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    • 1. 发明专利
    • NEEDLE-LIKE ULTRASONIC PROBE
    • JPH0824259A
    • 1996-01-30
    • JP16093294
    • 1994-07-13
    • HITACHI LTDHITACHI MEDICAL CORPHITACHI CONSTRUCTION MACHINERY
    • YOKOZAWA KOICHISHINOMURA RYUICHIITO YUKIOISHIKAWA KIYOSHIKANDA HIROSHI
    • A61B8/12
    • PURPOSE:To obtain an ultrasonic probe which can pierce while a position to be observed is searched and wherein a transmitted or a pseudo-transmitted ultrasonic wave can be easily measured by arranging a pair of an ultrasonic convertor and an ultrasonic reflecting material or a pair of the first and the second ultrasonic convertors so as to face them in the direction being perpendicular to the axis of a puncture needle. CONSTITUTION:A plurality of pairs of thin film ultrasonic convertors 2 and 2' facing each other so as to placing the central axis between them are provided on the wall face of a hollow outer needle 10 and a low frequency ultrasonic convertor 3 for searching is also provided on the face in the axial direction of the apex part of a filled inner needle 20. Under a condition where apex positions of the inner needle 20 and the outer needle 10 are joined, a needle-like ultrasonic probe is pierced into the object to be examined and when the apex of the inner needle 20 reaches a site to be observed, it is stopped. Thereafter, when the outer needle 10 is pierced furthermore to an inner position to be observed, the tissue of living body at the position to be observed is introduced into the hollow outer needle 10 to result in a condition where this is placed up and down between a plurality of the facing pairs of the ultrasonic convertors. Under this condition, sound characteristics of the tissue of the living body introduced into the outer needle 10 are measured.
    • 7. 发明专利
    • THIN FILM ARRAY ULTRASONIC WAVE TRANSDUCER AND ITS FORMING METHOD
    • JPH05316596A
    • 1993-11-26
    • JP11462892
    • 1992-05-07
    • HITACHI CONSTRUCTION MACHINERY
    • ITO YUKIOKUSHIDA KEIKO
    • H04R17/00H04R31/00
    • PURPOSE:To obtain an array element with a fine pitch by growing a zinc oxide with a low crystalline degree at a position corresponding to a groove forming part between array elements and to eliminate the need for an inter-element gap depending on the thickness of the element. CONSTITUTION:A gold/chromium film is formed on a plane of a sapphire substrate 11 as a lower electrode film 24. Then the gold and chromium are sequentially etched by using a prescribed resist pattern as a mask to remove the gold/chromium film at the position corresponding to the gap of the array element. Then a C axis orientation film 25 of zinc oxide is deposited on the removed part by using the high frequency magnetron sputtering method. Furthermore, a gold/chromium film is laminated on the zinc oxide film 25 as an upper electrode film 26. Then a photo resist pattern aligned with the lower electrode pattern is formed on the layer film and after the gold/chromium film is etched by using it as a mask, the zinc oxide film is etched by using a water solution whose major components are a nitric acid and a hydrochloric acid. Thus, the array element in which the groove 27 is completely cut off is obtained.
    • 8. 发明专利
    • JPH05304699A
    • 1993-11-16
    • JP10745792
    • 1992-04-27
    • HITACHI CONSTRUCTION MACHINERY
    • ITO YUKIOKUSHIDA KEIKOKANDA HIROSHI
    • H04R17/00
    • PURPOSE:To fine the pitch of elements and to improve electronic focusing performance and directivity by arranging an ultrasonic converter consisting of zinc oxide piezoelectric thin film on acoustic medium and providing a V-shaped groove shallower than the width of the thin film. CONSTITUTION:A silicon dioxide film 5 is formed on the lens section of a sapphire board being an acoustic medium 1 as an acoustic matching layer 5 and a lower electrode film 2 is formed on the plane opposite to the lens section. On the gold/chrome layer of the electrode film 2, a c-axis orientation film 3 made of the zinc oxide is accumulated, on which an upper electrode film 4 is accumulated. Further, the etching of the zinc oxide thin film 3 is performed by means of C-plane selection etchant mainly containing sulfuric fluid and hydrochloric acid to form array-shaped ultrasonic conversion elements 7a, 7b. Providing a V-shaped groove 6 on the thin film 3 expands the effective width of the elements 7a and 7b. Thereby fining the pitch of the elements 7a, 7b and improving the electronic focusing performance and directivity and the effectivity of using space of the converter 1.