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1. 发明专利

JPS63287806A PRODUCTION OF OPTICAL INTEGRATED CIRCUIT 失效
公开(公告)号：JPS63287806A
公开(公告)日：1988-11-24
申请号：JP12122287
申请日：1987-05-20
申请人： HITACHI LTD
发明人： IMOTO KATSUYUKI , MIYAZAKI MASARU , ANO HIROMI , ITO YUMI
IPC分类号： G02B6/13 , G02B6/12
摘要： PURPOSE:To obtain the title circuit with reduced loss by effecting a gaseous phase decomposition of the gas of a silicon compd. composed of its hydride or contg. an additive for controlling refractive index at a prescribed temp. to form a glass film, followed by patterning it and then, by thermally treating the obtd. film at the temp. higher than said prescribed temp., thereby lessening unevenness of the side wall surface of a waveguide. CONSTITUTION:The gas of the silicon compd. composed of its hydride or contg. the additive (P, B, etc.) for controlling the refractive index is thermally decomposed at 250-550 deg.C, thereby forming the glass film on a substrate plate 1. Then, the obtd. glass plate 2 is patterned by a technique such as a photolithography or a dryetching, etc., followed by thermally treating at the temp. higher than that of the gaseous phase decomposition (such as more than 700 deg.C and less than 1,500 deg.C). Thus, the rectangular waveguide 7 is formed by patterning the glass film as a core layer formed at a low temp. and then, the edge of said waveguide is rounded by thermally treating at a high temp. and the glass film of the waveguide is made minute, thereby uniforizing the waveguide.

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