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1. 发明专利

JPH04206245A FOUR-POLE DEFLECTOR 失效
公开(公告)号：JPH04206245A
公开(公告)日：1992-07-28
申请号：JP32932790
申请日：1990-11-30
申请人： HITACHI LTD
发明人： TSUCHIYA SHUNICHI
IPC分类号： H01J37/147
摘要： PURPOSE:To suppress aberration of a lens without a complicated structure by using, as an alignment means of a scanning electron microscope, a deflector wherein two sets of conformal deflecting boards are arranged in series with a charged particle beam and the deflecting boards are arranged in parallel to each other. CONSTITUTION:Deflectors 2, 8 comprise two sets of parallel flat deflecting boards 22, 23 which generates electric fields having the same electric field strength and opposite directions are connected in series with respect to a charged particle beam and the charged particle beam passes between them so that the charged particle beam is deflected without the change of velocity vector of charged particles. In order to align an electron beam with an optical center axis of a lens system, the deflector 2 is used as an alignment means. In order to scan the electron beam while a trace of the electron beam from an electron gun 20 to an objective lens 7 is kept aligned with the optical center axis of the lens system, and also to scan the electron beam while a sample 9 is focused, the deflector 8 is used as a scanning means, which is placed in a rear stage of the objective lens 7. Thus aberration is minimized without a complicated structure, so that the electron beam having large focus depth can be applied to the sample.

2. 发明专利

JPH09128373A SUPPORT METHOD FOR NUMERICAL VALUE CALCULATION 失效
公开(公告)号：JPH09128373A
公开(公告)日：1997-05-16
申请号：JP28129595
申请日：1995-10-30
申请人： HITACHI LTD
发明人： TSUCHIYA SHUNICHI , EZAWA YOSHITAKA , OKAMOTO NORIAKI
IPC分类号： G06F17/11
摘要： PROBLEM TO BE SOLVED: To more precisely calculate necessary calculation time required until the termination of calculation before the execution of numerical value calculation is started compared to a conventional case and necessary calculation time required until the termination of calculation during the execution of calculation at the time of predicting numerical value calculation time and to display them for calculation worker. SOLUTION: A calculation scale showing the number of nodes, the number of elements, the total degree of freedom, band width, the number of fronts and variable combining them, the type of CPU of a computer, a calculation environment showing a memory and a disk, which can be used, the correlation of calculation time required for the execution of numerical value calculation are made into a data base by using calculation content data required at the time of executing numerical value calculation. At the time of executing numerical value calculation, calculation environment which is to be used and the scheduled calculation scale are previously designated. Thus, calculation time is predicted by using interpolation/extrapolation method from data on the data base, and it is displayed on the display device of the computer so as to inform the calculation worker of the predicted necessary time of numerical value calculation.

3. 发明专利

JPH1189151A ROTARY ELECTRIC MACHINE 失效
公开(公告)号：JPH1189151A
公开(公告)日：1999-03-30
申请号：JP24239597
申请日：1997-09-08
申请人： HITACHI LTD
发明人： TSUCHIYA SHUNICHI , USAMI SABURO , KIMOTO HIROSHI
IPC分类号： H02K3/48
摘要： PROBLEM TO BE SOLVED: To prevent a shaft-bending moment from being generated and to reduce the rotary vibration of a rotor by providing a film with a low friction coefficient at each of a slide surface in the coil slot of the rotor. SOLUTION: A number of coil slots 7 that are recessed grooves being directed from an outer-periphery surface being extended in axial direction toward a center direction are formed at a rotor. A coil 6 and a wedge 3 for pressing the coil 6 are accommodated in the coil slot 7 via a creepage block 3 for insulation, and a film 9 with a low friction coefficient (0.01 or less) is formed on a surface that opposes the coil 6 of the creepage block 3 and a surface that opposes the creepage block 3 of the coil 6 and/or a surface that opposes the wedge 3 of the coil 6 and the surface that opposes the coil 6 of the wedge 3, thus facilitating the relative move of the rotor in the direction of a rotary axis and reducing the rotary vibration of the rotor.

4. 发明专利

JPH1153347A ANALYZER 失效
公开(公告)号：JPH1153347A
公开(公告)日：1999-02-26
申请号：JP21355197
申请日：1997-08-07
申请人： HITACHI LTD
发明人： TSUCHIYA SHUNICHI , EZAWA YOSHITAKA , NISHIGAKI ICHIRO
IPC分类号： G06F17/50 , G06F17/17 , G06T17/20
摘要： PROBLEM TO BE SOLVED: To provide an analyzer which can execute a highly precise and efficient numerical calculation in a specified partial area within the area to be analyzed. SOLUTION: An input of an object of analysis is performed from an interactive data input means 101 and an analysis of the whole is executed by the first order finite element calculation processing means 102. Furthermore, a physical quantity on a boundary of a specified partial area is obtained from the calculation result by a boundary condition processing means 105, and by using these data, the second order numerical value calculation processing means 106 performs a detailed analysis of the specified partial area by a meshless method.

5. 发明专利

JPH07200536A NUMERICAL ANALYSIS METHOD 失效
公开(公告)号：JPH07200536A
公开(公告)日：1995-08-04
申请号：JP1794
申请日：1994-01-04
申请人： HITACHI LTD
发明人： TSUCHIYA SHUNICHI
IPC分类号： G06F17/10
摘要： PURPOSE:To simplify the discrete processing, to improve the efficiency of analysis and also to improve the accuracy of analysis by dividing an analysis model shape into several partial shapes and performing the proper discrete processing in each partial shape to analyze these shapes. CONSTITUTION:The shape data to be analyzed is divided into several partial shapes by an analysis model 2, and a data F part 10 defines the partial shapes 5, 4,.... Then the proper discrete partial. area data 7, 8... are generated to each partial shape based on the shapes 3, 4,... and their parameters and also on the node patterns 5, 6,... corresponding to the shapes 3, 4,... respectively. Furthermore the analysis date 9 are generated to the data 7, 8,... and analyzed by a data analyzing part 11. The pert 11 analyzes the data by a regular rigidity equation considering the boundary integration in a mismatched area of nodes included in a boundary area of the partial shape. Thus the proper discrete processing is carried out for each partial area with no consideration required for the matching properties of partial areas.

6. 发明专利

JP2000090070A ANALYTIC RESULT DISPLAY METHOD 失效
公开(公告)号：JP2000090070A
公开(公告)日：2000-03-31
申请号：JP25485398
申请日：1998-09-09
申请人： HITACHI LTD
发明人： TSUCHIYA SHUNICHI
IPC分类号： G06F17/10 , G06F17/50
摘要： PROBLEM TO BE SOLVED: To make a series of processes quantitative and smooth by defining display points, defined on an analytic model, by an arbitrary regular arranging method and generating display data at the display points from an analytic result. SOLUTION: The analytic result 101 obtained by an analyzer or the like, etc., are fetched as data and on the basis the analytic result 101, a data manager 102 determines display points for analytic result display by a display point defining means 103 to generate display data 104. The display data 104 are displayed by a display means 106, the display points where the data are displayed are specified by an interactive input/output means 109, and the data manager 102 automatically generates a temporary data file 105. From the temporary data file 105, a chart regarding the analytic result 101 at the specified display points is generated through the interactive input/output means 109 and stored in the temporary data file 105.

7. 发明专利

JPH05312800A 失效
公开(公告)号：JPH05312800A
公开(公告)日：1993-11-22
申请号：JP11335792
申请日：1992-05-06
申请人： HITACHI LTD
发明人： TSUCHIYA SHUNICHI , SAKURAI SHIGEO , HIRANO AKIHIKO
IPC分类号： G01N33/20
摘要： PURPOSE:To enable highly-precise preestimation of the degree of deterioration by a method wherein the relation. between the amount of distribution of elements in the vicinity of a tissue grain boundary of an object material and a transition temperature of a brittle fracture transition temperature rate is determined beforehand experimentally and a change in the amount of distribution thereof is simulated for an object member. CONSTITUTION:An electrolytic polishing device 1 is employed, while a phosphoric acid solution 2 and an organic solvent 3 containing a perchloric acid are used as an electrolytic solution. A sample 4 is made a sharp needle of which the radius of curvature is within 100nm, and a former austenite grain boundary face 5 in a material is controlled to be perpendicular to the direction of the needle and to be at a position within 50nm from the fore end. The sample 4 satisfying these conditions is subjected to electrolytic polishing by a back polishing method and analyzed by an atom probe and thereby a chemical composition of each atomic layer of P in the vicinity of the former austenite grain boundary 5 is determined. A simulation model in conformity with grain boundary segregation of a member in a machine in use is prepared on the basis of a concentration profile thus obtained, a diffusion coefficient is made appropriate and preestimation of the amount of the grain boundary segregation of impurities is made highly precise and highly reliable. This operation is repeated and integrated with the preceding one and thereby the preestimation of deterioration of higher precision is conducted.

8. 发明专利

JPH0562639A ATOMIC ARRANGEMENT STEREO-ANALYSIS METHOD AND APPARATUS THEREFOR 失效
公开(公告)号：JPH0562639A
公开(公告)日：1993-03-12
申请号：JP21960591
申请日：1991-08-30
申请人： HITACHI LTD
发明人： YOSHIMURA TOSHIHIKO , ISHIKAWA YUICHI , TSUCHIYA SHUNICHI
IPC分类号： H01J37/285 , H01J49/10 , H01J49/40
摘要： PURPOSE:To enhance the reliability of the remaining life estimation as well as of the evaluation of the degree of brittleness in plant-forming members through cubic visualization/analysis of all constructional atoms in the region of a needle-like sample tip and hence highly precise quantifiability of the behavior of minutely added elements greatly contributing to making the stainless steel brittle. CONSTITUTION:In order to increase the ion detection efficiency of a conventional position sensitive atom probe (three-dimensional atom probe) and increase the position resolving power of the detection ions, a needle-like sample is provided, at its tip, with a mechanism for post ionizing of the particles not field vaporized in synchronism with the pulse, and the position detector is provided with a mesh electrode 1004 for again taking the ions 1003 splashed by a part of the surface of an electron multiplier plate 1001, into the electron multiplier plate 1001.

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