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1. 发明专利

JPH01157042A PLASMA X-RAY GENERATION DEVICE 失效
公开(公告)号：JPH01157042A
公开(公告)日：1989-06-20
申请号：JP31402587
申请日：1987-12-14
申请人： HITACHI LTD
发明人： KATO YASUO , OCHIAI ISAO , MURAYAMA SEIICHI
IPC分类号： H05G2/00 , G03F7/20 , G21K5/00 , H01J35/18 , H01J35/22 , H01L21/027
摘要： PURPOSE:To reduce substantially the damage of an X-ray permeation window by forming a plasma in an atmosphere exposed to such pressure as negligibly low for X-ray absorption, irradiating an object through a throttle having a minimum solid angle and blocking particles off the direction toward an irradiation area with the throttle. CONSTITUTION:Two-stage throttles a and 8' having an opening agreeing to the solid angle of an X-ray irradiated toward an irradiation area are placed in a plasma formation space at the predetermined intervals. Particles irradiated from a plasma to an area within the solid angle collide with gas molecules existing on the orbit of the particles and are scattered, even to a space 10 between the two throttles 8 and 8', and a space 10' between the throttle 8' and a beryllium window 7. Particles off the solid angle are blocked with the throttles 8 and 8', and the number of high energy particles colliding with the window 7 is substantially reduced with the throttles 8 and 8'. Also, it is possible to reduce the number of high energy particles reaching the window 7 further substantially by applying more-staged throttles.

2. 发明专利

JPH01157041A PLASMA X-RAY GENERATION DEVICE 失效
公开(公告)号：JPH01157041A
公开(公告)日：1989-06-20
申请号：JP31401887
申请日：1987-12-14
申请人： HITACHI LTD
发明人： OKAMOTO YUKIO , MURAYAMA SEIICHI , KATO YASUO , OCHIAI ISAO , SATO TOSHIHIKO
IPC分类号： H01J35/22 , H01L21/027 , H01L21/30
摘要： PURPOSE:To obtain high output and efficiency and improve stability by providing a floating electrode in a discharge space. CONSTITUTION:A floating electrode 9 made of a metal such as aluminum is placed within a discharge space 8 forward of both electrodes 1 and 2 via an insulation material 10 made of alumina and the like. The shape of the floating electrode 9 is semi-spherical, conical or otherwise. The floating electrode 9 is provided with an opening 9' for taking out an X-ray. When the floating electrode 9 comes in contact with a plasma, a space charged layer is formed at the boundary thereof, and this layer works to repulse high speed electrons, thereby trapping the aforesaid electrons. According to the aforesaid construction, the abrasion of the electrode 2 due to evaporation and the like can be reduced substantially.

3. 发明专利

JPH01120742A X-RAY GENERATOR 失效
公开(公告)号：JPH01120742A
公开(公告)日：1989-05-12
申请号：JP27562187
申请日：1987-11-02
申请人： HITACHI LTD
发明人： OCHIAI ISAO , KATO YASUO
IPC分类号： H05G2/00 , H01J35/22 , H05G1/00
摘要： PURPOSE:To prevent the atmospheric air from infiltrating into a plasma generating section when an X-ray extracting window is broken by providing a vacuum valve partitioning a space between the plasma generating section and the X-ray extracting window. CONSTITUTION:A remote-controllable vacuum valve 6 partitioning a space between a plasma generating section and an X-ray extracting window 7 is provided, a device feeding or evacuating the space on the X-ray extracting window 7 side partitioned by the vacuum valve 6 and a sensor detecting the pressure rise are provided, the opening and closing of the vacuum valve 6 and the operation of a plasma generating mechanism are controlled by the signal of the sensor. The infiltration of the atmospheric air into the plasma generating section is reduced when the X-ray extracting window 7 is broken or this extracting window 7 is exchanged, and the X-ray intensity with good reproducibility can be obtained for a long time.

4. 发明专利

JPS6394543A PLASMA X-RAY GENERATOR 失效
公开(公告)号：JPS6394543A
公开(公告)日：1988-04-25
申请号：JP23919586
申请日：1986-10-09
申请人： HITACHI LTD
发明人： KATO YASUO , OCHIAI ISAO , MIYATA TOSHIMITSU , HARADA KUNIO
IPC分类号： H05G2/00 , H01J35/22 , H01L21/027 , H01L21/30 , H05G1/00
摘要： PURPOSE:To prevent the breakage of an insulator and improve the life and reliability of a discharge tube by insulating between plasma focusing coaxial electrodes and using porcelain as an insulator which triggers the plasma motion by the creeping discharge as the voltage is applied. CONSTITUTION:A discharge tube 4 containing electrodes 1, 2 arranged coaxially via an insulator 3 is filled with gas, the pulse voltage is applied across the electrodes 1, 2 from a capacitor 6 to generate plasma on the surface of the insulator 3, plasma is focused near the tips of the electrodes 1, 2 to form high- temperature and high-density plasma, and soft X-rays are generated. The insulator 3 is made of porcelain. By using porcelain as the insulator 3 insulating the coaxial electrodes 1, 2, a soft X-ray source which has high reliability and is stable and highly efficient can be obtained for the purpose to repeat a tremendous number of discharges at high frequencies such as lithography.

5. 发明专利

JPS62206753A PLASMA X-RAY GENERATOR 失效
公开(公告)号：JPS62206753A
公开(公告)日：1987-09-11
申请号：JP4825886
申请日：1986-03-07
申请人： HITACHI LTD
发明人： KATO YASUO , OCHIAI ISAO , WATANABE YOSHIO , MURAYAMA SEIICHI
IPC分类号： H01J35/22 , H01L21/027 , H01L21/30 , H05G2/00
摘要： PURPOSE:To improve the plasma focusing efficiency, by applying to the inner cylindrical electrode a high voltage pulse of negative polarity opposite to the outer cylindrical electrode. CONSTITUTION:While a negative polarity high voltage is applied to the inner cylindrical electrode 1 from a charged capaciter 5, a positive polarity voltage is applied to the outer cylindrical electrode 2. In a discharge space 7 separated from the outside by a discharge container 4, a gas such as neon, argon, or kripton is filled. When a voltage is applied between the electrodes, a dielectric breakdown is produced on the surface of an insulator 3, to generate plasma. The plasma receives a Lorentz's force from the electric field and the magnetic field between the electrodes, moves to the opening end of the electrodes, and is pinched by the pressure of the magnetic field when it passes the end of the electrodes. The plasma of a high temperature and a high density is formed on the axis of the top of the electrode 1, and soft X-rays are radiated.

6. 发明专利

JP2002221504A X-RAY DETECTOR AND CHARGED PARTICLE BEAM DEVICE 失效
公开(公告)号：JP2002221504A
公开(公告)日：2002-08-09
申请号：JP2001018427
申请日：2001-01-26
申请人： HITACHI LTD
发明人： OCHIAI ISAO , SHINADA HIROYUKI , KANDA KIMIO
IPC分类号： G01N23/225 , H01J37/22 , H01J37/244
摘要： PROBLEM TO BE SOLVED: To provide a high-sensitive X-ray detector capable of suppressing movement of a secondary electron image and distortion of the secondary electron image caused by astigmatism or the like even if bringing the detector close to a sample inside an electron microscope. SOLUTION: This X-ray detector is provided with a magnetic field generation means for counterbalancing a stray magnetic field to a sample base from a magnetic generation means provided for blocking incidence of electrons generated together with X-rays by sample irradiation into a detection element inside the X-ray detector.

7. 发明专利

JPH0982261A ELECTRON MICROSCOPE 失效
公开(公告)号：JPH0982261A
公开(公告)日：1997-03-28
申请号：JP23500295
申请日：1995-09-13
申请人： HITACHI LTD
发明人： OCHIAI ISAO , KURODA KATSUHIRO , ISAGOZAWA SHIGETO , KANDA KIMIO , IGARASHI TOKUSHICHI
IPC分类号： G01N23/225 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To provide an electron microscope capable of increasing a maximum counting rate and a signal-noise ratio, and improving secondary electron detection sensitivity by housing a plurality of X-ray detection elements in an X-ray detector having an open end of horse's hoof form, and laying a secondary electron detector at the U-shaped open end of the X-ray detector. SOLUTION: In a scanning electron microscope, an electron beam diaphragmed with an objective lens 4 irradiates a sample 5. In addition, an X-ray detector 31 and a secondary electron detector 11 are laid between the objective lens 4 and the sample 5 along a lateral direction. The end of the X-ray detector 31 has a horse's hoof shape and is formed to be open. Also, the secondary electron detector 11 is positioned at the side of the open end. Secondary electrons generated from the sample 5 are attracted from space 15, due to the electric field of the detector 11. Furthermore, a vessel of horse's hoof form at the end of the X-ray detector 31 contains a plurality of X-ray detection elements 33, and the end of the X-ray detector 31 is provided with an X-ray transmission window 36 and a collimator 37. In this case, the vessel has an opening of horse's hoof form and, therefore, the X-ray detector 31 is movable in space between the objective lens 4 and the sample 5.

8. 发明专利

JPH0961382A TOTAL REFLECTION FLUORESCENT X-RAY ANALYZER 失效
公开(公告)号：JPH0961382A
公开(公告)日：1997-03-07
申请号：JP21567295
申请日：1995-08-24
申请人： HITACHI LTD
发明人： SUGA MITSUO , OCHIAI ISAO , KOJIMA TOSHIO , ITOGA TOSHIHIKO
IPC分类号： G01N23/223
摘要： PROBLEM TO BE SOLVED: To improve the detection limit of impurity elements in the elementary analysis near the surface of a sample total reflecting first-order X-rays. SOLUTION: The total reflection fluorescent X-ray analyzer having an emitting device for emitting a first-order X-ray 103 to a sample surface at a minute incident angle, a fluorescent X-ray detector 108 for detecting the fluorescent X-ray generated from the area of a sample 106 to which the first-order X-ray 103 is emitted, an a reflected X-ray detector 17 for detecting the reflected X-ray reflected by the sample 106, is formed out of two or more semiconductor detecting elements 150-152. Thus, the detecting limit of impurity elements contained in the sample 106 can be improved by improvement in energy resolution of the fluorescent X-ray detector 108 and the improvement in maximum counting ratio of the fluorescent X-ray by the increase in detected solid angle of the fluorescent X-ray, and the separation of adjacent peaks and the detection of a light element are also facilitated.

9. 发明专利

JPH08153905A SUPERCONDUCTING RADIATION SPECTROSCOPE 失效
公开(公告)号：JPH08153905A
公开(公告)日：1996-06-11
申请号：JP29425094
申请日：1994-11-29
申请人： HITACHI LTD
发明人： SUGA MITSUO , TAKAGUCHI MASANARI , OCHIAI ISAO
IPC分类号： H01L39/22
摘要： PURPOSE: To improve energy resolution of a radiation spectroscope, by constituting a superconducting radiation spectroscope containing a tunnel junction composed of superconductor-tunnel insulating film-superconductor and a substrate, forming the superconductor in the substrate, and retaining the tunnel junction with the substrate. CONSTITUTION: In order to form tunnel junctions 161, 162 on a substrate 101 composed of superconductor Nb by a lift-off method, a photoresist mask is formed. After the mask is formed, the mask surface is ground by a sputtering method, in order to clean the surface of the Nb substrate 101. After an Al film is formed on the substrate by a sputtering method, a tunnel insulating film of AlOx is formed by introducing oxygen. After an Nb film is formed by a sputtering method, the photoresist is dissolved by acetone washing, and a pattern is formed. By the above process, the tunnel junctions 161, 162 composed of proximity superconducting layers 111, 112, tunnel insulating films 121, 122, and upper superconducting electrodes 131, 132 are formed.

10. 发明专利

JPH08138612A ELECTRON MICROSCOPE 失效
公开(公告)号：JPH08138612A
公开(公告)日：1996-05-31
申请号：JP27637194
申请日：1994-11-10
申请人： HITACHI LTD
发明人： OCHIAI ISAO , KURODA KATSUHIRO , TAKAGUCHI MASANARI , KAKIBAYASHI HIROSHI , NISHIDA AKIO , SUGA MITSUO , MURAKOSHI HISAYA
IPC分类号： H01J37/244 , H01J37/256 , H01J37/28
摘要： PURPOSE: To provide an electron microscope having a little decrease in a secondary electron signal quantity in the case of introducing an X-ray detector having large detection stereoscopic angle or a signal noise rate. CONSTITUTION: A magnetic field is applied on a hole 2, through which electron beams of an X-ray detector 30 pass, so that secondary electrons are captured, made to pass through the hole and carried to the front face of the secondary electron detector. Thereby, only specific X ray is input in the X-ray detector and the secondary electrons emitted from the sample 10 and reflected electrons reflected from the sample are captured so as to be carried to a space arranged in the upper part of the X-ray detector.

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