by a sputtering vapor deposition method. When the thickness of an alumina film 13 reaches a small thickness of about 10-500nm, the infrared ray lamp 9 is turned off. In the state of lower temp. than the temp. in the above-mentioned prescribed range, an alumina film 13' is vapor-deposited and increased in thickness until its film thickness reaches a prescribed thickness, e.g., of about 100-200mum. When an electron beam source evaporation method is used, the above heating is not done and the increase of film thickness is done while applying cooling to the base material at the time of increasing film thickness. Further, thin film coating and increase in film thickness can be done by an electron beam source evaporation method and a sputtering vapor deposition method, respectively.

2. 发明专利

JPH06331507A SUPERVISORY DIAGNOSTIC METHOD AND SYSTEM FOR PLANT AND PLANT EQUIPPED THEREWITH 失效
公开(公告)号：JPH06331507A
公开(公告)日：1994-12-02
申请号：JP11988793
申请日：1993-05-21
申请人： HITACHI LTD
发明人： UCHIDA SHUNSUKE , FUJIMORI HARUO , TAKAHASHI FUMINOBU , FUKUZAKI KOJI , YAMADA IZUMI
IPC分类号： G01D21/00 , G01M99/00 , G05B23/02 , G21C17/00 , G01M19/00
摘要： PURPOSE:To realize supervisory diagnostic method and system for plant in which high reliability is achieved while simplifying the periodic inspection by analyzing and diagnozing the abnormality accurately while taking account of the history of the plant related to the manufacture, inspection, repair, operation, etc., thereof. CONSTITUTION:An operational state 1, a working state 2, and an environment 3 are accumulated through a monitor 6 and collected as a set 8 of plant state amount whereas water quality/chemical information 4 is accumulated as a set 9 of plant state amount 9. The state amount set 8 is updated and past data is accumulated as a state amount set 9. The data 5 at the time of periodic inspection and the water quality/chemical information 4 are also accumulated as a set 9. The set 9 is stored while being contracted as a plant chart 11. State amount prediction 12 is conducted while taking account of the properties inherent to the plant. Data of the sets 8, 10 are then compared by comparing means 100, 101 and when they match substantially, the plant is normal otherwise abnormal. In case of abnormality, abnormal machine and factor are identified.

3. 发明专利

JPH06281547A METHOD AND APPARATUS FOR MONITORING ABNORMALITY OF DEVICE 失效
公开(公告)号：JPH06281547A
公开(公告)日：1994-10-07
申请号：JP6834793
申请日：1993-03-26
申请人： HITACHI LTD
发明人： MATSUI YUJI , YAMADA IZUMI , FUJIMORI HARUO
IPC分类号： G01M99/00 , G21C17/003 , G01M19/00
摘要： PURPOSE:To detect the abnormality of a device to be monitored with high accuracy by subjecting a plurality of detecting signals to a regression analysis. CONSTITUTION:Two kinds of detecting signals detected by detectors 1, 2 are corrected by a response characteristic correcting device 3 to seemingly respond in the same manner to the change of the state of a to-be-monitored appliance. A regression analysis operating part 4 applies a regression analysis to the corrected two kinds of detecting signals, thereby to calculate a regression coefficient and a coefficient of correlation. It is detected by the operating part 4 whether an absolute value of the calculated coefficient of correlation exceeds a preliminarily set threshold value. Only when the coefficient of correlation is over the threshold value, the regression coefficient is regarded as significant and treated as a monitoring parameter 5. An abnormality detecting part 6 detects whether or not the monitoring parameter 5 is within a predetermined range of normality, and decides it abnormal when the parameter is beyond the predetermined range of normality. An abnormality informing part 7 informs the generation of the abnormality.

4. 发明专利

JPH06180269A PUMP LOOP DIAGNOSTIC DEVICE 失效
公开(公告)号：JPH06180269A
公开(公告)日：1994-06-28
申请号：JP33409892
申请日：1992-12-15
申请人： HITACHI LTD
发明人： MATSUI YUJI , YAMADA IZUMI , FUJIMORI HARUO
IPC分类号： G01M99/00 , G01M19/00
摘要： PURPOSE:To detect abnormality occurring in a pump loop with high sensitivity and surely, not effected by external factors, by calculating expected temperature of the liquid circulating in the loop based upon energy difference between the energy occurring inside the loop and one released into the outside air, and comparing it with actual temperature. CONSTITUTION:The water flows from a water drum, through a valve 1, into a purification system loop 3, and then, through a valve 2, introduced into a reactor core again. In the loop 3, the water is circulated by a pump 4. Flow rate signal 22, measured by a flow rate measuring device 15, is converted into generated heat quantity 23 by an integration calculation device 18. Based upon the generated heat quantity 23 and outside air temperature signal 24 measured by an outside air temperature measuring device 16, an expected temperature calculating device 19 calculates expected temperature 25. The expected temperature 25 and actual temperature 26 measured by a water temperature measuring device 17 are recursion-analysed with a regression analyser 20. As a result of analysis with the analyzer 20, if the regression coefficient significantly gets out of the range pre-set by the regression coefficient, it is diagnosed that abnormality took place in the loop.

5. 发明专利

JPH0641917B2 失效
公开(公告)号：JPH0641917B2
公开(公告)日：1994-06-01
申请号：JP5481286
申请日：1986-03-14
申请人： HITACHI LTD
发明人： FUJIMORI HARUO , MATSUI TETSUYA
IPC分类号： G01N21/27 , G01N21/17 , G01N21/64

6. 发明专利

JPH05347442A 失效
公开(公告)号：JPH05347442A
公开(公告)日：1993-12-27
申请号：JP15472392
申请日：1992-06-15
申请人： HITACHI LTD
发明人： FUJIMORI HARUO , MATSUI YUJI
IPC分类号： B01D59/34 , B01J19/08 , H01S3/00 , H01S3/101
摘要： PURPOSE:To control the deflection angle of atomic beams by measuring the frequency dependency of resonance fluorescence intensity obtained by irradiating atomic beams with laser beams for resonance fluorescence and adjusting the wave front of a laser for deflection. CONSTITUTION:The device is composed of a vacuum vessel 1, an atomic-beam source 2, a laser 3 for deflection, a laser 4 for resonance fluorescence, laser frequency controllers 5, a laser optical system 6, fluorescence detectors 7, a data processor 8, a laser optical system controller 9, evacuation pumps 10, atom recovery devices 11 and a heater 12. When atomic beams are irradiated with laser beams for resonance fluorescence while sweeping resonance fluorescence laser frequency at that time, resonance fluorescence intensity is maximized by frequency displaced from resonance frequency to stationary atoms by a Doppler shift section corresponding to atomic velocity in the direction of a laser optical axis. An angle to the laser optical axis for resonance fluorescence of atomic beams is determined from the frequency dependency of resonance fluorescence intensity. An angle to the atomic beams of the wave front of laser beams for deflection is adjusted by using the measured value of the angle, thus controlling the deflection angle of atomic beams.

7. 发明专利

JPH05180753A PHOTOACOUSTIC ABSORBANCY MEASURING METHOD AND APPARATUS 失效
公开(公告)号：JPH05180753A
公开(公告)日：1993-07-23
申请号：JP34577791
申请日：1991-12-27
申请人： HITACHI LTD
发明人： MATSUI YUJI , FUJIMORI HARUO , FUSE MOTOMASA
IPC分类号： G01N21/00 , G01N29/00
摘要： PURPOSE:To calculate absorbancy with high accuracy, in the measurement of the absorbancy of a liquid sample, by simultaneously measuring the intensity of a photoacoustic signal and the temp. of the sample. CONSTITUTION:The liquid sample in a cell 3 absorbs exciting light 9 to generate a photoacoustic wave. The generated photoacoustic wave is detected by an acoustic wave sensor 4 to be converted to a photoacoustic signal 10 and only the component synchronizing with a reference signal 11 is amplified by a lock-in amplifier 6 and the intensity of the photoacoustic signal is measured. The temp. of the liquid sample in the cell 3 is measured by a temp. sensor 5 and the coefficient of cubic expansion of the sample is calculated. The absorbancy of the liquid sample can be measured with high accuracy.

8. 发明专利

JPH0547062B2 失效
公开(公告)号：JPH0547062B2
公开(公告)日：1993-07-15
申请号：JP28943586
申请日：1986-12-04
申请人： HITACHI LTD
发明人： KITAMORI TAKEHIKO , FUJIMORI HARUO , SUZUKI KAZUMICHI
IPC分类号： G01N15/14 , G01N15/02

9. 发明专利

JPH0552818A METHOD AND APPARATUS FOR OPTO-ACOUSTIC ANALYSIS AND OPTO-ACOUSTIC CELL 失效
公开(公告)号：JPH0552818A
公开(公告)日：1993-03-02
申请号：JP21200391
申请日：1991-08-23
申请人： HITACHI LTD
发明人： MATSUI YUJI , FUJIMORI HARUO , YAMADA IZUMI , IZUMI SHIGERU
IPC分类号： G01N21/00 , G01N29/00
摘要： PURPOSE:To perform measurement highly sensitively while liquid sample is allowed to flow to a cell by using a small capacity cell in opto-acoustic measurement. CONSTITUTION:A duct with low rigidity such as a vinyl tube is used as a duct connected to at least one of a branch tube 28 for a cell 15 inlet and a branch tube 29 for an outlet. Alternately, difference in acoustic impedance is made between inside and outside by providing an aperture part instead of uniform inner diameters of the branch tubes 28,29. Thus sound speed drops in the cell so that frequency of a resonance peak in the cell is lower than a structural resonance peak of a detector 4 or the cell, whereby highly sensitive measurement is possible without influence from opening of the inlet and outlet provided for permitting sample solution to flow during measurement.

10. 发明专利

JPH04290945A GRANULAR SUBSTANCE SENSING METHOD 失效
公开(公告)号：JPH04290945A
公开(公告)日：1992-10-15
申请号：JP5632591
申请日：1991-03-20
申请人： HITACHI LTD
发明人： AJIRO YASUKO , FUJIMORI HARUO
IPC分类号： G01B17/00 , G01N15/02 , G01N15/06 , G01N15/10 , G01N21/63 , G01N29/00
摘要： PURPOSE:To enhance the resolution for particle sizes by shortening the pulse width of energized light to be projected onto a granular substance, and thereby enlarging difference due to the particle size at the threshold for destruction. CONSTITUTION:The emergized light 6 emitted by a light source 1 is passed through a lens 5 and condensed at a specimen cell 7 at whose center an acoustic sensor 12 is installed, followed by stopping by a beam stopper 9. The pulse width of this energized light is 5ns approximately, and thereby the destructive threshold for granular substance is varied so as to enlarge the particle size dependency of the intensities of plasma beam and acoustic wave generated in association with destruction of the granular substance. Thus the resolution for particle sizes is increased. The acoustic wave 10 generated from the plasma 8 produced with the granular substance as nucleus is sensed by an acoustic sensor 12, and the generated number of acoustic waves 10 and the wave height are measured by a signal processing device 13. The number of particles and the size of granular substance are determined from these number of acoustic waves 10 and wave height, respectively, and are fed to a recording device 14.

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