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1. 发明专利

JPH06188099A SYNCHROTRON RADIATION LIGHT GENERATION DEVICE 失效
公开(公告)号：JPH06188099A
公开(公告)日：1994-07-08
申请号：JP33835392
申请日：1992-12-18
申请人： HITACHI LTD , HITACHI ENG CO LTD
发明人： MATSUMOTO MANABU , KOBARI TOSHIAKI , KAKIUCHI SHUNJI , TSUMAKI KOJI , TORII TSUNEO
IPC分类号： H05H13/04
摘要： PURPOSE:To raise evacuation efficiency. CONSTITUTION:A distribution type ion pump(DIP) 23 is disposed on an outer portion of charged particle orbit 13. Means of preventing light irradiation of DIP 23 is taken by eliminating a portion where light passes. And further, an absorber 31 for absorbing light passing to side wall of DIP 23 is disposed. Accordingly, because DIP is disposed at the position of a large gas source due to photodesorption, the evacuation efficiency is raised. Photoelectrons released from the absorber are contained within a cell of DIP, so that ionization of gas molecules is enhanced to raise the evacuation efficiency. In power connection in a low voltage region, the ignition delay is eliminated.

2. 发明专利

JPH02183999A CHROMATIC ABERRATION CORRECTING METHOD 失效
公开(公告)号：JPH02183999A
公开(公告)日：1990-07-18
申请号：JP271189
申请日：1989-01-11
申请人： HITACHI LTD
发明人： TSUMAKI KOJI
IPC分类号： G21K1/08 , H05H7/04 , H05H13/04
摘要： PURPOSE:To correct chromatic aberration with a weak six-pole magnet and expand a dynamic aperture by using a magnet divided with a four-pole magnet into two and inserted with the fix-pole magnet between them and integrated. CONSTITUTION:A device is constituted of two deflecting magnets 1, a triplet consisting of a nonconvergent magnet 2, a convergent magnet 3, and a nonconvergent magnet 4 on the outside, and a convergent magnet 6 storing a six-pole magnet at the portion pinched by the deflecting magnets. A four-pole magnet storing this six-pole magnet is obtained by dividing an ordinary four-pole magnet into two and pinching the six-pole magnet between them. The six-pole magnet can be installed at the place where the betatron function is the maximum. The six-pole magnet can be operated most effectively, thus the chromatic aberration of the weak six-pole magnet can be corrected. A large dynamic aperture can be obtained.

3. 发明专利

JPS62206519A UNIFORMING DEVICE FOR RADIANT LIGHT INTENSITY 失效
公开(公告)号：JPS62206519A
公开(公告)日：1987-09-11
申请号：JP4835586
申请日：1986-03-07
申请人： HITACHI LTD
发明人： TSUMAKI KOJI , NISHI MASATSUGU
IPC分类号： H05H13/04 , G02B27/00 , G03F7/20 , H01L21/027
摘要： PURPOSE:To uniform the intensity of radiant light and extend the irradiated area by changing the reflection angle of a mirror from a bell-shaped distribution to a uniform rectangular distribution to uniform the intensity of the radiant light in an optical system where said mirror is provided between a light emitting point and an irradiated point and the light of right and left trailing parts of the distribution is condensed inward. CONSTITUTION:For the purpose of changing the intensity distribution shown by a solid line in a figure A to that shown in a figure B, the light from a point A as the boundary, where the intensity of radiant light is reduced to a half, to a point b1 is reflected by a mirror 1 to compensate the intensity of light from the point A to a point b2. The similar operation is performed for the light between points c2 and c1 to extend the range, where the intensity of light is uniform, from an area between points b2 and c2 to that between points A and C. With respect to positional relations among a light source 2, the mirror 1, and a wafer 3, the reflection angle of the mirror is denoted as alpha and the angle for a radiant light intensity Ia1 and that for a radiant light intensity Ia2 are denoted as theta and theta-alpha respectively. When a point a1 is moved from the point 1 to the point A, the reflection angle alpha of the mirror in each position is determined in accordance with this movement. Thus, the intensity of the radiant light whose intensity distribution including right and left trailing parts is not uniform is made uniform to obtain a radiant light intensity uniforming device which extends the irradiates area.

4. 发明专利

JPS62198099A ELECTRON BEAM STABILIZATION 失效
公开(公告)号：JPS62198099A
公开(公告)日：1987-09-01
申请号：JP3922986
申请日：1986-02-26
申请人： HITACHI LTD
发明人： TSUMAKI KOJI , MIYATA KENJI , NISHI MASATSUGU
IPC分类号： H05H7/06 , H05H13/00 , H05H13/04

5. 发明专利

JPH01193684A POSITION MONITOR 失效
公开(公告)号：JPH01193684A
公开(公告)日：1989-08-03
申请号：JP1697888
申请日：1988-01-29
申请人： HITACHI LTD
发明人： TSUMAKI KOJI
IPC分类号： G01T1/29 , G21K5/04
摘要： PURPOSE:To accurately measure the position of ion beam, by allowing heavy ion beam to pass through a membrane and measuring the intensity distribution of ion beam excited at that time. CONSTITUTION:A carbon membrane 1 having a thickness of several 1mum is arranged to the region permitting heavy ion beam 9 to pass in the vacuum chamber 8 of a heavy ion accelerator. The beam 9 performs interaction along with the membrane 1 to excite a bound electron. The excited electron passes through the membrane 1 to emit light and returns to a ground state. This beam is condensed by a lens 2 to be formed into an image on a multichannel beam sensor 3. The sensor 3 measures a photon one at a time to measure the intensity distribution of beam. The beam is converted to an electric signal in the sensor 3 and the converted signal is amplified by an amplifier 5 and shaped in a waveform to be sent to a display apparatus 7 and a signal memory 6. The intensity distribution waveform of beam is obtained on the display apparatus 7 and, since this distribution of beam corresponds to that of the beam 9, the position of the beam 9 can be accurately measured.

6. 发明专利

JPS6180800A Radiation light irradiator 失效
标题翻译：辐射灯辐射器
公开(公告)号：JPS6180800A
公开(公告)日：1986-04-24
申请号：JP20148084
申请日：1984-09-28
申请人： Hitachi Ltd
发明人： TSUMAKI KOJI , MIYATA KENJI , NISHI MASATSUGU
IPC分类号： H05H13/04

7. 发明专利

JPH07263198A ACCELERATOR AND VACUUM EXHAUST DEVICE 失效
公开(公告)号：JPH07263198A
公开(公告)日：1995-10-13
申请号：JP4824194
申请日：1994-03-18
申请人： HITACHI LTD
发明人： TSUMAKI KOJI , YANAGI YOSHIHIKO , YAMAMOTO MEGUMI , SUZUKI HIROYUKI , SUZUKI YOZO , KOBARI TOSHIAKI , MATSUMOTO MANABU
IPC分类号： H05H13/04
摘要： PURPOSE:To provide an accelerator having high utilizing efficiency of emitted light, compact size, and low cost by arranging a vacuum exhaust device on the inside of a beam orbit. CONSTITUTION:In a vacuum chamber 103, a pump room 3 for setting a vacuum pump constituted by uniting an ion pump and a getter pump is arranged on the inside of a beam room 1 covering an electron beam orbit 106, and a slotter 2 for passing through emitted light from the beam is arranged on the outside of the beam room 1. By arranging the pump room 3 on the inside of the vacuum chamber 103, the outer size of a storage ring is made compact. Since the vacuum exhaust pump does not disturb the taking out of emitted light, the required number of emitted light intake ports are installed in the outside position of the beam orbit 106, and the utilizing efficiency of emitted light can be enhanced.

8. 发明专利

JPH01146299A CHARGED PARTICLE ACCUMULATION RING 失效
公开(公告)号：JPH01146299A
公开(公告)日：1989-06-08
申请号：JP30314287
申请日：1987-12-02
申请人： HITACHI LTD , NIPPON TELEGRAPH & TELEPHONE
发明人： TSUMAKI KOJI , NISHI MASATSUGU , NAKADA JOJI , NAKAJIMA MASAYUKI
IPC分类号： H05H7/04 , H05H13/04
摘要： PURPOSE:To reduce load on a 6-pole magnet for correcting chromatic aberration by arranging an iron shield for guiding leakage magnetic field from a deflection magnet into a 4-pole magnet on the orbit axis of charged particles. CONSTITUTION:An iron shield 14 placed on an orbit axis is connected to a 4-pole magnet 12 constituting a focusing magnet and a non-focusing magnet to concentrate leakage magnetic field of a deflection magnet 11 on the orbit axis onto the 4-pole magnet 12. Since the magnetic permeability of the iron placed on the orbit axis is large, the leakage magnetic field passes through the iron and is led to the 4-pole magnet 12. Since the magnetic poles of the 4-pole magnet are of the shape as shown in the figure, 6-pole magnetic field components are produced. This makes it possible to reduce chromatic aberration produced by the 4-pole magnet and to reduce load on the 6-pole magnet used for correcting chromatic aberration in the past.

9. 发明专利

JPS61240600A ELECTRONIC BEAM INCIDENCE APPARATUS 失效
公开(公告)号：JPS61240600A
公开(公告)日：1986-10-25
申请号：JP8020185
申请日：1985-04-17
申请人： HITACHI LTD
发明人： TSUMAKI KOJI , NISHI MASATSUGU
IPC分类号： H05H13/04

10. 发明专利

JPH0729728A ELECTROMAGNET 失效
公开(公告)号：JPH0729728A
公开(公告)日：1995-01-31
申请号：JP16817793
申请日：1993-07-07
申请人： HITACHI LTD
发明人： YANAGI YOSHIHIKO , KAKIUCHI SHUNJI , TSUMAKI KOJI , SAKURAHATA HIROAKI , WATABIKI MASAYUKI
IPC分类号： H01F7/06 , H05H7/04
摘要： PURPOSE:To provide an electromagnet which can keep the intensity of a magnetic field in a proportional relation with that of a current on a high magnetomotive force side without enlarging an iron core in size. CONSTITUTION:An electromagnet is composed of a pair of magnetic poles 100 possessed of an inter-magnetic pole gap 4 and an air layer gap 5 inside, a coil 3 which is provided in the inter-magnetic pole gap 4 and generates a magnetic field when a current flows through it, and an elastic member 20 which is so provided to a part of the air layer gap 5 as to control the gap 5 in width corresponding to a magnetic force which acts on the gap 5. By this setup, a magnetic material can be restrained from increasing in magnetic resistance on a high magnetomotive force side without enlarging a magnetic pole in area. Therefore, an electromagnet, which can keep the intensity of a magnetic field in a proportional relation with that of a current from a low magnetomotive force side (low coil current) to a high magnetomotive force side (high coil current) without enlarging it in size, can be realized.

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