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1. 发明专利

JP2003077105A Thin-film magnetic head, thin-film magnetic head slider, its manufacturing method, and magnetic disk device 有权
标题翻译：薄膜磁头，薄膜磁头滑块及其制造方法和磁盘设备
公开(公告)号：JP2003077105A
公开(公告)日：2003-03-14
申请号：JP2001262653
申请日：2001-08-31
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： KATO TAKAHIRO , SAIKI NORIYUKI , ISONO CHIHIRO , KIKUCHI HIROSHI
IPC分类号： G11B5/31 , G11B5/60
CPC分类号： G11B5/6005 , Y10T29/49032
摘要： PROBLEM TO BE SOLVED: To provide a highly reliable thin-film magnetic head capable of effectively suppressing the corrosion of a magnetic film in an aqueous solution in a polishing and washing step, a thin-film magnetic head slider, a magnetic disk device and its manufacturing method. SOLUTION: A conductor is formed by conductive contact so as to be exposed outside through an internal metal film from a magnetic film as a recording magnetic pole. The conductor has a standard electrode potential ser higher for the magnetic film in an aqueous solution, and the surface area of the conductor is set larger than the sectional area of the magnetic film on a floating surface opposite a magnetic recording medium. Thus, the corrosion of the recording magnetic film in the thin-film magnetic head manufacturing process is suppressed. Moreover, recording/reproducing characteristics are improved by preventing the thinning of the magnetic film caused by the corrosion.
摘要翻译：要解决的问题：为了提供一种高可靠性的薄膜磁头，能够有效地抑制研磨和洗涤步骤中的水溶液中的磁性膜的腐蚀，薄膜磁头滑块，磁盘装置及其制造方法。解决方案：导体由导电接触形成，以便通过内部金属膜从作为记录磁极的磁性膜暴露在外部。导体对于水溶液中的磁性膜具有较高的标准电极电位，并且将导体的表面积设定为大于与磁记录介质相对的浮动面上的磁性膜的截面面积。因此，抑制了薄膜磁头制造工序中的记录磁性膜的腐蚀。此外，通过防止由腐蚀引起的磁性膜的变薄，改善了记录/再现特性。

2. 发明专利

JPH10222816A THIN FILM MAGNETIC HEAD AND MAGNETIC DISK DEVICE 失效
公开(公告)号：JPH10222816A
公开(公告)日：1998-08-21
申请号：JP2345897
申请日：1997-02-06
申请人： HITACHI LTD
发明人： TASAKA KENJI , TSUMITA NORIKAZU , FURUSAWA KENJI , TOKISUE HIROMITSU , SAIKI NORIYUKI
IPC分类号： G11B5/39
摘要： PROBLEM TO BE SOLVED: To reduce the thermal asperity (TA), which is generated by the contact between a disk and a head, to efficiently radiate the heat generated by an MR element and to improve the reproduced output by selecting the non-magnetic insulating film having a high thermal diffusion rate as the constituting material of the head element and the disk protective film. SOLUTION: In a thin film magnetic head element 10, hydrogen-containing amorphorus carbon or vapor phase synthesized diamond are used for the material of non-insulating films 104 and 106 which are located adjacent to an MR element 105 so as to greatly reduce the TA generated by the contact with a disk 2. Also silicon carbide is used for a slider material 14. Moreover, insulating films 102 ; 104 and 106 among the slider, a bottom section shield film 103, the element 105 and a top section shield film 107, a gap insulating film 108 of an inductive type head 12 and an insulating film 110, which protects the entire head, are replaced by high thermal diffusion films. Thus, the heat generated by Joule heating of the element 105 while the power is supplied is efficiently diffused and the reproduced output is increased.

3. 发明专利

JPH07204219A MANUFACTURE OF MAGNETIC HEAD SLIDER 失效
公开(公告)号：JPH07204219A
公开(公告)日：1995-08-08
申请号：JP29424794
申请日：1994-11-29
申请人： HITACHI LTD
发明人： TASAKA KENJI , SONOBE HIDEKI , NATE KAZUO , MIWA HIROAKI , AKAMATSU KIYOSHI , HAGIWARA YOSHIKI , SAIKI NORIYUKI
IPC分类号： G11B21/21 , A61F5/02
摘要： PURPOSE:To provide a method for manufacturing a magnetic head with a high yields by preventing a head element surface other than the surface to be machined of the slider of the magnetic head and its back side from being fouled or damaged. CONSTITUTION:A method for manufacturing a magnetic head slider includes the following processes (1)-(6): (1) a head element formation process in which plural lines of head elements 30 are formed in matrices on one side of a nonmagnetic substrate 1a by photolithography; (2) a process for forming organic protective films 5 on the side of the substrate where the head elements 30 have been formed and its back side; (3) a process for cutting a slider block (SB) 6 for one line of the head element 30 and for grinding the slider surface of the block and its back side; (4) a slider rail formation process for forming a rail groove 11a in the slider surface of the SB 6; (5) a process for removing the organic protective film 5 from the SB 6 where the rail groove 11a has been formed; (6) and a cutting process for cutting a slider out of the SB 6; and the processes (5) and (6) may be performed in reverse order.

4. 发明专利

JPH07147013A PRODUCTION OF SLIDER FOR THIN FILM MAGNETIC HEAD 失效
公开(公告)号：JPH07147013A
公开(公告)日：1995-06-06
申请号：JP29211193
申请日：1993-11-22
申请人： HITACHI LTD
发明人： SONOBE HIDEKI , TOGAWA EISEI , HAYASHI MASAYUKI , SAIKI NORIYUKI , TAKEMOTO KAZUNARI , NATE KAZUO , SUZUKI SABURO , HAGIWARA YOSHIKI
IPC分类号： G11B5/60 , G11B21/21
摘要： PURPOSE:To prevent a damage of a surface to be worked by providing a lift off thin film at an under layer of a mask for etching. CONSTITUTION:An element is formed on a wefer 1 by a photolithography and slider blocks Z each is cut out and fixed on a working jig 3 with a floating surface upward. The lift off thin film 6 is formed on the whole surface of the block 2 by a physical vapor deposition method or a chemical vapor deposition method such as plasma polymerization. The material of the thin film 6 is selected taking a process resistance into consideration, and film thickness is preferably made 0.1-0.5mum. Then, a masking material for dry etching 4 is formed on the film 6, a slider gray surface is worked to make a block 5. In this way, the generation of a residual dross at the time of removing a mask after etching and the damage of the surface to be worked is prevented, and a free shape rail is formed on the slider surface with good accuracy and high purity.

5. 发明专利

JPH06150276A SLIDER FOR THIN FILM MAGNETIC HEAD AND ITS MANUFACTURE 失效
公开(公告)号：JPH06150276A
公开(公告)日：1994-05-31
申请号：JP30205292
申请日：1992-11-12
申请人： HITACHI LTD
发明人： SONOBE HIDEKI , TASAKA KENJI , MIZUSHIMA AKIKO , NATE KAZUO , MIWA HIROAKI , TOGAWA EISEI , SAIKI NORIYUKI
IPC分类号： G11B5/60 , G11B21/21
摘要： PURPOSE:To improve the machining accuracy of rails so as to prevent the damage to a slider for thin film magnetic heads by filling the gap between slider blocks with a resin and forming a mask. CONSTITUTION:Slider blocks 2 segmented from alumina titanium carbide are fixed in the recessed section of a jig 5 and a specific film 6 is press-fixed to the blocks 2. The sticking strength of the film 6 is reduced by hardening an adhesive by irradiating the adhesive with ultraviolet rays. The space formed of the blocks 2 and jig 5 is filled up with an acrylic photosetting resin 7 injected from a hole on the rear side of the jig 5 and the resin 7 is hardened by irradiating the resin 7 with ultraviolet rays. After hardening the resin 7, the film 6 is removed and a phenol novolak-base positive resist 8 is applied to the surfaces of the blocks 2, jig 5, and resin 7. Then, a resist mask 9 is formed by patterning the resist 8 and Ar ion milling is performed. Finally, a slider block 3 is obtained by subjecting the resin 7 to ultrasonic cleaning in acetone.

6. 发明专利

JPH01282728A MAGNETIC RECORDING MEDIUM 失效
公开(公告)号：JPH01282728A
公开(公告)日：1989-11-14
申请号：JP11151288
申请日：1988-05-10
申请人： HITACHI LTD
发明人： SAIKI NORIYUKI , IMAMURA MASAAKI , MAEDA FUJIO , IECHIKA KEIGO , KATO YOSHIKI
IPC分类号： G11B5/708 , C09D5/23
摘要： PURPOSE:To improve the sliding resistant hardness of the magnetic recording medium by using ultra-high-hardness fine particles having >=3,500 Knoop hardness as a reinforcing material. CONSTITUTION:A magnetic film 11 is disposed on a nonmagnetic substrate 12 and a protective film having the ultra-high-hardness fine particles 14 having >=3,500 Knoop hardness is disposed on the magnetic film 11. For example, diamond powder, cubic boron nitride powder, etc., are used as the ultra-high- hardness fine particles having >=3,500 Knoop hardness. While only the fine particles may be incorporated as the reinforcing material into the magnetic film, said fine particles are more preferably mixed with the reinforcing material having

7. 发明专利

JP2003016607A Magnetic head, its manufacturing method and magnetic disk device using the same 审中-公开
标题翻译：磁头，其制造方法和使用该磁头的磁性装置
公开(公告)号：JP2003016607A
公开(公告)日：2003-01-17
申请号：JP2001196628
申请日：2001-06-28
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： KIKUCHI HIROSHI , SAIKI NORIYUKI
IPC分类号： G11B5/31 , G11B5/39
摘要： PROBLEM TO BE SOLVED: To provide a magnetic head having a new configuration attainable of high-density recording, its manufacturing method, and a high-performance magnetic disk device using the magnetic head.
SOLUTION: A side magnetic body 10 is arranged in at least a magnetic gap 7 forming the track of a recording head. Thus, the trouble of a track width reduction is eliminated to reduce unnecessary magnetic flux leakage from the gap. Therefore, the recording head of a narrow track width enabling high- density recording is realized.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种具有可实现高密度记录的新结构的磁头，其制造方法和使用磁头的高性能磁盘装置。解决方案：侧磁体10布置在至少形成记录头轨道的磁隙7中。因此，消除了磁道宽度减小的麻烦，以减少从间隙中的不必要的磁通量泄漏。因此，实现了能够进行高密度记录的窄轨道宽度的记录头。

8. 发明专利

JP2002212779A SURFACE TREATMENT PROCESS AND METHOD FOR MANUFACTURING THIN FILM MAGNETIC HEAD USING THIS PROCESS, AND THIN FILM MAGNETIC HEAD 失效
公开(公告)号：JP2002212779A
公开(公告)日：2002-07-31
申请号：JP2001002157
申请日：2001-01-10
申请人： HITACHI LTD
发明人： NOGUCHI TOSHIMITSU , KIKUCHI HIROSHI , SAIKI NORIYUKI , NISHIDA TETSUYA
IPC分类号： G03F7/40 , B08B3/08 , C23G5/00 , C25D5/34 , C25D5/48 , C25D7/12 , G11B5/31 , H01L21/027 , H01L21/28 , H01L21/288 , H01L21/304 , H01L21/306 , H01L21/3205
摘要： PROBLEM TO BE SOLVED: To provide a surface treatment process which reduces damage to a photoresist and a substrate, in improving wettability of the surface for the purpose of eliminating defects in plating or wet etching. SOLUTION: In a pre-processing for plating or wet etching of the surface on which patterning of photoresist 31 is applied, the surface is irradiated with ultraviolet rays with wavelengths shorter than the photosensitive wavelength of the photoresist in use, ultraviolet rays having an emission spectrum with a peak at a wavelength of 172 nm or shorter, or a monochromatic ultraviolet ray with a wavelength of 172 nm or shorter, in an atmosphere containing at least one out of air, oxygen and ozone.

9. 发明专利

JP2000235705A MAGNETIC HEAD 失效
公开(公告)号：JP2000235705A
公开(公告)日：2000-08-29
申请号：JP3531599
申请日：1999-02-15
申请人： HITACHI LTD
发明人： KIKUCHI HIROSHI , SAIKI NORIYUKI
IPC分类号： G11B5/31
摘要： PROBLEM TO BE SOLVED: To provide a structure of a novel magnetic head for enabling high recording density and a novel process for production for producing the same and to provide a high-performance magnetic disk device using such magnetic head. SOLUTION: This magnetic head is characterized in that the upper magnetic core 12 and lower magnetic core of a magnetic circuit of a write head are formed of the laminated structural material consisting of a first magnetic material, nonmagnetic material and second magnetic material and are connected in a track part and back gap part. In addition, the end of the upper magnetic core 12 exists inner than a floating surface.

10. 发明专利

JPH06236508A MAGNETIC HEAD BLOCK POSITIONING AND FIXING METHOD AND FIXING JIG 失效
公开(公告)号：JPH06236508A
公开(公告)日：1994-08-23
申请号：JP2296793
申请日：1993-02-10
申请人： HITACHI LTD
发明人： AKAMATSU KIYOSHI , FUJISAWA MASAYASU , NATE KAZUO , SONOBE HIDEKI , HAGIWARA YOSHIKI , TOGAWA EISEI , SAIKI NORIYUKI , SUZUKI TAKASHI
IPC分类号： G11B5/127
摘要： PURPOSE:To position plural magnetic head blocks (work) in a lump and to work them. CONSTITUTION:Plural magnetic head blocks 1 are fixed in a working process for photo-etching the magnetic head blocks 1. The fixing jig 2 is provided with a groove part 2a for juxtaposing and fixing the plural magnetic head blocks 1 and a film-like adhesive 3 stuck to a groove bottom 2b of the groove part 2a. Moreover, the dimension of the groove part 2a is settled in depth to make the upper surface of the fixing jig 2 and the upper surfaces of the press-fixed magnetic head blocks 1 positioned at the same height.

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